• 대한전자공학회논문지
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• 제18권4호
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• pp.49-61
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• 1981

N+P, N+PP+ 형 태양전지를 제조하여 얻은 실험자료들을 근거로 실리콘 접합형 태양전지에 일반적으로 적용할 수 있는 컴퓨터 모의 실험 프로그램을 개발하고, 이의 유용성을 확인하였다. 이 모의 실험 프로그램은 N+P, P+N, N+PP+, P+NN+형의 실리콘 태양전지에 적용할 수 있는 것으로, 입사광은 AMI, 등강도 광원, 인공조명으로 많이 사용되는 GE -ELH 광원이고, AR코팅은 Si3N4형과 투과도가 파장에 관계없는 일정형 2종류가 있으며, 프로그램에서 이들 전지의 구조, 광원, AR 코팅 종류에 대한 파장 특성분포도 쉽게 변화시킬 수 있도록 되어 있다. 이 모의실험의 결과들을 토대로 N+와 P 영역에서의 평균도오핑농도와 전지의 두께, AMI 스펙트럼에 대한 집광도, 앞면 접합깊이에 대하여 효율이 최대가 되는 최적치들을 구하였으며, 앞면의 표면 재결합 속도, 접합부에서의 캐리어의 유효 수명, 누설저항에 대하여는 허용 한계치로, 기타 효율변화인자로서 동작온도 직렬저항과 전기장의 세기에 대하여는 효율의 변화율로서 파라미터들이 효율에 미치는 영향들을 분석하였다.

• 열처리공학회지
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• 제22권5호
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• pp.267-274
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• 2009

Titanium Chromium Nitrided (TiCrN) coatings were deposited on stainless steel 316 L and Si (100) wafer by inductively coupled plasma assisted D.C. magnetron sputtering at the various sputtering power on Cr target and $N_2/Ar$ gas ratio. Increasing the sputtering power of Cr target, XRD patterns were changed from TiCrN to nitride $Cr_2Ti$. The maximum hardness was $Hk_{3g}$ 3900 at $0.3\;N_2/Ar$ gas ratio. The thickness of the TiCrN films increased as the Cr target power increased, and it showed over $Hk_{5g}3100$ hardness at 100 W, 150 W. TiCrN films were deposited by the ICP assisted DC magnetron sputtering shown good wear resistance as the $N_2/Ar$ gas ratio was 0.1, 0.3.

• 한국자동차공학회논문집
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• 제18권5호
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• pp.130-135
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• 2010

Paint is used as top coat in Automobile Refinishing that is divided into 1K paint of base type and 2K paint of urethane type. after using 1K paint, it can be reusable. However 2K paint is not available that is mixed a certain amount of base with hardner, so 2K paint has to be used all at a time or discarded the rest. This study covered that colored Urethane paint and colorless urethane paint in top coating process of AR. Top coat urethane paint is divided into colored urethane paint and transparent urethane paint like clear coat. Colored urethane paint is used for paint that contains resin, pigment, solvent and additives. It is color such as black and white. While transparent urethane paint is used for paint that contains resin, solvent and additives. Urethane paint has a paint system that cur after several hours of mixing base and hardner. By a paint technician of a field and empirical data, we can also recognize that according to worker's paint style and experience, although he or she paint same car model and area, paint use of one's is different. There aren't guidelines workers refer to about paint use by car models and work scope because ARP works various car models that are in different color, size and area. After using urethane paint, the rest of paint has come, and there are highs and lows in paint use each time he or she works. Therefore, this study suggest a basic guideline to use paint efficiently and regularly by understanding area, the type of work, and paint use that are appropriate for each car model and regardless of workers and work scopes in AR.

• 한국세라믹학회지
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• 제43권6호
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• pp.358-361
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• 2006

A two-step plasma-assisted boronizing process was carried out on the AISI 1045 steel substrate to reduce the pore density introduced by a conventional single plasma boronizing process. The specimens were plasma boronized for 1 h at $650^{\circ}C$ and subsequently far 7 h at $800^{\circ}C$ in an atmosphere of $BCl_3-H_2-Ar$. The boride layer thickness was parabolic in boronizing time, a high HV reading of 1540 was found up to the boride layer thickness of $25{\mu}m$. It was found that the morphology of the boride layer prepared by the two-step boronizing process was changed from a columnar to a tooth-like structure and the pores in the borided steel were eliminated completely in comparison to those synthesized by the conventional single boronizing process, implying that it is highly applicable for enhancing the dense and compact coating properties of the low-alloy steel.

