• Title/Summary/Keyword: AlN crystal

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Petrochemical Study on the Cretaceous Volcanic Rocks in Kyeongsang Basin, Korea: Possibility of Magma Heterogeneity (경상분지 백악기 화산암류에 대한 암석화학적 고찰: 이원성 마그마의 가능성)

  • Sung, Jong Gyu;Kim, Jin Seop;Lee, Joon Dong
    • Economic and Environmental Geology
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    • v.31 no.3
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    • pp.249-264
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    • 1998
  • The Creataceous volcanic rocks distributed in the southeastern part (Kyeongsang basin) of Korea peninsula are composed of basalt, basaltic andesite, andesite, dacite and rhyolite. The variation of major elements show that contents of MgO, CaO, $FeO^T$, $Al_2O_3$, $TiO_2$ and $P_2O_5$ decrease with increasing of $SiO_2$, but $K_2O$ contents are increased slightly, $Na_2O$ widely dispersed. We can show slightly inflection point and low frequency of dacites in range between 63-65 wt.% $SiO_2$, while continuous trend exit in variation diagram. Variation trends in Harker diagrams for the major, minor, trace and REEs suggest that the BAV (basaltic to andesitic volcanics) and DRV (dacitic to rhyolitic volcanics) are not related to a simple crystal fractionation process. In the regime of under 65 wt. % in silica content, fractionation of olivine and clinopyroxene is predominant, while that of plagioclase happens strongly higher than 65 wt.% (e.g., $SiO_2$, vs. Eu and Sr, MgO vs. $Al_2O_3$ and CaO). The latter means low-pressure fractional crystallization for DRV. On the discriminant diagram, DRV are located in more mature environment than BAV. The $(Ce/Sm)_N$ vs. CeN digram shows that these two classes cannot be related to crystal fractionation. If they had been produced by fractionation, although they plotted in a slightly elongate cluster along the same horizontal trend, DRV should lie to the right of these primitive compositions. These diagrams clearly rule out a simple fractionation throughout from BAV to DRV. BAV had been influenced greatly subductiong slab as shown by K/Yb vs. Ta/Yb. We suggest that BAV primitive magma generated higher degree of partial melting than DRV primitive magma. LILE (K, Ba, $Rb{\pm}Th$) enriched characteristics as shown in BAV are inherited from subducting slab fluids and/or higher degree of partial melting of mantle material. However, lower degree of partial melting of mantle relative to BA V and contamination at high-level magma reservoir caused LILE enrichment to DRV.

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Co-Deposition법을 이용한 Yb Silicide/Si Contact 및 특성 향상에 관한 연구

  • Gang, Jun-Gu;Na, Se-Gwon;Choe, Ju-Yun;Lee, Seok-Hui;Kim, Hyeong-Seop;Lee, Hu-Jeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.438-439
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    • 2013
  • Microelectronic devices의 접촉저항의 향상을 위해 Metal silicides의 형성 mechanism과 전기적 특성에 대한 연구가 많이 이루어지고 있다. 지난 수십년에 걸쳐, Ti silicide, Co silicide, Ni silicide 등에 대한 개발이 이루어져 왔으나, 계속적인 저저항 접촉 소재에 대한 요구에 의해 최근에는 Rare earth silicide에 관한 연구가 시작되고 있다. Rare-earth silicide는 저온에서 silicides를 형성하고, n-type Si과 낮은 schottky barrier contact (~0.3 eV)를 이룬다. 또한, 비교적 낮은 resistivity와 hexagonal AlB2 crystal structure에 의해 Si과 좋은 lattice match를 가져 Si wafer에서 high quality silicide thin film을 성장시킬 수 있다. Rare earth silicides 중에서 ytterbium silicide는 가장 낮은 electric work function을 갖고 있어 낮은 schottky barrier 응용에서 쓰이고 있다. 이로 인해, n-channel schottky barrier MOSFETs의 source/drain으로써 주목받고 있다. 특히 ytterbium과 molybdenum co-deposition을 하여 증착할 경우 thin film 형성에 있어 안정적인 morphology를 나타낸다. 또한, ytterbium silicide와 마찬가지로 낮은 면저항과 electric work function을 갖는다. 그러나 ytterbium silicide에 molybdenum을 화합물로써 높은 농도로 포함할 경우 높은 schottky barrier를 형성하고 epitaxial growth를 방해하여 silicide film의 quality 저하를 야기할 수 있다. 본 연구에서는 ytterbium과 molybdenum의 co-deposition에 따른 silicide 형성과 전기적 특성 변화에 대한 자세한 분석을 TEM, 4-probe point 등의 다양한 분석 도구를 이용하여 진행하였다. Ytterbium과 molybdenum을 co-deposition하기 위하여 기판으로 $1{\sim}0{\Omega}{\cdot}cm$의 비저항을 갖는 low doped n-type Si (100) bulk wafer를 사용하였다. Native oxide layer를 제거하기 위해 1%의 hydrofluoric (HF) acid solution에 wafer를 세정하였다. 그리고 고진공에서 RF sputtering 법을 이용하여 Ytterbium과 molybdenum을 동시에 증착하였다. RE metal의 경우 oxygen과 높은 반응성을 가지므로 oxidation을 막기 위해 그 위에 capping layer로 100 nm 두께의 TiN을 증착하였다. 증착 후, 진공 분위기에서 rapid thermal anneal(RTA)을 이용하여 $300{\sim}700^{\circ}C$에서 각각 1분간 열처리하여 ytterbium silicides를 형성하였다. 전기적 특성 평가를 위한 sheet resistance 측정은 4-point probe를 사용하였고, Mo doped ytterbium silicide와 Si interface의 atomic scale의 미세 구조를 통한 Mo doped ytterbium silicide의 형성 mechanism 분석을 위하여 trasmission electron microscopy (JEM-2100F)를 이용하였다.

