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Optimization of Etching Profile in Deep-Reactive-Ion Etching for MEMS Processes of Sensors

  • Yang, Chung Mo;Kim, Hee Yeoun;Park, Jae Hong
    • Journal of Sensor Science and Technology
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    • v.24 no.1
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    • pp.10-14
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    • 2015
  • This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

A Vegetation Characteristics of Native and Introduced Kentucky bluegrass Cultivars Seeded on Cut-Slop (자생 및 도입 켄터키 블루그래스 품종의 훼손비탈면 녹화 특성)

  • Jeong, Dae-Young;Shim, Sang-Ryul;Ahn, Byung-Joon
    • Journal of the Korean Society of Environmental Restoration Technology
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    • v.12 no.1
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    • pp.82-91
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    • 2009
  • Research was initiated to investigate vegetation characteristics of native ('Pureundle' and 'Sewon') and introduced ('Brilliant' and 'Midnight') Kentucky bluegrass (KB, Poa pratensis L.) varieties by soil-seed applying system on a cut-slope in May 17, 2008. There were no statistic differences observed in soil hardness and soil moisture content while significant differences were observed in surface coverage rate, height and disease occurrence in native and introduced KB varieties. The introduced 'Brilliant' KB was highest in the surface coverage rate from the early period of seeding to August 11, 2008. The surface coverage rate of introduced varieties were high when compared to native varieties in their early growth stage. But native varieties reached to equal surface coverage rate with the introduced varieties when three months after seeding. The height of 'Pureundle' and 'Brilliant' KBs were high compared with Midnight and Sewon KBs. 'Pureundle' and 'Brilliant' KBs were damaged by disease whereas there were no disease occurrence in 'Midnight' and 'Sewon' KBs. Probably, the disease occurrence was close related with the height of KBs not with native and introduced KB varieties. These results indicate that the growth of KB on a cut-slope are statistically affected by varieties in early growth stage of this experiment but reach equal rate between native and introduced KB varieties in three months after seeding. This growth characteristics implies the huge potential of native KB varieties seeding for cut-slope vegetation. Considering that native KB varieties are adapted to a environment and have no risk of causing disturbance to the ecosystem compared to the introduced KB varieties, the use of them as native varieties for a cut-slope vegetation can be increased.

Increase of Side-lobe Level Difference of Spherical Microphone Array by Implementing MEMS Sensor

  • Lee, Jae-Hyung;Choi, Si-Hong;Choi, Jong-Soo
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2011.04a
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    • pp.816-820
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    • 2011
  • A method for increasing the difference of side-lobe level in spherical microphone array is presented. In array signal processing, it is known that narrow interval between sensors can increase the difference between main lobe and side-lobe of array response which eventually increase the source recognition capability. Recent commercial array being used, however, have shown certain limitation in using the number of sensors due to its costs and geometrical size of array. To overcome this problem, we have adapted MEMS sensors into spherical microphone array. To check out the improvement, two different types of spherical microphone array were designed. One array is composed with 32 regular instrument microphones and the other one is 85 MEMS sensors. Simulation and experiments were conducted on a sinusoidal noise source with two arrays. The time history data were analyzed with spherical harmonic decomposition and beamforming technique. 85 MEMS sensors array showed the improved side-lobe level suppression by more than 4 dB above the frequency content of 2 kHz compared to 32-sensor array.

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A Study on Wavelet Based Watermarking using Human visual system property (HVS 특성을 이용한 Wavelet 변환 공간에서의 효과적인 워터마킹 기법에 관한 연구)

  • 노상윤;박상주
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.27 no.4A
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    • pp.336-344
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    • 2002
  • Recently, aegis of authentication and creator's copyright has become a matter of great concern by the diffusion of multimedia technique and the growth of the internet and the easily duplicated property of digital data. Consequently, many active researches have been made to protect copyright and to assure integrity by inserting watermark into the digital data. In this paper, watermark is repeated through the entire image and adapted to the content of the image. It is achieved by an underlying process of transforming the digital image to the frequency domain by wavelet transform, which has three (vertical, horizontal, diagonal) directions and Multi-resolution features, and then choosing frequency area inferior to the human perceptibility, and significant for invisible and robust watermark. Watermark is inserted by utilizing Human Visual System (HVS) feature in the wavelet transformed frequency domain. Especially, watermark inserted into the high frequency concentrated textual area makes itself invisible.

