• Journal of the Semiconductor & Display Technology
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• v.4 no.1 s.10
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• pp.35-41
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• 2005

An air levitation type wafer transfer system is composed of control and transfer track. Wafer transfer speed is mainly affected by air velocity of propulsion nozzle. In this study, the propulsion force coefficient was evaluated experimentally for the nozzle with 0.5mm, 0.8mm, and 1.0mm diameter. As a result, the propulsion force was largest in the smallest size of nozzle at same air velocity. The propulsion force coefficient of nozzle increases with reducing diameter of nozzle. This increment of propulsion force coefficient was enlarged remarkably at the 0.5mm diameter of nozzle.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.81-82
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• 2006

Conveyor-type transporters have been widely used as a typical delivery system of semi-conductor, FPD and other IT-related products. However, as the IT-product is getting larger in size and higher in resolution, several problems are caused by mechanical contacts between the transporter and target object. In this context, recently, lots of efforts are being devoted for development of various contact-free handling systems to get rid of deffets and oil contaminations. The objectives of this paper are to characterize suspension mechanisms and to investigate air flow effects on air levitation transport system. For this purpose, a series of CFD analyses were carried out and the simulation data showed a good agreement with the corresponding experimental ones. It is anticipated that the promising result can be used as a basis for concept design of the transport system.

• Proceedings of the KIEE Conference
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• 2006.04b
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• pp.106-108
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• 2006

This paper shows the design of a levitation magnet for an OLED system which has a large air gap. Evolution strategy was adopted for the optimization of the magnet system. During the optimization process, interpolation of levitation force was used to reduce the computation time which was needed to calculate the levitation force. Object function for optimization was total weight of the magnet system.

• Journal of Electrical Engineering and Technology
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• v.11 no.5
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• pp.1299-1304
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• 2016

• Proceedings of the KIEE Conference
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• 2008.04c
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• pp.83-85
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• 2008

This paper deals with design and dynamic analysis of electromagnets for levitation applications. On the basis of equivalent magnetic circuit (EMC) method and 3-D finite element analysis (FEA) model, initial and detailed design for electromagnets are performed. Using the state equation for the closed-loop control, the dynamic analysis of electromagnets is also performed. Finally, this paper investigates the variation of levitation force according to current under fixed nominal air-gap, and the variation of required current according to load weight in order to maintain the nominal air-gap. From these results, the validation of design and dynamic analysis of electromagnets is confirmed. In particular, the influence of winding temperature on levitation control is discussed in detail.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.26 no.7
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• pp.875-880
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• 2016

A new hybrid permanent magnet biased magnetic levitation actuator (maglev) is developed. This new maglev actuator is composed of two C-core electromagnetic cores separated with two permanent magnets. Compared to the conventional hybrid maglev actuators, the new actuator has unique flux paths such that bias flux paths are separated with control flux paths. The control flux paths have minimum reluctances only developed by air gaps, so the currents to produce control fluxes can be minimized. The gravity load can be compensated with the permanent magnet bias fluxes developed at off-centered air gap positions while external disturbances are controlled with control fluxes by currents. The consumed power to operate this levitation system can be minimized. 1-D magnetic circuit model is developed for this model such that the flux densities and magnetic forces are extensively analyzed. 3-D finite element model is also developed to analyze the performances of the maglev actuator.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.5 s.176
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• pp.1166-1174
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• 2000

In this paper, we introduce a positioner based on magnetic levitation to eliminate the friction which is the most severe effect to limit high resolution on the micro level. Differently from existing electromagnetic device, the proposed positioner consists of air core solenoid and permanent magnet. Although the combination produces small magnetic force, it is suitable for realizing micro motion repeatedly without the accumulation of error because there is no hysteresis caused by ferromagnetic materials, no eddy current loss, no flux saturation. First, the approximate modeling of stiffness and damping effects between the magnetic elements is made and verified experimentally. Then, we have formulated the dynamic equation of one d.o.f magnetic levitation positioner using linear perturbation method and discussed the necessity of optimization for the chief design parameters to maximize the stability performance.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.401-407
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• 2012

The recent manufacturing process in the thin wafers and flat panel necessitate new approaches to reduce handling fragile and surface-sensitive damage of components. This paper presents a new pneumatic levitation for non-contact handling of parts and substrates. This levitation can achieve non-contact handling by blowing air into an air pressure pick-up head with radial passages to generate a negative pressure region. Negative pressure is caused by the radial air flow by nozzle throat and through holes connecting to the bottom region. The numerical analysis deals with the levitational motion with different design factors. The dynamic motion is examined in terms of force balance(dynamic equilibrium) occurring to the flow field between two objects. The stable equilibrium position and the safe separation distance are determined by analyzing the local pressure distribution in the fluid motion. They make considerable design factors consisting the air pressure pick-up head. As a result, in case that the safe separation distance is beyond 0.7mm, the proposed pick-up head can levitate stably at the equilibrium position. Furthermore, it can provide little effect of torque, and obtain more wide picking region according to the head size.

• Proceedings of the KIEE Conference
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• 2004.04a
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• pp.253-255
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• 2004

Conventional magnetic levitation systems could show unsatisfactory performance under air-gap disturbance due to rail irregularities. In this paper, we propose a feedback control system with discrete Kalman filter for air-gap disturbance attenuation. It is shown that excellent system performance can be obtained with the use of discrete Kalman filter, and that results from experiments agree well with those of simulations.

• Journal of Mechanical Science and Technology
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• v.20 no.9
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• pp.1492-1501
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• 2006

A transportation system of single wafer has been developed to be applied to semiconductor manufacturing process of the next generation. In this study, the experimental apparatus consists of two kinds of track, one is for propelling a wafer, so called control track, the other is for generating an air film to transfer a wafer, so called transfer track. The wafer transportation speed has been evaluated by the numerical and the experimental methods for three types of nozzle position a..ay (i.e., the front-, face- and rear-array) in an air levitation system. Test facility for 300mm wafer has been equipped with two control tracks and one transfer track of 1500mm length from the starting point to the stopping point. From the present results, it is found that the experimental values of the wafer transportation speed are well in agreement with the computed ones. Namely, the computed values of the maximum wafer transportation speed $V_{max}$ are slightly higher than the experimental ones by about $15{\times}20%$. The disparities in $V_{max}$ between the numerical and the experimental results become smaller as the air velocity increases. Also, at the same air flow rate, the order of wafer transportation speeds is : $V_{max}$ for the front-array > $V_{max}$ for the face-array > $V_{max}$ for the rear-array. However, the face-array is rather more stable than any other type of nozzle array to ensure safe transportation of a wafer.