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Crystal Structure and Photoluminescence of Domestic Natural Alkaline Feldspar (국산 천연알카리 장석의 결정구조와 Photoluminescence)

  • Choi, Jin-Ho;Cheon, Chae-Il;Kim, Jeong-Seog
    • Journal of the Korean Ceramic Society
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    • v.44 no.5 s.300
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    • pp.155-159
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    • 2007
  • Blue light-emitting phosphors having the excitation spectrum range of the medium-long ultraviolet ($280nm{\sim}400nm$) have been prepared by solid state reaction method. As a starting material the natural alkaline feldspar powder produced from the domestic mine field in Buyeo, Chungnam-do. The photoluminescence characteristics and crystal structures have been analyzed for the phosphor samples. The powder mixture of the natural alkaline feldspar and the rare-earth oxide was calcined at $800{\sim}1000^{\circ}C\;for\;3{\sim}4h$ in air. The calcined samples we fully ground at room temperature and then heat-treated in the mild reducing gas atmosphere of $5%H_2-95%N_2$ mixture at $1100{\sim}1150^{\circ}C\;for\;3{\sim}4h$. The natural alkaline feldspar material consists of the monoclinic orthoclase ($KAlSi_3O_8$) and the triclinic albite ($NaAlSi_3O_8$) phases. At the $0.5wt%Eu_2O_3$ addition the PL spectrum showed the maximum intensity and with further increase of $Eu_2O_3$ the PL intensity decreased. The albite phase disappeared in the $Eu_2O_3$ doped phosphors. The effect of the co-doped activator on the PL characteristics have been also discussed.

Crystal Structure of a Carbon Monoxide Sorption Complex of Fully $Ca^{2+}$-Exchanged Zeolite X (제올라이트 X 착물의 결정구조)

  • Lee, Seok-Hee;Kim, Yong-Gwon;Jeong, Gyoung-Hwa;Kim, Nam-Seok;Park, Keun-Ho
    • Journal of the Korean Applied Science and Technology
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    • v.22 no.1
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    • pp.28-34
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    • 2005
  • The structure of a carbon monoxide sorption complex of dehydrated fully $Ca^{2+}$-exchanged zeolite X, $|Ca_{46}(CO)_{27}|[Si_{100}Al_{92}O_{384}]$-FAU, has been determined in the cubic space group $Fd\;{\overline{3}}$ at $21^{\circ}C$ (a = 24.970(4) ) by single-crystal X-ray diffraction techniques. The crystal was prepared by ion exchange in a flowing stream of 0.05 M aqueous ${Ca(NO_3)_2}$ for three days, followed by dehydration at $400^{\circ}C$ and $2{\times}10^{-6}$ Torr for two days, and exposure to 100 Torr of zeolitically dry carbon monoxide gas at $21^{\circ}C$. The structure was determined in this atmosphere and was refined, using the 356 reflections for which $F_o$ > $4{\sigma}(F_o)$, to the final error indices $R_1$ = 0.059 and $wR_2$ = 0.087. In this structure, $Ca^{2+}$ ions occupy three crystallographic sites. Sixteen $Ca^{2+}$ ions fill the octahedral site I at the centers of hexagonal prisms (Ca-O = 2.415(7) ${\AA}$). The remaining 30 $Ca^{2+}$ ions are found at two nonequivalent sites II (in the supercages) with occupancies of 3 and 27 ions. Each of these $Ca^{2+}$ ions coordinates to three framework oxygens, either at 2.276(10) or 2.298(8) ${\AA}$, respectively. Twenty-seven carbon monoxide molecules have been sorbed per unit cell, three per supercage. Each coordinates to one of the latter 16 site-II $Ca^{2+}$ ions: C-Ca = 2.72(8) ${\AA}$. The imprecisely determined N-C bond length, 1.26(14) ${\AA}$, differs insignificantly from that in carbon monoxide(g), 1.13 ${\AA}$.