The Treatment of Slurry-type Swine Waste using UASB Reactor (UASB 공정에 의한 슬러리형 돈사폐수의 처리)

  • Won, Chul-Hee;Kim, Byoung-Ug;Han, Dong-Joon;Rim, Jay-Myoung
    • Journal of Korean Society on Water Environment
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    • v.20 no.6
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    • pp.583-588
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    • 2004
  • This research examined the treatment efficiency and methane production rate in treating slurry-type swine waste using UASB (upflow anaerobic sludge blanket) reactor. The UASB reactor was operated at an organics volumetric loading rate (VLR) of $2.6-15.7kgCOD/m^3/day$. A stepwise increase of the VLR resulted in a temporary deterioration in the COD removal rate in UASB reactor but recovered quickly. The COD removal rate were 65-70% for VLR up to $5 kgCOD/m^3/day$. When organics VLR was $10kgCOD/m^3/day$, the COD removal rate decreased sharply and there was loss of 17.537g of the seeding biomass due to sludge washout. This result indicated that the UASB system cannot be adapted to more than $10kgCOD/m^3/day$ of VLR. As the organic load increased from 2.6 to $15.7kgCOD/m^3/d$, the biogas production rate varied from 3.2 to 10.8 L/d and the methane conversion rate of the organic matter varied from 0.30 to $0.23m^3CH_4/kg\;COD_{removed}$. The methane content showed the range of 70.1-81.5% during the experimental period. The volatile solids (VS) removal efficiency was similar at the low VLR (< $5 kgCOD/m^3/day$), but it decreased sharply at the high VLR (> $5 kgCOD/m^3/day$). The VS reduction rate was, moreover, large those of COD. The result shows that hydraulic retention time above 2 days is essential in case of treating wastewater containing 1% of solids.

Numerical Study on Auto-ignition and Combustion Emissions Using Gasoline/Ethanol Surrogates (휘발유/에탄올 혼합연료의 자연발화 및 연소배기가스 특성에 관한 수치적 연구)

  • Lee, Eui Ju
    • Fire Science and Engineering
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    • v.30 no.3
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    • pp.1-6
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    • 2016
  • More than five thousands transportation fires occurannually in Korea and the resulting destruction of property and loss of life is huge and results in traffic and environmental pollution. The recent development of automobile technology such as the hybrid concept and use of bio fuels makes fire protection even more difficult due to a lack of understanding of the new adapted system including vehicle engines. In this study, a numerical simulation was performed on a PSR (perfectly Stirred Reactor) to simulate an automobile engine and to clarify the effect of gasoline/ethanol surrogates as a fuel. The temperature, NOx and soot emissions were predicted to decrease with increasing ethanol content, but that of unburned hydrocarbons was found to increase dramatically. The result will provide not only the basic thermal characteristics for engines and their after-treatment systems, but also make it possible to assess the potential for fire events in these systems when an ethanol mixed fuel is used in gasoline vehicles.

Environment Corresponding Package by Quantitative Mixing System with Functional Inorganic Material and Polyolefin Resin (기능성 무기물과 폴리올레핀계 수지의 정량적 혼합시스템에 의한 환경대응형 포장소재 개발)

  • Kim, Hi-Sam;Lim, Hyun-Ju;Park, Young-Mi
    • Textile Coloration and Finishing
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    • v.21 no.1
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    • pp.1-9
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    • 2009
  • A lot of research has been made over the recent decade to develop testing packages with antimicrobial properties to improve food safety. In this study, a new method, experimental device and technology for environmental corresponding packages of polypropylene (PP) film has been developed to provide effective temperature buffering during the transport/long-term storage of grains or foodstuffs from the supplier to the market. This quantitatively optimized mixing system enabled to produce PP films with the 700$\sim$1,400d (width;1.5$\sim$3mm, thickness;0.01$\sim$0.5mm). In the whole mixing systems, the finely-granulated inorganic illite and PP virgin chip for master batch (M/B) chip was calculated by digital measurement methods, and then the M/B chip for PP film was adapted through a air jet and PP grinding method. The prepared PP film was characterized with tensile strength and elongation, far infrared radiation (FIR) emissivity, antimicrobial activity and deodorization properties. The results revealed that the two differently grain-sized illite could be show homogeneously dispersed on PP chip surface, and as the increasing of illite content, the FIR emissivity and the anion emission rate of film was increasingly improved. In both of 325 and 1,500 mesh-sized illite contained PP chip, of course the antimicrobial activity was good. But the ultimate deodorization rate for ammonia gas of PP film were found to be approximately the same.

