• 한국안광학회지
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• 제3권1호
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• pp.1-8
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• 1998

지주파 PECVD 방법으로 아세틸렌 분암비를 달리하면서 제작한 비정질 탄소 박막에서의 분광 특성을 조사하였다. Raman 분광으로부터 D 피크와 G 피크의 상대적인 세기로부터 $sp^3/sp^2$은 수소함량에 대한 경향성을 알 수가 있었으며, FTIR 분광으로부터 계산된 수소함량은 16~37 atm %, $sp^3/sp^2$d,s 0.22~1.44로 변화하였다. 이와 같은 분광특성에 의하여 최적의 아세틸렌 분압비는~15%임을 알 수가 있었다.

• 한국세라믹학회지
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• 제33권7호
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• pp.802-808
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• 1996

PbTiO3 thin films were fabricated onto MgO(100) single crystal substrate by reactive D. C magnetron sput-tering of Pb and Ti metal in an oxygen and argon gas mixture. The annealing of the thin films resulted in the decrease of both the c-axis orientation ratio and the lattice parameter. It is well known that the c-axis lattice parameter of thin film is dependent on the Pb/(Pb+Ti)ratio and the residual stress in the film The PbTiO3 thin films with a Pb/(Pb+T) ratio ranging from 0.45 to 0.57 were fabricated and annealed. The structure of the film the c-axis orientation ratio and the lattice parameter were not dependent on the Pb/(Pb+Ti) ratio before and after annealing. These experimental results proved that the decrease of the c-axis lattice parameter under the annealing conditions was due to the relaxation of the intrinsic stress in the film. This relaxation of the intrinsic stress caused the decrease of the c-axis orientation ratio and this phenomenon can be explained by c-axis growth lattice model.

• 한국재료학회지
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• 제13권8호
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• pp.497-502
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• 2003

Crystallographic characteristics and interfacial structures of $Al_2$$O_3$and $ZrO_2$dielectric films prepared by atomic layer chemical vapor deposition (ALCVD) were investigated at atomic scale by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (EDS)/electron energy-loss spectroscopy (EELS) coupled with a field-emission transmission electron microscope. The results obtained from cross-sectional and plan-view specimens showed that the $Al_2$$O_3$film was crystallized by annealing at a high temperature and its crystal system might be evaluated as either cubic or tetragonal phase. Whereas the $ZrO_2$film crystallized during deposition at a low temperature of ∼$300^{\circ}C$ was composed of both tetragonal and monoclinic phase. The interfacial thickness in both films was increased with the increased annealing temperature. Further, the interfacial structures of X$ZrO_2$$O_3$and $ZrO_2$films were discussed through analyses of EDS elemental maps and EELS spectra obtained from the annealed films, respectively.

• 열처리공학회지
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• 제22권5호
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• pp.290-297
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• 2009

In case of using Asymmetric Bipolar Pulsed DC (ABPD) power generator, thin film is efficiently deposited as ions are getting higher energy by suppressing target poisoning and electric arc. In this article, the mechanical properties of CNx thin films deposited on the STS 316L were compared with DC and ABPD power generators. The CNx thin films deposited with ABPD clearly improved wear resistance by higher ratio of sp3CN as compared with DC. Nb interlayer affected to increase the value of 10N of adhesion between CNx thin films and substrate. But, CNx thin films deposited with ABPD couldn't endure to wear load and decreased wear resistance as the films were too thinner than substrate. Nevertheless the higher substrate bias energy applied to perform the dense films, it wasn't shown benefits about the wear properties from DC sputtering. But, in case of using ABPD sputtering, the wear resistance was largely improved without changing morphology despite of thin films.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권8호
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• pp.325-329
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• 2003

Effects of thermal treatment on the structural properties of diamond-like carbon (DU) films were examined. The DLC films were deposited by using a modified filtered cathodic vacuum arc (FCVA) deposition system and by varying the negative substrate bias voltage, deposition time, and nitrogen flow rate. Thermal treatment on DLC films was performed using a rapid thermal annealing (RTA) process at $600^{\circ}C$ for 2min. Raman spectroscopy, x-ray photoemission spectroscopy (XPS), atomic force microscope (AFM), and surface profiler were used to characterize the I$_{D}$I$_{G}$ intensity ratio, sp$^3$ hybrid carbon fraction, internal stress, and surface roughness. It was found for all the deposited DLC films that the RTA-treatment results in the release of internal compressive stress, while at the same time it leds to the decrease of sp$^3$ fraction and the increase of I$_{D}$I$_{G}$ intensity ratio. It was also suggested that the thermal treatment effect on the structural property of DLC films strongly depends on the diamond-like nature (i.e., sp$^3$ fraction) of as-deposited film.ed film.

