• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1531-1534
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• 2005

Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

• Journal of the Korean Society for Heat Treatment
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• v.31 no.2
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• pp.63-67
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• 2018

Recent mold industry uses many roll-to-roll processes that can produce high production speed and precision machining and automation process. In the circular cylinder mold, however, patterns of less than $10{\mu}m$ are difficult to manufacture and maintain. In this study, we fabricated a circular cylindrical mold with a DLC thin film which have high hardness, low coefficient of friction and high releasability by using lithography and lift-off process. The height, line width, and pitch of the fabricated DLC macro pattern are $3.1{\mu}m$, $9.1{\mu}m$ and $20.2{\mu}m$, respectively. The pattern size is finer than the current applied to the aluminum cylinder type, and this shows the possibility of practical use of DLC micro pattern roll mold.

• Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
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• 2003.04a
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• pp.151-159
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• 2003

This study presents method for self-calibration of the SEM(Scanning Electron Microscope) stereo image using the standard microprobe with same grid pattern and using parallel and central perspective projection equation. Result showed that parallel projection method is more suitable for standard microprobe. The maximum error of 3D coordinates acquired by this method did not exceed 5 $\mu\textrm{m}$, and DSM(Digital Surface Model) for three dimensional measurement of the rock sample was generated by the digital photogrammetry. This result can be used for quantification of micro scale change of shape and analysis of the micro morphology of rock due to weathering.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.397-400
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• 2004

The direct extrusion with porthole die can produce condenser tube which has the competitive power in costs and qualities compared with the existing conform extrusion. In general, porthole die extrusion has a great advantage in the forming that produces the hollow sections difficult to produce by conventional extrusion with a mandrel on the stem. Especially, condenser tube manufactured by porthole die belongs to sophisticated part and demands tighter dimension tolerance and higher surface finish than any other part. In order to confirm the general of porthole die extrusion, we perform the 3D FE analysis of hot porthole extrusion in non-steady state by using DEFORM 3D and investigate a pattern of elastic deformation for porthole die through the stress analysis using ANSYS 5.5 during extrusion process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.616-619
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• 2003

Photochemical and photothermal effects have correlation with each other and depend on laser wavelength. Multi-scanning laser ablation process of polymer with DPSS(Diode Pumped Solid State) 3rd harmonic Nd:YVO$_4$ laser with wavelength of 355nm is applied to fabricate three-dimensional micro shape. The DPSSL photomachining system can rapidly and cheaply fabricate 2D pattern or 3D shape with high efficiency because we only use CAD/CAM software and precision stages instead of complex projection mask. Photomachinability of polymer is highly influenced by laser wavelength and its own chemical structure. So the optical characteristics of polymers for 355nm laser source is investigated by experimentally and theoretically.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.10
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• pp.2187-2193
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• 2002

We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.514-517
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• 2005

Microstereolithography(MSL) has evolved from the stereolithography technique, and is also based on a light-induced layer-stacking fabrication. Although integral MSL allows the manufacture of a complete layer by one irradiation only, there is a problem related with shape precision due to the light-intensity distribution of focused image. In this study, we developed the integral MSL apparatus using Digital Micromirror Device ($DMD^{TM})$, Texas Instruments) as dynamic pattern generator. It is composed of Xenon-Mecury lamp, optical devices, pattern generator, precision stage, controllers and the control program. Also, we have studied curing depth and width of photocurable resin according to the change of exposure energy.

• Laser Solutions
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• v.18 no.4
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• pp.1-5
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• 2015

For continuous laser micro patterning on three-dimensional free form surface, innovative laser system is developed. The two axis galvanometer is combined with the dynamic focusing unit to increase optical distance. Also, it is synchronized with the 3 axis mechanical system. To determine laser machining sequence, laser CAM system is developed. It can make possible of 3D surface micro patterning under $25{\mu}m$ pattern width. The uniformity of pattern width is about 2.8% and it is validated that focal plane is well conserved by the dynamic focusing unit. Velocity and positional information of 1 axis is stage is fed to the scanner control board by the encoder signal and it makes possible real time synchronization. With this system, possible patterning volume is enlarged from $40{\times}40mm^2$ to $40{\times}120{\times}30mm^3$.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.14 no.1
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• pp.195-201
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• 2014

In this paper, an AccessPoint compact microstrip patch antenna was designed by using L-shaped feeding structure of a Fractal Structure and the compact antenna can be obtained by the rare formed presence of the resonance flow which is called "Crossed-Diagonal". CST's MicroWave5.0 was used for the design. As the operating characteristics of the patch antenna, it showed the characteristic of 1031 [MHz] or 29.4% in the range of 3.202 [GHz] ~ 4.233 [GHz] when an input return loss is less -10 [dB] and VSWR 2:1, also as it is in this paper, we got simulation results such as, gains of the E-plane and H-plane are 8.7 [dBi] and 8.6 [dBi] for this is the single patch, and 3 [dB] beamwidth is $43.9^{\circ}$ at E-plane and $78.7^{\circ}$ at H-plane.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.6
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• pp.621-628
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• 2009

Because the Ultra-Precision Technology increase its competitiveness in the field of the design, precision of processing technology, confidence and fixation degree are major considerations. According to Pattern shapes using these processing technologies, Light Reflection has influence on the sense of sight about human being. Based on background of these studies, we draw a plan about a round workpiece using a 3D design program and analyze the effect on Light Reflection changing a pattern angle and a source of light through SPEOS program in this research. We make Pattern form as V-Shape, and compare the area distributed by Light Reflection by classifying angle into 4 and analyze changes according to a source of light. In order to measure and evaluate the data from simulation analysis we has manufactured Diamond Tool and has processed Pattern precision using a Ultra-Precision Machine. Based on the result of this study, we forecast that the field of design will achieve rapid growth due to Ultra-Precision Technology in the world market.