• Title/Summary/Keyword: ATR-IR

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ATR 분광계를 이용한 화학증착소재 흡착에 따른 표면거동에 대한 연구

  • Park, Myeong-Su;Kim, Yeong-Gyu;Sin, Jae-Su;Lee, Chang-Hui;Yun, Ju-Yeong;Gang, Sang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.120.2-120.2
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    • 2013
  • 반도체 소자의 소형화로 신개념 화학증착공정 구현을 위한 장비와 화학증착소재의 개발이 활발이 연구되고 있다. 특히 증착소재의 물리적 화학적 특성을 파악하고 가장 적합한 소재를 선택하기 위한 연구도 변행되고 있다. 많은 연구자들이 소재 평가를 위해 가스크로마토그래피, 질량분석기, 적외선 분광기 등을 이용한 화학증착소재의 특성을 파악하기 위해 노력하고 있다. 하지만 실제 화학기상증착(Chemical Vapor Deposition)법과 원자층증착(Atomic Layer Deposition)법 공정에서 웨이퍼 표면에서의 화학증착소재의 흡착거동에 대한 연구는 거의 전무한 실정이다. 따라서 본 연구에서는 개선된 Attenuated Total Reflectance(ATR)분광계를 이용하여 표면에 흡착된 소재의 흡착거동에 대해 분석을 수행하였다. 평가에 사용된 화학증착소재는 C-Zr (Tris (dimethylamino) cyclopentadienyl zirconium)이며, Fourier Transform Infrared Spectroscopy (FT- IR)시스템 내에 설치된 ATR 분광계 표면에 흡착된 C-Zr 증착소재를 다양한 공정조건(온도 및 반응가스, 플라즈마 파워 등)에서의 거동 변화를 연구하였다.

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ATR-Infrared Spectroscopic Study of n-Doped Polyacetylene Films

  • Kim, Jin-Yeol;Kim, Jae-Taek;Kwon, Min-Hee;Han, Dong-Kyu;Kwon, Si-Joong
    • Macromolecular Research
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    • v.15 no.1
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    • pp.5-9
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    • 2007
  • The attenuated total reflection infrared (ATR-IR) spectra of trans-polyacetylene (trans-PA) film doped with sodium (n-doping) were observed in the range of 1900 to $700cm^{-1}$. The observed IR bands were attributed to negatively charged domains created by n-doping electrons. The doping-induced IR bands showed considerable difference from its pristine film. After doping, the out-of-plane CH deformation band of the strong $1010cm^{-1}$ region in the pristine film disappeared while several new bands were observed at 1600 (due to C=C stretching), 1400 (due to in-plane CH bending), 1290 and 1174 (due to CH stretching), and $880cm^{-1}$ (due to CC stretching) regions for Na-doped PA. In particular, a weak band of C=C stretching at $1600cm^{-1}$ was newly obtained for the first time in the present study. The electro conductivity of the doped trans-PA film was $10^2S/cm$ and the origins of doping-induced IR bands are discussed in terms of solitons and polarons.

Comparison of pigment in automotive solid color paints by FT-IR and XRF spectroscopy for forensic aspect (법과학적 관점에서 FT-IR과 XRF를 이용한 단색 페인트의 안료 비교)

  • Park, Ha-Sun;Kim, Ki-Wook;Heo, Sangcheol;Ryu, Seung-Jin;Lee, Hyunik;Min, Ji-Sook
    • Analytical Science and Technology
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    • v.26 no.4
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    • pp.245-255
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    • 2013
  • Identification of paint on victim's clothing and a vehicle are valuable for forensic examination when investigating hit-and-run accidents. Automotive paints on clothes are used to prove a victim caused by traffic accident and to identify a suspected vehicle. The comparison of transferred paints between victim's vehicle and suspected vehicle can be an important evidence in reconstructing the accident situation and in discovering the truth. The paints such as white, yellow, red, blue, or black are hard to examine particle shape under a stereomicroscope because of it is not included aluminum, pearl, and mica flakes in the pigments. The aim of this study under forensic aspect is to compare pigment among basecoat layers of solid paints by identifying inorganic elemental compositions and binder resins of pigments using by micro-FT-IR and micro-XRF spectrometer. The pigment samples were analyzed by using two methods of FT-IR: Reflectance and ATR method. Two methods of FT-IR were useful in discriminating binder resins of pigments by comparing characteristic peaks and patterns of spectra. Also, XRF spectrometer could identify the elemental compositions in inorganic pigments of trace paints which are difficult to compare the identification by FT-IR.

