• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.118-118
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• 2008

The oxide CMP has been applied to interlayer dielectric(ILD) and shallow trench isolation (STI) in chip fabrication. Recently the slurry used in oxide CMP being changed from silica slurry to ceria (cerium dioxide) slurry particularly in STI CMP, because the material selectivity of ceria slurry is better than material selectivity of silica slurry. Moreover, the ceria slurry has good a planarization efficiency, compared with silica slurry. However ceria abrasives make a material removal rate too high at the region of wafer center. Then we focuses on why profile of material removal rate is convex. The material removal rate sharply increased to 3216 $\AA$/min by $4^{th}$ run without conditioning. After $4^{th}$ run, material removal rate converged. Furthermore, profile became more convex during 12 run. And average material removal rate decreased when conditioning process is added to end of CMP process. This is due to polishing mechanism of ceria. Then the ceria abrasive remains at the pad, in particular remains more at wafer center contacted region of pad. The field emission scanning electron microscopy (FE-SEM) images showed that the pad sample in the wafer center region has a more ceria abrasive than in wafer outer region. The energy dispersive X-ray spectrometer (EDX) verified the result that ceria abrasive is deposited and more at the region of wafer center. Therefore, this result may be expected as ceria abrasives on pad surface causing the convex profile of material removal rate.

• Korean Chemical Engineering Research
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• v.56 no.5
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• pp.705-710
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• 2018

An electrochemical glucose sensor with enzyme-free was fabricated using Pt nanoparticles (Pt NPs) decorated CuO nanoflowers (CuO NFs). 3-D CuO nanoflowers film was directly synthesized on Cu foil by a simple hydrothermal method and Pt NPs were dispersed on the petal surface of CuO NFs through electrochemical deposition. This prepared sample was noted to Pt NPs-CuO NF. Morphology of the Pt NPs-CuO NFs layer was analyzed using scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS). The electrochemical properties and sensing performances were investigated using cyclic voltammetry (CV) and chronoamperometry (CA) under alkaline condition. The sensor exhibited a high sensitivity, wide liner range and fast response time. Its excellent sensing performance was attributed to the synergistic effect of the Pt NPs and CuO nanostructure.

• Corrosion Science and Technology
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• v.19 no.1
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• pp.43-50
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• 2020

In this study, the effects of KCl(s) and K₂SO₄(s) on the oxidation characteristics of 2.25Cr-1Mo steel were investigated for 500 h in 10O₂ + 10CO₂ (vol%) gas environmen at 650 ℃. Oxidation kinetics were characterized by weight gain, oxide layer thickness, and fitted models for the experiment data were proposed. The fitted models presented considerable agreement with the experimental data. The oxide layer was analyzed using the scanning electron microscope, optical microscope, and energy dispersive X-ray spectroscopy. The oxidation kinetics of 2.25Cr-1Mo steel with KCl and K₂SO₄ coatings showed significantly different oxidation kinetics. KCl accelerated the oxidation rate very much and had linear oxidation behavior. In contrast, K₂SO₄ had no significant effect, which had parabolic kinetics. The oxide layer was commonly composed of Fe₂O₃, Fe₃O₄, and FeCr₂O₄ spinel. KCl strongly accelerated the oxidation rates of 2.25Cr-1Mo steel in the high-temperature oxidation environment. Conversely, K₂SO₄ had little effect on the oxidation rates.

• Korean Journal of Soil Science and Fertilizer
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• v.49 no.5
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• pp.489-494
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• 2016

Carbon-based sorbents such as biochar and activated carbon have been proven to be cost-effective in removing pollutants containing heavy metals from wastewater. The aim of this study was using batch experiment to evaluate the adsorption characteristics of heavy metals in single-metal conditions onto reed biochar for treating wastewater containing heavy metals. The removal rates of heavy metals were in the order of Pb > $Cu{\fallingdotseq}Cd{\fallingdotseq}Zn$, showing the adsorption efficiency of Pb was higher than the other heavy metals. Freundlich and Langmuir adsorption isotherms were used to model the equilibrium adsorption data obtained from adsorption of Pb on reed biochar. For reed biochar, the Langmuir model provided a slightly better fit than the Freundlich model. Lead was observed on the biochar surface after adsorption by scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDS). The main functional groups of reed biochar were aromatic carbons. Overall, the results suggested that reed biochar could be useful adsorbent for treating wastewater containing Pb.

