• 전기학회논문지
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• 제64권4호
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• pp.592-597
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• 2015

3D-IC is a novel semiconductor packaging technique stacking dies to improve the performance as well as the overall size. TSV is ideal for 3D-IC because it is convenient for stacking and excellent in electrical characteristics. However, due to high-density and micro-size of TSVs, they should be tested with a non-invasive manner. Thus, we introduce a TSV test method on test prober without a direct contact in this paper. A capacitive coupling effect between a probe tip and TSV is used to discriminate small TSV faults like voids and pin-holes. Through EM simulation, we can verify the size of eye-patterns with various frequencies is good for TSV test tools and non-contact test will be promising.

• Bulletin of the Korean Chemical Society
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• 제30권3호
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• pp.713-715
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• 2009

• 로봇학회논문지
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• 제11권3호
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• pp.156-162
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• 2016

For the underwater localization, acoustic sensor systems are widely used due to greater penetration properties of acoustic signals in underwater environments. On the other hand, the good penetration property causes multipath and interference effects in structured environment too. To overcome this demerit, a localization method using the attenuation of electro-magnetic(EM) waves was proposed in several literatures, in which distance estimation and 2D-localization experiments show remarkable results. However, in 3D-localization application, the estimation difficulties increase due to the nonuniform (doughnut like) radiation pattern of an omni-directional antenna related to the depth direction. For solving this problem, we added a depth sensor for improving underwater 3D-localization with the EM wave method. A micro scale pressure sensor is located in the mobile node antenna, and the depth data from the pressure sensor is calibrated by the curve fitting algorithm. We adapted the depth(z) data to 3D EM wave pattern model for the error reduction of the localization. Finally, some experiments were executed for 3D localization with the fast calculation and less errors.

• 한국광학회지
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• 제17권3호
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• pp.285-289
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• 2006

광섬유형 콜리메이터와 광 진행 경로의 수직 방향으로 삽입된 주기적으로 식각된 줄무늬(stripe) 평판에 의해 진행하는 빔의 일부에 광 경로차를 유도하는 마이크로 옵틱형 마하젠더 간섭형 필터를 제안하고 구현하였다. 제안된 마이크로 옵틱 필터는 주기적으로 식각된 줄무늬(stripe) 구조의 평판을 빔 경로에 삽입하여 측방향 정렬에 무관하게 특정 소멸비 값 이상의 특성을 구현할 수 있으며, 식각된 박막의 두께를 조정함으로써 원하는 대역폭 및 주기의 전달특성을 가지는 필터를 구현할 수 있다. 네거티브 포토레지스터인 SU-8을 기반으로 줄무늬(stripe) 구조의 주기적으로 식각된 평판을 제작하였으며 이를 이용하여 구현된 필터의 소멸비는 측방향 정렬에 무관하게 30 dB이상의 값을 가진다. 제작된 필터의 FSR(Free Spectral Range)은 장파장 대역에서 약 237 nm이고 그리고 삽입손실은 2 dB 미만의 값을 가진다. 통과대역에서의 PDL(Polarisation Dependent Loss)값은 0.15 dB 미만이다.

• 한국표면공학회지
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• 제51권6호
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• pp.387-392
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• 2018

Nanopatterning is one of the essential nanotechnologies to fabricate electronic and energy nanodevices. Therefore, many research group members made a lot of efforts to develop simple and useful nanopatterning methods to obtain highly ordered nanostructures with functionality. In this study, in order to achieve pattern formation of three-dimensional (3D) hierarchical nanostructures, we introduce a simple and useful patterning method (nano-transfer printing (n-TP) process) consisting of various linewidths for diverse materials. Pt and $WO_3$ hybrid line structures were successfully stacked on a flexible polyimide substrate as a multi-layered hybrid 3D pattern of Pt/WO3/Pt with line-widths of $1{\mu}m$, $1{\mu}m$ and 250 nm, respectively. This simple approach suggests how to fabricate multiscale hybrid nanostructures composed of multiple materials. In addition, functional hybrid nanostructures can be expected to be applicable to various next-generation electronic devices, such as nonvolatile memories and energy harvesters.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1214-1218
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• 2005

