• Transactions on Electrical and Electronic Materials
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• v.5 no.4
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• pp.153-157
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• 2004

ITO thin films were deposited on PET and soda-lime glass substrates by a dc reactive magnetron sputtering of In-Sn alloy metal target without substrate heater and post-deposition thermal treatment. The dependency of rf-bias voltage and substrate power during deposition processing was investigated to control the electrical and optical properties of ITO films. The range of rf bias voltage is from 0 to -80 V and the substrate power is applied from 10 to 50 W. The minimum resistivity of ITO film is 5.4${\times}$10$^{-4}$ $\Omega$cm at 50 W power and rf-bias voltage of -20 V. The best transmittance of ITO films at 550 nm wavelength is 91 % in the substrate power of 30 W and rf-bias voltage of -80 V.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.3
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• pp.224-229
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• 2016

Recently, polymeric micro-fluidic biochips with numerous micro patterns on the surface were fabricated by injection molding for realizing low-cost mass production of devices. To evaluate the effects of process parameters on large-scale micro-structure replication, a $50{\times}50mm^2$ tool insert with surface structures having a patterns of trapezoidal shapes (height: $30{\mu}m$) was employed. During injection molding, PMMA was used; packing phase parameters and mold temperature were investigated. The replicated surface textures were quantitatively characterized by confocal laser microscopy with 10-nm resolution. The degree of replication at low mold temperatures was found to be higher than that at high mold temperature at the beginning of the packing stage. Thereafter, the degree of replication increased to a greater extent at higher mold temperatures; application of higher mold temperatures improved the degree of replication.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1988.05a
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• pp.74-77
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• 1988

This paper reports the properties of antireflection structure and hole formation of Te-based systems. The optical-recording characteristics of metallic recording media are enhanced significantly by incorporating the metal(Al) layer into an antreflection trilayer structure. Due to the interface condition inherent in the design of the trilayer structure, reflectivity from holes is ranked low fraction (<10%). The hole formation is carried by $Ar^+$ Laser(488nm). For 20nsec pulse duration, hole opening power(threschold) of $(Te_{86}Se_{14})_{50}Bi_{50}$ trilayer is lower than that of monolayer that used in this experiment. Hole shapes of the whole sample were clean.

• Proceedings of the KAIS Fall Conference
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• 2010.05b
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• pp.1230-1232
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• 2010

A simple, rapid and validated reverse d phase liquid chromatographic method has been developed for the determination of Letrozole (LZ) in pharmaceutical dosage. LZ was separated on ODS analytical column with a mixture of acetonitrile, water in the ratio 50:50 (v/v) as mobile phase at a flow rate of 1.0 mL /min. The effluent was monitored by UV detection at 265nm. Calibration plot was linear in the range of 160 to $240{\mu}g$/mL with the linear regression (r) = 0.999. The method was validated for recovery, precision, specificity.

• Journal of Surface Science and Engineering
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• v.50 no.4
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• pp.296-300
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• 2017

NiO nanofibers with Au nanoparticles were synthesized by sol-gel and electrospinning techniques, in which the reduction process by ultraviolet exposure is included for the growth of Au nanoparticles in the electrospinning solution. FE-SEM(Field Emission Scanning Electron Microscopy), TEM(Transmission Electron Microscopy) revealed that the synthesized nanofibers had the diameter of approximately 200 nm. X-ray diffraction showed the successful formation of Au-decorated NiO nanofibers. Gas sensing tests of Au-decorated NiO nanofibers were performed using reducing gases of CO, and $C_6H_6$, $C_7H_8$, $C_2H_5OH$. Compared to as-synthesized NiO nanofibers, the response of Au-loaded NiO nanofibers to CO gas was found to be about 3.4 times increased. On the other hand, the response increases were only 1.1-1.3 times for $C_6H_6$, $C_7H_8$, and $C_2H_5OH$.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.195-196
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• 2005

We report the new design of a miniature electromagnetic actuator for probe-based data storage with anti-vibration mechanism. The actuator consists of a media substrate, silicon frame, 2 pairs of magnets, a spacer, and a printed circuit board (PCB). The total area of the device is $11.2{\times}11.2 mm^2$ while the data recording area is $7.4{\times}7.4 mm^2$. A net momentum fee structure was included for high vibration resistance. The simulation shows that the lateral vibration can be reduced to below 100 nm for 1 G acceleration if the counter mass is adjusted with $1\%$ difference. The peak power for ${\pm}50 {\mu}m$ displacement is below 50 mW for a actuator with a resonance at 200 Hz.

• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.7-13
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• 1997

This paper describes the automation of an object generator and an image analyser in a knife scan OTF equipment to enhance the accuracy of OTF measurement. Pinholes and slits of various size in the object generator are used as an objects. A fishtail edge is mounted to the image analyzer and is translated to the direction of 45 degree angle with the horizontal to measure MTF simultaneously in the radial and tangential azimuths. The stepping motor control unit and software for the image analyzer are modified and the accuracy of this equipment is evaluated by measuring the OTF of SIRA group 50 mm standard lens.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.35 no.9
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• pp.375-379
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• 1986

The HCP(Hypocycloidal Pinch) device for plasma focus was modified for a pumping source of the dye laser, and the spectral distribution and time behavior of its light pulses were investigated by using a UV spectrometer, 70 MHz CRO and Si-PIN photodiode detector. An array of multiple stages of HCP and narrower electrode gaps were chosen in order to make a more uniform discharge along the HCP axis. The possible spectral range for the pumping of dye laser is 360-620nm, when the HCP is operated at 5-8kv of apllied voltage and 50-150Torr of Ar fill gas pressure. The rise-time and FWHM of light pulses from the HCP are 5us and 30-50us respectively when it is operated under the same conditions as above.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1380-1381
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• 2006

본 연구는 MgO 박막을 유도 결합 플라즈마를 이용하여, $CF_4/Ar$ 가스 혼합비로 식각하였고, RF 전력, DC-bais 전압과 Process Pressure를 변경하면서 실험하였다. 빛 방출 분석(optical emission spectroscopy, OES)을 이용하여, 플라즈마 진단과 식각 특성과의 관계를 분석하였다. OES 결과로부터 $CF_4$ 첨가비를 50%까지는 증가시킴에 따라 식각률이 증가하였고, 그 후에 Ar 이온이 감소함으로써 식각률이 감소하였다. MgO 박막의 최고 식각률은 50%의 $CF_4/(CF_{4}+Ar)$에서 700 W의 RF 전력, -150 V의 DC-bias 전압, 반응로 압력은 15 mTorr, 기판 온도는 $30^{\circ}C$로 고정시켰을 때 29nm/min이었다. 이 조건에서 MgO 박막과 $SiO_2$의 선택비는 0.06 이었다.

• Journal of Surface Science and Engineering
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• v.50 no.5
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• pp.392-397
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• 2017

The Young's modulus of a nanoscale titanium (Ti) thin-film was evaluated using a high-speed microcantilever resonating at the megahertz frequency in the present study. A 350 nm thick Ti film was deposited on the surface of a silicon microcantilever, and the morphology of the film was analyzed using the atomic force microscopy. The microcantilever was excited to resonate using an ultrasonic pulser that generates tone burst signals and the resonance frequency shift induced by the deposition of Ti was measured using a Michelson interferometer. The Young's modulus was determined through a modal analysis using the finite element method and the result was validated by the nanoindentation testing, showing good agreement within a relative error of 1.0%. The present study proposes a nanomechanical characterization technique with enhanced accuracy and sensitivity.