• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.48.1-48.1
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• 2010

Cu has been used for metallic interconnects in ULSI applications because of its lower resistivity according to the scaling down of semiconductor devices. The resistivity of Cu lines will affect the RC delay and will limit signal propagation in integrated circuits. In this study, we investigated the characteristics of electroplated Cu films according to the variation of concentration of organic additives. The plating electrolyte composed of $CuSO_4{\cdot}5H_2O$, $H_2SO_4$ and HCl, was fixed. The sheet resistance was measured with a four-point probe and the material properties were investigated with XRD (X-ray Diffraction), AFM (Atomic Force Microscope), FE-SEM (Field Emission Scanning Electron Microscope) and XPS (X-ray Photoelectron Spectroscopy). From these experimental results, we found that the organic additives play an important role in formation of Cu film with lower resistivity by EPD.

• Journal of Sensor Science and Technology
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• v.16 no.4
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• pp.301-306
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• 2007

AlN thin film for SAW filter application was deposited on (100) silicon wafers by reactive magnetron sputtering method. The structural characteristics were dependent on the deposition conditions such as sputtering pressure, RF power, substrate temperature, and nitrogen partial pressure. Scanning Electron Microscope (SEM), X-ray Diffraction (XRD), Electron Probe MicroAnalyzer (EPMA) and Atomic Force Microscope (AFM) have been used to find out structural properties and preferred orientation of AlN thin films. Insertion loss of SAW devices was 28.51 dB and out of band rejection was about 24 dB.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.179-183
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• 2005

Particles in the HDD can cause serious damages such as scratches and thermal asperity(TA) at the head/disk interface(HDI). Accordingly, particles cause data loss including physical and electrical damages. To improve the reliability of head-disk interface, understanding the damage characteristics at the HDI due to particle interactions is required. The materials such as $A1_2O_3$, TiC and aluminum were used in this experiment. The size and hardness of particles injected into the HDI are closely relevant to surface damage caused the data loss on the disk and head. In this paper, a variety of scratches were analyzed using scanning electron microscope(SEM) and atomic force microscope(AFM). In order to analyze defects of very small size on the disk, optical surface analyzer(OSA) was also used.

• Korean Journal of Crystallography
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• v.9 no.2
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• pp.131-137
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• 1998

결정결함의 밀도가 낮은 GaN epitaxy 막을 MOCVD(metal organic chemical vapour deposition) 방법에 의해 성장시켰다. 기판은 6H-SiC를 사용하였으며, AlN과 GaN으로 구성된 이중 buffer 층을 도입하였다. GaN buffer 층은 반응원료인 trimethyl gallium(TMG)과 NH3 가스를 교호식펄스공급(alternating pulsative supply, APS)방법에 의해 만들었다. AlN buffer/6H-SiC 위에 초기단계에 형성되는 GaN 섬은 APS처리에 의해 크기가 커지는 것을 AFM(atomic force microscope)으로 관찰하였다. Buffer 층의 역할은 그 위에 성막시킨 GaN epitaxy 막의 결정성과 결함밀도에 의해 조사하였다. 성막된 GaN의 결정구조와 결정성은 DCXRD(double crystal X-ray diffractormeter)에 의해 측정되었다. 결정결함은 EPD(etching pit density)를 측정하는 방법으로 알칼리혼합용에서 처리된 막을 SEM(scanning electron microscope)으로 관찰하였다.

• Fibers and Polymers
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• v.5 no.4
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• pp.259-263
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• 2004

Rubber-modified epoxy resins have been employed as adhesive and matrix materials for glass and corbon-fiber composites. The behavior of fracture around a crack tip for rubber-modified epoxy resin is investigated through the acoustic emission (AE) analysis of compact tension specimens. Damage zone and rubber particles distributed around a crack tip were observed by a polarized optical microscope and an atomic force microscope (AFM). The damage zone in front of pre-crack tip in rubber-modified specimen $(15wt\%\; rubber)$ began to form at about $13\%$ level of the fracture load and grew in size until $57\%$ load level. After that, the crack propagated in a stick-slip manner. Based on time-frequency analysis of AE signals and microscopic observation of damage zone, it was thought that AE signals with frequency bands of 0.15-0.20 MHz and 0.20­0.30 MHz were generated from cavitation in the damage zone and crack propagation, respectively.

