• Title/Summary/Keyword: 2-타원

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Sol-gel 법으로 제작된 $ZrO_2$ 박막의 분광타원편광분석 연구

  • Kim, Tae-Jung;Yun, Jae-Jin;Hwang, Sun-Yong;Kim, Yeong-Dong;Hwang, Su-Min;Lee, Seung-Muk;Ju, Jin-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.177-177
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    • 2011
  • Complementary metal-insulator-metal capacitor에서 $SiO_2$는 절연체로 널리 사용되고 있었으나, 반도체 소자의 고직접화로 인한 선폭의 감소로 터널링 효과에 의해 누설전류가 증가하여, 대체 물질에 대한 연구가 활발히 진행되고 있다. 그 중 $ZrO_2$는 고유전율, wide bandgap, 열안정성의 특징을 가지고 있어 대체 물질로 주목 받고 있다. $ZrO_2$ 박막 제작에는 sputter, atomic layer deposition 등의 진공증착을 이용한 방법과 용액을 이용한 sol-gel 법이 있다. 화학용액을 이용한 sol-gel 법은 소자의 패턴을 프린트 할 수 있는 장점과 상대적으로 값싼 공정으로 인해 최근 주목 받고 있지만, 진공증착법에 비해서 연구가 전무한 실정이다. 본 연구에서는 sol-gel 법에 의해 프린트된 $ZrO_2$ 박막의 광특성을 분광타원편광분석법으로 연구하였다. Si 기판위에 0.1 M의 $ZrO_2$ sol을 입힌 뒤에 $300{\sim}700^{\circ}C$의 온도에서 열처리 하였다. 분광타원 편광분석기로 1.12~6.52 eV 에너지 영역에서 측정하였고, $ZrO_2$ 박막의 광특성 분석을 위해서 Tauc-Lorentz 모델을 이용하였다. 그 결과 고온에서의 열처리로 인해 효율이 높아서 소자로 이용할 수 있는 tetragonal 구조를 가진 $ZrO_2$ 박막이 형성됨을 분석할 수 있었다. 본 연구는 sol-gel법으로 제작된 $ZrO_2$ 박막의 고직접, 고속 소자응용성과 비파괴적인 광특성 분석법을 제시하고 있다.

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Study on Refractive Index and Thickness of Human Stem Cells by Using Imaging Ellipsometry (영상 타원법을 이용한 인간 줄기세포의 굴절률과 두께 분포 연구)

  • Choi, Joong-Kyu;Shim, Woo-Young;Lee, Gwang;Kim, Sang-Youl;Park, Sang-Uk;CheGal, Won;Cho, Hyun-Mo;Cho, Yong-Jai
    • Korean Journal of Optics and Photonics
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    • v.20 no.1
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    • pp.53-56
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    • 2009
  • We applied an ellipsometric technique to get quantitative information about the thickness and refractive index of human Mesenchymal Stem Cells (hMSCs). The images of ellipsometric constants $\Delta$, $\Psi$ for the nucleus region and for the cell body region of hMSCs were obtained by using an Imaging Ellipsomter (IE) for their in vitro state. A numerical inversion method was applied to deduce the refractive index and the thickness of hMSCs from the measured $\Delta$, $\Psi$. Thus the images of the refractive index and those of the thickness of hMSCs for the nucleus region and for the cell body region are reported.

A small-area implementation of cryptographic processor for 233-bit elliptic curves over binary field (233-비트 이진체 타원곡선을 지원하는 암호 프로세서의 저면적 구현)

