• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.123-123
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• 2000

선폭이 초미세화됨에 따라 게이트 전극에서의 공핍 현상 및 불순물 확산의 물제를 갖는 poly-Si 게이트를 대체할 전극 물질로 텅스텐(W)이 많이 연구되어 왔다. 반도체 소자의 배선물질로 일찍부터 사용되어온 텅스텐은 내화성 금속의 일종으로 용융점이 높고, 저항이 낮다. 그러나, 일반적으로 사용되고 있는 CVD에 의한 텅스텐의 증착은 반응가스(WF6)로부터 오는 불소(F)의 게이트 산화막내로의 확산으로 인해 MOS 소자가 크게 열화될수 있다. 본 연구에서는 W/TiN 이중 게이트 전극 구조를 갖는 MOS 캐패시터를 제작하여 전기적 특성을 살펴보았다. P-Type (100) Si위에 RTP를 이용, 85$0^{\circ}C$에서 110 의 열산화막을 성장 및 POA를 수행한 후, 반응성 스퍼터링법에 의해 상온, 6mTorr, N2/Ar=1/6 sccm, 100W 조건에서 TiN 박막을 150, 300, 500 의 3그룹으로 증착하였다. 그 위에 LPCVD 방법으로 35$0^{\circ}C$, 0.7Torr, WF6/SiH4/H2=5/5~10/500sccm 조건에서 2000~3000 의 텅스텐을 증착하였다. Photolithography 공정 및 습식 에칭을 통해 200$\mu\textrm{m}$$\times$200$\mu\textrm{m}$ 크기의 W/TiN 복층 게이트 MOSC를 제작하였다. W/TiN 복측 게이트 소자와 비교분석하기 위해 같은 조건의 산화막을 이용한 알루미늄(Al) 게이트, 텅스텐 게이트 MOSC를 제작하였다. 35$0^{\circ}C$에서 증착된 텅스텐 박막은 10~11$\Omega$/ 의 면저항을 가졌고 미소한 W(110) peak값을 나타내는 것으로 보아 비정질 상태에 가까웠다. TiN 박막의 경우 120~130$\Omega$/ 의 면저항을 가졌고 TiN (200)의 peak 값이 크게 나타난 반면, TiN(111) peak가 미소하게 나타났다. TiN 박막의 두께와 WF/SiH4의 가스비를 변화시켜가며 제작된 MOS 캐패시터를 HF 및 QS C-V, I-V 그리고 FNT를 통한 전자주입 방법을 이용하여 TiN 박막의 불소에 대한 확산 방지막 역할을 살펴 보았다. W/TiN 게이트 MOS 소자는 모두 순수 텅스텐 게이트보다 우수하였고, Al 게이트와 유사한 전기적 특성을 보여주었다. W/TiN 게이트 MOS 소자는 모두 순수 텅스텐 게이트보다 우수하였고, Al 게이트와 유사한 전기적 특성을 보여주었다. TiN 박막이 300 , 500 이고 WF6/SiH4의 가스비가 5:10인 경우 소자 특성이 우수하였으나, 5:5의 경우에는 FNT 전자주입 특성이 열화되기 시작하였다. 그리고, TiN박막의 두께가 150 으로 얇아질 경우에는 WF6/SiH4의 가스비가 5:10인 경우에서도 소자 특성이 열화되기 시작하였다. W/TiN 복층 게이트 MOS 캐패시터를 제작하여 전기적인 특성 분석결과, 순수 텅스텐 게이트 소자의 큰 저전계 누설 전류 특성을 해결할 수 있었으며, 불소확산에 영향을 주는 조건이 WF6/SiH4의 가스비에 크게 의존됨을 알 수 있었다. TiN 박막의 증착 공정이 최적화 될 경우, 0.1$\mu\textrm{m}$이하의 초미세소자용 게이트 전극으로서 텅스텐의 사용이 가능할 것으로 보여진다.

• Journal of Environmental Science International
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• v.31 no.8
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• pp.677-689
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• 2022

In order to photocatalytically treat organic matter (COD_Cr) and chromaticity effectively, chemical coagulation and sedimentation processes were employed as a pretreatment of the leachate produced from landfill in Jeju Island. This was performed using FeCl₃·6H₂O as a coagulant. For the treated leachate, UV/TiO₂ and UV/TiO₂/H₂O₂ systems were investigated, using 4 types of UV lamps, including an ozone lamp (24 W), TiO₂ as a photocatalyst, and/or H₂O₂ as an initiator or inhibitor for photocatalytic degradation. In the chemical coagulation and sedimentation process using FeCl₃·6H₂O, optimum removal was achieved with an initial pH of 6, and a coagulant dosage of 2.0 g/L, culminating in the removal of 40% COD_Cr and 81% chromaticity. For the UV/TiO₂ system utilizing an ozone lamp and 3 g/L of TiO₂, the optimum condition was obtained at pH 5. However, the treated COD_Cr and chromaticity did not meet the emission standards (COD_Cr: 400 mg/L, chromaticity: 200 degrees) in a clean area. However, for a UV/TiO₂/H₂O₂ system using 1.54 g/L of H₂O₂ in addition to the above optimum UV/TiO₂ system, the results were 395 mg/L and 160 degrees, respectively, which were within the emission standard limits. The effect of the UV lamp on the removal of COD_Cr, and chromaticity of the leachate decreased in the order of ozone (24 W) lamp > 254 nm (24 W) lamp > ozone (14 W) lamp > 254 nm (14 W) lamp. Only COD_Cr and chromaticity treated with the ozone (24 W) lamp met the emission standards.