Effect of Pressure on HCl Absorption Behaviors of a K-based Absorbent in the Fixed Bed Reactor (고정층 반응기에서 K-계열 흡수제의 압력에 따른 HCl 흡수 거동 연구)

  • Kim, Jae-Young;Park, Young Cheol;Jo, Sung-Ho;Ryu, Ho-Jung;Baek, Jeom-In;Park, Yeong Seong;Moon, Jong-Ho
    • Clean Technology
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    • v.19 no.2
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    • pp.165-172
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    • 2013
  • In this study, the hydrogen chloride removal using K-based dry sorbents ($K_2CO_3/Al_2O_3$, KEPRI, Korea) was studied with varying the pressure in a fixed bed reactor (15 cm tall bed with 0.5 cm I.d.). Working temperature was $400^{\circ}C$ and feed gas concentration was 750 ppm (HCl vol%, $N_2$ balance). The chloride sorption capacity of sorbent increases with increasing pressure (1, 5, 10, 15 and 20 bar). Also, after forming KCl crystal by reaction with $K_2CO_3$ and HCl, owing to the strong bonding energy, sorbent regeneration was practically impossible. Its optical, physical and chemical characterizations were evaluated by SEM, EDAX, BET, TGA and XRD. At $400^{\circ}C$ and 20 bar condition, working condition for the dehalogenation process after gasification, K-based dry sorbent showed high HCl sorption capacity and HCl/$N_2$ separation performances comparing with Ca-based and Mg-based dry sorbents.

Strength Development Characteristics of Clay Stabilized with Electric Furnace Steel Slag (전기로 제강슬래그로 안정화된 연약점토의 강도 발현 특성)

  • Hyeongjoo Kim;Taegew Ham;Taewoong Park;Taeeon Kim
    • Journal of the Korean GEO-environmental Society
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    • v.25 no.5
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    • pp.29-37
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    • 2024
  • This study aimed to investigate the changes in chemical components that occur when weak clay is mixed with steel slag modified with calcium oxide, and to understand the expression characteristics of compressive strength according to hydrophilicity and curing time. XRF testing, SEM imaging, vane shear strength and uniaxial compressive strength testing were conducted. Calcium (Ca) released from the steel slag increases the Ca content in clay by increasing the number of crystal particles and forming a coating layer known as calcium silicate hydrate (CaO-SiO2-H2O) through chemical reactions with SiO2 and Al2O3 components. The weak clay stabilized with steel slag is classified into an initial inactive zone where strength relatively does not increase and an activation zone where strength increases over curing time. The vane shear strength of the initial inactive area was found to be 4.4 to 18.4 kN/m2 in the state of the weight mixing ratio Rss 30% (steel slag 30% + clay 70%). In the case of the active area, the maximum uniaxial compressive strength increased to 431.8 kN/m2 after 480 hours of curing time, which increased due to the apparent adhesion strength of clay through pozzolanic reaction. Therefore, considering the strength expression characteristics of stabilized mixed clay based on the mixing ratio (Rss) during the recycling of steel slag can enhance its practicality in civil engineering sites.

Human Health Risk Assessment of n-Butyl Glycidyl Ether from Occupational Workplaces (작업장에서의 n-부틸 글리시딜 에테르에 대한 건강 위험성 평가)

  • Moon, Hyung-Il;Choi, Hyeon-Il;Sin, Saemi;Byeon, Sang-Hoon
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.23 no.1
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    • pp.20-26
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    • 2013
  • Objectives: This study was conducted to evaluate the health risk of workers exposed to butyl glycidyl ether to prevent them from developing occupational diseases. Methods: The workplaces that coat floor with epoxy were selected and the samples were collected and analyzed with NIOSH 1616 Method. We calculate workplace reference concentration using with NOAEL estimated by the study of Anderson et al. in 1978. Risk was calculated by the ratio of exposure to workplace reference concentration. Monte-Carlo simulation was performed to derivate the median, cumulative 90%, and cumulative 95% value by using Crystal Ball. Results: Butyl glycidyl ether is a skin, eye irritator and can result in central nervous system depression, allergic reaction. NOAEL was 38 ppm and workplace reference concentration was calculated as 0.73 ppm corrected with uncertainty factors. Geometric mean was 1.152 ppm and geometric standard deviation was 1.522 by the workplace environment measurement. The median, cumulative 90%, and cumulative 95% value of risk were calculated as 1.617, 1.934, and 2.092, respectively. Conclusions: Not only cumulative 90% and cumulative 95% value but also the median of risk is higher than 1.0 by the risk characterization, so it can do a lot of harm to workers. Therefore, the process of derivating workplace reference concentration and the appropriacy of the uncertainty factors should be re-examined.