  • Park, Byung-Gwan;Shin, Kyung-Wook
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.21 no.7
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    • pp.1267-1275
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    • 2017
  • This paper describes a design of cryptographic processor supporting 233-bit elliptic curves over binary field defined by NIST. Scalar point multiplication that is core arithmetic in elliptic curve cryptography(ECC) was implemented by adopting modified Montgomery ladder algorithm, making it robust against simple power analysis attack. Point addition and point doubling operations on elliptic curve were implemented by finite field multiplication, squaring, and division operations over $GF(2^{233})$, which is based on affine coordinates. Finite field multiplier and divider were implemented by applying shift-and-add algorithm and extended Euclidean algorithm, respectively, resulting in reduced gate counts. The ECC processor was verified by FPGA implementation using Virtex5 device. The ECC processor synthesized using a 0.18 um CMOS cell library occupies 49,271 gate equivalents (GEs), and the estimated maximum clock frequency is 345 MHz. One scalar point multiplication takes 490,699 clock cycles, and the computation time is 1.4 msec at the maximum clock frequency.

A Study on the Computation of Deflection of the Vertical Referred to World Geodetic System by Astrogeodetic Data (세계측지계상에서 천문측량데이터를 이용한 연직선편차 계산에 관한 연구)

  • Lee, Suk-Bae
    • Journal of Korean Society for Geospatial Information Science
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    • v.15 no.1 s.39
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    • pp.47-53
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    • 2007
  • Astronomic surveying has been regarded as an important method for absolute positioning of geodetic datum in each countries under the local geodetic reference system. The purposes of this study are to determine astrogeodetic geoidal heights referred to Bessel ellipsoid and to determine deflection of the vertical and geoidal heights referred to GRS80 of World Geodetic System by astronomic surveying data which have been surveyed after 1970 in Korea. The results show that $\xi$ component of the deflection of the vertical distribute from -5.725" to 8.005" and $\eta$ component distribute from -14.917" to 6.2" and astrogeodrtic geoidal heights distribute from 23 m to 27 m in the study area. Also, we could see that GRS80 was more optimal ellipsoid than Bessel 1841 ellipsoid to Korea through comparing both astrogeotic geoidal heights referred to GRS80 and Bessel 1841 ellipsoid.

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Determination of Thermal Shock Stress Intensity Factor for Elliptical Crack by Modified Vainshtok Weight Function Method (수정 Vainshtok 가중함수법에 의한 타원균열의 열충격 응력세기계수의 결정)

  • 이강용;김종성
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.19 no.2
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    • pp.463-474
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    • 1995
  • Modified Vainshtok weight function method is developed. The thermal shock stress intensity factors for elliptical surface cracks existed in the thin and thick walled cylinders are determined. The present results are compared with previous solutions and shown to be good agreement with them.

타원편광분석법을 이용한 AlP 유전함수 연구

  • Jeong, Yong-U;Hwang, Sun-Yong;Mangesh, S.D.;Gong, Tae-Ho;Kim, Yeong-Dong;Sin, Sang-Hun;Song, Jin-Dong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.42-42
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    • 2011
  • 본 연구에서는 광학소자에 폭넓게 이용되는 AlGaP III-V족 화합물 반도체 중에서 한쪽 끝 이 종화합물인 AlP의 유전함수를 0.75~5.05 eV의 에너지 영역에서 타원편광분석법을 이용하여 분석하였다. AlP는 산소와 급격히 반응하기 때문에, 대기 중에서 물질 고유의 광특성이 유지되기 어려울 뿐만 아니라, 박막 위에 생성되는 산화막 때문에 순수한 AlP의 유전함수 측정이 불가능 하다. 본 연구에서는 물질의 유전함수에 미치는 산화 효과를 최소화하기 위하여 Molecular Beam Epitaxy로 성장한 $1.0{\mu}m$ 두께의 AlP 박막을 초고진공 상태의 chamber 안에서 타원편광분석기를 이용하여 실시간으로 측정하였다. 박막의 투명도에 의해 나타나는 간섭 pattern과 표면거칠기 효과로 인한 유전함수의 왜곡을 보정하기 위하여 변수화 모델이 이용되었으며 다층 변수화모델 계산을 통하여 순수한 AlP의 유전함수를 얻어낼 수 있었다. 본 연구에서 측정된 순수한 AlP의 유전함수는 타원편광분석기를 이용한 최초의 실험결과로서 이차미분을 이용한 전이점 (Critical Point) 분석결과 이론적인 electronic band structure에서 $E_1$, $E_1+_{{\Delta}_1}$, $E_2$에 해당하는 전이점들을 확인할 수 있었다.