• 한국재료학회지
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• 제31권11호
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• pp.649-656
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• 2021

K_0.5Bi_0.5TiO₃ (KBT) thin films were prepared by sol-gel processing for future use in piezoelectric generators. It is believed that the annealing temperature of films plays an important role in the output performance of piezoelectric generators. KBT films prepared on Ni substrates were annealed at 500 ~ 700 ℃. Tetragonal KBT films were formed after annealing process. As the annealing temperature increased, the grain size of KBT films increased. KBT thin films show piezoelectric constant (d₃₃) from 23 to 41 pC/N. The increase of grain size in KBT films brought about output voltage and current in the KBT generators. Also, the increase in the displacement of specimens during bending test resulted in increases in output voltage and current. Although KBT generators showed lower output power than those of generators prepared using NBT films, as reported previously, the KBT films prepared by sol-gel method show applicability as piezoelectric thin films for lead-free nano-generators, along with NBT films.

• 열처리공학회지
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• 제30권3호
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• pp.113-116
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• 2017

100 nm thick Sn doped ZnO (ZTO) single layer, 15 nm thick Ag buffered ZTO (ZTO/Ag), Ag intermediated ZTO (ZTO/Ag/ZTO) and Ag capped ZTO (Ag/ZTO) films were prepared on poly-carbonate (PC) substrates by RF and DC magnetron sputtering and then the influence of the Ag thin film on the optical and electrical properties of ZTO films were investigated. As deposited ZTO thin films show the visible transmittance of 81.8%, while ZTO/Ag/ZTO trilayer films show a higher visible transmittance of 82.5% in this study. From the observed results, it can be concluded that the 15 nm thick Ag interlayer enhances the opto-electrical performance of ZTO thin films effectively for use as flexible transparent conducting oxides films in various opto-electrical applications.

• 생물환경조절학회지
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• 제10권3호
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• pp.181-186
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• 2001

시설에서 고추, 오이, 토마토 등 과채류 생육기간에는 초관 하부에 광이 부족하게 된다. 본 연구는 플라스틱필름 시설에서 풋고추를 재배할 때 산광필름이 생육, 초관, 개화 및 착과에 미치는 영향을 구명하고자 실시하였다. 시설내 환경을 측정한 결과, 일사량의 투과율은 직조필름과 복층필름에서 일반필름의 90%, 75% 수준이었다. 또한 광합성유효광의 투광율은 직조필름과 복층필름에서 일반필름의 96%, 81% 수준이었다. 그러나 직조필름, 복층필름 및 일반필름의 산란광율은 각각 46%, 31%, 9%이었다. 일반필름으로 피복된 시설에서 정식후 48일 측정한 초장은 직조필름과 복층필름으로 피복된 시설보다 각각 13.9cm, 6.5cm 큰 96.9%cm이었다. 그리고 제3절의 길이는 직조필름과 복층필름으로 피복된 시설보다 각각 5.7cm, 2.5cm 짧은 8.6cm이었다. 또한 직조필름으로 피복된 시설에서 제1분지각은 복층필름과 일반필름으로 피복된 시설보다 2.3$^{\circ}$큰 61.0이었고, 붙임과율은 1.2%, 3.6% 낮은 2.1%이었다. 그러나 피복재간의 풋고추 분지수와 비타민C의 함량은 차이가 없었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.192-192
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• 2009

We have successfully demonstrated the inkjet printing process to fabricate $Al_2O_3$ thick films without a high temperature sintering process. A single solvent system had a coffee ring pattern after printing of $Al_2O_3$ dot, line and area. In order to fabricate the smooth surface of $Al_2O_3$ thick film, we have introduced a co-solvent system which has nano-sized $Al_2O_3$ powders in the mixture of Ethylene glycol monomethyl ester and Di propylene glycol methyl ether. This co-solvent system approached a uniform and dense deposition of $Al_2O_3$ powders on the substrate. The packing density of inkjet-printed $Al_2O_3$ films is more than 70% which is very high compared to the value obtained from the films synthesized by other conventional methods such as casting processes. The characterization of the inkjet-printed $Al_2O_3$ films has been implemented to investigate its thickness and roughness. Also the dielectric loss of the films has been measured to understand the feasibility of its application to 3D integration package substrate.

• 센서학회지
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• 제11권4호
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• pp.247-253
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• 2002

초전형 적외선 센서를 제작하기 위하여 rf 마그네트론 스퍼터링법으로 $(Pb,La)TiO_3(PLT)$/$LiTaO_3$(LTO)/PLT 강유전 박막을 증착한 후 급속 열처리하여 열처리 온도와 시간에 따른 결정성을 조사하였다. 강유전 박막의 c축 배향도에 따른 비유전율 및 유전손실을 측정하고 C축 배향도가 가장 큰 강유전 박막으로 제작된 센서에 대해 초전계수를 측정하여 센서의 전압응답에 대한 성능지수($F_V$)와 감도에 대한 성능지수($F_D$)를 구하였다. 얻어진 $F_V$, $F_D$는 각각 $6.15{\times}10^{-10}\;C{\cdot}cm/J$, $1.98{\times}10^{-8}\;C{\cdot}cm/J$였다.