• Title/Summary/Keyword: AlC

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Electrical Characteristics of Ni/Ti/Al Ohmic Contacts to Al-implanted p-type 4H-SiC (Al 이온 주입된 p-type 4H-SiC에 형성된 Ni/Ti/Al Ohmic Contact의 전기적 특성)

  • Joo, Sung-Jae;Song, Jae-Yeol;Kang, In-Ho;Bahng, Wook;Kim, Sang-Cheol;Kim, Nam-Kyun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.11
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    • pp.968-972
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    • 2008
  • Ni/Ti/Al multilayer system ('/'denotes the deposition sequence) was tested for low-resistance ohmic contact formation to Al-implanted p-type 4H-SiC. Ni 30 nm / Ti 50 nm / Al 300 nm layers were sequentially deposited by e-beam evaporation on the 4H-SiC samples which were implanted with Al (norminal doping concentration = $4\times10^{19}cm^{-3}$) and then annealed at $1700^{\circ}C$ for dopant activation. Rapid thermal anneal (RTA) temperature for ohmic contact formation was varied in the range of $840\sim930^{\circ}C$. Specific contact resistances were extracted from the measured current vs. voltage (I-V) data of linear- and circular transfer length method (TLM) patterns. In constrast to Ni contact, Ni/Ti/Al contact shows perfectly linear I-V characteristics, and possesses much lower contact resistance of about $2\sim3\times10^{-4}\Omega{\cdot}cm^2$ even after low-temperature RTA at $840^{\circ}C$, which is about 2 orders of magnitude smaller than that of Ni contact. Therefore, it was shown that RTA temperature for ohmic contact formation can be lowered to at least $840^{\circ}C$ without significant compromise of contact resistance. X-ray diffraction (XRD) analysis indicated the existence of intermetallic compounds of Ni and Al as well as $NiSi_{1-x}$, but characteristic peaks of $Ti_{3}SiC_2$, a probable narrow-gap interfacial alloy responsible for low-resistance Ti/Al ohmic contact formation, were not detected. Therefore, Al in-diffusion into SiC surface region is considered to be the dominant mechanism of improvement in conduction behavior of Ni/Ti/Al contact.

The effect on small Al addition of the melt-spun Nd-Fe-C magnent (비정질 Nd-Fe-C 자석에 미치는 Al 첨가의 영향)

  • 조대형
    • Electrical & Electronic Materials
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    • v.10 no.10
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    • pp.995-999
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    • 1997
  • For melt-spun Fe-Nd-C alloy variation of phase development and magnetic properties with the variety of small Al addition was investigated. As the amount of Al addition increased the amorphization of Fe$_{14}$/Nd$_{2}$/C or $\alpha$-Fe was retarded and the residual Fe$_{14}$/Nd$_{2}$/C or $\alpha$-Fe did not eliminated after heat treatment resulting in poor coercivities of the ribbons. The grain size of Fe$_{14}$/Nd$_{2}$/C increased with the increase of Al addition and the abnormal grain was often found out in the ribbon heat treated for more then 10 min. The enhancement of coercivity was the highest with the addition of 0.5at%Al. As the amount of Al addition increase the coercivities dropped rapidly. The highest coercivity obtained so far is 13.9kOe which about 16% higher than that(11.2kOe) obtained from the Al-free specimen.

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The properties of TiC/Al surface alloy using a high power $CO_2$-laser (고출력 이산화탄소 레이저에 의한 TiC/Al 표면합금의 특성)

  • 송순달
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.11 no.4
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    • pp.133-137
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    • 2001
  • The properties of TiC/Al surface alloy prepared using a high power $CO_2$-laser was investigated. To analyze this process, the physical properties between substrate [Al] and TiC powder were measured. Surface layer size profiles, optical absorption rate and powder efficiency were measured as afunction of the laser output in TiC/Al matrix. Regardless of TiC powder existence, the absorption rate in substrate Al was decreased when laser output increased. When the laser output increased in the range of 2kW to 4.5 kW, the powder efficiency increased from 4% to 12%. However, TiC powder were not melted in molten aluminum. As a result, increased powder particles easily penetrated to the surface layer and created a two phase states in the metal matrix.

