• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.314-315
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• 2012

최근들어 반도체 및 디스플레이 소자의 구조가 복잡해짐에 따라 다층 박막 증착에 대한 중요성이 날로 증가하고 있다. 본 연구에서는 다층 박막을 효율적으로 증착하기 위해 회전이 가능한 육각건을 개발하였고, 이를 이용하여 에너지 절약형 단열 유리 증착 공정을 구현 하였다. 개발된 회전형 육각건은 기존 플래너형 스퍼터링 건의 확장형으로서 최대 6개의 물질을 하나의 챔버에서 증착이 가능하도록 구성되었다. 기존 공정의 경우 서로 다른 물질 증착을 위해서는 각각의 챔버가 필요한 반면, 회전형 육각건을 이용할 경우 하나의 챔버에서 공정을 진행할 수 있어 원가 절감이 가능하다. Fig. 1은 개발된 회전형 육각건의 모식도로서, 스퍼터링 타겟이 장착 가능한 건과, 회전부로 구성되어 있다. 이를 이용하여 투명전극-금속-투명전극-금속-절연체로 구성되어 있는 에너지 절약형 단열 유리용 다층 박막 증착 공정을 개발하였다. 이때 알루미늄이 도핑된 ZnO (AZO)는 RF 마그네트론 스퍼터로, 금속 박막은 DC 스퍼터, $SiO_2$ 및 SiN과 같은 절연 박막은 $O_2$와 $N_2$ 분위기에서 반응성 RF 스퍼터로 각각 증착하였다. Base pressure는 $10^{-7}$ torr였으며, 증착 시 공정 압력은 1~3 mTorr로 조정하였다. 증착 균일도 향상을 위해 20 rpm의 속도로 기판을 회전시켰다. Fig. 2(a)는 ZnO-Ag-ZnO 구조로 이루어진 다층 박막의 단면을 관찰한 투과전자 현미경 사진으로 각 층간의 계면이 뚜렷하게 나타남을 확인할 수 있으며, 각 층간의 intermixing 현상이 발생하지 않음을 확인 가능하다. 이를 보완하기 위해 Fig. 2(b)에서 보는 바와 같이 XPS를 이용하여 depth profile을 측정하였다. 각 층에서 서로 다른 물질이 발견되는 현상, 즉 교차 오염이 발생함에 따라 나타나는 intermixing 없이 거의 순수한 형태의 ZnO, Ag 박막 성분이 검출되었다. 이는 6개의 서로 다른 물질이 장착된 회전형 육각건을 이용하여 고 품질의 다층 박막 증착이 가능함을 제시하는 결과이다. 증착된 다층 박막의 균일도는 3.8%, 가시광선 영역에서 80% 이상의 투과도, 면저항 값은 3 ${\Omega}/{\Box}$ 이하를 보임으로서 에너지 절약형 단열 유리로서의 사양을 만족시키는 결과를 제시하였다.

• Membrane Journal
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• v.6 no.2
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• pp.86-95
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• 1996

Rotary disc ultrafiltration module(RDM) was developed for the separation of oil e$$\mu$sions. This module was devised to reduce the gel polarization phenomenon by decoupling the operation pressure and the surface velocity of solution in ultrafiltration(UF) processes. The rotary disc membrane consists of 3mm-thick ABS plate covered with UF membrane (UOP, U.S.A.). When the angular velocity($\omega$) was increased, the pure water flux was slightly decreased due to pressure drop caused by centrifugal force and slip flow at the surface of membrane. The pressure drop was proportional to the square of linear velocity(${\omega}r$). When the angular velocity was changed from 52.36rad/s to 2.62rad/s, the flux decline for 5% cutting oil in one-shaft RDM at $25^{\circ}C$ and 0.1MPa was 30.16%. In the lower concentrations, angular velocity tends to give less effect on the flux. Flux(J; $kg/m^{2} \cdot s$) in a rotating disc module is mainly a function of the bulk concentration($C_{B}$; %), the linear velocity(${\omega}r$; m/s) and the effective transmembrane pressure($\Delta P_{T}$ ; Pa). Using a modified resistance-in-series model, the flux data of cutting oil experiments were fitted to give the following equation.

