• 한국재료학회:학술대회논문집
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• 한국재료학회 1999년도 춘계학술발표강연 및 눈문개요집
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• pp.138-138
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• 1999

• 한국세라믹학회지
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• 제44권1호
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• pp.65-69
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• 2007

For self-developed alkali-alkaline earth-silicate and commercial glass melts for plasma display panel substrate, the corrosion behavior of fused casting refractory consisting of $Al_2O_3-ZrO_2-SiO_2$ was examined at the temperature corresponding to $10^2\;dPa{\cdot}s$ of melt viscosity by static finger methode. The corroded refractory specimens showed a typical concave shape due to interfacial convection of melts at their flux line. However, the corrosion thickness by commercial glass melts was $6\sim10$ times comparing to that by the self?developed melts. From the view point of the glass composition and the role of alkaline earth in glass network, it was discussed the effect of alkali/alkaline earth diffusion and temperature on the refractory corrosion.

• 한국세라믹학회지
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• 제46권3호
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• pp.271-274
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• 2009

Redox investigation of Sn and S ion was attempted in alkaline earth borosilicate glass melts with only 1 mol% $Na_2O$ by means of Square Wave Voltammetry (SWV). According to voltammograms, there was only one peak due to $Sn^{4+}/Sn^{2+}$ in melt doped with $SnO_2$. The calculated standard enthalpy and entropy of the reduction of $Sn^{4+}$ to $Sn^{2+}$ were 116kJ/mole and 62 J/mol K, respectively. The determined redox ratio, [$Sn^{2+}$] / [$Sn^{4+}$] in the temperature range of $1300{\sim}1600^{\circ}C$ was in $0.4{\sim}2.1$. On the contrary, in the voltammogram of melt doped with $BaSO_4$ there was no peak due to $S^{4+}/S^o$ but shoulder that might be attributed to the adsorption of sulfur at the electrode. The absence of the peak related with $S^{4+}/S^o$ was discussed from the view-point of the thermal decomposition behavior of $BaSO_4$ in the glass batch.

• 한국재료학회지
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• 제9권5호
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• pp.441-445
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• 1999

Alkaline earth metal oxides were added to the conventional MgO films as a protective layer for dielectric materials to have lower firing voltage(Vf) of the plasma display panel(PDP). Panels with various protective layers of MgO-alkaline earth metal oxides were prepared on glass by using e-beam evaporation and its effect on firing voltage characteristics were investigated. (Ba-Mg)O films had poor voltage characteristics because of higher activation energy of BaO. But, (Sr-Mg)O, (Ca-Mg)O and (Ca-Sr-Mg) O had better voltage characteristics than the conventional MgO. A mixture film of (Mg-Ca-Sr)O show the lowest firing voltage which is less than that of MgO by 20V. The chemical composition to have lowest firing voltage is MgO:SrO:CaO ratio of 6:2:2. The mixture of MgO-Alkaline earth metal oxides films showed good transmittance properties within the visual range.

• 마이크로전자및패키징학회지
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• 제6권1호
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• pp.51-58
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• 1999

지르코니아에 접합과 반응성이 정합되며 고온에서 물리화학적으로 안정성을 갖는 접합재를 제조하기 위하여 silicate계 유리의 조성에 따른 적심특성, 결정화 및 반응성등 제반 특성을 고찰하였다. 지르코니아와의 열팽창계수가 정합 될 수 있는 유리계에 대한 조성 실험하였다. Alkaline earth silicate 유리는 적심성이 우수하였으며 적심각이 낮으며 $B_2O_3$의 첨가함로써 유리의 점도를 조절 및 결정화를 억제할 수가 있었다. $900^{\circ}C$ 이하에서 적심공정에 일어났으며 $800^{\circ}C$에서 10시간동안 유지한 후에 결정화와 계면 반응을 조사한 결과 기공이 많이 발생하였으며 $B_2O_3$를 15mo1% 첨가한 경우 흐름성이 증가하였으며 기판과의 반응성이 높아졌다. 기공을 없애기 위해서는 공정변수를 조절하여 유리의 소결을 촉진할 필요가 있으며 유리점도와 반응성에 관한 최적화가 요구된다. 본 연구에서는 유리-세라믹필러 복합체의 고온적심성에 대하여 조사하였다. Filler로서 $ZrO_2$분말을 여러 조건으로 열처리하여 분말종류와 첨가량에 따라 기공, $ZrO_2$ filler의 형상 및 계면반응 등을 고찰하였다.

