• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1914-1917
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• 2001

3D Feed Horn Shape MEMS Antenna Array는 적외선 이미지 소자 또는 Tera hertz band 등에서 많은 응용을 할 수 있는 장점을 가진 MEMS 구조체 이다. 하지만 일반적인 MEMS 공정을 이용해서 3D Feed Horn Shape MEMS antenna array를 구현하기는 적합하지 않았다. 본 논문에서는 마스크와 웨이퍼가 일체 된 형태의 경사된 척이 초 저속으로 회전하면서 노광을 할 수 있는 새로운 방식과 미러 반사구조를 이용해서 평행광을 얻을수 있는 노광장치 (MRPBI : Mirror Reflected Parallel Beam Illuminator) System제작방법을 제안하였다. 3D Feed Horn Shape MEMS Antenna의 구조적인 high apect ratio의 특성에 의해서 SU-8과 PMER Negative Photo resist를 이용한 기본적인 실험을 통해 3D 구조체의 구현 가능성을 증명하였다. 또한 Microbolometer의 성능향상을 위한 이론적인 3D MEMS Antenna Model들을 HFSS(High Frequency Structure Simulator)을 이용해서 그 최적구조를 제안하고 3D MEMS Antenna Gain 값을 비교 분석하였다.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.11 no.6
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• pp.969-975
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• 2000

New class of three dimensional (3-D) micromachined microwave planar filters at K and Ka-band are presented using LIGA micro-machined process. The K-and Ka-band filters show wide bandpass characteristics of~36% and ~39% with the insertion loss 1.26dB at 19.11GHz and 1.7dB at GHz, respectively. These filters can be applicable in high power MMIC of MIMIC.

• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.4
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• pp.170-175
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• 2004

A three dimensional feed horn 10${\mu}{\textrm}{m}$ wavelength infrared antenna has been suggested, fabricated and characterized. It was applied to an infrared detector for efficient collecting of IR radiation and for reducing background noise. The horn antenna size was designed for maximum antenna directivity. The 3D feed horn antenna mold was fabricated using rotating and tilted illumination while the antenna plate was constructed by way of electroplating. Antenna characteristics were measured by coupling with a microbolometer. Measurement results indicated that the directivity of the antenna is 16.1㏈ and the background noise is reduced by approximately two times.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.12 no.1
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• pp.27-36
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• 2001

In this paper, micromachined millimeter-wave cavity resonators ar presented. One-port and two-port cavity resonators at Ka-band are designed using 3D design software, HP $HFSS^{TM}$ ver. 5.5 Cavity resonators are fabricated on Si substrate, which is etched down for the cavity, bonded with a Quartz wafer in which metal patterns for the feeding line coupling slot are formed. One-port resonator shows the resonant frequency of 39.34 GHz, the return loss of 14.5 dB, and the loaded $Q(Q_{L})$ of 150. Two-port cavity resonator shows the resonant frequency of 39 GHz, the insertion and return losses of 4.6dB and 19,9dB, the loaded($Q_{L}$) and unloaded $Q(Q_{U})$) of 44.3 and 107, respectively.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.11 no.6
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• pp.952-958
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• 2000

다양한 구조위 트랜스미션 라인과 힌지들을 갖는 고주파용 마이크로머신드 용량성 스위치들이 새롭게 디자인되었고 전기도금 기술, 저온 공정기술, 그리고 건식 식각기술들을 이용하여 제작되었다. 특히, 집적화된 용량성 스위치들이 높은 스위칭 on/off ratio와 on 캐패시턴스를 갖도록 하기 위하여 고유전율을 갖는 SrTiO3라는 상유전체를 절연체로 사용하였다. 제작된 스위치들은 8V의 구동전압, 0.08dB의 삽입손실, 42dB의 높은 isolation, 600의 on/off ratio, 그리고 50pF의 on 캐패시턴스의 특성들을 갖는다.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.295-301
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• 2002