• Korean Journal of Food Science and Technology
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• v.20 no.6
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• pp.820-826
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• 1988

The freezing point$(t_f)$, latent heat of freezing$({\triangle}\;H_f)$ and kinetic constant of fleering$(k_f)$ were determined from DSC thermogram at cooling rate $-2.5^{\circ}C/min{\sim}-10.0^{\circ}C/min$. The freezing point of various starches was decreased with an increase in cooling rate, and that of whole starches were lower than defatted starches. Changes of the latent heat of freezing was not observed at above cooling rate $-2.5^{\circ}C/min$. The latent heat of freezing$({\triangle}\;H_f)$ could be deduced as a function of water content(W) as follows: ${\triangle}\;H_f=0.700W-13.048$, (Kcal/kg) $(35%{\leqq}W{\leqq}70%)\;{\triangle}\;H_f=1.569W-73.861,\;(Kcal/kg)\;(W{\geqq}70%$) In the water content range $35{\sim}90$(wt %), the activation energy of various starches in freezing process was determined $126{\sim}270$ Kcal/mol.

• The Korean Journal of Mycology
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• v.9 no.3
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• pp.123-128
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• 1981

Three edible species, e.g. Lyophyllum sp. and Armillaria mellea introduced from Japan in 1979 and Auriaularia auricula-judae from Taiwan in 1978 were selected for artifcial cultivation. The media, MSDS for Lyophyllum sp, MHS and PDS for A. auricula-judae, and MSDS and MHS for A. mellea were selected. The range of optimum pH of Lyophyllum sp. was 6.0 and pH 8.0 for A. auricula-judae and pH 6.0 to 7.0 for A. mellea. The range of optimum temperature for the mycelial growth of Lyophyllum sp. was 25 to $30^{\circ}C,\;30^{\circ}C$ for A. auricula-judae and $25^{\circ}C$ for A. mellea. When the moisture content 75 to 80% (w/w) in the substrates, the mycelial growth of Lyophyllum sp. and A. auricula-judae, was rapid. 65% (w/w) for A. mellea. As the spawning substrates, wheat for Lyophyllum sp. oak sawdust for A. auricula-judae and poplar sawdust for A. mellea were selected, respectively. In this experiment, yields of Lyophyllum sp. and A. auricula-judae were high on the poplar sawdust added 20% (w/w) of rice bran. Lyophyllum sp. and A. auricula-judae for sources of new edible mushrooms seems to be possible.

• Asian-Australasian Journal of Animal Sciences
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• v.24 no.8
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• pp.1148-1156
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• 2011

Compensatory growth of juvenile olive flounder Paralichthys olivaceus fed different diets with different feeding regime was compared. Four hundred fifty fish (twenty five fish per tank) were randomly distributed into 18 of 180 L flow-through tanks. Six treatments were prepared: fish were hand-fed with the control (C) diet to satiation twice a day, six days a week, for 8 weeks (C-8W treatment); and other groups of fish were starved for 2 weeks and then fed with the C, high protein (HP), high carbohydrate (HC), high lipid (HL), and combined protein, carbohydrate and lipid (CPCL) diets to satiation twice a day, six days a week, for 6 weeks, referred to as C-6W, HP-6W, HC-6W, HL-6W, and CPCL-6W treatments, respectively. Final body weight of fish in HP-6W treatment was higher than that of fish in C-6W, but not different from that of fish in C-8W, HC-6W, HL-6W and CPCL-6W treatments. Specific growth rate of fish in HP-6W treatment was higher than that of fish in all other treatments except for fish in CPCL-6W treatment. Feeding rate of fish in C-8W treatment was higher than that of fish in HP-6W, HC-6W, HL-6W and CPCL-6W treatments, but not different from that of fish in C-6W treatment. In addition, feeding rate of fish in C-6W treatment was higher than that of fish in HP-6W, HL-6W and CPCL-6W treatments. Feed and protein efficiency ratios of fish in HP-6W, HC-6W, HL-6W and CPCL-6W treatments were higher than those of fish in C-6W treatment. None of moisture, crude protein and ash content of the whole body of fish excluding the liver was different among treatments. Dietary supplementation of protein, carbohydrate, lipid and their combination could improve compensatory growth of fish when fish were fed for 6 weeks after 2-week feed deprivation; especially, supplementation of dietary protein was the most effective to improve compensatory growth of fish.