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Effects of Metal Mg on Replacement Reaction of Molten Al for Fabrication of $Al_2$O$_3$//Al Composites (Al$_2$O$_3$/Al 복합체 제조시 용융 알루미늄의 치환반응에 미치는 금속 마그네슘의 영향)

  • 정두화;배원태
    • Journal of the Korean Ceramic Society
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    • v.35 no.1
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    • pp.23-32
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    • 1998
  • Al2O3/Al composites were produced by immersing the sintered silica preform in molten aluminum which contained magnesium as impurity. Three distinct regions existed in the penetration behavior of molten me-tal with changing the reaction temperature. These regions are denoted as low temperature regime(75$0^{\circ}C$-85$0^{\circ}C$) intermediate regime(90$0^{\circ}C$-95$0^{\circ}C$) and high temperature regime(100$0^{\circ}C$$\leq$) In the low temperature regime the penetration speed of molten aluminum increased with increasing reaction temperature whereas it decreased in the intermediate regime due to the phase transition of alumina formed by displacement reac-tion. In the high temperature regime the penetration speed of molten aluminum was the highest at 100$0^{\circ}C$ which was 3.6 mm/hr But above 105$0^{\circ}C$ molten aluminum did not penetrate into the silica preform because of the formation of a dense spinel layer at the preform surface by magnesium in molten Al.

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Effect of First-Stage Growth Manipulation and Polarity of SiC Substrates on AlN Epilayers Grown Using Plasma-Assisted Molecular Beam Epitaxy

  • Le, Duy Duc;Kim, Dong Yeob;Hong, Soon-Ku
    • Korean Journal of Materials Research
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    • v.24 no.5
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    • pp.266-270
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    • 2014
  • Aluminum nitride(AlN) films were grown on the C-face and on the Si-face of (0001) silicon carbide(SiC) substrates using plasma-assisted molecular-beam epitaxy(PA-MBE). This study was focused on first-stage growth manipulation prior to the start of AlN growth. Al pre-exposure, N-plasma pre-exposure, and simultaneous exposure(Al and N-plasma) procedures were used in the investigation. In addition, substrate polarity and, first-stage growth manipulation strongly affected the growth and properties of the AlN films. Al pre-exposure on the C-face and on the Si-face of SiC substrates prior to initiation of the AlN growth resulted in the formation of hexagonal hillocks on the surface. However, crack formation was observed on the C-face of SiC substrates without Al pre-exposure. X-ray rocking-curve measurements revealed that the AlN epilayers grown on the Si-face of the SiC showed relatively lower tilt and twist mosaic than did the epilayers grown on the C-face of the SiC. The results from the investigations reported in this paper indicate that the growth conditions on the Si-face of the SiC without Al pre-exposure was highly preferred to obtain the overall high-quality AlN epilayers formed using PA-MBE.

A study on the Microstructure and Mechanical Properties of Two-Phase (($NiAl+Ni_3Al$) 2상 합금의 미세 조직과 기계적 특성에 관한 연구)

  • Lee, Jong-Hun;Choe, Byeong-Hak;Lee, Nam-Jin;Kim, Hak-Min;Lee, Jin-Hyeong
    • 연구논문집
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    • s.24
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    • pp.161-174
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    • 1994
  • The Ni-Al intermetallic compound that has the greatest potential to be commercialized shows the high ductility at room temperature with the addition of boron, but has extremely low ductility at high temperature and oxidation environment. On this research work, the changes of microstructure and compressive fracture properties were studied in ($NiAl+Ni_3Al$) two-phase alloys. The precipitation behavior of $Ni_3Al$ after solution treatment at $1300^\circC$ for 14hrs and aging treatment at $800^{\circ}C$ for 14hrs was varied with Al content in ($NiAl+Ni_3Al$) two-phase alloys. These microstructure could be modified dramatically by suitable heat treatments. Martensite or martensite plus $Ni_3Al$ microstructure was obtained upon oil quenching from $1300^\circC$. Aging of Martensite at $800^\circC$ resulted in the $Ni_3Al$ plus NiAl phase. The compressive fracture strength and compressive fracture strain were improved by the $Ni_3Al$ plus NiAl phase mixtures at room temperature and $1100^\circC$. Microcracks are observed mostly in the region of NiAl and the interface of $NiAl-Ni_3Al$ phase after compressive test at room temperature. In the case of high temperature compressive test, microcracks are formed in the region of $Ni_3Al$ phase.

