• 제목/요약/키워드: Al-Zn-Sn-O

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ZnO:Al 투명전도막을 이용한 높은 개방전압을 갖는 비정질 실리콘 박막 태양전지 제조 (Amorphous silicon thin-film solar cells with high open circuit voltage by using textured ZnO:Al front TCO)

  • 이정철;안세진;윤재호;송진수;윤경훈
    • 신재생에너지
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    • 제2권3호
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    • pp.31-36
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    • 2006
  • Superstrate pin amorphous silicon thin-film(a-Si:H) solar cells are prepared on $SnO_2:F$ and ZnO:Al transparent conducting oxides(TCO) in order to see the effect of TCO/p-layers on a-Si:H solar cell operation. The solar cells prepared on textured ZnO:Al have higher open circuit voltage VOC than cells prepared on $SnO_2:F$. Presence of thin microcrystalline p-type silicon layer(${\mu}c-Si:H$) between ZnO:Al and p a-SiC:H plays a major role by causing improvement in fill factor as well as $V_{OC}$ of a-Si:H solar cells prepared on ZnO:Al TCO. Without any treatment of pi interface, we could obtain high $V_{OC}$ of 994mV while keeping fill factor(72.7%) and short circuit current density $J_{SC}$ at the same level as for the cells on $SnO_2:F$ TCO. This high $V_{OC}$ value can be attributed to modification in the current transport in this region due to creation of a potential barrier.

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ZnO:Al 투명전도막을 이용한 높은 개방전압을 갖는 비정질 실리콘 박막 태양전지 제조 (Amorphous silicon thin-film solar cells with high open circuit voltage by using textured ZnO:Al front TCO)

  • 이정철;;이준신;송진수;윤경훈
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2006년도 춘계학술대회
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    • pp.158-161
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    • 2006
  • Superstrate pin amorphous silicon thin-film (a-Si:H) solar cells are prepared on $SnO_2:F$ and ZnO:Al transparent conducting oxides (TCO) In order to see the effect of TCO/P-layers on a-Si:H solar cell operation. The solar cells prepared on textured ZnO:Al have higher open circuit voltage $V_{oc}$ than cells prepared on $SnO_2:F$. Presence of thin microcrystalline p-type silicon layer $({\mu}c-Si:H)$ between ZnO:Al and p a-SiC:H plays a major role by causing improvement in fill factor as well as $V_{oc}$, of a-Si:H solar cells prepared on ZnO:Al TCO. Without any treatment of pi interface, we could obtain high $V_{oc}$, of 994mv while keeping fill factor (72.7%) and short circuit current density $J_{sc}$ at the same level as for the cells on $SnO_2:F$ TCO. This high $V_{oc}$ value can be attributed to modification in the current transport in this region due to creation of a potential barrier.

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가스 센서용 ZnO, SnO2 박막의 이방성 식각을 위한 mask 재료의 식각 선택도 조사 (Etch selectivities of mask materials for anisotropic dry etching of gas sensing ZnO and SnO2 films)

  • 박종천;조현
    • 한국결정성장학회지
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    • 제21권4호
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    • pp.164-168
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    • 2011
  • 고이온밀도 플라즈마 식각에 의한 고종횡비, 고이방성을 갖는 ZnO, $SnO_2$ 나노 구조 가스 감응층 형성을 위하여 mask 재료들과의 식각 선택도를 조사하였다. $25BCl_3$/10Ar ICP 플라즈마에서는 ZnO와 Ni 간 5.1~6.1 범위의 식각 선택도가 확보된 반면에 Al의 경우 효율적인 식각 선택도를 확보할 수 없었다. $25CF_4$/10Ar ICP 플라즈마에서는 ZnO와 Ni 간에 7~17 범위의 높은 식각 선택도를 얻을 수 있었다. $SnO_2$$SnF_x$ 식각 생성물의 높은 휘발성에 기인하여 Ni에 비해 매우 높은 식각 속도를 나타내었고, 최고치 약 67의 매우 높은 식각 선택도를 확보하였다.