Annealing Effect on Structure of Poly(trimethylene terephthalate) Undrawn Fibers

  • Murase, Shigemitsu;Ohtaki, Manabu
    • Proceedings of the Korean Fiber Society Conference
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    • 2003.10a
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    • pp.59-60
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    • 2003
  • The undrawn monofilament of poly (trimethylene terephthalate) (PTT) was obtained by melt-spinning. After being annealed at 40 C it was analyzed by the measurements of DSC, DMA, WAXD and ATR FT-IR. Tg of PTT fiber after annealing for more than 96 hours was 20 C higher than that before annealing as determined by the DSC and DMA measurements. The WAXD analysis showed very weak diffraction peaks at 2$\theta$=17$^{\circ}$ and 2$\theta$=24$^{\circ}$ for the annealing time of more than 96 hours. The ATR FT-IR measurements made clear the conformational change of methylene chains of PTT glycol residue from random to gauche-gauche conformation.

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Ultraviolet Photografting Reaction of Acrylamide onto Styrene-Butadiene Rubber (Styrene-Butadiene 고무의 아크릴아미드 UV 광그라프팅 반응)

  • Lee, K.I.;Ryu, S.H.
    • Elastomers and Composites
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    • v.33 no.5
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    • pp.363-369
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    • 1998
  • Photografting reaction onto styrene-butadiene rubber (SBR) as a function of monomer concentration, irradiation time and carbon black content has been studied using ultraviolet (UV). Acrylamide and benzophenone are used as monomer and photoinitiator, respectively. FT-IR ATR and static contact angle analysis using distilled water are used to measure the graft ratio of acrylamide onto SBR surface. Graft ratio of acrylamide increases with acrylamide concentration and irradiation time and contact angle tends to decrease with increasing graft ratio. It is observed that graft ratio increases with carbon black content.

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Effect of Combined Environmental Factors on Adhesive Shear Strengths and Chemical Structures of Adhesives (복합적 환경인자의 영향에 의한 접착제의 접착전단강도 및 화학구조 변화)

  • Hwang, Young-Eun;Yoon, Sung-Ho
    • Composites Research
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    • v.24 no.1
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    • pp.31-36
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    • 2011
  • Adhesive shear strengths of the established adhesives and the alternative adhesives were evaluated and their chemical structures were analyzed in order to investigate the possibility of replacing the established adhesives with the alternative adhesives applicable to the seeker for the guided missiles. Two types of the adhesives such as the structural adhesives and the sealant adhesives were considered. Those adhesives were exposed to the combined environmental factors consisting of temperature, moisture and ultraviolet over 1000 hours. Adhesive shear test was conducted to evaluate adhesive shear strengths and ATR FT-IR was utilized to investigate chemical structures. According to the results, the adhesive shear strengths of the alternative adhesives revealed higher than those of the established adhesives. Also the alternative adhesives were more stable to the combined environmental condition than the established adhesives. Therefore, it is found that the established adhesives were able to be replaced by the alternative adhesives.

Antistatic Behavior of UV-curable Multilayer Coating Containing Organic and Inorganic Conducting Materials (유·무기 전도성 물질을 함유한 UV 경화형 다층 코팅의 대전방지 특성)

  • Kim, Hwa-Suk;Kim, Hyun-Kyoung;Kim, Yang-Bae;Hong, Jin-Who
    • Journal of Adhesion and Interface
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    • v.3 no.3
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    • pp.22-29
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    • 2002
  • UV curable coating system described here consists of double layers, namely under layer and top laser coatings. The former consists of organic-inorganic conductive materials and the latter consists of multifunctional acrylates. Transparent double layer coatings were prepared on the transparent substrates i.e. PMMA, PC, PET etc. by the wet and wet coating procedure. Their surface resistances and film properties were measured as a function of the top layer thickness and relative humidity. As the thickness of the top layer was less than $10{\mu}m$, the surface resistance in the range of $10^8{\sim}10^{10}{\Omega}/cm^2$ was obtained. The surface properties of the two-layer coating were remarkably improved compared with the single layer coating. The effects of migration of conducting materials on the film properties of multilayer coating were investigated by using contact angle and Fourier transform infrared/attenuated total reflection(FT-IR/ATR). It was found that the migration of dopant(dodecyl benzenesulfonic acid, DBSA) molecules were occurred from film-substrate interface to film-air interface in the organic conductive coating system but not in the inorganic one.