As demands for precision parts are increased, existing methods to fabricate them such as MEMS, LIGA technology have the technical limitations like high precision, high functionality and ultra miniaturization. A micro-stereolithography technology based on $DMD^{TM}$(Digital Micromirror Device) can meet these demands. In this technology, STL file is the standard format as the same of conventional rapid prototyping system, and 3D part is fabricated by stacking layers that are sliced as 2D section from STL file. Whereas in conventional method, the resin surface is cured as scanning laser beam spot according to the section shape, but in this research, we use integral process which enables to cure the resin surface at one time. In this paper, we deal with the dynamic pattern generation and $DMD^{TM}$ operation to fabricate micro structures. Firstly, we address effective slicing method of STL file, conversion to bitmap, and dynamic pattern generation. Secondly, we suggest $DMD^{TM}$ operation and optimal support manufacturing for $DMD^{TM}$ mounting. Thirdly, we examine the problems on continuous stacking layers, and their improvements in software aspects.

• 한국정밀공학회지
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• 제21권11호
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• pp.186-194
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• 2004

In this research, microfabrication technique using localized electrochemical deposition (LECD) with ultra short pulses is presented. Electric field is localized near the tool tip end region by applying a few hundreds of nano second pulses. Pt-Ir tip is used as a counter electrode and copper is deposited on the copper substrate in 0.5 M CuSO$_4$ and 0.5 M H$_2$SO$_4$ electrolyte. The effectiveness of this technique is verified by comparison with LECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration are investigated. The proper condition is selected from the results of the experiments. Micro columns less than 10 $\mu$m in diameter are fabricated using this technique. The real 3D micro structures such as micro pattern and micro spring can be fabricated by this method. It is suggested that presented method can be used as an easy and inexpensive method for fabrication of microstructure with complex shape.

• 대한치과보철학회지
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• 제42권1호
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• pp.1-10
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• 2004

Statement of problem : Tooth wear is physiological phenomenon. Ninety-seven percent of normal people have tooth wear and about 7% has pathologic teeth wear. If we know the amount of tooth surface loss caused by pathologic tooth wear, we may restore it ideally Purpose : Recently measurement of tooth wear by using 3D scan has been increasing. Therefore, we need to know how accurate 3D scan is. Past accuracy test on 3D scan was about linear change, but as we know that tooth wear is volume change. Thus, the purpose of this study is to know how accurate 3D scan is. Material and Methods : For accuracy test of 3D scanner volume values measured by 3D scanner and micro-balance were compared. For test I, preliminary, 3 ball samples and 3 circular cones were made with pattern resin. For test II, 10 teeth shape rubber samples were used. Results and Conclusion : 1. The result of the accuracy test on 3D scan with 3 ball samples and 3 circular cones made of pattern resin has no significant difference(p<0.05). 2. The result of the accuracy test on 3D scan with 10 samples of tooth shape rubber has no significant difference (p<0.05). As a result, we may concluded the analysis of quantifying tooth wear used by 3D scan is useful in the clinic.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1518-1521
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• 2005

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its usage in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries This paper focus to apply the sputtering technology accumulated by experiments to 3d structure fabrication with high resolution. Therefore some verifications and discussions of the characteristics of FIB sputtering results according to focal length were described in this paper. And we suggested the definition of rectangular pattern profile and made the verifications of sputtering results based on definition of it.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 춘계학술발표대회
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• pp.15.1-15.1
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• 2009

Nano transfer printing and micro contact printing is well known printing method based on soft lithography which uses conformal soft elastomer with designed surface relief structures. Here I introduce another class of novel 3D nanofabrication technique by using the same elastomer but in a different manner. The approach, which we refer to as proximity field nanopatterning, uses the surface-reliefed elastomers as phase masks to pattern thick layers of transparent, photosensitive materials. Aspects of the optics, the materials, and the physical chemistry associated with this method are outlined. A range of 3D structures illustrate its capabilities, and several application examples demonstrate possible areas of use in technologies ranging from microfluidics to photonic materials to density gradient structures for chemical release and high-energy density science.