• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.7
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• pp.82-88
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• 1993

This paper describes fabrication of relative type capacitive pressure sensor to be in great demand for many fields. The fabricated sensor consists of two parts` a sensing diaphragm and a pyrox glass cover. The sensor size is 4.5${\times}3.4mm$^{2})$ and 400$\mu$m thick. To improve the nonlinearity, this sensor is designed a rectangular silicon diaphragm with a center boss structure, and in order to improve the temperature characteristics of the sensor in a packaging process, the sensing element is mounted on the pyrex glass support. Some suggestions toward the design and fabrication of improved sensors have been presented. The zero pressure capacitance, Co of sensor is 26.57pF, and the change of capacitance, ${\Delta}$C is 1.55pF from 0Kgf/Cm$^{2}$ to 1Kgf/Cm$^{2}$ at room temperature. The nonlinearity of the sensor output with center boss diaphragm is 1.29%F.S., and thermal zero shift and thermal sensitivity shift is less than 1.43%F.S./$^{\circ}C$and 0.14% F.S./$^{\circ}C$, respectively.

• Journal of Power System Engineering
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• v.10 no.4
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• pp.159-164
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• 2006

In recent, the marine engine of a large size is being realized a lower speed, longer stroke and a small number of cylinders for the energy saving. Consequently the variation of rotational torque became larger than former days because of the longer delay-time in fuel oil injection process and an increased output per cylinder. It was necessary that algorithms have enough robustness to suppress the variation of the delay-time and the parameter perturbation. This paper shows the structure of hybrid F-NFC against the delay-time and the perturbation of engine parameter as modeling uncertainties, and the design of the robust speed controller by hybrid F-NFC for the engine. And, The Parameter values of linear equation are determined by RC-GA for F-NFS. The hybrid F-NFC is combined the F-NFC and PID controller for filling up each.

• Korean Journal of Materials Research
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• v.25 no.12
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• pp.694-702
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• 2015

Nd-Fe-B permanent magnets have been used in a wide variety of applications because of their high magnetic flux density. So, demand for neodymium has been increasing in worldwide. In this study, an electrowinning process was performed in $LiF-NdF_3-Nd_2O_3$ high temperature molten salts. However, a corrosion resistant material for use in the molten salt must be found for stable operation because of the harsh corrosion environment of the electrowinning process. Therefore, for this paper, boron nitride(BN), aluminum nitride(AlN), and silicon nitride($Si_3N_4$) were selected as protective and structural materials in the high temperature electrolyte. To investigate the characteristics of BN, AlN, and $Si_3N_4$, in molten salts, materials were immersed in the molten salts for 24, 72, 120, and 192 hours. Also, surface condition and stability were investigated by SEM and EDS and corrosion products were calculated by HSC chemistry. As a result, among BN, AlN, and $Si_3N_4$, AlN was found to show the best protective material properties.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.5
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• pp.389-395
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• 2005

The etching technology of the high aspect ratio contact(HARC) is necessary at the critical contact processes of semiconductor devices. Etching the $SiO_{2}$ contact hole with the sub-micron design rule in manufacturing VLSI devices, the unexpected phenomenon of 'profile tilting' or 'bottom distortion' is often observed. This makes a short circuit between neighboring contact holes, which causes to drop seriously the device yield. As the aspect ratio of contact holes increases, the high C/F ratio gases, $C_{4}F_{6}$, $C_{4}F_{8}$ and $C_{5}F_{8}$, become widely used in order to minimize the mask layer loss during the etching process. These gases provide abundant fluorocarbon polymer as well as high selectivity to the mask layer, and the polymer with high sticking yield accumulates at the top-wall of the contact hole. During the etch process, many electrons are accumulated around the asymmetric hole mouth to distort the electric field, and this distorts the ion trajectory arriving at the hole bottom. These ions with the distorted trajectory induce the deformation of the hole bottom, which is called 'profile tilting' or 'bottom distortion'. To prevent this phenomenon, three methods are suggested here. 1) Using lower C/F ratio gases, $CF_{4}$ or $C_{3}F_{8}$, the amount of the Polymer at the hole mouth is reduced to minimize the asymmetry of the hole top. 2) The number of the neighboring holes with equal distance is maximized to get the more symmetry of the oxygen distribution around the hole. 3) The dual frequency plasma source is used to release the excessive charge build-up at the hole mouth. From the suggested methods, we have obtained the nearly circular hole bottom, which Implies that the ion trajectory Incident on the hole bottom is symmetry.