In this paper, solenoid-type 3-D passives (inductors and transformers) have been designed, fabricated, and characterized by using electroplating techniques, wire bonding techniques, multi-layer thick photoresist, and low temperature processes which are compatible with semiconductor circuitry fabrication. Two different fabrication approaches are performed to develop the solenoid-type 3-D passives and relationship of performance characteristics and geometry is also deeply investigated such as windings, cross-sectional area of core, spacing between windings, and turn ratio. Fully integrated inductor has a quality factor of 31 at 6 GHz, an inductance of 2.7 nH, and a self resonant frequency of 15.8 GHz. Bonded wire inductor has a quality factor of 120, an inductance of 20 nH, and a self resonant frequency of 8 GHz. Integrated transformers with turn ratios of 1:1 and n:l have the minimum insertion loss of about 0.6 dB and the wide bandwidth of a few GHz.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1899-1901
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• 2001

본 논문에서는 3차원 feed horn 안테나를 볼로미터에 결합함으로써 감지도(Detectivity)를 향상시킨 비가시광 영상 감지 소자를 제안하였다. Feed horn 안테나의 우수한 지향성(Directivity)를 통해서 주위의 잡음 성분을 제거함으로써 감지도의 향상을 확인할 수 있었다. 안테나와 볼로미터와의 결합 손실을 줄이기 위해서 볼로미터의 흡수층의 모양을 원형의 형태로 하였으며 크기도 안테나 폭과 일치를 시켰다. 또한 열적 고립 구조를 만들기 위한 지지 다리의 모양도 원형의 형태로 하여서 전체 길이를 증가 시켰으며 이로 인해 열전도도(Thermal conductance)를 $4.65{\times}10^{-8}$[W/K]까지 낮출 수 있었 다. 설계된 소자의 감지도는 $2.37{\times}10^{9}$[$cm\sqrt{Hz}/W$]을 나타내었으며 안테나 결합을 통한 감지도의 향상을 확인 할 수 있었다. 볼로미터의 제작은 MEMS 기술을 이용한 표면미세가공(Surface micromachining)법으로 열적 고립 구조체를 제작할 수 있으며 3차원 feed horn안테나는 SU-8이라는 음성 감광제를 경사회전노광시켜서 제작할 수 있다.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.178-182
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• 2007

This study represents the efficient depth measurement for 3-dimensional microsystems using the disparity histogram from stereo images. Implementation of user-friendly Windows program written in C++ involves the various methods for the stereo-image processing in which the minimization of matching-pixel error upon the unique point for stereo images was carried out as a pre-processing method. Even though MPC among various methods was adopted in the present measurement, the resulting measurements seem to require optimizations of the windows sizes and corrections of post-manipulation for stereo images. The present work using Windows program is promising to measure the 3-dimensional depth of micro-system efficiently in implementing the 3-dimensional structure of micro-systems.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.881-884
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• 2005

We present a microfabricated three-dimensional (3-D) hybrid biopolymer micro cantilever which can measure the contractile force of cardiomyocytes and analyze the force dependence on different types of surface. To make different conditions of the cell seeding surface, we fabricated the specific type of cantilever which was grooved on the surface. The presented cantilever was facilitated to measure bending of the cantilever and to calculate the contractile force of cardiomyocytes. Also, we demonstrate the dependence of the morphology for the cardiomyocytes seeded on a plain surface and a grooved surface. Finally, we show the dependence of force for the cardiomyocytes on a different surface.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.684-687
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• 2004

We have developed multi-layer passivation films of UV-polymerized film/inorganic composite film to improve the long lifetime of passivated OLEDs for very thin flat panel applications. Preliminary lifetime to half initial luminance ($L_{o}{\sim}\;3,000\;cd/m^2$) of order 300 Hr is achieved on the conventional encapsulated test pixel using a passive matrix drive at room temperature; 570 Hr lifetime is achieved on a de tested multi-layer passivated 9$mm^2$ test pixel.