Fabrication of Nanometer-sized Pattern on PMMA Plate Using AAO Membrane As a Template for Nano Imprint Lithography (AAO 나노기공을 나노 임프린트 리소그래피의 형틀로 이용한 PMMA 나노패턴 형성 기술)
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- Journal of Institute of Control, Robotics and Systems
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- v.14 no.5
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- pp.420-425
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- 2008