18% 효율 Cu(In,Ga)Se2 박막태양전지용 ZnSnO 버퍼층의 원자층 증착법 및 분석 (Characterization of Atomic-Layer Deposited ZnSnO Buffer Layer for 18%- Efficiency Cu(In,Ga)Se2 Solar Cells)

  • 김선철;김승태;안병태
    • Current Photovoltaic Research
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    • 제3권2호
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    • pp.54-60
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    • 2015
  • ZnSnO thin films were deposited by atomic layer deposition (ALD) process using diethyl zinc ($Zn(C_2H_5)_2$) and tetrakis (dimethylamino) tin ($Sn(C_2H_6N)_4$) as metal precursors and water vapor as a reactant. ALD process has several advantages over other deposition methods such as precise thickness control, good conformality, and good uniformity for large area. The composition of ZnSnO thin films was controlled by varying the ratio of ZnO and $SnO_2$ ALD cycles. The ALD ZnSnO film was an amorphous state. The band gap of ZnSnO thin films increased as the Sn content increased. The CIGS solar cell using ZnSnO buffer layer showed about 18% energy conversion efficiency. With such a high efficiency with the ALD ZnSnO buffer and no light soaking effect, AlD ZnSnO buffer mighty be a good candidate to replace Zn(S,O) buffer in CIGSsolar cells.

Growth of ZnSnO3 Thin Films on c-Al2O3 (0001) Substrate by Pulsed Laser Deposition

  • Manh, Trung Tran;Lim, Jae-Ryong;Yoon, Soon-Gil
    • 한국전기전자재료학회논문지
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    • 제27권5호
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    • pp.297-302
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    • 2014
  • $La_{0.5}Sr_{0.5}CoO_3$ (LSCO) electrode thin films with a resistivity of ~ 1,600 ${\mu}{\Omega}cm$ were grown on c-$Al_2O_3$ (0001) substrate. $ZnSnO_3$ (ZTO) thin films with different thicknesses were directly grown on LSCO/c-$Al_2O_3$ (0001) substrates at a substrate temperature that ranged from 550 to $750^{\circ}C$ using Pulsed Laser Deposition (PLD). The secondary phase $Zn_2SnO_4$ occurred during the growth of ZTO films and it became more significant with further increasing substrate temperature. Polarization-electric-field (P-E) hysteresis characteristics, with a remnant polarization and coercive field of 0.05 ${\mu}C/cm^2$ and 48 kV/cm, respectively, were obtained in the ZTO film grown at $700^{\circ}C$ in 200 mTorr.

Al 도핑 및 열처리 온도에 따른 용액 공정 기반 AlZnSnO TFT의 특성 향상 연구

  • 김현우;최병덕
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.216.1-216.1
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    • 2015
  • 본 연구에서는 용액 공정 기반 AZTO (Aluminum-Zinc-Tin Oxide, AlZnSnO) 박막 트랜지스터를 제작하여 Al (Aluminum) 도핑과 열처리 온도의 가변을 통한 특성 향상을 확인하였다. ZTO 용액의 Zn:Sn 비율(4:7)을 고정하고 Al 도핑(0~8.3%)과 열처리 온도($350{\sim}550^{\circ}C$)를 가변하였다. 실험 결과 Al 도핑이 증가할수록 드레인 전류는 감소하고 문턱 전압이 양의 방향으로 이동하면서 포화 이동도와 아문턱 기울기가 감소하였다. 열처리 온도가 증가할 때는 드레인 전류가 증가하고 문턱 전압은 음의 방향으로 이동하며 이동도와 아문턱 기울기가 증가하였다. Al 도핑은 강한 금속-산소 결합에 의해 oxygen vacancy와 전자 농도가 감소하게 하여 드레인 전류, 이동도, 아문턱 기울기의 감소와 양의 방향 문턱 전압 이동을 야기한다. 열처리 온도가 높아지면 반도체 층의 분자 구조가 더 밀집되고 oxygen vacancy 가 증가하며, 이는 전자 농도의 증가로 이어져 Al 도핑의 효과와 반대의 경향을 보인다. 실험 결과를 통해 Al:Zn:Sn=0.5:4:7의 비율과 $350^{\circ}C$ 열처리 조건에서 문턱 전압과 이동도, 아문턱 기울기, 전류 온오프 비($I_{on}/I_{off}$)가 각각 3.54V, $0.16cm^2/Vs$, 0.43 V/dec, $8.1{\times}10^5$으로 우수한 특성을 확인하였다.

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Characteristic of Al-In-Sn-ZnO Thin Film Prepared by FTS System with Hetero Targets

  • Hong, Jeong-Soo;Kim, Kyung-Hwan
    • Transactions on Electrical and Electronic Materials
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    • 제12권2호
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    • pp.76-79
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    • 2011
  • In order to improve efficiency and make a new material thin film, we prepared the Al-In-Sn-ZnO thin film on a glass substrate at room temperature using a Facing Target Sputtering (FTS) system. The FTS system was designed to array two targets that face each other. Two different kinds of targets were installed on the FTS system. We used an ITO ($In_2O_3$ 90wt%, $SnO_2$ 10wt%) target and an AZO (ZnO 98wt%, $Al_2O_3$ 2wt%) target. The AIZTO films were deposited using different applied powers to the targets. The as-deposited AIZTO thin films were investigated using a UV/VIS spectrometer, an X-ray diffratometer (XRD), and Energy Dispersive X-ray spectroscopy (EDX).

