• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.24 no.1
• /
• pp.17-21
• /
• 2011

Copper (Cu) had been attractive material due to its superior properties comparing to other metals such as aluminum or tungsten and considered as the best metal which can replace them as an interconnect metal in integrated circuits. CMP (Chemical Mechanical Polishing) technology enabled the production of excellent local and global planarization of microelectronic materials, which allow high resolution of photolithography process. Cu CMP is a complex removal process performed by chemical reaction and mechanical abrasion, which can make defects of its own such as a scratch, particle and dishing. The abrasive particles remain on the Cu surface, and become contaminations to make device yield and performance deteriorate. To remove the particle, buffing cleaning method used in post-CMP cleaning and buffing is the one of the most effective physical cleaning process. AE(Acoustic Emission) sensor was used to detect dynamic friction during the buffing process. When polishing is started, the sensor starts to be loaded and produces an electrical charge that is directly proportional to the applied force. Cleaning efficiency of Cu surface were measured by FE-SEM and AFM during the buffing process. The experimental result showed that particles removed with buffing process, it is possible to detect the particle removal efficiency through obtained signal by the AE sensor.

• Proceedings of the KIEE Conference
• /
• 2003.07c
• /
• pp.1867-1869
• /
• 2003

In this paper, chamber(Circuit breaker compartment of C-GIS) made of stainless steel with 4 mm width is used. Artificial defect was made on enclosure or HV conductor of chamber and $SF_6$ gas was injected into it according to pressure. In this experiment, Acoustic emission sensors of different types was used to compare sensitivity to detect acoustic signal occurred by Partial discharge(PD) of according to types and resonance frequency in $SF_6$ gas atmosphere. Sensors used in tests was R6I, R15I and 2/4/6 Pre-Amplifier connected with R6IU without pre. amp. In case of R6IU, gain was adjusted with 40 dB like other sensors and operated by differential mode. Post amplifier(post. amp) and band pass filter(BPF) were developed Gain of post. amp. is 60 dB and BPF has band width of $50{\sim}300$ kHz. Also, envelope circuit developed reduces frequency of AE sensor. As a result, in $SF_6$ atmosphere, R6IU and R6I had resonance frequency of 60 Hz was better than R15I. Also, R6IU was better than R6I because of type property of pre.amp. had differential mode.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.24 no.5
• /
• pp.476-486
• /
• 2004

This paper is the second part of the study on the development of a smart active layer (SAL) sensor, which consists of two parts. As mentioned in the first paper, structural health monitoring (SHM) is a new technology that is being increasingly applied at the industrial field as a potential approach to improve cost and convenience of structural inspection. Recently, the development of smart sensor is very active for real application. This study has focused on preparation and application study of SAL sensor which is described with regard to the theory and concept of the SAL sensor in the first paper. In order to detect elastic wave, smart piezoelectric sensor, SAL, is fabricated by using a piezoelectric element, shielding layer and protection layer. This protection layer plays an important role in a patched network of distributed piezoelectric sensor and shielding treatment. Four types of SAL sensor are designed/prepared/tested, and these details will be discussed in the paper In this study, SAL sensor ran be feasibly applied to perform structural health monitoring and to detect damage sources which result in elastic waves.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.20 no.1
• /
• pp.25-30
• /
• 2007

In this paper, lead-free [$Li_{0.04}(Na_{y}K_{1-y})_{0.96}](Nb_{0.86}Ta_{0.1}Sb_{0.04})O_{3}$ (y=0.4 - 0.58) ceramics were manufactured using conventional miked oxide method for acoustic emission(AE) sensor application and their dielectric and piezoelectric properties were investigated with the variations of Na/K ratio. The samples in the composition Na/K=54/46 exhibited excellent electrical properties of $d_{33}=300$ PC/N and kp=0.49. Taking into consideration above piezoelectric properties, it can be concluded that the [$Li_{0.04}(Na_{y}K_{1-y})_{0.96}](Nb_{0.86}Ta_{0.1}Sb_{0.04})O_{3}$ system ceramics are the promising lead-free materials capable of substituting PZT system ceramics.

