• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2007.06a
• /
• pp.663-664
• /
• 2007

• Transactions on Electrical and Electronic Materials
• /
• v.8 no.1
• /
• pp.26-31
• /
• 2007

The goal of this study is to determine if High Pressure Micro Jet (HPMJ) conditioning can be used as a substitute for, or in conjunction with, conventional diamond pad conditioning. Five conditioning methods were studied during which 50 ILD wafers were polished successively in a 100-mm scaled polisher and removal rate (RR), coefficient of friction (COF), pad flattening ratio (PFR) and scanning electron microscopy (SEM) measurements were obtained. Results indicated that PFR increased rapidly, and COF and removal rate decreased significantly, when conditioning was not employed. With diamond conditioning, both removal rate and COF were stable from wafer to wafer, and low PFR values were observed. SEM images indicated that clean grooves could be achieved by HPMJ pad conditioning, suggesting that HPMJ may have the potential to reduce micro scratches and defects caused by slurry abrasive particle residues inside grooves. Regardless of different pad conditioning methods, a linear correlation was observed between temperature, COF and removal rate, while an inverse relationship was seen between COF and PFR.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1294-1298
• /
• 2005

In this study, combined micro press and surface finishing process are proposed to fabricate the micro nozzle array on a stainless steel sheet metal. In micro hole punching process the burr occurs inevitably, but the burr must be minimized in order to improve the quality and accuracy of the product. For this reason, subsequent magnetic field-assisted finishing technique is applied to remove the burr which exists around the nozzles for ink-jet printer head and proved to be a feasible for deburring by experiment. The deburring characteristics of sheet metals were investigated changing with polishing time and magnetic abrasive size. After the deburring, the burr size has remarkably reduced and roundness of the hole also has improved.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.7
• /
• pp.44-50
• /
• 2009

High-pressured jetting is now widely used in the advanced cutting processes of polymers, metals, glass, ceramics and composite materials because of some advantages such as heatless and non-contacting cutting. Similarly to the focused laser beam machining, it is well known as a type of high-density energy processes. High-pressured jetting is going to be developed not only to minimize the cutting line width but also to achieve the short cutting time as soon as possible. However, the interaction behavior between a work piece and high-velocity abrasive particles during the high-pressured jet cutting makes the impact mechanism even more complicated. Conventional high-pressured jetting is still difficult to apply to precision cutting of micro-scaled thin work piece such as thin metal sheets, thin ceramic substrates, thin glass plates and TMM (Thin multi-layered materials). In this paper, we proposed the advanced high-pressured jetting technology by introducing a new abrasives supplying method and investigated the optimal process conditions of the cutting pressure, the cutting velocity and SOD (Standoff distance).

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.415-419
• /
• 2002

In this study, we suggest a environmentally-conscious and dry cleaning process mechanism for the recycling of end-of-life CRT, and also develope a protype cleaning system to verify the faulty of the designed mechanism. This system accommodates the specifications of 14 ~ 32" end-of-life CRT. In experimental result, it is expected that the developed system improve the productivity up to 10% and decrease the loss rate of cleaning glass 3~4 times rather than the existing methods.hods.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.1
• /
• pp.126-134
• /
• 2003

In this study, we suggest a environmentally-conscious and dry cleaning process mechanism for the more useful recycling of end-of-life CRT, and also develop a prototype cleaning system to verify the faulty of the designed mechanism. This system accommodates the specifications of 14∼32" end-of-life CRT. In experimental result, it is expected that the developed system improve the productivity up to 10% and decrease the loss rate of cleaning glass 3∼4 times than the glass blasting methods.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2003.10a
• /
• pp.329-333
• /
• 2003

In micro hole punching process the burr occurs inevitably, but the burr must be minimized in order to improve the quality and accuracy of the product. In this study, magnetic field assisted polishing technique is applied to remove the burr which exists in nozzles for ink-jet printer head and proved to be a feasible for deburring by experiment. The deburring characteristics of sheet metals was investigated changing with polishing time. After the deburring, the burr size has remarkably reduced and roundness of the hole also has improved.

• Journal of Korean Society of Industrial and Systems Engineering
• /
• v.30 no.2
• /
• pp.8-14
• /
• 2007

The powder blasting process has become an important machining technique for the cost effective fabrication of micro devices. This process is similar to sand blasting, and effectively removes hard and brittle materials. A large number of investigations on the abrasive jet machining with such output parameters as material removal rate, penetration and surface roughness have been carried out and reported by various authors. To achieve higher surface roughness, to increase material removal rate and to identify the influence of blasting parameters on the output parameters, we use the taguchi method which is one of the design methods of experiments. We can select process parameters to optimize the blasting process of glass. Experimental results indicate that the taguchi method is useful as a robust design methodology for the powder blasting process.

• Journal of the Semiconductor & Display Technology
• /
• v.10 no.3
• /
• pp.35-42
• /
• 2011

This paper describes the characteristics of high speed grinding and the influence of wheel surface speed V and a grindability of the grinding materials. The various fine ceramics pieces was ground by metal and vitrified bonded diamond wheel. The surface roughness of fine ceramics(Zirconia($ZrO_2$), Silicon Carbide(SiC), Silicon Nitride($Si_3N_4$), Alumina($Al_2O_3$)) decreases from $0.05{\mu}m(R_{max})$ to $0.025{\mu}m(R_{max})$ when the wheel speed at grinding point increases the wheel speed. Relation between the temperature at grinding point and surface roughness was linear. Abrasive jet machining(AJM), a specialized from of shot blasting, is considered one of the most helpful micro machining methods for hard and brittle materials such as glasses and ceramics by constant pressure grinding.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.15 no.4
• /
• pp.8-15
• /
• 2016

Most machines lose a lot of energy due to friction. Wear due to friction also reduces performance. Therefore, it is important to reduce friction on the surface to improve energy efficiency and decrease wear. Surface texturing refers to making patterns on the surface for reducing friction. There are many surface texturing methods, such as using lasers, abrasive jet machining, and so on. Recently, mechanical manufacturing methods, such as cutting and grinding, have been highlighted. Among them, the grinding method has the advantage of making patterns in large areas quickly. Therefore, it is appropriate for surface texturing on large machines. This paper is a study on the slope change of the surface texturing pattern using grinding. Therefore, we researched the slopes of the patterns corresponding to "spindle speed and feed rate" and "curvature of workpiece surface" using a mathematical model and experiment. As a result, we made a proper mathematical model concerning our research. Therefore, using the mathematical model in this paper, we could predict the slope change of the pattern according to grinding conditions.