• 반도체디스플레이기술학회지
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• 제21권1호
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• pp.119-126
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• 2022

MAS-based glass, which has been studied to replace the ceramic material used in the plasma etching chamber, has problems such as forming and processing due to its high melting temperature. To solve this problem, in this study, fluoride was added to the existing MAS-based glass to increase the workability in the glass manufacturing and to improve the chemical resistance to CF₄/Ar/O₂ plasma gas. Through RAMAN analysis, the structural change of the glass according to the addition of fluoride was observed. In addition, it was confirmed that high-temperature viscosity and thermal properties decreased as the fluoride content increased and plasma resistance was maintained, it showed an excellent etching rate of up to 11 times compared to quartz glass.

• 한국세라믹학회지
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• 제43권7호
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• pp.433-438
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• 2006

In order to examine the working condition of melts in tin bath of float process it was investigated Sn diffusion behavior and solidification rate of melts for alkali-alkaline earth-silica PDP substrate glasses such as commercial CaO rich CS-77 glass, commercial $Al_2O_3$ rich PD-200 glass and self developed $SiO_2$ rich T-series (T-2, T-4, T-6) glasses. In the case of Sn depth and concentration created in glass surface by ion exchange between Sn and alkali, T-series showed lower value than CS-77, especially T-2 is more excellent than PD-200. The solidification rate of melts expressed by cooling time between $log{\eta}=4\;and\;7.6dPa{\cdot}s$ was low for T-series comparing with CS-77 and PD-200. Therefore, it was concluded that T-series is desirable considering forming condition in the tin bath of the float process.

• 한국세라믹학회지
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• 제45권7호
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• pp.375-379
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• 2008

Redox behavior was observed in alkali alkaline earth silicate PDP (Plasma Display Panel) glass melts doped with sulfate and sulfide by square wave voltammetry (SWV). According to voltammograms produced at a temperature range of 1100 to $1400^{\circ}C$ and frequency range of 5 to 1000 Hz, both melts showed the same behavior in which there is one reduction peak at low frequency but another peak at an increase of frequency. Based on the frequency dependence of the peak current, self diffusivity of $S^{4+}$ was determined. Based on the temperature dependence of the peak potential, standard enthalpy (${\Delta}H^0$) and standard entropy (${\Delta}S^0$) for the reduction of $S^{4+}$ to $S^0$ were calculated.

• 암석학회지
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• 제18권4호
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• pp.337-348
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• 2009

전남 해남의 순신 천열수 금광상을 배태하고 있는 응회질암층은 규화변질작용과 견운모 변질작용을 받았으나 석영반정에는 포획될 당시의 조성이 보존되어 있는 투명하고 균질한 유리포유물이 산출되고 있다. 유리포유물의 크기는 $5-200\;{\mu}m$이며 유리(60~80 vol%) + 기포(15~30 vol%) $\pm$ 딸결정(<10 vol%)으로 구성되어 있다. 일정한 정육각형의 고온석영 결정형의 유리포유물은 석영 반정의 가장자리에 산출되는 경향이 있으며 모두 초생포유물이다. 유리포유물은 석영반정이 성장하고 있던 마지막 단계의 액상선 성분을 나타내는 것으로 매우 분화된 K 성분이 높은 칼크-알칼리계열에 속하는 유문암질암이다. 이 액상선의 멜트내의 $Au_2O_3$ 함량은 매우 미비하여(<0.30 wt%) Au 성분은 잔류용융체에 부화되지 않았음을 나타내고 있다. 유리포유물이 나타내는 조직적 특성은 마그마가 지표에 분출되기 전에 이미 2-4 wt%의 물에 포화되었음을 지시하며, 고온 석영형으로 산출되는 유리포유물의 모습은 모결정인 석영이 $\beta$-석영 안정영역에서 결정화작용이 끝났음을 의미한다. 유리포유물에 용해되어 있는 2-4 wt%의 물에 포화된 마그마의 포화압력은 약 300-900 bar를 나타낸다. 이는 해남의 화산암을 형성한 마그마는 적어도 지하 0.8-2.5 km의 깊이의 마그마 챔버에서 분출한 것으로 계산된다.

• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.61-66
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• 2021

In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al₂O₃-SiO₂(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF₄/O₂/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al₂O₃ and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO₂.