Content Analysis of Food & Nutrition Section in Middle School Textbooks -Home Economics, Physical Education and Science- (중학교 교과서 식생활 내용분석 -가정, 체육, 과학을 중심으로-)

  • 이영숙;김영남
    • Journal of Korean Home Economics Education Association
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    • v.12 no.3
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    • pp.53-63
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    • 2000
  • The purpose of this study was quantitative and qualitative contents analysis of food and nutrition section in middle school textbooks of home economics, physical education and science. As a quantitative approach numbers of sentence lines tables, figures, photos, activities, and exercises were counted. As a qualitative approach, types of explanations were categorized by 7 criteria, and commons and differences of the contents of those subjects were compared. The conclusions of this study were summarized as follows: 1) Contents of food and nutrition section were divided into nutrients. water. energy, food groups, and nutritional problems. When average sentence lines of each were compared, those of nutrients were the longest in all 3 subjects. 2) When compared the numbers of tables, figures, and photos in 3 subjects of textbooks, there were more figures in home economics and science, and more tables in physical education. 3) There were more activities and exercises in home economics an science than in physical education. 4) The D(sentences with table) or E type(sentences with figure) was adapted for the explanation of nutrients functions, recommended dietary allowance, food sources, food groups, eating habits, and weight control in home economics: nutritions functions and energy metabolism in physical education : and digestion, body constituents, energy metabolism, and detection of nutrients in science. 5) Contents about classification and functions of nutrients. food sources deficiency water, energy contents of nutrients and obesity were shown in all 3 subjects. Food groups and eating habits were explained in detail in home economics whereas digestion of nutrients in the digestive tracts were explained in detail in science. Recommended dietary allowance for Koreans and basic food groups revised in 1995 were presented in home economics, whereas those revised in 1989 were presented in physical education. To avoid confusion, recommended dietary allowance for Koreans and food groups presented in physical education tex should be updated.

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Phenomenological study on influence of e-Learning in the role change of HR staff in hotels (e-Learning 도입에 따른 호텔 HR 담당자들의 역할변화에 관한 현상학적 연구)

  • Kim, Minsun;Moon, Yun Ji
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2013.10a
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    • pp.581-584
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    • 2013
  • E-Learning, a technology-based learning process is the obtaining of knowledge from the basis of IT technology. The development of e-Learning requires corporate educational staff as well as HR staff, who manage e-learning, to drastically change their roles. The main reason for this is that the properly adapted and highly experienced education and training abilities of HR staff could accelerate the adoption and usage of e-Learning but they need to clearly select and define an appropriate curriculum from among the extensive mass-customized content with an e-learning basis. Here the research has analyzed the influence of the introduction and usage of e-Learning in hotels on HR staff and their roles from the viewpoint of hermeneutic phenomenology.

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A Case Study of Faculty Advisor's non Face-to-face Counseling during Coronavirus Incubation Period - SNS Counseling Applied Photovoice- (코로나19로 인한 지도교수의 비대면 상담 사례 연구 - 포토보이스 기법을 활용한 SNS 상담을 중심으로-)

  • Kwak, Huyn-Joo;Koh, Eun-Hyeon
    • Journal of Convergence for Information Technology
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    • v.10 no.11
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    • pp.202-209
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    • 2020
  • Due to Corona 19, non-face-to-face education was conducted at general universities, so it was necessary to conduct non-face-to-face faculty advisor counseling. SNS counseling using photovoices was conducted in the 6th session and FGI for 10, 3rd graders in the early childhood education department of a college in the metropolitan area. The results of the study analyzing students' perceptions of the counseling and content of the counseling are as follows. First, the research participants positively recognized the SNS counseling that applied the photovoice technique. Second, they gradually adapted to non-face-to-face daily life and learning and evaluated the positive aspects, but they complained of fear in career and employment. A non-face-to-face counseling strategy and follow-up studies were proposed through this case study.