• Title/Summary/Keyword: Air Control

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CFD Analysis on the Internal Air Flow Control in a Wax Spin Coater of Silicon Wafer Polishing Station (실리콘 웨이퍼 연마장비용 왁스 스핀코팅장치의 내부기류 제어에 관한 전산유동해석)

  • Kim, Kyoung-Jin;Kim, Dong-Joo;Park, Joong-Youn
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.1
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    • pp.1-6
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    • 2011
  • In this paper, the air flow induced by the rotating flat disk is numerically investigated in a hope to better understand the air flow structures inside the wax spin coater for a silicon wafer polishing station. Due to the complex inner geometry of actual spin coater such as the casing around the rotating ceramic block and servo motor, recirculation of air flow is inevitably found on the coating target if the internal space of spin coater is closed at the bottom and it could be the possible source of contamination on the wax coating. By numerical flow simulation, we found that it is necessary to install the air vent at the bottom and to apply the sufficient air suction in order to control the path of air flow and to eliminate the air recirculation zone above the spinning surface of coating target.

A Study on the Optimal Control Strategy of Air-Conditioning System with Slab Thermal Storage - Results Influenced by the Choice of a Criterion Function - (슬래브축열의 최적제어방책에 관한 연구 -평가함수의 선택이 결과에 미치는 영향-)

  • Jung, Jae-Hoon;Shin, Young-Gy
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.18 no.11
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    • pp.896-905
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    • 2006
  • An optimal control of an air-conditioning system with slab thermal storage is investigated by making use of the Maximum Principle. An optimal heat input to a plenum chamber and an air-conditioned room is determined by minimizing a criterion function which is given as integral sum of two terms. The first term is the square of the deviation in the room air temperature from the set-point value, and the second is the absolute value of the heat input. The result indicates that it tries to keep a room air temperature in set-point value by heating as much as possible at the time of a setup of a room air temperature or just before that, in order to avoid a heat loss arising at the time of the non-air conditioning. The result is compared with that of the case when the square of the heat input is used as a criterion.

Study on Control of Refrigerant Flow Rate and Characteristics of Superheat in Evaporator using Electronic Expansion Valve (전자(電子) 팽창밸브를 이용(利用)한 증발기(蒸發器)의 냉매(冷媒) 流量(유량) 제어(制御) 및 과열도(過熱度) 특성(特性)에 관한 연구(硏究))

  • Choi, S.O.;Kim, J.H.;Yang, H.S.;Kim, J.S.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.6 no.4
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    • pp.380-387
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    • 1994
  • An experimental study was performed to investigate the characteristics of refrigerant flow rate control and superheat in an evaporator with an electronic expansion valve(EEV). The EEV used in this study was devised using a needle valve coupled with a stepping motor controlled by a personal computer. A Pill control equation was used to control the superheat of the evaporator and to set the superheat to $5^{\circ}C$. In order to determine an optimum running condition for the system, Pill parameters were varied for the wide range of values. The running condition of an air conditioning system with a PI control was reasonably stable compared with that of the Pill control. Experimental results for the PI control using parameter values, $K_p=1.5$, $T_i=400(sec)$ and $T_s=6(sec)$ show that the superheat reached its target value. When external disturbances were introduced to the system, the superheat target value was reached within about 3 minutes. When the EEV was applied to the air conditioning system driven by an inverter, room temperature control was excellent.

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An implementation Of Control Loop For Domestic Flue Gas Desulfurization System (국산 개발 배연탈황 설비의 제어루프 구현)

  • Lee, Chan-Ju;Kim, Eung-Seok
    • Proceedings of the KIEE Conference
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    • 1998.07b
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    • pp.825-827
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    • 1998
  • Air pollution is one of the most important global issues of the environmental concerns. Some advanced foreign countries have developed the air pollution control technology. KEPCO has been researching on the air pollution control technology and developed the FGD(Flue Gas Desulfurization) system for 200MW thermal power plant. In this paper, we describe the major control loops implemented to the domestic FGD system. The major control loops are to be classified into booster fan control, absorber PH control and limestone density control. The control loops were applied to the actual desulfurization processes and proved to their performance.