• 한국재료학회지
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• 제13권9호
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• pp.587-592
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• 2003

The thin films of 316L stainless steel were made on glass and S45C substrate by Ion beam assisted deposition with reactive atmosphere of argon and nitrogen. The films were deposited at the various conditions of ion beam power and the ratios of Ar/$N_2$gas. Properties of these films were analyzed by glancing x-ray diffraction method(GXRD), AES, potentiodynamic test, and salt spray test. The results of GXRD showed that austenite phase could be appeared by $N_2$ion beam treatment and the amount of austenite phase increased with the amount of nitrogen gas. The films without plasma ion source treatment had the weak diffraction peak of ferrite phase. But under the Ar plasma ion beam treatment, the strong diffraction peaks of ferrite phase were appeared and the grain size was increased from 12 to 16 nm. Potentiodynamic polarization test and salt spray test indicated that the corrosion properties of the STS 316L films with nitrogen ion source treatment were better than bulk STS 316L steel and STS 316L films with Ar ion source treatment.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.212-212
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• 1999

Ar-O2 분위기의 Plasma 표면 처리된 OPP 의 polymer 위에 약 400$\AA$ 정도로 sputter 코팅된 Al의 부착력에 관하여 연구를 하였다. 금속과 polymer와 같이 성질이 서로 다른 물질이 서로 결합할 때 접착력은 제품의 성능과 신뢰도를 결정하는데 매우 중요한 인자이다. 최근 고분자재료의 표면을 플라즈마 처리 (plasma surface treatment)에 의해 고분자와 금속도포(coating) 층간의 접착력향상에 따라, 증착필름 및 인쇄용 필름 등의 기능도 향상시킬 수 있다. 저온 plasma를 이용한 표면처리는 plastic 재료가 가지고 있는 기본적인 특성을 저해하지 않고, 그 표면 층만을 개량하는 plasma 또는 sputter etching 갚은 electrical discharge 방법은 진공 증착 방식에서 많이 사용되고 있다. 7$\mu\textrm{m}$의 두께 OPP polymer를 10m/min의 속도로 OPP의 표면을 연속 plasma pretreatment를 하였다. 5$\times$10-2torr에서, PEM(Plasma Emission Monitor)를 이용하여 plasma intensity에 따른 Ar/O2비를 변화시키면서 test를 하였다. AFM과 XPS를 이용하여 OPP의 표면분석을 하였다. 이 plasma처리는 기존의 D.C plasma 처리 방식과는 달리 Midium frequency AC voltage hollow cathod 방식으로 plasma를 발생된 high energy plasma 분위기를 만들 수 있다. 이러한 방식은 -cycle일 때 plasma로부터 발생된 전자가 polymer 표면을 bombard 하게 되고, +cycle 일 때 polymer 표면이 cathod 가 되어 active ion에 의해 sputtering 이 된다. 이때 plasma 처리기의 polymer 기판 후면에 magnet를 설치하여 높은 ionization을 발생시켜 처리 효과를 한층 높여 주었다. 이 plasma 처리는 표면 청정화, 표면 etching 이 동시에 행하는 것과 함께 장시간 처리에 의해 표면에서는 미세한 과, C=C기, -C-O-의 극성기의 도입에 의한 표면 개량이 된다는 것을 관찰할 수 있다. OPP polymer 표면을 Ar 100%로 plasma 처리한 경우 C-O, C=O 등의 carbonyl가 발생됨을 알 수 있었다. C-O, C=O 등의 carbynyl polor group이 도입됨에 따라 sputter된 Al의 접착력이 향상됨을 알 수 있으며, TEM 관찰 결과 grain size도 상당히 작아짐을 알 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.135-135
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• 2015

Tubes are of extreme importance in industries as for fluid channels or wave guides. Furthermore, some weapon systems such as cannons use the tubes as gun barrels. To increase the service life of such tubes, a protective coating must be applied to the tubes' inner surface. However, the coating methods applicable to the inner surface of the tubes are very limited due to the geometrical restriction. A small-diameter cylindrical magnetron sputtering gun can be used to deposit coating layers on the inner surface of the large-bore tubes. However, for small-bore tubes with the inner diameter of one inch (~25 mm), the magnetron sputtering method can hardly be accommodated due to the space limitation for permanent magnet assembly. In this study, a new approach to coat the inner surface of small-bore tubes with the inside diameter of one inch was developed. Instead of using permanent magnets for magnetron operation, an external electro-magnet assembly was adopted around the tube to confine the plasma and to sustain the discharge. The electro-magnet was operated in pulse mode to provide the strong axial magnetic field for the magnetron operation, which was synchronized with the negative high-voltage pulse applied to the water-cooled coaxial sputtering target installed inside the tube. By moving the electro-magnet assembly along the tube's axial direction, the inner surface of the tube could be uniformly coated. The inner-surface coating system in this study used the tube itself as the vacuum chamber. The SS-304 tube's inner diameter was 22 mm and the length was ~1 m. A water-cooled Cu tube (sputtering target) of the outer diameter of 12 mm was installed inside of the SS tube (substrate) at the axial position. The 50 mm-long electro-magnet assembly was fed by a current pulse of 250 A at the frequency and pulse width of 100 Hz and 100 usec, respectively. The calculated axial magnetic field strength at the center was ~0.6 Tesla. The central Cu tube was synchronously driven by a HiPIMS power supply at the same frequency of 100 Hz as the electro-magnet and the applied pulse voltage was -1200 V with a pulse width of 500 usec. At 150 mTorr of Ar pressure, the Cu deposition rate of ~10 nm/min could be obtained. In this talk, a new method to sputter coat the inner surface of small-bore tubes would be presented and discussed, which might have broad industrial and military application areas.