• Journal of Surface Science and Engineering
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• v.29 no.5
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• pp.314-324
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• 1996

Scanning probe microscopes (SPMs) such as the scanning tunneling microscope (STM) and the atomic force microscope (AFM) were used for surface modification tools at the nanometer scale. Material surfaces, i. e., titanium, hydrogen-terminated silicon and trimethylsilyl organosilane monolayer on silicon, were locally oxidized with the best lateral spatial resolution of 20nm. The principle behind this proximal probe oxidation method is scanning probe anodization, that is, the SPM tip-sample junction connected through a water column acting as a minute electrochemical cell. An SPM-nanolithogrphy process was demonstrated using the organosilane monolayer as a resist. Area-selective chemical modifications, i. e., etching, electroless plating with gold, monolayer deposition and immobilization of latex nanoparticles; were achieved in nano-scale resolution. The area-selectivity was based on the differences in chemical properties between the SPM-modified and unmodified regions.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.44-47
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• 2004

단일 나노선 연구에 있어서 나노선에 원하는 패턴을 선택적으로 구현하는 새로운 방법을 소개한다. 기존에 많이 쓰였던 SEM(Scanning Electron Microscope) 사진을 통한 나노선의 위치를 찾는 방법은 전자빔에 의해 유도되는 비결정성 탄소입자 등으로 인해 측정하고자하는 나노선의 전기적 특성을 왜곡시킬 수 있다. 이러한 점을 예방하고 작업의 편리성을 위하여 ER(E-beam Resist)이 코팅된 상태에서 바로 SEM을 이용해 패터닝하는 방법을 고안하였다. 또 다른 방법으로 기존의 AFM(Atomic Force Microscope) 사진으로 위치를 찾는 방식의 단점인 긴 작업시간을 개선하기 위해 광학현미경 사진을 이용해 패터닝하는 방법을 고안하였다. 이러한 방법들은 작업의 편리성이나 패턴의 정확도면에서 서로 보완적인 성격을 가지고 있어 필요에 따라 방법을 선택할 수 있다.

• KEPCO Journal on Electric Power and Energy
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• v.5 no.3
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• pp.197-200
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• 2019

We report on electrochemical signal amplification using gap electrodes based on the redox cycling between gap electrodes. The distance between electrodes was controlled from $2{\mu}m$ to a few hundreds of nanometer by chemical deposition of reduced Au ion on the pre-defined electrodes. Enhanced redox current of ferri/ferrocyanide was obtained by redox cycling between the two working electrodes. The faradaic current is amplified about a thousand times in this redox system. Since the signal amplification is due to the shortened diffusion length between the two electrodes, the narrower the nanogap was, the better detection limit, calibration sensitivity, and dynamic range. The experimental results were discussed on the basis of the cyclic voltammetry (CV), atomic force microscope (AFM) and scanning electron microscope (SEM) measurements.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.877-880
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• 2008

In this article, in order to fabricate polymer based electrospray device with super hydrophobic nozzle we use PTFE(polyfluorotetraethylene) plate and PMMA(polymethylmethacrylate). To obtain the super hydrophobic surface nozzle, PTFE surface is treated by argon and oxygen plasma treatment process. And evaluate the treated surface, perform measuring contact angle, SEM(Scanning Electron Microscope) and AFM(Atomic Force Microscope). We compare the performance of the super hydrophobic PTFE surface nozzle with raw PTFE and PMMA surface nozzle. For the ion beam treated PTFE nozzle, the liquid doesn't overflow and it keeps initial position and meniscus shape. From these results, we expect in cease of superhydrophobic surface nozzle jetting becomes more stable and repeatable.

• Membrane and Water Treatment
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• v.10 no.5
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• pp.381-385
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• 2019

Surface modification is very efficient and scalable approach to achieve improved membrane performance. We treated Reverse Osmosis Thin Film Composite (TFC RO) membrane with various concentrations of Polyethylene Glycol (PEG), a hydrophilic polymer after activation with sodium hypochlorite. This treatment resulted in an increment of the water flux by 43% and the salt rejection by 2.36% for the 3000 mg/l PEG-treated membrane. Further, these PEG-treated membranes were exposed to a mixture of 3000 mg/l PEG and 1000 mg/l sodium hypochlorite for 1 hour. Further modification of this membrane by PEG and sodium hypochlorite mixture increased the water permeance up to 133% when compared with the virgin TFC RO membrane. We characterized the treated membranes to understand the changes in wettability by contact angle analysis, changes in surface morphology and roughness by scanning electron microscope (SEM) and atomic force microscope (AFM) analysis.