• Title/Summary/Keyword: 50nm

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Electrical Properties and Synthsis of Large Area Conductive Nano Carbon Films by Linear Ion Beam Source

  • Yeo, Gi-Ho;Sin, Ui-Cheol;Yu, Jae-Mu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.220.1-220.1
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    • 2014
  • 본 연구에서는 PECVD 공법 중에 이온화 에너지가 높은 선형이온빔 소스를 이용하여 고온에서 전도성 카본박막을 코팅하였다. 카본 박막 코팅을 위한 Precursor는 $C_2H_2$ gas를 이용하였으며, 온도에 따른 카본 박막의 전기적 특성 및 두께에 따른 카본 박막 성장 구조를 분석하였다. 카본 박막의 전기적 특성은 Interfacial contact resistance (ICR) 방법으로 측정하였으며, 접촉 저항 측정을 위한 모재는 SUS316L stainless steel을 사용하였고 카본 박막 성장 구조 분석을 위해서는 폴리싱된 Si-wafer를 사용하였다. 선형이온빔 소스를 이용하여 상온에서 증착한 카본 코팅의 접촉저항 값은 50 nm 코팅 두께에서 $660m{\Omega}cm^2@10kgf/cm^2$으로 비정질상의 특성을 나타냈으며, 고온에서는 $14.8m{\Omega}cm^2@10kgf/cm^2$으로 온도가 증가함에 따라 비정질상의 카본 박막이 전도성을 가지는 카본박막으로의 성장을 확인할 수 있었다. 또한 전도성 카본 박막의 성장 구조 분석은 FE-SEM 및 Raman spectrum 분석을 통해 확인하였으며, 그 결과 코팅 두께가 증가할수록 카본 입자들은 수nm에서 약 150 nm의 카본 cluster를 형성하며 성장하였다. 이때 전도성 카본 박막의 두께에 따른 접촉저항의 값은 고온 조건에서 카본 박막의 두께가 약 100 nm일 때, $12.1m{\Omega}cm^2@10kgf/cm^2$의 가장 낮은 값을 가졌다. 위의 결과를 경제성이 아주 우수한 대면적 전도성 나노 카본 박막의 상용화 가능성이 높아질 것으로 기대된다.

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Electrical Properties of CuPc-OFET with Metal Electrode (금속 전극에 따른 CuPc-OFET 의 전기적 특성)

  • Lee, Ho-Shik;Park, Yong-Pil
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2007.10a
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    • pp.751-753
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    • 2007
  • Organic field-effect transistors (OFETs) are of interest for use in widely area electronic applications. We fabricated a copper phthalocyanine (CuPc) based field-effect transistor with different metal electrode. The CuPc FET device was made a top-contact type and the substrate temperature was room temperature. The source and drain electrodes were used an Au and Al materials. The CuPc thickness was 40nm. and the channel length was $50{\mu}m$, channel width was 3mm. We observed a typical current-voltage (I-V) characteristics in CuPc FET with different electrode materials.

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Synthesis of $\beta$-$Ga_2$$O_3 Nanobelts and Nanoparticles from Mechanically Ground GaN Powders with Different Thermal Annealing Atmospheres (기계적으로 연마한 GaN 분말로부터 열처리 분위기를 달리한 $\beta$-$Ga_2$$O_3 나노벨트 및 나노입자의 합성)

  • Kim, Byung-Cheul;Sun, Kyu-Tae;Park, Kwang-Soo;Im, Ki-Joo;Noh, Tae-Yong;Nahm, Sahn;Sung, Man-Young;Kim, Sang-Sig
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.12
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    • pp.965-971
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    • 2001
  • $\beta$-Ga$_2$O$_3$ nanobelts and nanoparticles were synthesized from mechanically ground GaN powders with thermal annealing in a nitrogen atmosphere and an oxygen atmosphere, respectively. The study of field emission scanning electron microscopy (FESEM) on the microstructures of nanomaterials revealed that the nanobelts synthesized in the nitrogen atmosphere are with the range of 20~1000nm width and 10 ~100nm thickness, and that nanomaterials are nanoparticles with 20~50nm radius obtained by thermal annealing in an oxygen atmosphere. The crystal structure of the $\beta$-Ga$_2$O$_3$ nanobelts and nanoparticles was in this study investigated by X-ray diffractometer (XRD) and high-resolution transmission electron microscope (HRTEM). The formation processes of the nanobelts and nanoparticles will be discussed in this paper.

