Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process (현상공정에서 표면장력에 의한 극미세 3 차원 구조물의 변형거동 분석 및 저감방안에 관한 연구)
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- Transactions of the Korean Society of Mechanical Engineers A
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- v.32 no.4
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- pp.303-309
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- 2008