Experimental Study on Air Ionization Phenomena in the Super Clean Room

초청정 클린룸의 공기이온화에 대한 실험적 연구

  • 오명도 (생산기술연구원 기계기술실용화 센터) ;
  • 배태식 (생산기술연구원 기계기술실용화 센터) ;
  • 김선창 (생산기술연구원 기계기술실용화 센터)
  • Published : 1992.05.01

Abstract

Experimental study on air ionization phenomena has been conducted to analyze the propagation behavior and dischargeability of polarity air ions under the super clean room environments with the operation of prototype of Air Ionization System. Varying humidity and air velocity, the distribution of air ion density and the discharge time are measured and analyzed.

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Acknowledgement

Supported by : 상공부