Sputtered Al-Doped ZnO Layers for Cu2ZnSnS4 Thin Film Solar Cells

  • Lee, Kee Doo;Oh, Lee Seul;Seo, Se-Won;Kim, Dong Hwan;Kim, Jin Young
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.688-688
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    • 2013
  • Al-doped ZnO (AZO) thin films have attracted a lot of attention as a cheap transparent conducting oxide (TCO) material that can replace the expensive Sn-doped In2O3. In particular, AZO thin films are widely used as a window layer of chalcogenide-based thin film solar cells such as Cu(In,Ga)Se2 and Cu2ZnSnS4 (CZTS). Mostly important requirements for the window layer material of the thin film solar cells are the high transparency and the low sheet resistance, because they influence the light absorption by the activelayer and the electron collection from the active layer, respectively. In this study, we prepared the AZO thin films by RF magnetron sputtering using a ZnO/Al2O3 (98:2wt%) ceramic target, and the effect of the sputtering condition such as the working pressure, RF power, and the working distance on the optical, electrical, and crystallographic properties of the AZO thin films was investigated. The AZO thin films with optimized properties were used as a window layer of CZTS thin film solar cells. The CZTS active layers were prepared by the electrochemical deposition and the subsequent sulfurization process, which is also one of the cost-effective synthetic approaches. In addition, the solar cell properties of the CZTS thin film solar cells, such as the photocurrent density-voltage (J-V) characteristics and the external quantum efficiency (EQE) were investigated.

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廢電子스크랩에서 Thiobacillus ferrooxidans를 이용한 Cu, Al, Zn, Ni, Co, Sn 및 Pb의 浸出 (Biological Leaching of Cu, Al, Zn, Ni, Co, Sn and Pb from Waste Electronic Scrap using Thiobacillus Ferrooxidans)

  • 안재우;김명운;정진기;이재천;김동진;안종관
    • 자원리싸이클링
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    • 제14권1호
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    • pp.17-25
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    • 2005
  • 폐전자스크랩으로부터 미생물 침출법에 의해 유가금속을 회수하기 위한 기초 연구로 Thiobacillus ferrooxidans를 이용하여 Cu, Zn, Al, Co, Ni, Sn 및 Pb의 침출 거동을 조사하였다. 예비실험으로 각 금속의 침출 거동을 조사하기 위해 먼저 폐전자스크랩 대신 각 금속분말을 이용하여 침출 실험을 실시하였는데, 금속분말의 양이 증가함에 따라 츰출율을 감소하는 경향을 보였으며 각각의 금속분말의 농도가 5 g/L이하에서 Cu, Co 및 Zn의 경우 85%이상의 침출율을 나타내었다. 한편 폐전자스크랩을 이용한 침출실험 결과 고액농도가 100 g/L에서 Cu, Co의 경우는 90%이상의 침출율을 보이고 있으나 Al, Zn 및 Ni의 경우는 40%이하의 침출율을 나타내었다. Pb의 경우는 PbSO$_4$ 형태로 Sn의 경우는 SnO 형태로 침전되어 침출액중으로는 거의 용출되지 않았다.

물 분해 수소제조를 위한 금속산화물들의 반응특성 (The Properties of the Several Metal Oxides in the Water-splitting for H2 Production)

  • 손현명;박주식;이상호;황갑진;김종원;이진배
    • 한국수소및신에너지학회논문집
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    • 제14권3호
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    • pp.268-275
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    • 2003
  • The water-splitting process by the metal oxides using solar heat is one of the hydrogen production method. The hydrogen production process using the metal oxides (NiFe2O4/NiAl2O4,CoFe2O4/CoAl2O4, CoMnNiFerrite, CoMnSnFerrite, CoMnZnFerrite, CoSnZnFerrite) was carried out by two steps. The first step was carried out by the CH4-reduction to increase activation of metal oxides at operation temperature. And then, it was carried out the water-splitting reaction using the water at operation temperature for the second step. Hydrogen was produced in this step. The production rates of H2 were 110, 160, 72, 29, 17, $21m{\ell}/hr{\cdot}g-_{Metal\;Oxide}$ for NiFe2O4/NiAl2O4, CoFe2O4/CoAl2O4, CoMnNiFerrite, CoMnSnFerrite, CoMnZnFerrite, CoSnZnFerrite respectively in the second step. CoFe2O4/CoAl2O4 had higher H2 production rate than the other metal oxides.