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Optimal Parameter Design for Al/SiC Composites using Design of Experiments (실험계획법에 의한 Al/SiC 복합재료의 최적공정 설계)

  • Lee, K.J.;Kim, K.T.;Kim, Y.S.
    • Journal of Power System Engineering
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    • v.15 no.5
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    • pp.72-76
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    • 2011
  • In this work, the parameter optimization for thermal-sprayed Al/SiC composites have been designed by $L_9(3^4)$ orthogonal array and analysis of variance(ANOVA). Al/SiC composites were fabricated by flame spray process on steel substrate. The hardness of composites were measured using micro-vickers hardness tester, and these results were analyzed by ANOVA. The ANOVA results showed that the oxygen gas flow, powder feed rate and spray distance affect on the hardness of the Al/SiC composites. From the ANOVA results, the optimal combination of the flame spray parameters could be extracted. It was considered that experimental design using orthogonal array and ANOVA was efficient to determine optimal parameter of thermal-sprayed Al/SiC composites.

Preparation of AlN/SiC Whisker Composite by Reaction Sintering Process (반응소결법에 의한 AlN/SiC 휘스커 복합체의 제조)

  • 박정현;김용남;유재영;강민수
    • Journal of the Korean Ceramic Society
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    • v.36 no.2
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    • pp.193-202
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    • 1999
  • Al powder, AlN powder, SiC whisker and sintering aids were wet-mixed, and then the specimens prepared with mixed powder were reacted by nitridation at 600∼1400$^{\circ}C$ for 5 hrs. It was cleat that the higher nitridation and the more SiC whisker content were, the better bending strength was. The specimen of Al50/AlN50 reacted at 1400$^{\circ}C$ for 5hrs had the nitridation percent of 97%, the shrinkage under 2%, and the relative density of 78%. And the maximum bending strength of reaction-bonded specimen was 250 MPa. The specimens completely nitrided were post-sintered at 1700, 1800 and 1900$^{\circ}C$ for 2hrs. The post-sintered body had the shrinkage under 6% and the relative density of 86%. Because of the formation of solid solution between AlN and SiC whisker over 1800$^{\circ}C$, the promotion of mechanical properties according to SiC whisker addition was not observed. The post-sintered body had the maximum bending strength of 195 MPa.

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Microstructure and Mechanical Properties of TiC-Ni/Al Composites by the Reaction-Bonding Method (반응결합법에 의한 TiC-Ni/Al 복합체의 미세구조 및 기계적 특성)

  • 한인섭;우상국;김흥수;양준환;정윤중
    • Journal of the Korean Ceramic Society
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    • v.33 no.5
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    • pp.536-546
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    • 1996
  • The TiC-Ni/Al reaction-bonding composites were prepared by the infiltration of Ni/Al melt into the TiC preforms. The microstructure the reaction composition crystalline phase and the mechanical properties of the composites were investigated. During the reaction-bonding Ni/Al mixture had a good wettability and per-meability with TiC preform and pore-free and fully dense sintered bodies were produced. In the case of the Ni/Al atomic ratio of 0.3 and 0.5 TiC raw particle shape was changed to irregular particles because of the decomposition in the liquid matrix and its phenomena was more distinguished in the Al-rich liquid matrix. With increasing more than 1 of the Ni/Al atomic ratio the sample of TiC grain shape was changed from spherical to palatelet particles. Also with increasing the atomic ratio of Ni/Al bending strength and fracture spherical to palatelet particles. Also with increasing the atomic ratio of Ni/Al bending strength and fracture toughness were increased and its maximum value was 1073 MPa and 11 MPa.m1/2 respectively.

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Sintering behavior and mechanical properties of the $Al_2O_3-SiC$ nano-com-posite using a spark plasma sintering technique ($Al_2O_3-SiC$ 나노복합체의 방전 플라즈마 소결 특성 및 기계적 물성)

  • 채재홍;김경훈;심광보
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.13 no.6
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    • pp.309-314
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    • 2003
  • A spark plasma sintering technique has been used for the fabrication of $Al_2O_3$-SiC nanocomposites at the low temperature of $1100^{\circ}C$$1500^{\circ}C$. The sintered $Al_2O_3$-SiC composites shows very homogeneous microstructure without any particular abnormal grain growth, indicating that the addition of nano-sized SiC particles is very effective to control grain growth and to induce the residual stress in the $Al_2O_3$ matrix, resulting in the intragranular fracture. These SiC particles are present in the grain boundaries and also intragrain, depending on the sintering condition, and improve remarkably the mechanical properties of $Al_2O_3$-SiC composite through the mechanisms of strengthening and toughening induced by crack diffraction and crack bridging.