• Journal of the Korean Vacuum Society
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• v.16 no.1
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• pp.33-39
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• 2007

Electrical and mechanical modifications of devices based on carbon nanotubes(CNTs) using an atomic force microscope(AFM) in the forms of cutting and reconnection of CNTs are demonstrated. In addition to the modifications, electrostatic force microscopy is used to visualize the cutting and reconnection of CNTs. In this way, AFM is shown to be a useful tool in local modifications and manipulations of CNT-based devices.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.717-718
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.1051-1052
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.651-652
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.23 no.4 s.181
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• pp.52-59
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• 2006

Surface qualities of a micro-processed sample with a pulse laser have been investigated by making use of scanning confocal microscope(SCM) and atomic force microscope(AFM). Samples are bump electrodes and ITO glass of LCD module used in a mobile phone and a wafer surface scribed by UV laser. A image of $140{\times}120{\mu}m^2$ is obtained within 1 second by SCM because scan speed of a x-axis and y-axis are 1kHz and 1Hz, respectively. AFM is able to correctly measure the hight and width of ITO, and scribing depth and width of a wafer with a resolution less than 300nm. However, the scan speed is slow and it is difficult to distinguish a surface composed of different kinds of materials. Results show that SCM is preferable to obtain a image of a sample composed of different kinds of material than AFM because the intensity of a reflected light from the surface is different for each material.

• Polymer(Korea)
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• v.38 no.3
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• pp.358-363
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• 2014

Adhesion forces between acrylate imprinting resin and a surface treated atomic force microscope (AFM) tip were investigated. Compared to the untreated silicon tip, 38% of the adhesion force is reduced for the hydrophobic tip treated with $CH_4$ plasma whereas 1.6 time increases is found for the hydrophilic tip with $O_2$ plasma treatment. Such a measurement of the adhesion force using AFM provides very quantitative results on adhesion comparing to the crosscut adhesion test which gives qualitative results. Since the adhesion area becomes larger as the imprinting pattern size gets smaller, the surface treatment issue becomes more important in the nano-imprinting process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.522-525
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• 2004

ITO thin films $({\sim}150\;nm)$ are deposited on glass substrates by different deposition condition. The sheet resistance of ITO thin films measured by using a four probe station. The microstructure of these films is determined using a X-ray diffractometer (XRD) and a scanning electron microscope (SEM) and a atomic force microscope (AFM). The sheet resistance of ITO thin films compared $s_{11}$ values by using a near field scanning microwave microscope.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.357-361
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• 1997

In this work surface damage of head and disk of head disk drive was analysed using an Atomic Force Microscpoe. The initial damage of the disk occurred by generation of extermely small wear particles. Also it was show that wear particles tend to pile up near the front side of the slider. The surface damage mechanism of drag test and contact-start-stop test was found to be quite similar.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.27-32
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• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.405-406
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• 2010