• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.717-720
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• 2001

Ferroelectric lead ziroconate titanate (PZT) thin film were fabricated on the different bottom electrodes. Both Ru and Ru/RuO$_2$bottom electrodes were deposited by RF-magnetron sputteirng method. The structure phase and surface morphology of the PZT thin film were largely affected by the bottom electrode. It was observerd that used of Ru/RuO$_2$double electrode reduced leakage current and better ferroelectric properties compare with RuO$_2$bottom electrode. From these results, Ru/RuO$_2$hybride bottom electrode is thought to be the available structure for the bottom electrode.

• 한국재료학회지
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• 제11권8호
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• pp.671-678
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• 2001

$RuO_2$ 박막을 전극으로 하여 Pt/Ti/Si 기판 위에 $RuO_2$ /LiPON/$RuO_2$의 다층 구조로 이루어진 전고상의 박막형 마이크로 슈퍼캐패시터를 제작하였다. 전극용 $RuO_2$박막은 반응성 dc 마그네트론 스퍼터를 이용하여 $O_2$/[Ar+$O_2$]비를 증가시키며 성장시켰고, 비정질 LiPON 고체전해질 박막은 순수한 질소분위기 하에서 rf 스퍼터링으로 성장시켰다. 상온에서의 충-방전 측정을 통해 $RuO_2$ 박막의 미세구조에 따라 슈퍼캐패시터의 사이클 특성이 영향을 받는 것을 알 수 있었다. Glancing angle x-ray diffraction(GXRD)과 transmission electron microscopy (TEM) 분석을 통해 산소 유량의 증가가 $RuO_2$박막의 미세 구조의 영향을 주는 것을 알 수 있었고, X-ray photoelectron spectroscopy (XPS) 분석을 통해 산소 유량 비의 증가가 Ru과 산소간의 결합에도 영향을 줌을 알 수 있었다. 또한 사이클 후 슈퍼캐패시터의 TEM 및 AES depth profiling 분석을 통해, 충-방전 시 $RuO_2$와 LiPON과의 계면반응에 의해 형성된 계면 층이 사이클 특성에 영향을 줌을 알 수 있었다.

• 한국수소및신에너지학회논문집
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• 제30권3호
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• pp.193-200
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• 2019

$RuO_2$, $PtO_2$, and various $(Ru,Pt)O_2$ colloidal solution were prepared using modified Watanabe method. Electrodes were manufactured by dipping of Ni mesh into the colloidal solution. Manufactured electrodes were characterized by XRD, SEM, and EDS. $(Ru,Pt)O_2$ electrodes showed $RuO_2$ crystal structure and high roughness. The hydrogen evolution reaction (HER) activities were evaluated by Linear Sweep Voltammetry. 1Ru2Pt electrode showed similar activity with commercial electrode, HER potentials are -0.9 V for both.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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• pp.58-62
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• 2002

Pb($Zr_{0.52}Ti_{0.48}$)$O_3$ (PZT) thin films deposited on the Pt/Ti and Ru/$RuO_2$ bottom electrode by rf magnetron sputtering methode. Ru/$RuO_2$ bottom electrode deposited on the p-type wafer as Ru thickness by in-situ process. Our results show that all PZT films indicated perovskite polycrystalline structure with perferred orientation (110) and no pyrochlore phase is observed. A well-fabricated $RuO_2$/PZT/Ru(100nm)/$RUO_2$ capacitor showed a leakage current density in the order of $2.13{\times}10^{-7}A/cm^2$ as 100 kV/cm, a remanent polarization of 7.20 ${\mu}C/cm^2$, and a coercive field of 58.37 kV/cm. The results show that the new Ru/$RuO_2$ bottom electrodes are expected to reduce the degradation ferroelectric fatigue and excellent ferroelectric properties.

• Transactions on Electrical and Electronic Materials
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• 제6권4호
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• pp.177-185
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• 2005

Fatigue characteristics of lead zirconate titanate (PZT) films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) were investigated. The fatigue characteristics were investigated with respect to PZT film thickness, domain structure, fatigue pulse height, temperature, electrode materials and electrode configurations. The used top and bottom electrode materials were Pt and $RuO_2$. In the fatigue characteristics with fatigue pulse height and PZT film thickness, the fatigue rates are independent of the applied fatigue pulse height at the electric field regions to saturate the P-E hysteresis and polarization $(P^*,\;P^A)$ characteristics. The unipolar and bipolar fatigue characteristics of PZT capacitors with four different electrode configurations $(Pt//Pt,\;Pt//RuO_2,\;RuO_2//Pt,\;and\;RuO_2//RuO_2)$ were also investigated. The polarization-shifts during the unipolar fatigue and the temperature dependence of fatigue rate suggest that the migration of charged defects should not be expected in our CVD-PZT films. It seems that the polarization degradations are attributed to the formation of charged defects only at the Pt/PZT interface during the domain switching. The charged defects pin the domain wall at the vicinity of Pt/PZT interface. When the top and bottom electrode configurations are of asymmetric $(Pt//RuO_2,\;RuO_2//Pt)$, the internal fields can be generated by the difference of charged defect densities between top and bottom interfaces.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.394-397
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• 2001