• Journal of Korean Tunnelling and Underground Space Association
• /
• v.9 no.1
• /
• pp.75-82
• /
• 2007

As one of the main support systems, rock bolts play a crucial role in the reinforcement of tunnels. Numerical and experimental studies using a transmission method of ultrasonic guided waves are performed to evaluate the integrity of rock bolts encapsulated by grouting paste. Numerical simulations using "DISPERSE" are carried out for the selection of the optimal experimental setup, i.e. non-destructive testing (NDT) system of the rock bolt. Based on results of the numerical simulation, the calculated frequency range for NDT testing is between 20kHz and 70kHz with the first longitudinal L(1) mode. Laboratory transmission tests are performed by attaching the piezo electric sensor at the tip of the rock bolt before embedding. Both of analytical and experimental results show that the amplitude of signals as well as the wave velocity increases with increase in the defect ratio of grouting paste. The defect in grouting paste means that the space around the rock bolt is not fully filled with the grouting paste. Experimental results also show that the increase of the wave velocity is more sensitive to the defect ratio increase than that of the amplitude. This study demonstrates that the transmission technique of ultrasonic guided waves may be a valuable tool in the evaluation of the rock bolt integrity.

• Composites Research
• /
• v.16 no.5
• /
• pp.45-53
• /
• 2003

The experimental and numerical investigations on the failure characteristics of the secondary bonded composite single-lap joints were performed. The initiations and growths of cracks were observed using CCD camera and acoustic emission sensor during the tension tests of the joint specimens. The structural behaviors of the specimens were predicted by the geometric nonlinear two-dimensional finite element analysis. The three types of observed initial cracks were included in each finite element models and the strain energy release rates of each specimen models were calculated by VCCT(Virtual Crack Closure Technique) technique. The tension tests showed that the initial cracks occurred in the 60∼90% of final failure loads and the major failure modes of the specimens were adhesive failure and the delamination between the 1st and 2nd ply of laminate. The specimens with the thicker bondline had earlier crack initiation loads but higher crack propagation resistance and eventually better loading capability. The delaminations were mostly observed in the thicker bondline specimens. The mode I values of calculated strain energy release rates were higher than the mode II values in the all specimen models considering the three types of initial cracks. The mode I and total strain energy release rates were calculated as higher values in the order of initial crack in the edge interface, comer interface and delamination between the plies of laminate.

• Journal of Korean Tunnelling and Underground Space Association
• /
• v.15 no.3
• /
• pp.187-199
• /
• 2013

Umbrella arch method (UAM) used for improving the stability of the tunnel ground condition has been widely applied in the tunnel construction projects due to the advantage of obtaining both reinforcement and waterproof. The purpose of this study is to develop the evaluation technique of the integrity of bore-hole in UAM by using a non-destructive test and to evaluate the possibility of being applied to the field. In order to investigate the variations of frequency depending on grouted length, the specimens with different grouted ratios are made in the two constraint conditions (free boundary condition and embedded condition). The hammer impact reflection method in which excitation and reception occur simultaneously at the head of pipe was used. The guided waves generated by hitting a pipe with a hammer were reflected at the tip and returned to the head, and the signals were received by an acoustic emission (AE) sensor installed at the head. For the laboratory experiments, the specimens were prepared with different grouted ratios (25 %, 50 %, 75 %, 100 %). In addition, field tests were performed for the application of the evaluation technique. Fast Fourier transform and wavelet transform were applied to analyze the measured waves. The experimental studies show that grouted ratio has little effects on the velocities of guided waves. Main frequencies of reflected waves tend to decrease with an increase in the grouted length in the time-frequency domain. This study suggests that the non-destructive tests using guided ultrasonic waves be effective to evaluate the bore-hole integrity of the UAM in the field.