• Korean Journal of Soil Science and Fertilizer
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• v.41 no.4
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• pp.239-246
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• 2008

This research tried to find out the optimum fabrication method of calcined clay granules comprising zeolite. Kaolin clay and natural zeolite powder were used as raw materials of calcined clay, and silica stone powder was used for controlling the porosity of the granules. The granulation was performed with two kinds of granulators: a pan granulator and a high-shear mixer granulator. Various granules were fabricated by the mixing ratios and the rotation speeds of the granulators, and were heated from 400 to $700^{\circ}C$ at $100^{\circ}C$ interval. The crushing strength, pore size distribution, and CEC of the granules were measured. The evaluation method for the resistance of granules to human treading was created and the tests were conducted at dry and wet conditions. The resistance and crushing strength improved in proportion to the rotation speed of the granulator and the heating temperature, but the CEC decreased. The pellet made by the pan granulator did not have the strength against treading upon heating to below $700^{\circ}C$, but the pellet made by the high-shear mixer granulator endured the treading test upon heating to over $500^{\circ}C$

• Journal of the Korean Magnetics Society
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• v.9 no.2
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• pp.111-120
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• 1999

The effects of annealing in rotating magnetic field after deposition on electromagnetic properties of $Co_{82}Zr_6Mo_{12}$ thin (200~1200 $\AA$) films prepared by RF-magnetron sputtering were investigated in terms of microstructure and surface morphology. The coercivity decreases, but $4{\pi}M_5$ does not change with increasing the film thickness. The coercivity of the films was decreased below 300 $^{\circ}C$ due to stress relief and decreasing the surface roughness, while increased at 400 $^{\circ}C$ due to partial grain growth. And then, $4{\rho}M_5$ was almost independent of annealing temperatures below 200 $^{\circ}C$, but increased from 7.4 kG to 8.0 kG at 300 $^{\circ}C$ and at 400 $^{\circ}C$, which was caused by precipitation and growth of fine Co particles in the films. The electrical resistivity of films was decreased with increasing annealing temperatures and the magnetoresistance was a negative value of nearly 0 $\mu$$\Omega$cm. After annealing at 300 $^{\circ}C$, maximum effective permeability was 1200 to the hard axis of the thin films according to high frequency change. Considering the practical application of biasing layers of the films for magnetoresistive heads, optimal annealing conditions was obtained after one hour annealing at 300 $^{\circ}C$ in 400 Oe rotating magnetic field.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.14 no.5
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• pp.506-512
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• 2003

An output multiplexer of manifold type is widely used in a recent satellite transponder f3r its mass and volume reduction. For correct operation, the filter of such a multiplexer must be singly terminated. In this paper, a simple synthesis method of a 6-pole dual-mode singly terminated filter is described. From the transfer function of the filter, network parameters such as in/output terminations and coupling matrix are obtained with the aid of orthogonal projection and plane rotation. The rotation order, pivot, and rotation angle of the plane rotation process are given for easy filter synthesis. Two different-structure filters are taken into consideration and the network parameters of each filter have been obtained from the same transfer function. The method described in this paper can be applied to the other degree singly terminated filter.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.463-463
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• 2010

고휘도 고효율 백색 LED (lighting emitting diode)가 차세대 조명광원으로 급부상하고 있다. 백색 LED를 생산하기 위한 공정에서 MOCVD (유기금속화학증착)장비를 이용한 Epi wafer공정은 에피층과 기판의 격자상수 차이와 열팽창계수차이로 인하여 생성되는 에피결함의 제거를 위하여 기판과 GaN 박막층 사이에 완충작용을 해줄 수 있는 버퍼층 (Buffer layer)을 만들고 그 위에 InGaN/GaN MQW (Multi Quantum Well)공정을 하여 고휘도 고효율 백색 LED를 구현할 수 있다. 이 공정에서 기판의 온도가 불균일해지면 wafer 파장 균일도가 나빠지므로 백색 LED의 yield가 떨어진다. 균일한 기판 온도를 갖기 위한 조건으로 기판과 induction heater의 간격, 가스의 흐름, 기판의 회전, 유도가열코일의 디자인 등이 장비의 설계 요소이다. 코일에 교류전류를 흘려주면 이 코일 안 또는 근처에 있는 도전체에 와전류가 유도되어 가열되는 유도가열 방식은 가열 효율이 높아 경제적이고, 온도에 대한 신속한 응답성으로 인하여 열 손실을 줄일 수 있으며, 출력 온도 제어의 용이성 및 배출 가스 등의 오염 없다는 장점이 있다. 본 연구에서는 유도가열방식의 induction heater를 이용하여 회전에 의한 기판의 온도 균일도 측정을 하였다. 기초 실험으로 저항 가열 히터를 통하여 대류에 의한 온도 균일도를 평가하였다. 그 결과 gap이 3 mm일 때, 평균 온도 $166.5^{\circ}C$ 에서 불균일도 6.5 %를 얻었으며 이를 바탕으로 induction heater와 graphite susceptor의 간격이 3 mm일 때, 회전에 의한 온도 균일도를 측정을 하였다. 가열원은 induction heater (viewtong, VT-180C2)를 사용하였고, 가열된 graphite 표면의 온도를 2차원적으로 평가하기 위하여 적외선 열화상 카메라(Fluke, Ti-10)을 이용하여 온도를 측정하였다. 기판을 회전하면서 표면 온도의 평균과 표준 편차를 측정한 결과 2.5 RPM일 때 평균온도 $163^{\circ}C$ 에서 가장 좋은 5.5 %의 불균일도를 확인할 수 있었고, 이를 상용화 전산 유체 역학 코드인 CFD-ACE+의 모델링 결과와 비교 분석 하였다.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2016.10a
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• pp.819-820
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• 2016

