• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.5
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• pp.385-393
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• 2004

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(voice coil motor) for coarse motion, for an SFF ODD(small form factor optical disk drive), in order to achieve fast access speed and precise track-following control. Over the past few decades there have been a lot of researches related to the VCM and dual-stage actuator. In this paper, we focus our attention on the design and control of the PZT actuator. Due to the dual cantilever structure. the PZT actuator can generate precise translational tracking motion at its tip to which an optical pickup is attached. and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing it with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.5
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• Journal of Power System Engineering
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• v.9 no.4
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• pp.162-167
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• 2005

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that are cost less and faster than previous semiconductor processes have been developed for the production of electric paper and RFID(Radio Frequency IDentification). The system proposed in this study prints by spraying the molten metal. And this system consist of a nozzle, heating furnace, operating actuator and an XYZ 3-axis stage. As an operating system, the piezoelectric(PZT) actuator is a very useful tool for position control of the metal printing system. However, the PZT actuator has a hysteresis nonlinearity due to the ferroelectric characteristics of the PZT element. This hysteresis causes problem position control characteristics in the system and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. In order to reduce the hysteresis nonlinearity of the PZT actuator, this proposed a inverse hysteresis model and a mathematic modeling method that can express the geometric relationship between voltage and displacement. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good tracking performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.485-491
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• 2000

We obtain the mathematical model of the hard disk drive actuator system from the system response data of the finite element analysis or experimental results. System response data including the dynamics of the considered system are expressed as the mathematical model. It allows the dynamic analysis of the actuator system without resort to the repetitive finite element modeling work. Even though the dynamic characteristics of the system are affected somewhat by the structural modification and the change of the dynamic properties, we can use the modified size and material properties of the actuator system in the mathematical model to some extent. In this study, we express the mathematical model of the simplified rectangular plate first and then proceed to the actual hard disk drive actuator system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.451-456
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• 2006

This paper is concerned with the dynamic modeling and controller design for a cylindrical shell equipped with MFC actuators. The dynamic model was derived by using Rayleigh-Ritz method based on Donnel-Mushtari shell theory. The actuator and sensors for the MFC actuator equations were derived based on pin-force model. The boundary conditions at both ends were assumed to be shear diaphragm. After calculating the natural vibration characteristics, the positive position feedback controller was designed to cope with the first two modes. To this end, the equations of motion were reduced to modal equations of motion by considering the modes of interest. The theoretical results show that vibrations can be successfully suppressed.

• Journal of KSNVE
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• v.11 no.2
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• pp.292-300
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• 2001

This research is concerned with the validation of the modeling technique and controller design for slewing beam structures. When cantilever beam rotates about axes perpendicular to the undeformed beam's longitudinal axis, it experiences inertial loading. Hence, the beam vibrates from the initial stage of slewing. In this paper, the analytical model for a single slewing flexible beam with surface bonded piezoelectric sensor and actuator is developed using the Hamilton's principle with discretization by the assumed mode method. Comparisons with the theoretical model are made based upon the frequency responses and time responses. A new factor called the coupling coefficient is introduced to incorporate the discrepancies between the theoretical and experimental results. The slewing is achieved by applying the PID control, which is found to be less sensitive to vibrations. The vibrations are controlled by PPF controller, which is found to be effective in suppressing residual vibrations after slewing. The vibrations occurred during slewing is difficult to control because the piezoceramic actuator is not powerful enough to overcome inertial loadings.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.75-80
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• 2007

This paper is concerned with the dynamic modeling and controller design for a cylindrical shell equipped with MFC actuators. The dynamic model was derived by using Rayleigh-Ritz method based on Donnel-Mushtari shell theory. The actuator and sensors for the MFC actuator equations were derived based on pinforce model. The boundary conditions at both ends were assumed to be shear diaphragm. After calculating the natural vibration characteristics, the positive position feedback controller was designed to cope with the first two modes. To this end, the equations of motion were reduced to modal equations of motion by considering the modes of interest. The theoretical results show that vibrations can be successfully suppressed.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.397-400
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• 1996

In this paper, robust motion control of a flexible micro-actuator is presented. The actuator is made of a bimorph piezoelectric high-polymer material (PVDF). No mathematical model system can exactly model a physical system such a flexible micro-actuator. For this reason we must be aware of how modeling errors might adversely affect the performance of a control system for such a model. The H method addresses a wide range of the control problems, combining the frequency and time domain approaches. The design is an optimal one in the sense of minimization of the maximum of the closed-loop transfer function. It includes colored measurement and process noise. It also addresses the issues of robustness due to model uncertainties, and is applicable to the, flexible micro-actuator control problem. Therefore, we adopt the H control problem to the robust motion control of the flexible micro-actuator. Theoretical and experimental results demonstrate the satisfactory performance and the effectiveness of the designed controller. the effectiveness of the designed controller.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.531-536
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• 2005

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that cost less and are faster than previous semiconductor processes have been developed for the production of electric paper and RFID. The system proposed in this study prints by spraying the molten metal, and consists of a nozzle, heating furnace, operating actuator, and an XYZ 3-axis stage, As an operating system, the piezoelectric(PZT) method has very valuable uses. However, the PZT actuator has a very big hysteresis characteristic due to the ferroelectric characteristics of the PZT element. This causes problems in the system position control characteristics and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. The study proposed a inverse hysteresis model, a mathematic modeling method that can express the geometric relationship between voltage and displacement, in order to reduce the hysteresis of the PZT actuator. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good precision position control performance.