• Progress in Superconductivity
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• 제9권1호
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• pp.85-90
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• 2007

Lanthanum aluminate($LaAlO_3$) film has been prepared on single crystal and metal substrates by dip coating method. Lanthanum acetate and aluminum were prepared via ligand exchange starting from lanthanum nitrate hexahydrate and aluminum nitrate hexahydrate in acetate glacial acetic acid solution after being refluxed. Coating solution was obtained by diluting the gel with methanol and 2-methoxyethanol to adjust the total cation concentration to 0.67 M. Precursor coated film was prepared by dip-coating with a speed of 25 mm/min on various substrates such as $LaAlO_3$ (001), MgO(001), $SrTiO_3$(001) single crystal, LMO/MgO/Ni-alloy. Thin films have been obtained by heat treating the precursor film at various temperatures from $600^{\circ}C{\sim}900^{\circ}C$ and various heating rate from $0.83^{\circ}C/min{\sim}1.25^{\circ}C/min$ under $Ar/O_2$ mixture containing 1000ppm oxygen. The films have been characterized by scanning electronic microscopy (SEM) and X-ray diffraction (XRD). XRD analysis for the prepared film showed that $LaAlO_3$ thin films with a preferred orientation of (100) plane parallel to substrate surface were obtained at $800^{\circ}C(1.11\;^{\circ}C/min)$ on LMO/MgO/Ni-alloy substrate, but the intensity decreased with the increase of heat treatment temperature.

• 한국표면공학회지
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• 제43권5호
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• pp.238-242
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• 2010

In the present work, the influence of oxide on the Cr-Si-N coatings was investigated for the Cr-Si-O-N coatings on AISI 304 and Si wafer deposited by hybrid system, which combines the DC magnetron sputtering technique and arc ion plating (AIP) using Cr and Si target in an $Ar/N_2/O_2$ gaseous mixture. As the O content in the Cr-Si-N coatings increased, the diffraction patterns of the Cr-Si-O-N coatings showed CrN and $Cr_2O_3$ phases. However, as the O content increased to 28.8 at.%, diffraction peak of $Cr_2O_3$ was disappeared in the Cr-Si-O-N coating. The $d_{200}$ value was decreased with increasing of O content. The average grain size increased from about 40 nm to 65 nm as the O content increased. The maximum micro-hardness of the Cr-Si-O-N coating was obtained 4507 Hk at the O content of 24.8 at.%. The average friction coefficient of the Cr-Si-O-N coatings was gradually decreased by increasing the O content and the average friction coefficient decreased from 0.37 to 0.25 by increasing the O content. These results indicated that amorphous phase was increased in the Cr-Si-O-N coatings by increasing of O content.

• 한국진공학회지
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• 제11권3호
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• pp.176-182
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• 2002

이온빔 스퍼터링을 사용하여 유리 기판위에 $TiO_2$ 박막을 증착하고 광학적, 구조적 특성을 분석한 후 실제 반사 방지막을 제작하였다. 박막 증착은 상온에서 실시하였으며 이온빔 전압을 1.2 kV 이온빔 전류 밀도를 200 $\mu\textrm{A}/\textrm{cm}^2$로 고정하였다. 방전가스로 아르곤과 산소 가스를 사용하였으며 $O_2$/Ar비를 변화시켜 박막을 증착하고 각 박막의 특성을 분석하였다. 증착된 박막은 비정질이었고 $O_2$/Ar비가 1일 때 화학량론적인 조성비를 나타내었다. 증착된 박막의 표면 거칠기는 7 $\AA$이내의 낮은 값을 보였으나 과량의 산소분위기에서는 그 값이 50 $\AA$이상으로 증가하였고 이로 인해 투과도가 감소하는 경향을 보였다. 증착된 $TiO_2$ 박막의 굴절률은 2.40-2.45값을 나타내었고.$O_2$/Ar 비가 0.25-1사이에서 높은 투과도를 나타내었다. 이온빔 스퍼터링으로 $SiO_2$/$TiO_2$6층 반사 방지막을 제작하여 가시 광선 영역에서 약 1%이하의 반사율 특성을 갖는 박막을 증착할 수 있었다.