• Journal of the Korean Chemical Society
• /
• v.44 no.3
• /
• pp.212-219
• /
• 2000

An absorption spectrometry coupled with flow injection analysis has been developed and tested for the analysis of the Cr$_2O_7^{2-}$/Nn$O_4^-$ mixtures. Even though one has to inject the sample twice into the FIA system and the process of the sample treatment is required to completely destroy the Mn$O_4^-$ ion for the analysis of the Cr$_2O_7^{2-}$ ion, the new method has definite advantages over the current method. It utilizes only a single analytical wavelength (570 nm) and enables one to construct calibration curves which accurately follow the Beer's law over wide ranges of analytical concentrations of both ions ($2.0{\times}10^{-6}$M∼$8.0{\times}10^{-3}$M for Cr$_2O_7^{2-}$ ion, $2.0{\times}10^{-6}$M∼$4.0{\times}10^{-3}$M for MnO4- ion).

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.412-412
• /
• 2010

플라즈마는 미세 전기 소자 제작에 있어 박막의 증착, 식각, 세정등 여러 가지 공정에서 널리 사용되고 있다. 미세 소자의 선폭의 감소와 높은 생산성을 위한 웨이퍼 면적의 대형화가 진행됨에 따라 플라즈마의 균일도는 공정 수율 향상의 관점에서 중요한 요소로 그것의 계측과 공정 중 실시간 감시에 필요성이 부각되고 있다. 플라즈마에 존재하는 라디칼의 밀도, 이온의 밀도, 전자 온도 등의 웨이퍼 상에서의 공간 분포와 공정 결과물과의 상관관계에 대한 연구는 현재까지 다양하게 진행 되었으며 특히, 라디칼의 공간 분포가 공정 결과물의 균일도와 큰 상관 관계가 있는 것으로 알려져 있다. 라디칼의 농도 분포를 계측은 레이저 유도 형광법, 발광 분광법, 흡수 분광법 등을 통하여 이루어져 왔으며, 특히 발광 분광법의 경우 계측의 민감성, 편의성등을 이유로 가장 널리 사용되고 있다. 그러나 현재 까지 진행된 발광 분광법을 이용한 라디칼의 공간 분포 계측은 그 자체로 공간 분포를 계측하는 것이 아닌 플라즈마 밀도의 축 대칭성을 가정하여 Abel inversion을 적용하거나, 광섬유를 플라즈마에 직접 삽입하는 방식을 사용하기 때문에 실제 반도체 제작공정을 비롯한 미세소자 공정 플라즈마의 라디칼 밀도 분포를 실시간, 비 접촉 방식으로 계측 하는데 한계가 있다. 본 연구에서는 반도체 공정 플라즈마의 밀도 균일성 분석을 위한 공간 분해 발광 분광기를 제안한다. 기존의 발광 분광법과 비교하여 공간 분해능 향상을 위하여 직렬로 설치된 다수의 렌즈, 개구, 그리고 핀홀을 이용하였다. 공간 분해 발광 분광기의 공간 분해능을 계산하였으며, 실험을 통하여 검증 하였다. 또, HDP CVD를 이용한 $SiO_2$ 박막 증착 공정에서 산소 라디칼의 농도와 증착된 박막의 두께 분포의 상관 관계를 계측 함으로써 공간 분해 발광 분광기의 플라즈마 공정 적용 가능성 입증 하였다.

• The Journal of Natural Sciences
• /
• v.9 no.1
• /
• pp.53-56
• /
• 1997

The structure of poly-$\beta$-hydroxybutyrate (PHB) in Chlorogloea fritschii was analyzed by FT-IR spectrometry under various conditions (phosphate starves or sufficient conditions). They exhibited characteristic absorption peaks for PHB, such as C=O stretching band at 1700-1800 $cm^-1$and C-H stretching bands at about 2900 $cm^-1$, however, the intensity of C-H stretching peaks, relative to the rest of the spectrum was increased under phosphate starved condition, which suggests that C. fritschii might produce another modified PHB polymer under phosphate starved condition.

• Proceedings of the Optical Society of Korea Conference
• /
• 2002.07a
• /
• pp.252-253
• /
• 2002

원적외선 영역에서 혈중성분들의 분광 특성이 존재함이 확인되면서 이 영역의 빛을 이용한 혈중 성분의 정량 분석을 통한 진단기술 개발이 활발히 진행되고 있다1). 특히 원적외선 영역에서 특정 파장에서의 반응성을 이용한 여러 방법들 중 photo-Acoustic을 이용한 방법이 여러 가지로 연구되어지고 있다. (2) 현재 수용액 상태의 혈중 성분들의 원적외선 분광 특성을 연구하였으며, 이를 이용한 혼합 성분들의 흡수 spectrum 정량-정성 분석이 가능하며, 이러한 특성을 이용하여 non-invasive로 이용 가능한 분광법을 연구 진행 중이다. (중략)

• Analytical Science and Technology
• /
• v.6 no.4
• /
• pp.359-362
• /
• 1993

To find compromise experimental conditions that will allow a group of elements to be run on flame atomic absorption spectrometer without changing the burner height or gas flow rates, measurements were carried out. The optimum absorbance for simultaneous analysis of ten elements was observed at high flow rate of air-$C_2H_2$ as fuel and at 2mm of burner height. At the condition, 73% of mean relative absorbance were achieved.

