• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.24 no.4
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• pp.297-305
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• 2012

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.988-992
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• 2006

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1264-1268
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• 2004

This paper presents a wafer motion modeling of the transfer unit and the control unit in the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. The motion in the transfer unit is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated plate is modeled as a linear spring. The motion in the control unit is also modeled as another mass-spring-damper system, but in two dimensional systems. Experiments with a clean tube system built for 12-inch wafers show the validity of the presented force and motion models.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.459-462
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• 2003

This paper presents a force model of the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafer motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes the control method to emit and stop a wafer at the center of a control unit. It shows the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when a wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for 12 inch wafer shows the validity of the proposed model and the algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.66-73
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• 2004

This paper presents wafer motion modeling of transfer unit in clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. When the wafer is transferred in x direction with an initial velocity the motion along x direction can be modeled as a simple decaying motion due to viscous friction of the fluid. But, the motion in y direction is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated is modeled as a linear spring. Experiments with a clean tube system built fur 12 wafer show the validity of the presented force and motion models.

• Air Cleaning Technology
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• v.10 no.3 s.38
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• pp.61-74
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• 1997

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.4 no.2
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• pp.72-81
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• 1992

Experimental study on air ionization phenomena has been conducted to analyze the propagation behavior and dischargeability of polarity air ions under the super clean room environments with the operation of prototype of Air Ionization System. Varying humidity and air velocity, the distribution of air ion density and the discharge time are measured and analyzed.

• Air Cleaning Technology
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• v.23 no.3
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• pp.1-9
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• 2010

This study proposed the optimum design values for the biological clean room system observing the regulations of Hazard Analysis Critical Control Point (HACCP). Even though the standard for industrial clean room system has been well established, the basis for biological food clean room system is the first stage. In order to prevent the contaminations in advance for food storages, processes, and distributions, the criterion of Hazard Analysis Critical Control Point is positively required. This study also suggested the possible ways of how to avoid the hazardous contaminations.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.1
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• pp.63-70
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• 2009

The air sterilization systems are investigated experimentally in this paper. The goal is to reduce bacteria, mold and viruses in office air by using a UV sterilizer installed inside a partition panel and wall-mounted unit. These systems allow occupants to turn the system on/off and to control the incoming air speed and direction. The partition air sterilization system conditions and sterilizes the air, and then delivers the clean air into the personal task area through the partition panels, which are connected to the pressurized under-floor plenum. Room air exits through the return grills mounted on the ceiling. The wall-mounted air sterilization system sterilizes the air, and then delivers the clean air to the personal task area from the wall. In this study a full-size experimental environment is established to investigate the immunization performance of these air sterilization systems. A typical office space scale is used in this study in order to find an optimal system to achieve a sterilized healthy micro-environment. Multiple system parameters, including volume flow rate and velocity of supplied air, were regulated during the experiments. The more air contact these air sterilization systems had, the better disinfection performance. Over 90% of eradication ratios were obtained by these two air sterilization systems. The results indicate that these systems can efficiently disinfect office air contamination.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.1
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• pp.121-130
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• 2002

Clean stockers are being used by semiconductor and TFT-LCD manufacturers to store and buffer work in process. Since an important function of a stocker is to keep the contained material clean. The only way to keep the stored product clean is to provide constant clean airflow the product and through stocker, The airflow across the product prevent contamination from settling on the product. Up to now, stocker typically have been configured to receive their laminar airflow from fan filter units that are located on the side of the stocker This type of stocker may have such problems as complexity of structure, increment of temperature, mechanical vibration, initial investment and running cost. In this study, In order to solve the above mentioned problems, new air control system in stocker is proposed, which is to control open ratios of exits that are located on the side of the stocker without fan filter units. Open ratios of exits need to be optimized for the same quantities of airflow in each exit. In this study, static pressure regain was used for the analysis of the open ratios of exits theoretically and Blue Ridge Numerics FEM software, CFDesign, was used fur simulating airflow in stocker. As a result, Open ratios of exits important to provide constant clean airflow can be obtained by the analysis of static pressure regain and was verified by simulation results. Therefore, new air control system in stocker can be used by the semiconductor and TFT-LCD manufacturers.