• 제목/요약/키워드: 450 mm

검색결과 396건 처리시간 0.037초

실리콘기판위에 양극접합된 MLCA의 기계적 특성 (Mechanical Characteristics of MLCA Anodic Bonded on Si wafers)

  • 김재민;이종춘;윤석진;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.160-163
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    • 2003
  • This paper describes on anodic bonding characteristics of MLCA(Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100 %, input power $1\;/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-008 %FS. Moreover, any damages or separation of MICA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MICA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

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Chitosan과 L-lysine의 공중합체로 부터 인공피부의 제조와 평가 (Synthesis and Evaluation of Copoly(chitosan-g-L-lysine) for Wound Covering Material)

  • 김계용;민동선;박성호;이선용;조양자;정용훈;김정목
    • 대한의용생체공학회:학술대회논문집
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    • 대한의용생체공학회 1989년도 춘계학술대회
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    • pp.7-8
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    • 1989
  • The graft copolymer of chitosan with amino acid, L-lysine was synthesized by heterogeneous copolymerization and was evaluated as an artificial skin. The mechanical properties under dry and wet state, water content, water vapor transmittance rate and biodegradability were measured. The tensile strength and elongation under wet state ranged $0.3-0.5\;kg/mm^2$, 10-13%, respectively. Water vapor transmittance rate ranged $450-500\;g/m^2{\cdot}day$ like that of the normal skin. The weight loss of prepared membrane by protease IV was measured for the degree of biodegradation. The degree of biodegradation was around 15% and after 4 days it was slow. Biocompatibility was evaluated by studying the attachment of human fibroblast on the prepared membrane surface.

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냉간압연된 Cu-3.0Ni-0.7Si 합금의 어닐링에 따른 두께방향으로의 미세조직 및 기계적 특성 변화 (Change in Microstructure and Mechanical Properties through Thickness with Annealing of a Cu-3.0Ni-0.7Si Alloy Deformed by Cold Rolling)

  • 이성희;한승전
    • 한국재료학회지
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    • 제28권2호
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    • pp.113-117
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    • 2018
  • Effects of annealing temperature on the microstructure and mechanical properties through thickness of a cold-rolled Cu-3.0Ni-0.7Si alloy were investigated in detail. The copper alloy with thickness of 3 mm was rolled to 50 % reduction at ambient temperature without lubricant and subsequently annealed for 0.5h at $200{\sim}900^{\circ}C$. The microstructure of the copper alloy after annealing was different in thickness direction depending on an amount of the shear and compressive strain introduced by rolling; the recrystallization occurred first in surface regions shear-deformed largely. The hardness distribution of the specimens annealed at $500{\sim}700^{\circ}C$ was not uniform in thickness direction due to partial recrystallization. This ununiformity of hardness corresponded well with an amount of shear strain in thickness direction. The average hardness and ultimate tensile strength showed the maximum values of 250Hv and 450MPa in specimen annealed at $400^{\circ}C$, respectively. It is considered that the complex mode of strain introduced by rolling effected directly on the microstructure and the mechanical properties of the annealed specimens.

철강재료 용접에서 보조가스가 레이저플라즈마와 용입특성에 미치는 영향 (Effect of Assist Gas on Laser Induced Plasma and Bead Formation in Welding of Structural Steel by CW Nd:YAG Laser)

  • 김기철;신현준
    • Journal of Welding and Joining
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    • 제20권3호
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    • pp.109-115
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    • 2002
  • In this study high power Nd:YAG laser welding of structural steel was investigated. For the test steel blocks of $50{\times}50{\times}200mm$ were cut and machined, and bead-on-plate weld was made on the machined surface. Argon, nitrogen, helium, dry air or mixed gases were used to find the effect of shielding conditions on the bead formation. Results demonstrated that there were Fe I rich region and Fe II rich region in the laser induced plasma column based on the spectral analysis with S-2000 field spectrometer The Fe I region was located at the root of the column near keyhole opening. On the other hand, Fe II region was found at the middle of the plasma column. In the Nd:YAG laser welding, Fe I region emitted continuum which had peak value at wave length of around 710nm, and Fe II region had the peak at 580nm. In the welding of steel by $CO_2$ laser, however, no continuum was observed. There showed two groups of strong spikes in the $CO_2$ laser welding; the first group was displayed at the wave band of 450-560nm. This spike group emitted stronger intensity of light and sharper peaks than those group at 680-800nm.