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Design and Analysis of Fuzzy Control in a Variable Speed Refrigeration System

  • Hua, Li;Jeong, Seok-Kwon
    • International Journal of Air-Conditioning and Refrigeration
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    • v.15 no.2
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    • pp.61-69
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    • 2007
  • This paper deals with fuzzy control with a feedforward compensator to progress both energy saving and coefficient of performance (COP) in a variable speed refrigeration system. Both the capacity and superheat are controlled simultaneously and independently in the system. By adopting the fuzzy theory, the controller design for the capacity and superheat is possible without depending on a dynamic model of the system. Moreover, the feedforward compensator of the superheat can reduce influence of the interfering loop between the capacity and superheat. Some experiments are conducted to design appropriate fuzzy controller by an iteration manner. The results show that the proposed fuzzy controller with the compensator can establish good control performances for the complicated refrigeration system in spite of its inherent strong non-linearity. Also, the fuzzy control performances were investigated by comparing to the model based PI control experimental results to evaluate transient behavior under the control.

Study on Fresh Air Load Reduction System by Using Geothermal Energy - Reducing Effect of a Fresh Air Load by Combining with Air-heated Solar Collector - (지열을 이용한 공조외기부하저감 시스템에 관한 연구 - 공기식 집열기와의 병용에 의한 공조외기부하저감 효과 -)

  • Son Won-Tug;Lee Sung
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.16 no.12
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    • pp.1218-1226
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    • 2004
  • This paper presents thermal behaviors and performances of a fresh air load reduction system by using earth tube system combined with air-heated solar collector. The earth tube system reduces a fresh air load by heat exchange with soil throughout the year. In the previous experimental research, it was clarified that the earth tube system was very useful as a fresh air load reduction system. However, since outlet temperature of the fresh air which was heated by earth tube system was below 15$^{\circ}C$ in winter, it is not suitable to introduce the fresh air into the place of residence directly. Therefore, a simulation model using the simple heat diffusion equation was used to examine a rising effect of outlet air temperature in winter by combining with air-heated solar collector. An improvement of annual performance by control of operation is also quantitatively examined. In conclusion, it is confirmed that its performance is improved by control of operation throughout the year and outlet air temperature rose by combining with air-heated solar collector.

A Study on Humid Control Characteristics of Alkaline Desiccants (알칼리성 용해제의 조습특성에 관한 연구)

  • Hong, Young-Ho
    • Applied Chemistry for Engineering
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    • v.21 no.2
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    • pp.169-173
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    • 2010
  • Many salts have the ability to attract and remove water vapor from the surrounding environment. The ability of each salt to remove water vapor is based on the flow rate and temperature of air in surrounding. The objective of this study was toinvestigate the humid control characteristics in air-water system by using a desiccants. The aim is to asses the influence of three parameters on the humid control process which are air volume rate, air temperature and desiccant amount. Humidity control materials which consist of K (potassium) or Na (sodium) have been synthesized by the aqueous process. The humidity control properties of materials have been also investigated. Experiment results are as following. Thermal characteristics of desiccants showed similar properties regardless of processing condition. The experiments were examined by using artificial air-water system (humidity : 70~93%, air volume rate : $0.22{\sim}0.69m^3/s$). The results showed that the Na-type desiccant was an effective material. It was found that dew point increased with air volume rate, and the humidity change in humid control process was depended on desiccants amount.

A Study on the Air Traffic Situation Variables which Influence the Job Performance of Military Air Traffic Controllers (군관제사의 직무 수행과 항공교통상황 변인의 영향 연구)

  • Sin, Hyon-Sam;Jang, Jung-Ha;Ahn, Jae-Mo
    • Journal of the Korean Society for Aviation and Aeronautics
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    • v.20 no.1
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    • pp.19-25
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    • 2012
  • The air traffic situation variables were emphasized in this research to review the awareness level of job performance of military air traffic controllers in application of air traffic situation variables such as detection of aircraft identification, type of aircraft, position ,speed, altitude, determination of separation between departing and arriving in-trail aircraft, physical airport conditions, adverse weather conditions, NAVAID outage and ATC facilities' operational status. In this respect, This study was conducted under the auspice of ATC facility operating agencies and devoting air force air traffic controller's participation by answering the questionnaires from nine radar approach control facilities and other air traffic control towers.