• Transactions on Electrical and Electronic Materials
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• 제5권1호
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• pp.34-37
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• 2004

Amorphous chalcogenide thin films, especially a-(Se, S) based films, exhibit a number of photo-induced phenomena. In this study, we make the As$\_$40/Ge$\_$10/Se$\_$15/S$\_$35//Ag thin film and then we measure the holographic diffraction efficiency according to thickness of Ag. And we form the two-dimensional holographic grating. At first, we formed one-dimensional grating and then we form two-dimensional grating by rotate the sample. We found out the most suitable thickness of Ag and in case of As$\_$40/Ge$\_$10/Se$\_$15/S$\_$35//Ag(600${\AA}$), the diffraction efficiency was more higher than other samples. The holographic grating was formed by He-Ne laser(λ=632.8nm). The intensity of incident beam was 2.5mW and incident angle was 20$^{\circ}$. We confirm. the two-dimensional holographic grating by the pattern of diffracted beam and AFM(Atomic Force Microscope) image. We perform the etching process using by 0.26N NaOH in order to confirm clearly two-dimensional grating.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.124-130
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• 2003

Zinc Oxide(ZnO) thin films on Si (100) substrate were deposited by RF magnetron sputter with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance. To analyze a crystallographic properties of the films, $\theta/2\theta$ mode X-ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity. and surface roughness highly depended on $Ar/O_2$ gas ratios. The resistivity of ZnO thin films rapidly increased with increasing oxygen ratio and the resistivity value of $9{\times}10^7{\Omega}cm$ was obtained at a working pressure of 10 mTorr with $Ar/O_2$=50/50. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with $Ar/O_2$=50/50 showed the excellent roughness value of $28.7{\AA}$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.127.2-127.2
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• 2013

오늘날 유기고분자기반 태양전지는 다른 태양전지와 비교될 정도로 낮은 광변환효율로 인해 효율향 상을 위한 많은 연구들이 진행되어 왔다. 그중 패터닝을 통한 광포집률과 charge carrier 수집효율이 증가되었다는 많은 보고들이 있었다. 따라서 우리는 200~1,400 nm polystyrene bead를 합성하여 air-liquid interfacial 방법을 이용해 2차원 육방조밀구조를 갖는 template를 형성하고 Nanosphere lithography (NSL)를 이용하여 대면적으로 균일한 poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) (PEDOT:PSS)를 패턴화하였다. 균일한 패턴형성을 측정하기위해 Field Emission Scanning Electron Microscopy (FE-SEM), image를 얻었으며, Atomic Force Microscopy (AFM)를 통해 형성된 패턴의 낙차 높이를 얻었고, Near IR-UV-Vis을 통해 bead size 변화에따라 얻어진 PEDOT:PSS 패턴의 반사율을 측 정하였다.

• 한국정밀공학회지
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• 제18권12호
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• pp.177-184
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• 2001

C3M(chemical mechanical micro machining) is applied for diminishing the size of burr and fabricating the massless patterning for aluminium wafer(thickness of 1${\mu}m$). It is difficult to perform the micro size machining with the radically increased shear stress. While the miniaturization and function-orientation of parts has been needed in the many field such as electronics, optics and medicine. etc., it is not enough to satisfy the industry needs in the machining technology. In this paper feasibility test of diminishing burr and fabricating maskless pattern was experimented and analyzed. In the experiment oxide layer was farmed on the aluminium with chemical reaction by ${HNO_3}$(10wt%), then the surface was grooved with tungsten carbide tool for the different condition such as the load and fred rate. The result was compared with the conventional machining to show the improvement of C3M with SEM for burr diminish and XPS for atomic existence, AFM for more precise image.

• Progress in Superconductivity
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• 제2권2호
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• pp.71-75
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• 2001

The effect of annealing step-edges of LaAlO$_3$ and MgO single crystal substrates on YBa$_2$Cu$_3$O$_{7}$ junction has been studied. The step-edge was fabricated by argon ion milling and was annealed at 105$0^{\circ}C$ in 1 attn oxygen pressure. We compared AFM image near step-edge of the substrates between before and after annealing process. And YBa$_2$Cu$_3$O$_{7}$ thin film was deposited on the step-edge by a standard pulsed laser deposition. The step-edge junctions were characterized by current-voltage curves at 77 K. The annealing of step-edges of MgO substrate improved the current-voltage characteristic of Josephson junction: double steps in the current-voltage characteristic disappeared. However the annealing for LaAlO$_3$ did not improve the junction property.rty.

• 전자공학회논문지 IE
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• 제44권2호
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• pp.8-13
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• 2007

본 논문에서는 고효율의 유기발광소자 제작을 위해 플라즈마 조건 변화에 따른 ITO 특성을 분석하였다. $N_2$와 $O_2$ 가스로 RF 플라즈마 출력은 100 W, 200 W, 400 W로 가스압력은 12 mTorr, 120 mTorr로 변화실험을 하였다. $N_2$ 가스를 이용하여 플라즈마 처리한 ITO의 일함수는 $4.88{\sim}5.07$ eV의 값을 나타내었고 $O_2$ 가스를 이용하여 플라즈마 처리한 ITO는 $4.85{\sim}4.97$ eV의 일함수를 나타내었다. $N_2$ 가스에서 가스의 압력이 120 mTorr이면서 플라스마 출력이 200 W의 조건에서 RF 플라즈마 처리한 ITO의 특성이 우수하였다. ITO 표면의 rms roughness는 AFM 이미지에서 계산하여 나타낸 수치로써 $N_2$와 $O_2$ 가스가 주입된 플라즈마로 처리된 ITO는 플라즈마 출력이 200 W일 때 각각 $25.2\;{\AA}$과 $30.5\;{\AA}$로 나타났으며 플라즈마 처리되지 않은 ITO는 $44.5\;{\AA}$이었다. ITO 박막의 투과율 측정에서는 $N_2$와 $O_2$ 가스의 압력을 변화시켜도 ITO의 투과율은 거의 변동이 없었다.