Electrical power distribution is consists of high voltage, low voltage and motor control center(MCC). Motor control centers involves turning the motor on and off, it is configured electronic over current relay to detect a motor overcurrent flows. Existing electronic over current relay detects electrical fault such as overcurrent, undercurrent, phase sequence, negative sequence current, current unbalance and earth fault. However, it is difficult to detect mechanical fault such as locked rotor, motor stator and rotor and bearing fault. In this paper, we propose a condition monitoring and fault diagnosis system for electrical and mechanical fault detection of rotating machinery. The proposed system is designed with signal input and control part, system interface part and data acquisition board for condition monitoring and fault diagnosis, it was possible to detect electrical fault and mechanical fault through measurement and control of insulation resistance, locked rotor, MC counter and bearing temperature.

• Applied Chemistry for Engineering
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• v.9 no.4
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• pp.608-613
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• 1998

The purpose of this experiment was the physical properties of rubber compounds with DPCB and pure carbon black. Si-O peak in the silcia surface was observed at the range of wavenumber from 1,100 to 1,200 in the DPCB by FT-IR analysis. Cure rate of rubber compounds containing DPCB and organic silane coupling agent were (Si69) delayed compared with those containing pure carbon black. 300% modulus and interaction coefficient of DPCB with silane coupling agent were higher than those of pure carbon black and PICO weight loss amount showed constant value. It was found that $0^{\circ}C$ tan$\delta$ of rubber compounds with DPCB was larger than those of pure carbon black at 2.0% silane coupling agent based on 50 phr DPCB and $60^{\circ}C$ tan$\delta$ of rubber compounds with DPCB decreased as increasing the usage coupling agent. Consequently, it is postulated that DPCB is strong candidate material for lowering rolling resistance under constant abrasion resistance.

• Journal of Aerospace System Engineering
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• v.13 no.3
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• pp.78-86
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• 2019

This paper describes the stiffness optimization of the torsion spring hinge of the large SAR antenna considering the deployment performance. A large SAR antenna is folded in a launch environment and then unfolded when performing a mission in orbit. Under these conditions, it is very important to find the proper stiffness of the torsion spring hinge so that the antenna panels can be deployed with minimal impact in a given time. If the torsion spring stiffness is high, a large impact load at the time of full deployment damages the structure. If it is weak, it cannot guarantee full deployment due to the deployment resistance. A multi-body dynamics analysis model was developed to solve this problem using RecurDyn and the development performance were predicted in terms of: development time, latching force, and torque margin through deployment analysis. In order to find the optimum torsion spring stiffness, the deployment performance was approximated by the response surface method (RSM) and the optimal design was performed to derive the appropriate stiffness value of the rotating springs.

• Journal of the Korean Society of Marine Environment & Safety
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• v.30 no.1
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• pp.108-117
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• 2024

In this study, simulations based on computational fluid dynamics were performed for self-propulsion performance prediction of a catamaran that has asymmetrical inside and outside hull form and numerous knuckle lines. In the simulations, the Moving Reference Frame (MRF) or Sliding Mesh (SDM) techniques were used, and the rotation angle of the propeller per time step was different to identify the difference using the analysis technique and condition. The propeller rotation angle used in the MRF technique was 1˚ and those used in the SDM technique were 1˚, 5˚, or 10˚. The torque of the propeller was similar in both the techniques; however, the thrust and resistance of the hull were computed lower when the SDM technique was applied than when the MRF technique was applied, and higher as the rotation angle of the propeller per time step in the SDM technique was smaller in the simulations for several revolutions of the propeller to estimate the self-propulsion condition. The revolutions, thrust, and torque of the propeller in the self-propulsion condition obtained using linear interpolation and the delivered power, wake fraction, thrust deduction factor, and revolutions of the propeller obtained using the full-scale prediction method showed the same trend for both the techniques; however, most of the self-propulsion efficiency showed the opposite trend for these techniques. The accuracy of the propeller wake was low in the simulations when the MRF technique was applied, and slight difference existed in the expression of the wake according to the rotation angle of the propeller per time step when the SDM technique was applied.