Fabrication Method of 3D Feed Horn Shape MEMS Antenna Array Using MRPBI(Mirror Reflected Parallel Beam Illuminator) with Inclined X-Y-Z Stage (MRPBI를 이용한 3D Feed Horn Shape MEMS Antenna Array의 제조)
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- Proceedings of the KIEE Conference
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- 2001.07c
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- pp.1914-1917
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- 2001