Temperature Dependence of the $SrTiO_3$ Capacitor Thin Films Deposited by RF Magnetron Sputtering (고주파 마그네트론 스퍼터링에 의한 $SrTiO_3$ 캐패시터 박막의 온도 의존성)

  • Oh, Gum-Kon;Lee, Woo-Sun;Kim, Nam-Oh;Kim, Jai-Min;Lee, Byung-Sung;Kim, Sang-Yong
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.6
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    • pp.429-435
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    • 1999
  • The $SrTiO_3$ thin films were prepared on Ag/TiN-coated and p-type bare Si(100) substrates by r.f. magnetron sputtering deposition technique. The electrical properties of the deposited films were investigated, which controlling deposition parameters such as substrate temperature and film thickness. The electrical properties ofthe $SrTiO_3$ films were measured using the capacitance-voltage(C-V) technique. The thickness dependence of the electrical properties of the $SrTiO_3$ films was analyzed of the connection with the films in series. The substrate affected the crystal structure and texture characteristics of the $SrTiO_3$ films. The resistivity of the film, sandwiched between Al and Ag films was measured, as a function of the temperature.

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Engineered Tunnel Barrier Ploy-TFT Memory for System on Panel

  • Yu, Hui-Uk;Lee, Yeong-Hui;Jeong, Hong-Bae;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.128-128
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    • 2011
  • Polysilicon thin-film transistors (poly-Si TFTs)는 능동행렬 액정 표시 소자(AMLCD : Active Matrix Liquid Crystal Display)와 DRAM과 같은 메모리 분야에 폭넓게 적용이 가능하기 때문에 많은 연구가 진행되고 있다. 최근 poly-Si TFTs의 우수한 특성으로 인하여 주변 driving circuits에 직접화가 가능하게 되었다. 또한 디스플레이 LCD 패널에 controller와 메모리와 같은 다 기능의 장치을 직접화 하여 비용의 절감과 소자의 소형화가 가능한 SOP (System on panels)에 연구 또한 진행 되고 있다. 이미 잘 알려진 바와 같이 비휘발성 메모리는 낮은 소비전력과 비휘발성이라는 특성 때문에 이동식 디바이스에 데이터 저장 장치로 많이 사용되고 있다. 하지만 플로팅 타입의 비휘발성 메모리는 제작공정의 문제로 인하여 SOP의 적용에 어려움을 가지고 있다. SONOS 타입의 메모리는 빠른 쓰기/지우기 효율과 긴 데이터 유지 특성을 가지고 있으나 소자의 스케일링 따른 누설전류의 증가와 10년의 데이터 보존 특성을 만족 시킬 수 가 없는 문제가 발생한다. 본 연구에서는 SOP 적용을 위하여 ELA 방법을 통하여 결정화한 poly-Si TFT memory를 SiO2/Si3N4/SiO2 Tunnel barrier와 High-k HfO2과 Al2O3을 Trapping layer와 Blocking layer로 적용, 비휘발성 메모리을 제작하여 전기적 특성을 알아보았다.

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Electrochemical Properties of Viologen Self-Assembly Monolayer Using QCM (수정진동자를 이용한 Viologen Self-Assembly 단분자막의 전기화학적 특성)

  • Ock, J.Y.;Song, S.H.;Shin, H.K.;Park, J.C.;Chang, J.S.;Chang, S.M.;Kwon, Y.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.403-406
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    • 2002
  • Molecular self-assembled of surfactant viologen are of recent interest because they can from functional electroeds as well as micellar assemblies. which can be profitably utilized for display devices. photoelectrochemical studies and electrocatalysis as electron acceptor or electron mediator[1-3]. Fromherz et al studied the se1f-assembly of thiol and disulfide derivatives of viologens bearing long n-alkyl chains on Au electrode surface[4]. In this study, the electrochemical behavior of self-assembled viologen monolayer has been investigated with QCM, which has been known as nano-gram order mass detector. The self-assembly process of viologen was monitored using resonant frequency$({\Delta}F)$ and resonant resistance(R). The redox process of viologen was observed with resonant frequency$({\Delta}F)$.

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