• 한국진공학회지
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• 제19권2호
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• pp.128-133
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• 2010

ZnO:Al 박막은 산소 압력을 조절한 두 번의 증착 과정을 이용하여, DC 펄스 마그네트론 스퍼터링 방법에 의해 증착되었다. 시드막은 다양한 Ar/$O_2$ 압력비에서 증착되었으며, 벌크막은 순수한 Ar가스를 사용하여 증착되었다. 시드막 증착시 산소 압력이 증가함에 따라, 결정성과 (002) 배향성의 정도는 증가했다. 비저항은 시드가 없는 샘플의 경우 $4.7\times10^4\Omega{\cdot}cm$ cm로부터 Ar/$O_2$ = 9/1 샘플의 경우 $3.7\times10^4\Omega{\cdot}cm$까지, 결정성의 증가와 함께 점차 감소했다. 에칭된 표면은 분화구 형상의 구조를 보여주었으며, 급격한 형상 변화가 결정성 증가와 함께 나타났다. Ar/$O_2$= 9/1 조건의 샘플은 500 nm 에서 88%의 매우 높은 haze 수치를 보여주었으며, 이는 AFM 이미지에서 보여지는 것처럼 큰 표면 구조 크기에 의해 설명된다.

• 한국안전학회지
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• 제28권2호
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• pp.37-41
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• 2013

In this work, we report the effect on the volatole organic compounds(VOCs) sensing properties of Copper phthalocyanine(CoPc) and Dilithium phthalocyanine(DiLiPc) thin films onto alumina substrates. Use evaporation method and the spin-coated method for sensing device. The materials of metallophthalocyanine macrocyclic compound solutions blended with N,N'-diphenyl-N,N'-bis(1-naphthyl)-1,1'-biphenyl-4,4"-diamine and/or Poly[2-methoxy-5-(2'-ethylhexyloxy)-1,4-phenylenevinylene] solutions. The influence of the blended in with metallophthalocyanine macrocyclic compounds on the resistance have been measured and analyzed in five different volatole organic compounds. The following results were obtained: The AFM 3D image of thin films deposited on metallophthalocyanine macrocyclic compound shows that the surfaces roughness were about CuPc 4.1~14.3 nm(7.5~8.1%), DiLiPc 10.3~22.2 nm(7.9~11.5%). The resistances decreases upon increasing the concentration of vapor organic compounds to CuPc and DiLiPc thin films. That thin films blended Copper phthalocyanine(CoPc) and Dilithium phthalocyanine(DiLiPc) with N,N'-diphenyl-N,N'-bis(1-naphthyl)-1,1'-biphenyl-4,4"-diamine and/or Poly[2-methoxy--5-(2'-ethylhexyloxy)-1,4-phenylenevinylene]. The resistances of blended thin films with N,N'-diphenyl-N,N'-bis(1-naphthyl)-1,1'-biphenyl-4,4"-diamine and/or Poly[2-methoxy--5-(2'-ethylhexyloxy)-1,4-phenylenevinylene] decreases upon increasing the concentration of volatole organic compounds(VOCs) on DiLiPc than CuPc compound thin films.

• 한국세라믹학회지
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• 제45권8호
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• pp.472-476
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• 2008

The surface region of commercial stainless steel 304 and 316 plates has been modified through deposition of the multi-layered coatings composed of titanium film ($0.1{\mu}m$) and gold film ($1-2{\mu}m$) by an electron beam evaporation method. XRD patterns of the stainless steel plates deposited with conductive metal films showed the peaks of the external gold film and the stainless steel substrate. Surface microstructural morphologies of the stainless steel bipolar plates modified with multi-layered coatings were observed by AFM and FE-SEM images. The stainless steel plates modified with $0.1{\mu}m$ titanium film and $1{\mu}m$ gold film showed microstructure of grains of under 100 nm diameter. The external surface of the stainless steel plates deposited with $0.1{\mu}m$ titanium film and $2{\mu}m$ gold film represented somewhat grain growth of Au grains in FE-SEM image. The electrical resistance and water contact angle of the stainless steel bipolar plates modified with multi-layered coatings were examined with the thickness of the gold film.

• 대한기계학회논문집A
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• 제34권1호
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• pp.35-41
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• 2010

본 논문에서는 레이저 산란 영상을 이용하여 표면거칠기를 실험적으로 규명하였다. 우선, 레이저 산란 매개변수들과 표면형상에 따라 나타나는 광로의 편향성에 대해 고찰하였고, 이를 이용하여 레이저 산란 검사 시스템을 구성하였다. 연삭표면에서 획득한 레이저 산란 영상을 분석한 결과 영상에서 수직방향으로 나타나는 산란광 분포영역이 증가와 감소를 반복하는 특징이 나타났다. 이러한 차별적 특징을 표현하는 레이저 산란 영상을 획득하기 위해 실험계획법을 이용하여 레이저 산란변수들의 최적조건을 선정하였고, 연삭표면에서 표면거칠기가 증가함에 따라 레이저 산란 영상 내에서 수직방향으로 나타나는 산란광 분포 영역이 선형적으로 증가함을 알 수 있었다. 이러한 정보는 마이크로 표면의 평가 및 거칠기 측정 시 주요한 인자로 사용될 수 있을 것이다.