• Corrosion Science and Technology
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• v.19 no.4
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• pp.189-195
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• 2020

Two air vents situated on a heat transport pipe in district heating system were exposed to the same environment for 10 years. However, one air vent was more corroded than the other. It also had a hole on the top of the front-end pipe. Comparative analysis was performed for these air vents to identify the cause of corrosion and establish countermeasures. Through experimental observation of the damaged part and analyses of powders sampled from air vents, it was found that corrosion was initiated at the top of the front-end pipe. It then spread to the bottom. Energy dispersive X-ray spectroscopy results showed that potassium and chlorine were measured from the corroded product in the damaged air vent derived from rainwater and insulation, respectively. The temperature of the damaged air vent was maintained at 75 ~ 120 ℃ by heating water. Rainwater-soaked insulation around the front-end pipe had been hydrolyzed. Therefore, the damaged air vent was exposed to an environment in which corrosion under insulation could be facilitated. In addition, ion chromatography and inductively coupled plasma measurements indicated that the matrix of the damaged front-end pipe contained a higher manganese content which might have promoted corrosion under insulation.

• Korean Journal of Materials Research
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• v.20 no.1
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• pp.19-24
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• 2010

The current study examined Ag migration from the Ag paste bump in the SABiT technology-applied PCB. A series of experiments were performed to measure the existence/non-existence of Ag in the insulating prepreg region. The average grain size of Ag paste was 30 nm according to X-ray diffraction (XRD) measurement. Conventional XRD showed limitations in finding a small amount of Ag in the prepreg region. The surface morphology and cross section view in the Cu line-Ag paste bump-Cu line structure were observed using a field emission scanning electron microscope (FE-SEM). The amount of Ag as a function of distance from the edge of Ag paste bump was obtained by FE-SEM with energy dispersive spectroscopy (EDS). We used an electron probe micro analyzer (EPMA) to improve the detecting resolution of Ag content and achieved the Ag distribution function as a function of the distance from the edge of the Ag paste bump. The same method with EPMA was applied for Cu filled via instead of Ag paste bump. We compared the distribution function of Ag and Cu, obtained from EPMA, and concluded that there was no considerable Ag migration effect for the SABiT technology-applied printed circuit board (PCB).

• Korean Journal of Materials Research
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• v.24 no.1
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• pp.53-59
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• 2014

The corrosion resistance of submerged entry nozzle (SEN) materials were investigated for high-class steel manufacturing. Composite samples were fabricated by mixing $ZrO_2$, $Al_2O_3$, MgO, mullite, spinel, and carbon. The raw materials were mixed with attrition milling, compacted in a uniaxial pressure of 200MPa and calcined at $1000^{\circ}C$ for 3 h in $N_2$ atmosphere. The bulk density and apparent porosity of the calcined samples were measured by the liquid displacement method in water using Archimedes's principle. The corrosion resistance of the samples were measured by cup test with mold powder at $1550^{\circ}C$ for 2 h. The microstructure and elemental analysis of samples were observed by scanning electron microscopy (SEM), energy dispersive spectrum (EDS), and X-ray diffraction pattern (XRD). The XRD result shows that the starting raw materials were crystalline phase. The microstructure of fabricated specimen was investigated before and after corrosion tests at $1000^{\circ}C$ and $1550^{\circ}C$ for 2h. $ZrO_2$-C composite showed good resistance in the slag corrosion test. Among the composite oxide materials, $ZrO_2-Al_2O_3$-C and $ZrO_2$-MgO-C showed better resistance than $ZrO_2$-C in the slag corrosion test. The diameter variation index of $ZrO_2$-C refractory was 16.1 at $1000^{\circ}C$ for 2 h. The diameter variation index of the $ZrO_2-Al_2O_3$-C refractory was larger than that of the $ZrO_2$-C refractory at $1550^{\circ}C$ for 2 h.