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Gradient Structures and Surface Composition of Polypropylene/Ethylene-Propylene Rubber Blends (폴리프로필렌/에틸렌-프로필렌 고무 블렌드 경사구조 및 표면조성)

  • Kim, Seog Je;Lee, Sung-Goo;Lee, Jae Heung;Choi, Kil-Yeong
    • Journal of Adhesion and Interface
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    • v.2 no.4
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    • pp.24-31
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    • 2001
  • Polypropylenes(PP) with different melt index values were mixed with ethylene-propylene rubber(EPR) or ethylene-propylene diene monomer rubber(EPDM) and an ethylene copolymer containing carboxylic acid group in a twin screw extruder. Then test specimens were prepared from the pellets of the blends with an injection molding machine. The mechanical properties and morphology of fractured surfaces were measured. Relative peak intensities of carboxylic acid group on the specimen surface were measured with an attennuated total reflection infrared spectrometer (ATR-IR) and compared with each other. The blend specimens were found to have the gradient morphology of rubber domains in PP matrix in the core region and PP skin layer. The blends containing PP of higher melt index showed greater content of ethylene copolymer containing carboxylic acid on the surface when the relative peak intensities of ATR-IR for carboxylic acid were compared. As the melt index values were increased, the decrease tendency in mechanical propeties such as tensile strength and impact strength was more significant for PP/EPR blends than PP/EPDM blends.

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Phase Behaviors of the GAP/PTMG Polyurethanes Chain Extended with 3-Azidopropane-1,2-Diol (3-Azidopropane-1,2-diol로 쇄연장된 GAP/PTMG 폴리우레탄의 상거동)

  • Kim, Hyoung-Sug;You, Jong-Sung;Kweon, Jung-Ohk;Kim, Jung-Su;Lee, Tong-Sun;Noh, Si-Tae;Jang, Young-Ok;Kim, Dong-Kuk;Kwon, Sun-Kil
    • Applied Chemistry for Engineering
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    • v.21 no.4
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    • pp.377-384
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    • 2010
  • We perform a comparative study to investigate the properties of the new energetic chain extender (AzPD). A series of poly(glycidyl azide)/poly(tetramethylene oxide)-based energetic segmented polyurethane (GAP/PTMG ESPU) with different chain extender, which is 3-azidopropane-1,2-diol (AzPD), 1,4-butane diol (1,4-BD), or 1,5 pentane diol (1,5-PD), was synthesized by solution polymerization in dimethyl formamide (DMF) and their phase behaviors were investigated. The ESPUs were characterized with Fourier transform infrared-attenuated total reflection spectroscopy (ATR FT-IR), differential scanning calorimetry (DSC), and dynamic mechanical analysis (DMA). The results of the ATR FT-IR analysis of the urethane carbonyl group region showed that the 'free' C=O fraction was higher in GAP/PTMG AzESPU (0.5) than GAP/PTMG BDESPU (0.44) and GAP/PTMG PDESPU (0.41) for 7 days samples after preparation and that it was similar in the range of 0.26~0.29 for three 60 days ESPU samples. DMA curves of the GAP/PTMG AzESPU for 7 days samples showed amorphous polymers, but GAP/PTMG BDESPU and GAP/PTMG PDESPU showed viscoelastic behaviors with rubbery plateau and the flow region. However, DMA curves of the GAP/PTMG AzESPU for 60 days samples showed viscoelastic behaviors with rubbery plateau and the flow region like GAP/PTMG PDESPU, but GAP/PTMG BDESPU did not show the flow region. From phase behaviors with ATR FT-IR, DSC and DMA analysis, GAP/PTMG AzESPU showed good phase-mixing between components. However, it represented viscoelastic behavior of TPE similar to GAP/PTMG PDESPM according to phase equilibrium progress with aging time.