• 소성∙가공
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• 제13권3호
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• pp.253-261
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• 2004

The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

• 공업화학
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• 제30권4호
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• pp.472-478
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• 2019

막 축전식 탈염(MCDI) 셀에 공급하는 총 전하(TC)를 조절하여 경도물질($Ca^{2+}$)을 안정하게 탈염할 수 있는 방법을 연구하였다. 흡착과정에서 TC를 변화시키면서 흡착(1.5 V)과 탈착(0.0 V)을 30회 반복하였다. 탈염과정에서 유출수의 농도와 pH, 흡착 및 탈착량, 전류밀도와 셀 전위의 변화를 분석하였다. MCDI 셀에 사용된 탄소전극의 최대허용전하(MAC)는 46 C/g로 측정되었다. MAC 이하의 TC (40 C/g)에서 운전한 결과 전극반응이 일어나지 않아 장기간 운전에서도 안정적인 탈염특성을 얻을 수 있었다. 반면, MAC 이상의 TC (50, 60 C/g)에서 운전한 경우 유출수의 농도와 pH가 크게 변하였다. 또한 전극반응으로 인해 전극표면에 스케일이 생성되어 셀의 전기저항이 점차 증가하였다. 이를 통해 흡착과정에서 MCDI 셀에 공급하는 전하를 제어함으로써 전극반응 없이 경도물질을 안정하게 제거할 수 있음을 확인하였다.

• 설비공학논문집
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• 제17권12호
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• pp.1192-1203
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• 2005

A technical analysis was conducted to predict the development trend for heat pump system. The study was based on a submitted patent from 1983 to 2002 in Korea, U.S.A. and Japan. The total number of raw data from the registered database was 19,261 and the obtained data to be analyzed through the filtering process was 5,143. Technical development of compression type heat pump was more dominant than the other types, absorption, adsorption, and chemical heat pump. The patents for compression type made up over $80\%$ in each country, Most of patents were developed for the defrosting and controlling technology of the compression type heat pump system. Approximately $24\%\;and\;62\%$ of the patents about compression type heat pump were for defrosting and control technologies, respectively.

• 한국컴퓨터정보학회:학술대회논문집
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• 한국컴퓨터정보학회 2019년도 제59차 동계학술대회논문집 27권1호
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• pp.53-56
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• 2019

본 논문에서는 화력을 이용하는 대형 파워 플랜트 설비의 미세먼지 발생량을 저감시키고 능동적으로 제어 할 수 있는 효율적인 시스템을 제안한다. 이 시스템은 기존의 고정형으로 설계된 집진기 방식의 고정부하량 한계점과 극복하고 초미세먼지 PM2.5, 미세먼지 PM10의 발생량에 따라 IoT센서 감지에 의해 지능형 알고리즘으로 효율적으로 저감 제어 처리량을 극대화하고, 미세먼지 발생량을 최소화한다. 또한 이 시스템의 차별성은 기존의 집진기에서 잡혀지지 않는 초미세먼지를 새로운 형태의 물질인 FAA(Fine-dust Adsorption Agent)를 통해 연료 연소 시 발생되는 초미세먼지 미세입자 자체를 크게 만들어 기존 설비 집진기 필터에 포집되게 하는 혁신적인 방식이다. 이번 연구를 통해 350도~1000도 열원에서 작용할 수 있는 화학물질 FAA 용액(Agent)을 개발 하였으며 지능형 AI 분사장치를 통해 연료에 첨가되어 연소 시 미세먼지를 20배~50배까지 볼륨을 확대시켜 기존 집진필터에 포집될 수 있게 동작된다. 이때, 기존 설계된 집진기의 한계(부하)용량에 상관없이 미세먼지 발생량을 상황인식 반응형 알고리즘(AI제어) 통해 분사량을 능동적으로 조절하여 미세먼지 발생량을 저감하는 진보적 혁신성을 지닌다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.234.1-234.1
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• 2015

Molybdenum disulfide (MoS2)는 van der Waals 결합을 통한 층상구조의 물질로써 뛰어난 물리화학적, 기계적 특성으로 Field Effect Transistors (FETs), Photoluminescence, Photo Detectors, Light Emitters 등의 많은 분야에서 연구가 보고 되어지고 있는 차세대 2D-materials이다. 이처럼 MoS2 가 다양한 범위에 응용될 수 있는 이유는 layer 수가 증가함에 따라 1.8 eV의 direct band gap 에서 1.2 eV 의 indirect band-gap으로 특성이 변화할 뿐만 아니라 다양한 고유의 전기적 특성을 지니고 있기 때문이다. 그러나 MoS2 는 원자층 단위의 layer control 이 어렵다는 이유로 다양한 전자소자 응용에 많은 제약이 보고 되어졌다. 본 연구에서는 MoS2 의 layer를 control 하기 위해 ICP system 에서 mesh grid 를 삽입하여 Cl2 radical을 효과적으로 adsorption 시킨 뒤, Ion beam system 에서 Ar+ Ion beam 을 통해 한 층씩 제거하는 방식의 atomic layer etching (ALE) 공정을 진행하였다. ALE 공정시 ion bombardment 에 의한 damage 를 최소화하기 위해 Quadruple Mass Spectrometer (QMS) 를 통한 에너지 분석으로 beam energy 를 20 eV에서 최적화 할 수 있었고, Raman Spectroscopy, X-ray Photoelectron Spectroscopy (XPS), Atomic Force Microscopy(AFM) 분석을 통해 ALE 공정에 따른 MoS2 layer control 가능 여부를 증명할 수 있었다.