• Nuclear Engineering and Technology
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• v.40 no.3
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• pp.225-232
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• 2008

To understand the effect of the cyclic strain rate on the environmentally assisted cracking behaviors of SA508 Gr.1a low alloy steel in deoxygenated water at $310^{\circ}C$, the fatigue surface and a sectioned area of specimens were observed after low cycle fatigue tests. On the fatigue surface of the specimen tested at a strain rate of 0.008 %/s, unclear ductile striations and a blunt crack tip were observed. Therefore, metal dissolution could be the main cracking mechanism of the material at this strain rate. On the other hand, on the fatigue surfaces of the specimens tested at strain rates of 0.04 and 0.4 %/s, brittle cracks and flat facets, which are evidences of the hydrogen induced cracking, were observed. In addition, a tendency of linkage between the main crack and the micro-cracks was observed on the sectioned area. Therefore, at higher strain rates, the main cracking mechanism could be hydrogen induced cracking. Additionally, evidence of the dissolved MnS inclusions was observed on the fatigue surface from energy dispersive x-ray spectrometer analyses. Thus, despite the low sulfur content of the test material, the sulfides seem to contribute to environmentally assisted cracking of SA508 Gr.1a low alloy steel in deoxygenated water at $310^{\circ}C$.

• Journal of Electrochemical Science and Technology
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• v.9 no.1
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• pp.44-50
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• 2018

The aims of this study were to determine the corrosion behavior of pure copper in the presence of Desulfovibrio sp. and also to investigate the effects of glutaraldehyde (GD) and isothiazolinone (ISO) on the corrosion behavior of pure copper in the presence of this sulfate-reducing bacteria (SRB) strain by using electrochemical techniques. Electrochemical measurements of pure copper were carried out at specified time intervals (0, 8, 24, 48, and 96 hr) over a period of exposure. Corrosion rates of pure copper from anodic and cathodic Tafel slopes and corrosion potential ($E_{corr}$) were determined. Biofilm and corrosion products on the copper surfaces were observed by Field Emission Scanning Electron Microscopy (FESEM) and Energy Dispersive X-Ray Spectrometry (EDS) analyses. The effects of solution types (PC (Postgate's C medium) and SRB (Desulfovibrio sp.)) and exposure times of copper and biocides (ISO or GD) on the corrosion rates of pure copper were evaluated by statistical analyses. As a result of the FESEM analysis, biofilm formation was observed on the surfaces of pure copper exposed to the Desulfovibrio sp. cultures both with and without the biocides. The results show that the pure copper was corroded by Desulfovibrio sp. However, the addition of GD or ISO to the Desulfovibrio sp. culture resulted in a decrease in the corrosion rate of the pure copper. It was also observed that both of the biocides showed a similar effect on pure copper's corrosion rate caused by Desulfovibrio sp.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.17 no.3
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• pp.73-79
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• 2003

This paper describes the characteristics of capacitor elements at self healing. Self healing events were forced to be created by the over-rated voltage of the capacitor elements. The self healing site was photographed by the Scanning Electron Microscope and the by-products of self healing were analyzed by the Energy Dispersive X-ray Spectrometer. Also the self healing site was analyzed by the Differential Scanning Calorimeter and the Fourier Transform Infrared Spectrometer. As a result, the main component of by-products due to the hum cut at self healing was carbon. The Fourier Transform Infrared analysis result of the self-healing specimen was similar to that of the virgin specimen, however, different from that of the specimen thermally treated at 500$^{\circ}C$. It was observed that heat flow peaks of virgin specimen were different from self-healing specimen by the Differential Scanning Calorimeter analysis.