• Proceedings of the Optical Society of Korea Conference
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• 2003.07a
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• pp.148-149
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• 2003

렌즈와 거울의 형상을 정밀하게 측정하고 평가하는 광학시험에 많은 형태의 광간섭계가 개발되고 사용되어왔다. 그 중, 회절격자를 광선분할기로 사용하는 광간섭계들을 통칭하여 회절격자 간섭계라 부른다. 회절격자 간섭계는 별개의 광학표면을 사용하지 않고 회절격자에서 회절된 파면을 직접 기준파면으로 사용할 수 있으므로, 격자의 형태, 주기를 선정하여 기준파면과 측정파면을 원하는 방향으로 재생하여 다양한 형태의 간섭계를 만들 수 있다.(중략)

• Korean Journal of Optics and Photonics
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• v.14 no.6
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• pp.643-648
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• 2003

The phase-shifting diffraction-grating interferometer proposed in the investigation uses a diffraction grating that performs manifold functions of beam splitting, beam recombination, and phase shifting. The reference and measurement waves generated by means of diffraction have different amplitudes depending on their orders of diffraction, so the interference fringe pattern resulting from the two waves tends to yield poor visibility. To cope with this problem, we select a phase grating of reflection type and attempt to improve the interference visibility with optimization of the groove shape of the grating through electromagnetic analysis.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.313-320
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• 2004

We present a null testing method fer aspheric surfaces, utilizing a phase-shifting diffraction grating interferometer along with a binary amplitude computer generated hologram (CGH). The binary amplitude CGH is designed to compensate for the wavefront between a point source and the aspheric surface under test. The fringe visibility of the grating interferometer is controlled easily by selecting suitable grating diffraction orders for the measurement and reference wavefronts or by optimizing the groove shape of the grating used. The binary amplitude CGH is designed by numerical analysis of ray tracing and fabricated using e-beam lithography for autostigmatic testing. Experimental results of a large-scale aspheric mirror surface are discussed to verify the measurement performance of the proposed diffraction grating interferometer.

• Korean Journal of Optics and Photonics
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• v.14 no.4
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• pp.392-398
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• 2003

We present a novel concept of a phase-shifting diffraction-grating interferometer, which is intended for the optical testing of concave mirrors with high precision. The interferometer is configured with a single reflective diffraction grating, which performs multiple functions of beam splitting, beam recombination, and phase shifting. The reference and test wave fronts are generated by means of reflective diffraction at the focal plane of a microscope objective with large numerical aperture, which allows testing fast mirrors with low f-numbers. The fiber-optic confocal design is adopted for the microscope objective to focus a converging beam on the diffractive grating, which greatly reduces the alignment error between the focusing optics and the diffraction grating. Translating the grating provides phase shifting, which allows measurement of the figure errors of the test mirror to nanometer accuracy.

• Korean Journal of Optics and Photonics
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• v.15 no.1
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• pp.56-62
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• 2004

We present a diffraction grating interferometer of large equivalent wavelength specially designed for flatness testing of rough surfaces. Two transmission diffraction gratings are illuminated on the object under test by use of two measurement beams with different angles of incidence, which yields a large equivalent wavelength. This interferometer design minimizes unnecessary diffraction rays and the systematic error caused by the diffraction gratings, and provides a large working distance and easy alignment. To improve the measurement accuracy, phase shifting technique is applied and the equivalent wavelength error caused by defocus is calibrated. Test results obtained from mirror surfaces and machined rough surfaces are discussed.

• Proceedings of the Optical Society of Korea Conference
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• 2000.02a
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• pp.178-179
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• 2000

표면 형상측정은 산업계에서 요구되는 고부가가치 기계부품들의 표면 정보의 확보와 향상에 반드시 필요하다. 이는 정밀부품의 정상적인 기능 수행에 대한 판별과 예측에 중요한 위치를 차지한다. 광원파장의 1/4 이상의 단차를 측정할 수 없는 기존의 간섭계는 이러한 큰 단차와 거친 표면을 가지고 있는 기계가공된 표면들을 측정하는데 어려움이 있다. (중략)

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• Proceedings of the Optical Society of Korea Conference
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• 2000.02a
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• pp.86-87
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• 2000

지금까지 광파장 측정기로는 회절격자를 이용한 스펙트로미터$^{[1]}$ , 간섭계형 측정기$^{[2]}$ , 퓨리어변환 스펙트로미터$^{[3]}$ 등이 개발되어 왔다. 이러한 측정 방법들은 정밀도면에서 안정적이나 시스템의 부피가 크고, 복잡하며, 광학적 정렬의 어려움이 있다. 또한 WDM 파장영역인 1550nm 부근에서 회절격자를 이용한 스펙트로미터는 고가의 광검출기를 사용하여야 한다. 최근에는 기존의 광학적 정렬이나 기계적인 움직임이 없이 측정가능한 방법에 대한 연구가 활발하다. 본 논문에서는 위상지연기로 쓰인 Polarization Mantaining Fiber(PM-fiber)내에서 입사광의 파장에 따라 fast축과 slow축 방향 편광성분의 위상차가 파장의 함수인 것을 이용해 이 위상차에의한 서로 다른 편광성분의 Power의 차이를 측정함으로써 파장을 결정하는 저가의 휴대용 광파장 측정장비의 구현방법을 제시하였다. (중략)

• Proceedings of the Optical Society of Korea Conference
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• 1989.02a
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• pp.193-195
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• 1989

A simple fabrication technique of diffraction gratings with short periods is presented. We can see that the monitoring of diffracted light from photoresist gratings during the development process provides optimum conditions for exposure and development processes. With this technique reproducibility and high quality of diffraction gratings is expected.

• Korean Journal of Optics and Photonics
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• v.23 no.4
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• pp.135-142
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• 2012

We have developed a measurement method of the refractive index profile of an optical fiber by using diffraction phase microscopy. In the microscope system, the reference light was extracted directly from the probe light that passed through the sample by means of pinhole filtering with a diffraction grating. The spatial interference pattern produced by the probe light and the reference light was processed to generate the phase image of the sample fiber. The index profile was obtained by the inverse Abel transform of the phase profile. In order to remove the background phase that originated from the index difference between the cladding and the surrounding medium, the background phase was calculated from the phase data of the cladding to make a core phase profile that can be directly transformed to the index profile of the core without the full phase image that includes the entire cladding part.