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Preparation and Stability of Microemulsion Containing Quaternary Ammonium Salt (4급 암모늄염을 함유한 마이크로에멀젼의 제조 및 안정성)

  • Lee, Jang-Weon;Jeong, Noh-Hee
    • Journal of the Korean Applied Science and Technology
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    • v.20 no.1
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    • pp.44-50
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    • 2003
  • We studied on the preparation and evaluation of O/W type microemulsion containing "wax, liquid paraffine and quaternary ammonium salt". And also it was obtained to stability of microemulsions by mono ethylene glycol(MEG) addition. The microemulsions were generally prepared at 96${\sim}$97$^{\circ}C$ by the phase inversion method. We used polyoxyethylene(20) sorbitan monooleate(POE(20)SMO) and distearyl dimethyl ammonium chloride(D.D.A.C.) as the emulsifiers at microemulsion preparation. From the results, we could get best condition for microemulsion preparation, in case of oil phase, montanic ester wax ; 1.1wt%, paraffine wax ; 1.1wt%, liquid paraffine ; 3.1wt%, propylene glycol ; 0.6wt% and ethylene glycol monobutyl ether ; 0.6wt%, when the ratio(wt%) of D.D.A.C. and POE(20)SMO were 2 : 3. And also we could obtained that the distributed particle size of the final microemulsions were about 8${\pm}$1.5nm and the mean particle size was 7${\pm}$0.5nm. We got following results from final microemulsions that the percent of transmittance; 96${\sim}$98% at 700nm. And the microemulsion blended with MEG of 5${\sim}$15wt% showed smaller particle size and more stable distribution than non-containing MEG.

Investigation of friction effects between needles patterned using laser and elastomer (레이저에 의해 패터닝 된 바늘과 탄성중합체와의 마찰 효과)

  • Kim, Jae-Gu;Ro, Seung-Kook;Park, Jong-Kweon;Cho, Sung-Hak;Whang, Kyung-Hyun
    • Laser Solutions
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    • v.15 no.3
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    • pp.1-6
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    • 2012
  • The friction force of patterned needle in elastomer have been investigated to verify the application for bio and plastic industry. The micro pattern on the needle surface were prepared by 266 nm, 20 ns laser and 800 nm, 220 fs laser, which were able to generate the different surface roughness. The friction force was measured by the load cell of 10 N capacity. As the results, the friction force of no patterned needle is almost constant during the needle penetrates the silicone rubber sample. However, the needle having asperities shows the variation of the friction force. The higher the surface roughness is, the smaller the friction force is until the surface roughness is very high. In our experiment conditions, the reduction of the friction force by 20 % compared to no pattern needle was achieved with straight and $50{\mu}m$ discrete line generated by 266 nm, 20 ns laser.

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Mechanical Property Evaluation of Diamond-like Carbon Coated by PE-CVD (PE-CVD방법을 이용한 DLC 박막의 기계적특성 평가)

  • Kang Seog Ju;Yi Jin-Woo;Kim Seock Sam
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2003.11a
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    • pp.368-376
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    • 2003
  • In this research, DLC thin films are produced as several hundred nm thickness by PE-CVD method. And then these thin films are estimated tribological characteristics to find out useful possibilities as a protecting film for high-quality function and life extension at MEMs by mechanical properties observation . These are measured thickness and residual stress of DLC coating. Compared after measuring friction coefficient, adhesion force, hardness, cohesive force of coating films. As results all test, we can decide several conclusions. First, friction coefficient decreased, as the load increased. otherwise, friction coefficient increased, as thickness of coating film increased under low load$(1\~50mN)$. Secod, adhesion force increased as thickness of coating films. Third, hardness of coating film is affected by substrate coating film when it is less than thickness of 300nm and it has general hardness of DLC coating film when it is more than thickness of 500nm. Fourth, cohesive force of coating film is complexly affected by hardness, adhesion force, residual stress, etc.

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고굴절률 PECVD SiNx 박막의 성장 및 그 표면특성 분석

  • Chu, Seong-Jung;Jeong, Jae-Uk;Jeong, Ui-Seok;Park, Jeong-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.121-122
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    • 2011
  • 광도파로 기반 센서의 성능을 개선시키기 위해서는 코어와 클래딩 층의 굴절률 차를 크게 하여 표면감도를 향상시켜야 한다. 이를 위해 센서용 광도파로 코어 층을 위한 고굴절률 SiNx 박막을 플라즈마 화학기상증착(PECVD, plasma enhanced chemical vapor deposition)법을 이용하여 성장한 후 그 표면특성을 분석하였다. 이 때 플라즈마 화학기상증착 공정 조건 중 NH3 가스를 제외하여 Si 성분이 많은 고굴절률 SiNx 박막의 성장을 유도하고 He/SiH4 가스유량비를 0에서 100까지 변화시켜 SiNx 박막의 표면거칠기를 제어하였다. Si기판 위에 SiNx 박막을 10분 성장 후 BOE(buffered oxide etchant)로 선택식각하여 그 박막두께를 alpha step으로 측정하는 방법으로 He/SiH4 가스유량비 조건별 박막성장률을 계산하였다. 그 결과 He/SiH4 가스유량비 증가함에 따라 박막성장률이 33 nm/min에서 19 nm/min으로 선형적인 감소함을 알 수 있었다. 박막두께가 190 nm가 되도록 He/SiH4 가스유량비 조건별 SiNx 박막을 성장한 후 그 표면특성을 AFM (atomic force microscope)으로 관찰하였다. 이를 통해 He/SiH4 가스유량비가 50일 때 SiNx 박막의 표면거칠기가 최소가 됨을 알 수 있었다.