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The Effect of Aspect Ratio on the Flow Characteristics of Elliptic Jets (종횡비에 따른 타원제트의 유동특성에 관한 실험적 연구)

  • 권영철;이상준
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.16 no.6
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    • pp.1156-1162
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    • 1992
  • The effect of aspect ratio on the flow characteristics of elliptic jets was experimentally investigated. The flow characteristics of sharp-edged elliptic nozzles with aspect ratio of 1 (round nozzle), 2 and 4 were measured by using a 3-D LDV system along the major and minor axis at X/De = 2, 3, 5, 7 and along the centerline up to X/De = 14. At each measurement point mean velocites, turbulent intensities, skewness of three orthogonal velocity components, and Reynolds shear stress were obtained. The Reynolds number based on the nozzle exit velocity and nozzle equivalent diameter(De) was about 4 * 10$^{4}$. Difference in the spreading rate along the major and minor axis was remarkable. The jet half width along the major axis decreased at first and then increased again with going downstream. But the jet width along the minor axis increased steadly. The elliptic jet of AR = 2 had two switching points within the measurement range, while that of AR = 4 had only one. (AAA) : The elliptic jet of AR = 2 showed larger velocity decay rate than that of AR = 1 and AR = 4. The effect of aspect ratio on the flow characteristics of elliptic jets was dominant in the near jet regions of X/De < 7, and the skewness and Reynolds shear stress had quite different distribution depending on the aspect ratio of the elliptic nozzle.

Experimental investigation on the turbulent elliptic jets by using a 3-D LDV system (3-D LDV 시스템을 이용한 타원제트의 난류특성에 관한 연구)

  • 권영철;이상준
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.15 no.6
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    • pp.2160-2170
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    • 1991
  • Three-dimensional turbulent structures in the near field of elliptic jet were experimentally investigated by using a three-color, three-component Laser Doppler Velocimeter. The Reynolds number based on the nozzle exit velocity and nozzle equivalent diameter(De) was about 4*10$^{4}$. The turbulent characteristics of a sharp-edged elliptic nozzle with aspect ratio of 2 were analyzed along major and minor axis at X/De=2,3,5,7 and along the centerline up to X/De=14. Quantities measured at each point with the 3-D LDV system were three orthogonal velocity components, turbulent intensity, skewness, flatness, and Reynolds shear stress. The nondimensional mean velocities coincided well with the Schlichting's empirical curve with going downstream. Elliptic jet of AR=2 had two switching points at about X/De=2 and 16. The turbulent intensity along the minor axis was distributed widely than that along the major axis. In the near field, X/De<5, the Reynolds shear stresses of the inner part of the elliptic jet had negative value, which indicated the enhancement of entrainment toward the inner part.

Spacecraft Intercept on Non-coplanar Elliptical Orbit Considering J2 Perturbation (J2 섭동을 고려한 비공면 타원 궤도에서의 우주비행체 요격)

  • Oghim, Snyoll;Leeghim, Henzeh
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.46 no.11
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    • pp.902-910
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    • 2018
  • This paper deals with spacecraft intercept problem on non-coplanar elliptical obit considering J2 perturbation. This disturbance addressed in this work is a major factor changing the trajectory of a spacecraft orbiting the Earth. To resolve this issue, a real-time intercept method is proposed. This method is based on the optimization problem which consist of the equation of motion considering spherical earth and impulse, and the optimal solution numerically obtained is set as the direction of the thrust of the interceptor. The position error is resolved by iteratively solving the optimization problem and modifying the direction of thrust of interceptor. The proposed method in this paper is verified by using various numerical examples.