3D Surface Model Generation of Micro Structure by Self Calibration of The SEM Image

SEM 영상의 자체검정에 의한 미세구조물의 3차원 표면모델 생성

This study presents method for self-calibration of the SEM(Scanning Electron Microscope) stereo image using the standard microprobe with same grid pattern and using parallel and central perspective projection equation. Result showed that parallel projection method is more suitable for standard microprobe. The maximum error of 3D coordinates acquired by this method did not exceed 5 $\mu\textrm{m}$, and DSM(Digital Surface Model) for three dimensional measurement of the rock sample was generated by the digital photogrammetry. This result can be used for quantification of micro scale change of shape and analysis of the micro morphology of rock due to weathering.