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Ferroelectric ultra high-density data storage based on scanning nonlinear dielectric microscopy

  • Cho, Ya-Suo;Odagawa, Nozomi;Tanaka, Kenkou;Hiranaga, Yoshiomi
    • Transactions of the Society of Information Storage Systems
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    • v.3 no.2
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    • pp.94-112
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    • 2007
  • Nano-sized inverted domain dots in ferroelectric materials have potential application in ultrahigh-density rewritable data storage systems. Herein, a data storage system is presented based on scanning non-linear dielectric microscopy and a thin film of ferroelectric single-crystal lithium tantalite. Through domain engineering, we succeeded to form an smallest artificial nano-domain single dot of 5.1 nm in diameter and artificial nano-domain dot-array with a memory density of 10.1 Tbit/$inch^2$ and a bit spacing of 8.0 nm, representing the highest memory density for rewritable data storage reported to date. Sub-nanosecond (500psec) domain switching speed also has been achieved. Next, long term retention characteristic of data with inverted domain dots is investigated by conducting heat treatment test. Obtained life time of inverted dot with the radius of 50nm was 16.9 years at $80^{\circ}C$. Finally, actual information storage with low bit error and high memory density was performed. A bit error ratio of less than $1\times10^{-4}$ was achieved at an areal density of 258 Gbit/inch2. Moreover, actual information storage is demonstrated at a density of 1 Tbit/$inch^2$.

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Synthesis of 100 nm BaTiO3 by Solid-state Reaction (고상법에 의한 100 nm BaTiO3 분말의 합성)

  • Kim, Jung-Hwan;Jung, Han-Seong;Cho, Joon-Yeob;Hong, Jeong-Oh;Kim, Young-Tae;Hur, Kang-Heon
    • Journal of the Korean Ceramic Society
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    • v.46 no.2
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    • pp.170-174
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    • 2009
  • $BaTiO_3$ powder was synthesized by the solid-state reaction of fine $BaTiO_3$ and $TiO_2$ raw materials. Fine grinding media of 50 and 300 microns were used for obtaining fine particulate mixture of $BaTiO_3$ and $TiO_2$ with high homogeneity. Effect of the size of grinding media on the synthesis mechanism of $BaTiO_3$ was discussed on the basis of the particulate morphology and thermogravimetry data for the mixture powders. By using the finer grinding media, $BaTiO_3$ was formed at the lower temperature and the particle size with the relatively narrower distribution could be obtained. $BaTiO_3$ powder with the average size of 100 nm was synthesized by the solid reaction in vacuum atmosphere.

Synthesis of NaCaLa(MoO4)3:Ho3+/Yb3+ Phosphors via Microwave Sol-Gel Route and Their Upconversion Photoluminescence Properties

  • Lim, Chang Sung
    • Korean Journal of Materials Research
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    • v.26 no.7
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    • pp.363-369
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    • 2016
  • $NaCaLa_{1-x}(MoO_4)_3:Ho^{3+}/Yb^{3+}$ ternary molybdates with proper doping concentrations of $Ho^{3+}$ and $Yb^{3+}$ (x = $Ho^{3+}+Yb^{3+}$, $Ho^{3+}$ = 0.05 and $Yb^{3+}$ = 0.35, 0.40, 0.45 and 0.50) were successfully synthesized by microwave sol-gel method. Well-crystallized particles formed after heat-treatment at $900^{\circ}C$ for 16 h showed a fine and homogeneous morphology with particle sizes of $3-5{\mu}m$. Under excitation at 980 nm, the UC intensities of the doped samples exhibited strong yellow emissions based on the combination of strong emission bands at 520-nm and 630-nm emission bands in the green and red spectral regions, respectively. The optimal $Yb^{3+}:Ho{3+}$ ratios were obtained at 9:1 and 10:1, as indicated by the composition-dependent quenching effect of the $Ho^{3+}$ ions. The pump power dependence of the upconversion emission intensity and the Commission Internationale de L'Eclairage chromaticity coordinates of the phosphors were evaluated in detail.