• The Korean Journal of Quaternary Research
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• v.15 no.1
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• pp.37-45
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• 2001

Morphometric parameters such as cone height, cone height/width ratio($H_{co}$/$W_{co}$), cone height/difference between cone width and crater width ratio($H_{co}$/$W_{co-cr}$) and slope angle are measured to investigate the rates of slope development of scoria cones in Cheju Island. The parameters systematically decrease with increasing age of scoria cones, suggesting that comparative morphology of scoria cones is a useful age indicator. Cone age is most highly correlated with $H_{co}$/($W_{co-cr}$ or average slope angle because summit craters are infilled and eventually removed by erosional processes. The average slope angle is estimated as $\theta_{ave}$= $tan^{-1}$/〔2.$H_{co}$/$W_{co-cr}$〕. Cheju Island was formed through four eruptive stages during Pleistocene. The youngest cones of stage 4(0.1~0.025Ma) have a mean average slope angle of 23.6$\pm$1.7$^{\circ}$, whereas stage 3(0.3~0.1Ma) and stage 2(0.6~0.3Ma) cones have mean values of 18.9$\pm$$1.7^{\circ}C$and 12.6$\pm$$1.9^{\circ}C$, respectively.

• Journal of the Korean Applied Science and Technology
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• v.40 no.6
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• pp.1268-1277
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• 2023

In this study, to evaluate the possibility of utilizing Chamaecyparis obtusa (Siebold & Zucc.) Endl. (C. obtusa) leaf fractions as anti-inflammatory functional materials, C. obtusa extract extracted with 99% ethanol (CO99EL) was fractionated with hexane (CO99EL-H), chloroform (CO99EL-C), ethyl acetate (CO99EL-E), butanol (CO99EL-B) and distilled water (CO99EL-W). The anti-inflammatory effects of each fraction was performed using lipopolysaccharide (LPS)-induced RAW264.7 mouse macrophages. Cytotoxicity was highest in CO99EL-H and CO99EL-C and lowest in CO99EL-W. Interestingly, LPS-induced iNOS expression and NO production were significantly reduced by CO99EL-H and CO99EL-E, and COX-2 expression was significantly reduced by CO99EL-B and CO99EL-W. In addition, interleukin (IL)-1𝛽, an inflammatory cytokine increased by LPS, was significantly reduced by CO99EL-C, CO99EL-E, CO99EL-B and CO99EL-W, and IL-6 was significantly reduced by CO99EL-B and CO99EL-W. Therefore, the janus kinase (JAK)/signaling transducer and activator of transcription (STAT) signaling pathway activated by LPS was significantly reduced by CO99EL-H and CO99EL-C, and the mitogen-activated protein kinase (MAPK) signaling pathway was slightly reduced by CO99EL-H and CO99EL-C. However, nuclear factor (NF)-𝜅B activity was not reduced by any fractions. Based on the results of this study, it was confirmed that CO99EL fractions have different anti-inflammatory mechanisms depending on the solvent used for fractionation.

• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.141-149
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• 1998

The W thin films were deposited on Si3N4 by a PECVD technique. The effects of substrate temperature and gas flow ratio on the properties of the W films were investigated. The deposition of W films were limited by surface reaction at the temperature range of 150>~$250^{\circ}C$, W films had the deposition rate of 150~530 $\AA$/min and stress of 0.85~$14.35\times10 ^9 \textrm {dynes/cm}^2}$ at various substrate temperatures and $SiH_4/WF_6$ flow ratios. $SiH_4/WF_6$ flow ratio affected the deposition rate and stress of the W films, expecially, excessive flow of SiH4 abruptly changed the structure, chemical bonding, and stress of the W films. Among the deposited W films on TiN, Ti, Mo, NiCr and Al adhesion layer, the one on the Al had the best adhesion property.

• Proceedings of the Korean Magnestics Society Conference
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• 2007.05a
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• pp.245.2-245.2
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• 2007

• Journal of Microbiology and Biotechnology
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• v.7 no.1
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• pp.62-67
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• 1997

To enhance the hyperproductive and low energy-consuming ethanol fermentation rate, the thermotolerant yeast S. cerevisiae RA-74-2 cells were immobilized. An efficient immobilization condition was proved to be $1.5{\%}$ (w/v) alginate solution, neutral pH and 20 h activation of beads. The fermentation characteristics and stability at various temperatures were examined as compared with free S. cerevisiae RA-74-2 cells. The immobilized cells had excellent fermentation rate at the range of pH 3-7 at 30-$42^{\circ}C$ in 15-$20{\%}$ glucose media. When the seed volume was adjusted to 0.12 (v/v) (6ml bead/50 ml medium), $11{\%}$ (w/v) ethanol was produced during the first 34 hand $12.15{\%}$ (w/v) ethanol [$95{\%}$ (w/v) of theoretical yield] during the first 60 h in $25{\%}$ glucose medium. In repetitive fermentation using a 2 litre fermentor, 5.79-$7.27{\%}$ (w/v) ethanol [76-$95{\%}$ (w/v) of theoretical yield] was produced during the 40-55 h in $15{\%}$ glucose media. These data suggested the fact that alginate beads of thermotolerant S. cerevisiae RA-74-2 cells would contribute to economic and hyperproductive ethanol fermentation at high temperature.