• 제목/요약/키워드: 13.56 MHz

검색결과 370건 처리시간 0.021초

아르곤 압력에 따른 유도결합형 폴라즈마의 전기적 특성 (Electrical Properties of Inductively Coupled Plasma by Argon Pressurebstract)

  • 이영환;허인성;조주웅;김광수;이종찬;최용성;박대희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 춘계학술대회 논문집 유기절연재료 방전 플라즈마연구회
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    • pp.89-91
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    • 2003
  • In this paper, using a Langmuir probe Ar gas characteristic of electrodeless fluorescent lamp which used an inductively coupled plasma were investigated. The RF output changed into 5-50W in 13.56MHz. At this time internal plasma voltage of the chamber and probe current were measured while changing in -70V - +70V with a supply voltage by Langmuir probe. If pressure of Ar gas was increased, the electric current tended to decrease. Also, an electric current was increased according to an increase of a RF output.

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UHF 대역 RFID 전파경로에서의 전파간섭 모델링 및 채널 운용 방안 제안 (Modeling of Propagation Interference and Channel Application Solution Suggestion In the UHF Band RFID Propagation Path)

  • 문영주;여선미;전부원;노형환;정명섭;오하령;성영락;박준석
    • 전기학회논문지
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    • 제57권11호
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    • pp.2047-2053
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    • 2008
  • Auto-ID industries and their services have been improved since decades ago, and radio frequency identification (RFID) has been contributing in many applications. Product management can be the foremost example. In our industrial experiences, RFID in ultra high frequency (UHF) band provides much longer interrogation ranges than that of 13.56MHz; many more applications exist thereby. There should be several interesting and useful ideas on UHF RFID; however, those ideas can be limited due to the inevitable environmental circumstances that restrict the interrogation range in shorten value. This paper discusses the propagation interference among different types of readers (e.g, mobile RFID readers in stationary reader zone) in dense-reader environment. In most cases, UHF RFIDs in Korea will be dependent on the UHF mobile RFIDs. In this sense, the UHF mobile users accidently move into the stationary reader's interrogation zone. This is serious problem. In this paper, we analyze propagation loss and propose the effective channel allocation scheme that can contribute developing less-invasive UHF RFID networks. The simulation and practical measurement process using the commercial CAD tools and measurement equipments are presented.

Cutoff Probe를 이용한 자화유도결합 플라즈마의 특성 연구 (A Study on Magnetized Inductively Coupled Plasma Using Cutoff Probe)

  • 손의정;김동현;이호준
    • 전기학회논문지
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    • 제65권10호
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    • pp.1706-1711
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    • 2016
  • Electromagnetic wave simulation was performed to predict characteristics of manufactured cutoff probe at low temperature magnetized plasma medium. Microwave cutoff probe is designed for research the properties of magnetized inductively coupled plasma. It was shown that the cutoff probe method can safely be used for weakly magnetized high density plasma sources. Cutoff probe system with two port network analyzer has been prepared and applied to measure electron density distributions in large area, 13.56MHz driven weakly magnetized inductively coupled plasma source. The results shown that, the plasma frequency confirmed cut-off characteristics in low temperature plasma. Especially, cut-off characteristics was found at upper hybrid resonance frequency in the environment of the magnetic field. In case of a induced weak magnetic field in inductively coupled plasma, plasma density estimated from the cutoff frequency in the same way at unmagnetized plasma due to nearly same plasma frequency and upper hybrid resonance frequency. The plasma density is increased and uniformity is improved by applying a induced weak magnetic field in inductively coupled plasma.

고주파 글로우 방전을 이용한 GRIMM형 방전원의 특성 및 방출/흡광분석법 연구 (Characterization and Emission/Absorption Study of a Grimm-type Glow discharge source in the application of high frequency Glow Discharge)

  • 서정기;우진춘
    • 분석과학
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    • 제7권2호
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    • pp.155-164
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    • 1994
  • 전형적인 Grimm형 방전관을 제작하고 고주파 방전에 의한 금속 및 세라믹시료 분석에 적용하였다. 금속 알루미늄과 알루미나에 대해 방출 스펙트럼을 관찰하였고 방전에 미치는 고주파의 전력과 알곤 기체의 압력에 대한 영향을 관찰하였으며, 시료와 접촉된 전극에 나타나는 DC-bias voltage를 확인하였다. 또한 SEM 사진을 관찰함으로써 rf-sputtering에 의한 알루미나 표면의 미세구조를 확인하였다. 저합금강(BAS 404-405) 중의 망간성분과 황동시료(NIST 1108-1117) 중의 아연성분에 대해 검량곡선을 작성한 결과 양호한 직선성을 보여 주었다.

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용기포장 액상 식품의 물류관리를 위한 RFID 시스템 개발(I) - 물의 높이에 따른 RFID 인식성능 분석 - (Development of RFID Management System for Packaged Liquid Food Logistics (I) - Analysis of RFID Recognition Performance by Level of Water -)

  • 김용주;김태형
    • Journal of Biosystems Engineering
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    • 제34권6호
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    • pp.454-461
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    • 2009
  • The purpose of this study is to analyze the RFID recognition performance by level of water. A 13.56 MHz RFID management system for packaged liquid food logistics is consisted of antenna, reader, passive type tags, and embedded controller. The tests were conducted at different level of water, distances between tag and antenna, and position of attached tags. To analyze the RFID recognition performance, maximum recognition distances for a container and recognition rates for a logistics made of 27 containers were measured and analyzed. The maximum recognition distance for a container was different depending on position of attached tags, and attached tag at upside position showed a good performance. But, the recognition rate of 27 containers showed a good ability for attached tags at front side position, 30~35 cm distance to antenna, and water level 1. Therefore, to manage packaged liquid food logistics using RFID system, position of attached tag, distances between tag and antenna, and level of water should be considered.

플라즈마 중합법에 의해 제작된 PHENYL ISOTHIOCYANATE 막의 화학적 구조 (The Chemical Structure of Phenyl Isothiocyanate Thin Films Fabricated by Plasma Polymerization Method)

  • 김성오;박복기;김두석;이경섭;이진;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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    • pp.183-187
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    • 1997
  • The Thin films were obtained by plasma polymerization of phenyl isothiocyanate. Polymerizations were carried out in rf(13.56 [MHz]) glow discharge generated in an inter-electrode capacitively coupled gas flow system. It was fecund that this monomer produces uniform films with a wide range of thicknesses, from hundreds of nanometers to tens of micrometers. The deposition rate appeared to be dependent on the substrate distance from the monomer inlet. The IR data revealed significant decrease in -NCS groups content in the polymer as compared with the monomer spectrum and indicated for the appearance of new absorption bands corresponding to the -CN and C-H aliphatic groups. The soluble fraction by GC was found to be composed of numerous low molecular-weight compounds.

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RF/DC 마그네트론 스퍼터법을 이용한 $BaTiO_3$계 세라믹 박막의 제조와 PTC특성 (Preparation and PTC properties of thin films $BaTiO_3$ ceramic system using RF/DC magnetron sputtering method)

  • 박춘배;송민종;김태완;강도열
    • E2M - 전기 전자와 첨단 소재
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    • 제8권1호
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    • pp.77-82
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    • 1995
  • PTCR(Positive Temperature Coefficient of Resistivity) thermistor in thin film BaTiO$_{3}$ system was prepared by using radio frequency(13.56 MHz) and DC magnetron sputter equipment. Polycrystalline, surface structure, and R-T(Resistivity-Temperature) characteristics of the specimens were measured by X-ray diffraction(D-Max3, Rigaku, Japan), SEM(Scanning Electron Microscopy: M.JSM84 01, Japan), and insulation resistance measuring system (Keithley 719), respectively. Thin films characteristics of the thermistor showed different properties depending on the substrate even with the same sputtering condition. The thin film formed on the A1$_{2}$O$_{3}$ substrate showed a good crystalline and a low resistivity at below curie point. However, the thin films prepared on slide glass and Si wafer were amorphous. The thicknesses of the three samples prepared under the same process conditions were 700[.angs.], 637.75[.angs.], and 715[.angs.], respectively.

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13.56MHz ICP에서 단일 탐침법에 의한 Ar 가스의 발광특성 연구 (A Study on Emission Characteristics of Ar Gas Using a Single Langmuir Probe Method in Radio-Frequency Inductively Coupled Plasma)

  • 조주웅;최용성;김용갑;박대희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.611-615
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    • 2004
  • In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. Above all, Electrodeless fluorescent lamp is the removal of internal electrodes and heating filaments that are a light-limiting factor of conventional fluorescent lamps. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. Therefore, the electrodeless fluorescent lamps is substantially higher than that of conventional fluorescent lamps and last up to 60,000 hours. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an argon discharge for pressure from 10 [mTorr] and input RF power 100 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.

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유도결합형 플라즈마를 이용한 아르곤 가스의 색 좌표 특성 (Chromaticity Coordinate Properties of Argon Gas Using Inductively Coupled Plasma)

  • 이영환;백광현;최용성;박대희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.640-643
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    • 2004
  • 유도결합형 플라즈마는 낮은 가스 압력에서도 고밀도의 플라즈마를 발생시키기 때문에 무전극 램프에 많이 적용되고 있다. 그리고 무전극 램프는 장 수명을 실현하고 고품질의 빛을 발생하기 때문에 앞으로 광범위하고 다양한 장소에 사용이 예상된다. 본 논문에서는 유도결합형 플라즈마를 이용한 아르곤 가스의 방전 특성 중에서 색 좌표 특성을 살펴보았다. 즉, 외부 안테나에 의해 발생된 13.56[MHz]의 RF Power를 방전관 내부로 전달하고, 아르곤 가스 압력과 RF Power 변화에 따른 아르곤 가스의 방전 특성을 측정하였다. 또한, 유도결합형 플라즈마를 방전시키기 위한 아르곤 가스의 압력은 1[mTorr]에서 100[mTorr], RF 전력은 10[W]에서 120[W]이며 이의 색 좌표 특성과 스펙트럼을 살펴보았다. 측정 결과 RF 출력이 증가하면 색 좌표의 x, y 값이 동시에 감소하였다. 아르곤 가스 압력이 증가하면 농도의 증가로 인해 발광이 어려웠으며, 색 좌표 특성은 압력이 증가하면서 y 값은 변화가 적었으나 x 값이 100[mTorr]일 크게 증가하는 현상이 나타났다.

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Langmuir Probe를 이용한 유도결합형 플라즈마의 전자 밀도 측정 (Electron Density Measurement of Inductively Coupled Plasma Using Langmuir Probe)

  • 이영환;조주웅;김광수;박대희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.1111-1114
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    • 2003
  • In this paper, electrical characteristics of inductively coupled plasma in an electrodeless fluorescent lamp were investigated using a Langmuir probe with a variation of argon gas pressure. The RF output was applied in the range of $5{\sim}50W$ at 13.56MHz. The internal plasma voltage of the chamber and the probe current were measured while varying the supply voltage to the Langmuir probe in the range of $-100V{\sim}+100V$. When the pressure of argon gas was increased, electric current was decreased. There was a significant electric current increase from l0W to 30W. Also, when the RF power was increased, electron density was increase. This implies that this method can be used to find an optimal RF power for efficient light illumination in an electrodeless fluorescent lamp.

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