• Journal of the Korean Chemical Society
• /
• v.53 no.5
• /
• pp.565-569
• /
• 2009

The interaction between polyvinylpyrrolidone(PVP) and silver cation has been studied in water at room temperature and atmospheric pressure. The PVP and PVP/Ag composite was observed by transmission electron microscopy (TEM), UV-VIS absorption spectroscopy, Raman spectroscopy and oxygen/carbon dioxide analyzer. We identified silver cations interacting with nonbonding electrons of the oxygen atom in the carbonyl group of PVP. It was shown that PVP/Ag formed stable composites.

• Journal of ILASS-Korea
• /
• v.9 no.4
• /
• pp.67-76
• /
• 2004

Diode laser absorption sensors are advantageous because they may provide fast, sensitive, absolute, and selective measurements of species concentration. These systems are very attractive for practical applications owing to its compactness, reasonable cost, robustness, and ease of use. In addition, diode lasers we fiber-optic compatible and thus enable simultaneous measurements of multiple species along a line-of-sight. Recent advances of room-temperature, near-IR and visible diode laser sources for telecommunication, optical data storage applications make it possible to be applied for combustion diagnostics based on diode laser absorption spectroscopy. Therefore, combined with fiber-optics and high sensitive detection strategies, compact and portable sensor systems are now appearing for variety of applications. The objectives of this research are to develop new gas sensing system and to verify feasibility of this system. Wavelength modulation spectroscopy has been demonstrated in these experiments and has a bright prospect to this diode laser system.

• Journal of the Korean Chemical Society
• /
• v.50 no.1
• /
• pp.32-36
• /
• 2006

films of gold nanoparticles were formed on indium tin oxide (ITO) by an electrodeposition method from an aminosilicate stabilized gold colloid solution. The thin films were examined by cyclic voltammetry (CV), scanning electron microscopy (SEM), UV-visible, and energy dispersive X-ray spectroscopy (EDXS). The surface coverage of gold nanoparticles on the thin film was estimated to 1.2 nanomole/cm2. An anthraquinone-2, 6-disulfonic acid, disodium salt (AQDS) self-assembled layer was generated by immersing gold thin film into 1mM of AQDS in 0.1M HClO4 solution for over 20 hours. As a result, a new absorbance peak from the multi-layers (AQDS/thin film of gold /ITO) was obtained about at 690 nm. Also, the surface plasmon absorption of multi-layers was measured by UV-Visible spectrometer along with chronoamperometry by applying the various potentials from +0.5V to -0.5V. The maximum surface plasmon absorption band at 550 nm was decreased by applying negative potentials. The change of absorbance was correlated with the surface coverage of the AQDS indicating the pseudo-capacity surface state of the AQDS layer was coupled to the energy level of the plasmonband by applied negative potentials.

• Korean Journal of Optics and Photonics
• /
• v.9 no.4
• /
• pp.240-244
• /
• 1998

Cavity ring-down spectroscopy (CRDS) is a high-sensitive laser spectroscopic technique capable of measuring concentrations of trace gases. We have demonstrated a new design of the CRDS spectrometer with a continuous wave (CW) laser. The ring-dwon signal is produced through blocking the incident CW laser by scanning the cavity length fast toward off-resonance iwth PZT (piezoelectric transducer). We have also measured an absorption spectrum of acetylene overtone transitions near 570 nm at the pressure of 2700 Pa, and the minimum detectable absorption coefficient has been found to be about $3{\times}10^{-9}\cm^{-1}$.

• Journal of the Korean Chemical Society
• /
• v.35 no.4
• /
• pp.368-373
• /
• 1991

Palladium(II) complexes of the type Pd(IEAA-NR)$_2$ (R = H, CH$_3$, C$_2$H$_5$, n-C$_3$H$_7$, n-C$_4$H$_9$, or CH$_2$C$_6$H$_5$), where IEAA-NR represents N-alkyl derivative of isonitrosoethylacetoacetate (H-IEAA) imine, have been prepared. And the structure of the complexes have been studied by elemental analyses, electronic, infrared, $^1$H and $^{13}$C-NMR spectra. It is proposed that both of IEAA-NR ligands coordinate to metal through nitrogens of imine and isonitroso groups to form 5-membered chelate rings in the complexes.