In this paper, in-situ deposited $Ru/RuO_2$ bottom electrodes have been investigated as new bottom electrodes for PZT thin film capacitor application. As a comparison, structural and electrical properties of PZT thin films on Pt/Ti and $RuO_2$ bottom electrodes are also investigated. The use of $Ru/RuO_2$ hybrid electrodes showed better electrical properties in compression with $RuO_2$ bottom electrode. With increasing Ru electrode thickness, the PZT thin films showed preferred orientation along the (110) direction and and leakage current of PZT thin films were improved. The PZT thin films on Ru (100nm)/$RuO_2$ electrodes exhibited excellent ferroelectric properties such as remant polarization and coercive field of $7.2C/cm^2$ and 46.35 kV/cm, respectively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.394-397
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• 2001

In this paper, in-situ deposited Ru/RuO$_2$ bottom electrodes have been investigated as new bottom electrodes for PZT thin film capacitor application. As a comparison, structural and electrical properties of PZT thin films on Pt/Ti and RuO$_2$ bottom electrodes are also investigated. The use of Ru/RuO$_2$ hybrid electrodes showed better electrical properties in compression with RuO$_2$ bottom electrode. With increasing Ru electrode thickness, the PZT thin films showed preferred orientation along the (110) direction and leakage current of PZT thin films were improved. The PZT thin films on Ru (100nm)/RuO$_2$ electrodes exhibited excellent ferroelectric properties such as remant polarization and coercive field of 7.2 C/$\textrm{cm}^2$ and 46.35 kV/cm, respectively.

• 한국전기전자재료학회논문지
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• 제14권4호
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• pp.281-288
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• 2001

PZT thin films (3500$\AA$) have been prepard on the Ru/Ru $O_2$ and Ru $O_2$ bottom electrodes with a RF magnetron sputtering system using P $b_{1.05}$(Z $r_{0.52}$, $Ti_{0.48}$) $O_3$ ceramic target. Ru/Ru $O_2$ bottom electrode was fabricated by in-situ processing controlled the $O_2$ partial pressure. The PZT thin films deposited on the Ru/Ru $O_2$ bottom electrode were preferred oriented (101) plane. The PZT thin films deposited on the Ru/Ru $O_2$ bottom electrodes showed better electrical properties than those with Ru $O_2$ bottom electrodes because Ru $O_2$ prevented oxygen vacancies and impurities from existing withing the interface and substrate.e.

• 전기학회논문지
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• 제59권2호
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• pp.363-368
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• 2010

In this work, electrochemiluminescence (ECL) cell using nanocrysralline $TiO_2$ electrode and Ru(II) complex (Ru${(bpy)_3}^{2+}$) is fabricated for low-cost high-efficient energy conversion device application. The nanocrysrallme $TiO_2$ layer (${\sim}10{\mu}m$ thickness) with large surface area (${\sim}360m^2$/g) can largely inject electrons from nanoporous $TiO_2$ electrode and allows the oxidation/reduction of Ru(II) complex in the nanopores. The cell structure is composed of a glass/ F-doped $SnO_2$(FTO)/ porous $TiO_2$/ Ru(II) complex in acetonitrile/ FTO/ glass. The nanocrysralline $TiO_2$ layer is prepared using sol-gel combustion method. The ECL efficiency of the cell consisting of the porous $TiO_2$ layers was 250 cd/W, which was higher than that consisting of only FTO electrode (50cd/W). The nanoporous $TiO_2$ layers wwas effective for increasine ECL intensities.

• 한국환경과학회지
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• 제18권1호
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• pp.61-72
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• 2009

Fabrication and oxidants production of 3 or 4 components metal oxide electrode, which is known to be so effective to destruct non-biodegradable organics in wastewater, were studied. Five electrode materials (Ru as main component and Pt, Sn, Sb and Gd as minor components) were used for the 3 or 4 components electrode. The metal oxide electrode was prepared by coating the electrode material on the surface of the titanium mesh and then thermal oxidation at $500^{\circ}C$ for 1h. The removed RhB per 2 min and unit W of 3 components electrode was in the order: Ru:Sn:Sb=9:1:1 > Ru:Pt:Gd=5:5:1 > Ru:Sn=9:1 > Ru:Sn:Gd=9:1:1 > Ru:Sb:Gd=9:1:1. Although RhB decolorization of Ru:Sn:Sb:Gd electrode was the highest among the 4 components electrode, the RhB decolorization and oxidants formation of the Ru:Sn:Sb=9:1:1 electrode was higher than that of the 3 and 4 components electrode. Electrogenerated oxidants (free Cl and $ClO_2$) of chlorine type in 3 and 4 components electrode were higher than other oxidants such as $H_2O_2\;and\;O_3$. It was assumed that electrode with high RhB decolorization showed high oxidant generation and COD removal efficiency. OH radical which is electrogenerated by the direct electrolysis was not generated the entire 3 and 4 components electrode, therefore main mechanism of RhB degradation by metal oxide electrode based Ru was considered indirect electrolysis using electrogenerated oxidants.