• 상하수도학회지
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• 제21권1호
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• pp.13-25
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• 2007

The water treatment plants in Seoul Metropolitan Area, which are under Korea Water Resources Corporation(KOWACO)'s management, take water from Paldang Reservoir in Han River System for drinking water supply. There are taste and odor (T&O) problems in the finished water because the conventional treatment processes do not effectively remove the T&O compounds. As part of countermeasures for taste and odor control, KOWACO is planning to introduce advanced water treatment process such as ozone and GAC in near future. This study evaluated the removal characteristics of T&O and dissolved organic matter (DOM) to find design and operation parameters of advanced water treatment processes in a pilot-scale treatment plant. The GAC adsorption capacity for DOC in the two GAC system (GAC and $O_3$-GAC) at an EBCT of 14min was mostly exhausted after 9months. The differency of the removal efficiency of DOC between $O_3$-GAC and GAC increased with increasing operation time because the bioactivity in $O_3$-GAC process was enhanced by post-ozone process. Removal by conventional treatment was unable to reach the target TON(threshold odor number) of 3 but GAC systems at an EBCT(empty bed contact time) of 14 min were able to archive the target with few exception. During the high T&O episodes, PAC as a pretreatment together with GAC could be useful option for T&O control. However, substantial TON removal continued for more than two year (> 90,000 bed volumes). At the spiking of less concentration 26 to 61 ng/L in the influent of GAC systems, GAC absorber and $O_3$-GAC processes could meet the treatment target. The better spike control after 12 and 19 months of operation compared to that after 7 months of operation is a strong indication of biological control. The results presented in this study had shown that $O_3$-GAC process was found to be more effective for T&O control than GAC process. And the main removal mechanism in GAC systems were adsorption capacity and biodegradation.

• Carbon letters
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• 제13권4호
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• pp.236-242
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• 2012

Poly(vinylidene chloride) (PVDC)-derived nanoporous carbons were prepared by various activation methods: heat-treatment under an inert atmosphere, steam activation, and potassium hydroxide (KOH) activation at 873, 1073, and 1273 K. The pore structures of PVDC-derived nanoporous carbons were characterized by the $N_2$ adsorption technique at 77 K. Heat treatment in an inert atmosphere increased the specific surface area and micropore volume with elevating temperature, while the average micropore width near 0.65 nm was not significantly changed, reflecting the characteristic pore structure of ultramicroporous carbon. Steam activation for PVDC at 873 and 1073 K also yielded ultramicroporosity. On the other hand, the steam activated sample at 1273 K had a wider average micropore width of 1.48 nm, correlating with a supermicropore. The KOH activation increased the micropore volume with elevating temperature, which is accompanied by enlargement of the average micropore width from 0.67 to 1.12 nm. The average pore widths of KOH-activated samples were strongly governed by the activation temperature. We expect that these approaches can be utilized to simply control the porosity of PVDC-derived nanoporous carbons.

• 한국수소및신에너지학회논문집
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• 제21권3호
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• pp.220-226
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• 2010

The heat transfer performance improvement in closed cooling water system of an electric power generation can be achieved by a corrosion control using corrosion inhibitors. The effect of trisodium phosphate and sodium nitrite upon carbon steel at various $Cl^{-1}$ ion containing water concentrations was examined by an integrated corrosion monitoring system. Nitrite was found to be the most effective inhibitor among tested inhibitors for carbon steel. The inhibiting process is considered as adsorption of nitrite ions in oxide layer which form a passive film on the carbon steel surface.

• 전기학회논문지P
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• 제55권1호
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• pp.26-30
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• 2006

For the purpose of developing capacitive humidity sensor having interdigital electrodes, interdigital electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thickness. For the development of ASIC, switched capacitor signal processing circuits for capacitive humidity sensor were designed and simulated by Cadence using $0.25{\mu}m$ CMOS process parameters. The signal processing circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control. The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is $0.4%R.H./^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of $3%R.H.{\sim}98%R.H.$. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigital electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권3호
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• pp.144-148
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• 2001

For the purpose of developing capacitive humidity sensor having interdigit electrodes, interdigit electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thichness. For the development of ASIC, switched capacitor signal conditioning circuits for capacitive humidity sensor were designed and simulated by cadence using 0.25um CMOS process parameters. The signal conditioning circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is 0.4%R.H./$^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of 3%R.H. ${\sim}$ 98%R.H.. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigit electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc..