• 제목/요약/키워드: A-LTPS

검색결과 124건 처리시간 0.031초

A new crystallization method using a patterned $CeO_2$ seed layer on the plastic substrate

  • Shim, Myung-Suk;Kim, Do-Young;Seo, Chang-Ki;Yi, Jun-Sin;Park, Young-Soo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.1007-1010
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    • 2004
  • We report crystallization of a-Si using XeCl excimer laser annealing [1] on the plastic substrate. We tried to obtain higher crystallinity as the effect of $CeO_2$ seed layer patterned. Also, we tried to control the direction of crystallization growth of silicon layer for lateral growth as the type of $CeO_2$ pattern. This crystallization method plays an important role in low temperature poly-Si (LTPS) [2] process and flexible display.

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Two-shot SLS of Si film for manufacturing of AMOLED displays

  • Limanov, A.B.;Chung, U.J.;Van Der Wilt, P.C.;Chitu, A.M.;Choi, J.B.;Turk, B.A.;Im, James S.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.1267-1268
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    • 2008
  • The two-shot SLS method has recently been successfully implemented in volume manufacturing of advanced LTPS-based LCDs. In this presentation, we discuss how the approach is also well suited for being implemented in high-throughput and high-yield manufacturing of large AMOLED displays on large glass substrates.

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Low Power and Small Area Holding Latch with Level Shifting Function Using LTPS TFTs for Mobile Applications

  • Choi, Jung-Hwan;Kim, Yong-Jae;Ahn, Soon-Sung;Kwon, Oh-Kyong
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1283-1286
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    • 2006
  • A holding latch with level shifting function is proposed for power and cost effectiveness with low temperature polycrystalline silicon technology on the glass backplane. Layout area and power consumption of the proposed circuit are reduced by 10% and 52% compared with those of the typical structure which combines a static D-latch and a cross coupled level shifter for 2.2" qVGA panel, respectively.

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LTPS produced by JIC (Joule-heating Induced Crystallization) for AMOLED TFT backplanes

  • Hong, Won-Eui;Lee, Seog-Young;Chung, Jang-Kyun;Lee, Joo-Yeol;Ro, Jae-Sang;Kim, Dong-Hyun;Park, Seung-Ho;Kim, Cheol-Su;Lee, Won-Pil;Kim, Hye-Dong
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.378-381
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    • 2009
  • As a Joule-heat source, a conductive Mo layer was used to crystallize amorphous silicon for AMOLED backplanes. This Joule-heating induced crystallization (JIC) process could produce poly-Si having a grain size ranging from tens of nanometers to greater than several micrometers. Here, the blanket (single-shot whole-plane) crystallization could be achieved on the $2^{nd}$ and the $4^{th}$ generation glass substrate.

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Comparison of Degradation Phenomenon in the Low-Temperature Polysilicon Thin-Film Transistors with Different Lightly Doped Drain Structures

  • Lee, Seok-Woo;Kang, Ho-Chul;Nam, Dae-Hyun;Yang, Joon-Young;Kim, Eu-Gene;Kim, Sang-Hyun;Lim, Kyoung-Moon;Kim, Chang-Dong;Chung, In-Jae
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.1258-1261
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    • 2004
  • Degradation phenomenon in the low-temperature polysilicon (LTPS) thin-film transistors (TFTs) with different junction structures was investigated. A gate-overlapped lightly doped drain (GOLDD) structure showed better hot-carrier stress (HCS) stability than a conventional LDD one. On the other hand, high drain current stress (HDCS) at $V_{gs}$ = $V_{ds}$ conditions caused much severe device degradation in the GOLDD structure because of its higher current level resulting in the higher applied power. It is suggested that self-heating-induced mobility degradation in the GOLDD TFFs be suppressed for using this structure in short-channel devices.

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Nonvolatile memory devices with oxide-nitride-oxynitride stack structure for system on panel of mobile flat panel display

  • Jung, Sung-Wook;Choi, Byeong-Deog;Yi, Jun-Sin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.911-913
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    • 2008
  • In this work, nonvolatile memory (NVM) devices for system on panel of flat panel display (FPD) were fabricated using low temperature polycrystalline silicon (LTPS) thin film transistor (TFT) technology with an oxide-nitride-oxynitride (ONOn) stack structure on glass. The results demonstrate that the NVM devices fabricated using the ONOn stack structure on glass have suitable switching characteristics for data storage with a low operating voltage, a threshold voltage window of more than 1.8 V between the programming and erasing (P/E) states after 10 years and its initial threshold voltage window (${\Delta}V_{TH}$) after $10^5$ P/E cycles.

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A High-Speed Source Follower Type Analog Buffer Circuit Using LTPS TFTs for 2.2-inch qVGA TFT-LCD panel

  • Kim, Hyun-Wook;Bae, Han-Jin;Lee, In-Hwan;Kwon, Oh-Kyong
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1287-1290
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    • 2006
  • A high speed analog buffer using polycrystalline silicon (poly-Si) thin film transistors (TFT) is proposed for 2.2-inch quarter video graphic adapter (qVGA) TFT-LCD panel. Simulation results show that the settling time of the proposed circuit is $10{\mu}sec$ in 2.2-inch qVGA and the power consumption of proposed analog buffer is $25{\mu}W$.

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Sequential Lateral Solidification for Present and Future Applications

  • Wilt, Paul C. van der;Turk, Brandon A.;Limanov, Alex B.;Chitu, Adrian C.;Im, James S.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.56-57
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    • 2003
  • Sequential lateral solidification has recently become an option for manufacturing LTPS TFT LCDs owing to the availability of production equipment. Compared to the currently established ELA crystallization method, it is characterized by its low running costs and the high quality microstructures that can be obtained. In this presentation, we will review the production-related developments as well as elaborate on recent research activities that deal with a number of crystallization schemes that can be beneficial for future active-matrix display products.

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Blue Multi-Laser-Diode Annealing(BLDA) Technologies for Poly-Si Films

  • Ogino, Yoshiaki;Iida, Yasuhiro;Sahota, Eiji;Terao, Motoyasu;Chen, Yi;Noguchi, Takashi
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.945-947
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    • 2009
  • We developed a new laser irradiation (BLDA: Blue Multi-Laser-Diode Annealing) system. The system forms the uniform line beam, which is constructed by 48 pieces of semiconductor lasers. This new system has achieved high laser output stability and the highly accurate beam shape by adopting a reliable laser control, the auto-focus control in addition to an original laser photosynthesis technology and the beam homogenizing technology. It was confirmed to crystallize the Si films effectively with good quality.

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A Study on Negative Bias Temperature Instability in ELA Based Low-Temperature polycrystalline Silicon Thin-Film Transistors

  • Im, Kiju;Choi, Byoung-Deog;Hyang, Park-Hye;Lee, Yun-Gyu;Yang, Hui-won;Kim, Hye-Dong
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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    • pp.1075-1078
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    • 2007
  • Negative Bias Temperature Instability (NBTI) in Eximer Laser Annealing (ELA) based Low Temperature polysilicon (LTPS) Thin-Film Transistors (TFT) was investigated. Even though NBTI is generally appeared in devices with thin gate oxide, the TFT with gate oxide thickness of 120 nm, relatively thick, also showed NBTI effect and dynamic NBTI effect is dependent on operational frequency.

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