실험 데이터를 이용한 클럽 페이스 움직임 분석 프로그램 개발 (Development of a Program That Computes the Position of the Club Face Based on the Experimental Data)

  • 박진;신기훈
    • 한국운동역학회지
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    • 제20권2호
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    • pp.231-237
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    • 2010
  • The moving trajectory of a golf ball is mainly determined by the angles of the clubface and the trajectory of the club shaft. This paper presents a computer program for analyzing the position and angles of the club while the club moves in a circular motion. For this purpose, a mathematical algorithm was developed and implemented on the experimental data(5 m and 10 m carries) using VC++ and OpenGL. A skilled female golfer(174 cm, 65 kg, 0 handicap) was participated in data collection for the short approach shots. An iron club(Titleist 52 degree, 91.5 cm length, 450 g mass), attached with five reflective markers(12 mm), was used to collect experimental data. However, exact 3D coordinates and angles of the clubface are not directly calculated from measured data. A reverse engineering platform(Minolta Vivid910 hardware and Rapidform software) was thus employed to acquire the scanned data of the clubface. The scanned data and measured data were first aligned by applying appropriate coordinate transformations, and then exact coordinates and angles of clubface could be obtained at each position during circular motion. The program(Club Motion Analysis 1.0) exports the open, heel, loft angles of the club.

강자성체를 이용한 이중구조의 고균일도 플라즈마 발생장치

  • 김현준;조정희;채희선;조성원;정진욱
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.492-492
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    • 2013
  • 반도체 공정을 위한 원격 유도 결합 플라즈마(remote ICP)에서 플라즈마 균일도를 향상하는 연구를 진행하였다. 본 연구에서는고 균일도 플라즈마 발생을 위해 단면적이 다른 2개의 반응 용기를 상부와 하부에 설치하였으며, 각각의 반응 용기 외곽에 방전 코일이 위치하도록 구성하였다. 상부의 반응 용기는 외곽에 유도 코일을 권선하였고, 하부의 반응 용기는 고밀도의 플라즈마 생성을 위해 강자성체를 이용하여 권선하였으며, 강자성체는 쿼츠관을 둘러 싼 구조로 되어 있다. 0.5-1 Torr 공정 압력 범위의 아르곤 기체에서 전체 2500 W의 전력을 인가하였고, 임피던스 정합회로로부터 각각 병렬로 연결된 방전 코일에 전력이 분배되어 인가되는 구조로 설계하였다. 반도체 공정을 위한 플라즈마 균일도를 분석하기 위해 wafer의 위치에서 부유 탐침법을 적용하여 wafer 중심부로부터 반경 방향으로 위치를 변화시키며 플라즈마 밀도와 전자온도를 측정하였다. 동일한 공정 조건에서 하부에 강자성체를 사용하여 권선한 이중 구조의 경우 하나의 방전 코일을 이용한 구조 대비 플라즈마 밀도가 증가하였고, 플라즈마 균일도가 크게 향상됨을 보였다. 강자성체를 이용한 하부 코일에 의해 wafer 외곽 부분의 밀도가 높은 분포를 갖는 플라즈마가 형성되고, 상부의 유도코일에 의해 wafer 중심부에 밀도가 높은 플라즈마가 형성되어 wafer의 플라즈마 균일도가 개선된다. 또한, 강자성체를 이용한 하부 코일에 의해 고밀도의 플라즈마가 형성되므로 반도체 공정을 위한 장비에서 플라즈마 균일도의 개선과 밀도의 향상으로 대면적 Dry Strip 공정 (450mm)에 적용 가능하다.