• Transactions on Electrical and Electronic Materials
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• v.15 no.2
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• pp.81-86
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• 2014

The process parameter in optimized KOH alkali activation of soft carbon series coke material in high purity was set with DOE experiments design. The activated carbon was produced by performing the activation process based on the set process parameters. The specific surface area was measured and pore size was analyzed by $N_2$ absorption method for the produced activated carbon. The surface functional group was analyzed by Boehm method and metal impurities were analyzed by XRF method. The specific surface area was increased over 2,000 $m^2/g$ as the mixing ratio of activation agent increased. The micro pores in $5{\sim}15{\AA}$ and surface functional group under 0.4 meq/g were obtained. The contents of the metal impurity in activated carbon which is the factor for reducing the electrochemical characteristics was reduced less than 100 ppm through the cleansing process optimization. The electrochemical characteristics of activated carbon in 38.5 F/g and 26.6 F/cc were checked through the impedance measuring with cyclic voltammetry scan rate in 50~300 mV/s and frequency in 10 mHz ~100 kHz. The activated carbon was made in the optimized activation process conditions of activation time in 40 minutes, mixing ratio of activation agent in 4.5 : 1.0 and heat treatment temperature over $650^{\circ}C$.

• Journal of the Korean Wood Science and Technology
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• v.39 no.2
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• pp.179-186
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• 2011

In an effort to understand the hydrolytic degradation process of cured urea-formaldehyde (UF) resins responsible for the formaldehyde emission of wood-based composite panels, this study analyzed the influence of acid hydrolysis on the morphology of cured UF resins with different formaldehyde/urea (F/U) mole ratios such as 1.6, 1.4, 1.2 and 1.0. Field emission-scanning electron microscopy (FE-SEM) was employed to observe both exterior and fracture surfaces on thin films of cured UF resins before and after the etching with hydrochloric acid as a simulation of the hydrolytic degradation process. FE-SEM images showed that the exterior surface of cured UF resin with the F/U mole ratio of 1.0 had spherical structures after the acid hydrolysis while the other cured UF resins were not the case. However, the fracture surface observation showed that all the samples possessed spherical structures in the cured state of UF resins although their occurrence and size decreased as the F/U mole ratio increased. For the first time, we found the spherical structures in cured UF resins of higher F/U mole ratio of 1.4. After the acid hydrolysis, the spherical structures became a much predominant at the fracture surface. These results indicated that the spherical structures in cured UF resinswere much more resistant to the hydrolytic degradation by the acid than amorphous region.

• Journal of Korean Academy of Nursing
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• v.34 no.2
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• pp.362-371
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• 2004