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Characterization of Cast-Forging Process in Hypereutectic Al-15wt.%Si alloy

  • Kim, Eok-Soo;Lim, Kyung-Mook;Hong, Young-Myung;Han, Yoon-Sung;Lee, Kwang-Hak
    • 한국주조공학회지
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    • 제27권5호
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    • pp.212-216
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    • 2007
  • 과공정 Al-15wt.%Si 합금의 주단조 공정의 적용을 위해 주조 예비성형체를 제작하는 과정에서 P와 Sr을 첨가하여 과공정 Al-Si 합금의 응고과정에서 발생하는 초정 Si과 공정 Si의 미세화 개량처리를 행하였다. 미세화 조직의 변화에 따른 기계적성질 및 단조성을 조사하였으며, 미세화제로 첨가된 0.075wt.% Sr과 0.1wt.% P의 첨가에서 가장 효과적인 미세한 조직을 얻을 수 있었고, 인장강도와 연신율은 이들 첨가원가의 증가에 따라 향상되는 결과를 보였으나 일정 이상의 첨가에서는 더 이상의 향상은 없었다. 단조성 평가를 위한 열간가공 재현실험에서는 $450^{\circ}C$에서 약60N/mm2의 하중이 필요함을 알 수 있었다. 열간단조 및 열처리 후의 인장강도와 연신율은 보다 많은 향상을 가져왔으며, 이는 압축가공에 의한 주조 예비성형체 내부에 잔존하던 주조결함의 제어와 열처리에 의한 조직의 개량 및 균질화 효과에 의한 것으로 판단된다.

박육주철의 공정 셀 수와 칠 깊이에 미치는 두께, 기본 원소 및 접종제 첨가 원소의 영향 (Effects of Thickness, Base Element and Additive to Inoculant on the Number of Eutectic Cells and Chill Depth of Thin-Section Gray Cast Iron)

  • 김태형;이우종;권해욱
    • 한국주조공학회지
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    • 제32권6호
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    • pp.261-268
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    • 2012
  • The effects of thickness, base element and additive to inoculant on the number of eutectic cells and chill depth of thin-section gray cast iron were investigated. Meanwhile the number of eutectic cells increased by inoculation, chill depth decreased. The former decreased and the latter increased by holding the melt at the temperature range between 1,450 and $1,500^{\circ}C$. The former was more for the thinner casting with the thickness of 5 mm than the other. The result of thermal analysis coincided well with the change of macrostructure. The former increased and the latter decreased with the increased contents of carbon, silicon and the silicon content by inoculation. The former decreased and the latter increased with increased manganese content. The number of eutectic cells decreased as the amounts of rare earth and the bismuth added to this inoculant increased. With the addition of sulfur of 0.10 wt% of the weight of this inoculant, the maximum number of eutectic cells was obtained.

측방변위판막술 후 재발된 하악 전치부 순면 치은퇴축의 유리치은이식술을 이용한 치근 피개: 증례보고 (Free gingival graft for treatment of gingival recession relapsed after laterally positioned flap surgery: a case report)

  • 주명재;차재국;이중석;정의원
    • 대한치과의사협회지
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    • 제55권7호
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    • pp.450-456
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    • 2017
  • The purpose of this case report is to present a case of free gingival graft for treatment of mandibular incisor labial gingival recession relapsed after laterally positioned flap surgery. A 22 year-old female patient with discomfort and labial gingival recession on left mandibular central incisor was treated. The patient had been treated root coverage on same site by laterally positioned flap surgery, but treated site had relapsed in one month. Exposed root surface was covered by free gingiva from left palatal area. Although gingival color did not completely match with adjacent gingiva, more than 5mm keratinized gingiva was attained. The patient showed no further recurring pain and recession on gingiva after 5 months from the surgery. In conclusion, the root coverage with gain of keratinized gingiva could be achieved through free gingival graft from palate on relapsed gingival recession.

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NbTi 초전도 선의 접합 조건 변화에 따른 임계전류 특성 향상 연구 (Improvement of superconducting joint between NbTi filamentary wires)

  • 하동우;심기덕;장현만;하홍수;오상수;권영길;류강식
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.1521-1523
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    • 2000
  • NbTi/Cu superconducting wires were jointed inserting the NbTi filaments into Cu/NbTi sleeve and pressing it. When the NbTi filaments were inserted into Cu/NbTi sleeve additional NbTi filaments were inserted together to increase the numbers of filaments in the hole of sleeve. The thickness of sleeves and dimples were changed to get optimal factor for high Ic of joint Critical current of the joint with additional NbTi Filaments and 17mm thickness of dimple was 450 A at 4.2K, 0.5T.

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