Purpose: The study was performed to identify the process of change, decisional balance and self-efficacy corresponding to the stage of exercise behavior change based on a Transtheoretical Model in middle aged women. Method: The subjects consisted of 317 women by convenience sampling residing in city B. The collected data were analyzed using one-way ANOVA, Scheffe test, and Discriminant analysis by SPSS/WIN program. Result: The subjects were distributed in each stage of change of exercise behaviors: 53 subjects (16.7%) in the precontemplation stage, 86 subjects (27.1%) in the contemplation stage, 88 subjects (27.8%) in the preparation stage, 51 subjects (16.1%) in the action stage and 39 subjects(12.3%) in the maintenance stage. Analysis of variance showed that consciousness raising (F=24.96, p=.00), environmental reevaluation (F=7.l3, p=.00), self reevaluation (F=19.47, p=.00), dramatic relief (F=15.22, p=.00), social liberation (F=4.26, p=.00), counter conditioning (F=26.44, p=.00), a helping relationship (F=13.l7, p=.00), reinforcement management (F=21.25, p=.00), self liberation (F=27.70, p=.00), stimulus control (F=13.49, p=.00), pros (F=14.40, p=.00) and self-efficacy (F=39.9l, p=.00) were significantly associated with the stages of change of exercise behaviors. Through discriminant analysis, it was found that ‘stimulus control’ was the most influential variable in discriminating the five stages of change. Conclusion: This study can provide the basis of a staged matching exercise program using TTM for more effective and useful intervention.

• Journal of Gifted/Talented Education
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• v.21 no.2
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• pp.337-356
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• 2011

The purpose of this study was to find out the effect of the Astronomical Learning Program Using IIM on Science Process Skills and Scientific Attitudes in the elementary scientific gifted students. For this purpose, this research developed the Astronomical Learning Program Using IIM. This program was totally consisted 7 lessen. There was 7 part in this program. It contained Select the subject (step 1), The aim settings (step 2), Collect the data (step 3), Doing inquiry (step 4), An aim evaluation (step 5), Making a report (step 6), Announcing (step 7). To find the effect of the Astronomical Learning Program Using IIM on Science Process Skills and Scientific Attitudes in the elementary scientific gifted students. 20 participants was selected. These students were attended at a scientific gifted class(3rd grade) of an elementary school located in Ulsan. First, Science Process Skills test and Scientific Attitudes test was used to find the effect of the Astronomical Learning Program Using IIM. And the results were analyzed by SPSS WIN 18.0. The results of this study were as follows. First, the Astronomical Learning Program Using IIM was a positive effects on Science Process Skills of elementary scientific gifted students (F=4.920, p=.021). Second, the Astronomical Learning Program Using IIM was a positive effects on Scientific Attitudes of the elementary scientific gifted students (F=11.244, p=.001). According to this research, the Astronomical Learning program Using IIM was verified to improve Science Process Skills and Scientific Attitudes on the elementary scientific gifted students. It will be contribute on the curriculum construction of the gifted school or gifted class.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.459-459
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• 2012

Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

• Journal of Applied Biological Chemistry
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• v.62 no.1
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• pp.93-100
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• 2019

The root of Panax ginseng is used in ethnomedicine throughout eastern Asia and various recent studies have proved that Panax ginseng has inhibitory effects on cardiovascular disease. Each factor causing cardiovascular disease is known to have a very complex process which is achieved by a diverse number of mechanisms. Among these factors, platelets are the most important because they directly participate in thrombogenesis. Therefore, inhibiting the activity of platelets is an essential element for prevention of cardiovascular diseases. Our previous study showed the antiplatelet effects of Korean red ginseng extract and two of its components, ginsenoside Rg3 and ginsenoside Ro. However, the inhibitory mechanism of other ginsenosides remains unclear. Therefore, we investigated the inhibitory mechanism of ginsenoside F4 (G-F4) from Korean red ginseng on the regulation of signaling molecules involved in human platelet aggregation. With the use of G-F4, collagen-induced human platelet aggregation was inhibited in a dose-dependent manner, and it suppressed collagen-induced elevation of $[Ca^{2+}]_i$ mobilization through elevated phosphorylation of inositol 1, 4, 5-triphosphate receptor I ($Ser^{1756}$). In addition, G-F4 inhibited fibrinogen binding to ${\alpha}IIb/{\beta}_3$ during collagen-induced human platelet aggregation. Thus, in the present study, G-F4 showed an inhibitory effect on human platelet activation, suggesting its potential use as a new natural medicine for preventing platelet-mediated cardiovascular diseases.