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Deposition and Characteristics of TiN Thin Films by Atomic Layer Epitaxy (ALE 법에 의한 TiN 박막의 증착 및 특성)

  • Kim, Dong-Jin;Jung, Young-Bae;Lee, Myung-Bok;Lee, Jung-Hee;Lee, Yong-Hyun;Hahm, Sung-Ho;Lee, Jong-Hwa
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.6
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    • pp.43-49
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    • 2000
  • The TiN thin films were deposited by ALE(atomic layer epitaxy) on (100) silicon substrate. The TiN thin films were characterized by means of XRD, 4-point probe, AFM, AES and SEM. TEMAT(terakis(ethyl methy lamino)titanium) and $NH_3$ were injected into the reactor in sequence of TEMAT-$N_2-NH_3-N_2$ to ensure a saturated surface reaction. As a result, the depostion rate of the TiN film was controlled by self-limiting growth mechanism at temperature range form 150 to 220 $^{\circ}C$. Deposited TiN films, all of which show amorphous structure, had a fixed deposition rate of 4.5 ${\AA}$/cycle. The resistivity of 210 ~ 230 ${\mu}{\Omega}{\cdot}$cm and the surface r.m.s. roughness of 7.9 ~ 9.3 ${\AA}$ were measured. When TiN film of 2000 ${\AA}$ were deposited, a excellent step coverage were observed in a trench structure of 0.43${\mu}m$ contacts with 6:1 aspect ratio.

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System Diagnosis and MEMS Driving Circuits Design using Low Power Sensors (저 전력 센서를 이용한 MEMS 회로의 구현과 시스템 효율의 진단)

  • Kim, Tae-Wan;Ko, Soo-Eun;Jabbar, Hamid;Lee, Jong-Min;Choi, Sung-Soo;Lee, Jang-Ho;Jeong, Tai-Kyeong
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.45 no.1
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    • pp.41-49
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    • 2008
  • Many machineries and equipments are being changing to various and complicated by development of recent technology and arrival of convergence age in distant future. These various and complicate equipments need more precise outcomes and low-power consumption sensors to get close and exact results. In this paper, we proposed fault tolerance and feedback theorem for sensor network and MEMS circuit which has a benefit of energy efficiency through wireless sensor network. The system is provided with independent sensor communication if possible as unused action, using idle condition of system and is proposed the least number of circuits. These technologies compared system efficiency after examining product of each Moving Distance by developed sensor which gives effects to execution of system witch is reduced things like control of management side and requirement for hardware, time, and interaction problems. This system is designed for practical application; however, it can be applied to a normal life and production environment such as "Ubiquitous City", "Factory Automata ion Process", and "Real-time Operating System", etc.

Study of Blast Ground Vibration & Noise Measurements In-situ and Effect Analysis for Numerical Analysis, Rational Blasting Design at an Eel Farm (양만장의 발파 진동소음 현장측정과 수치해석을 통한 영향검토 및 합리적인 발파설계 연구)

  • Lee Song;Kim Sung-Ku;Rhee Yong-Ho
    • Tunnel and Underground Space
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    • v.16 no.2 s.61
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    • pp.179-188
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    • 2006
  • The vibration or/and noise generated by blast operations might cause not only structural damage to properties but mentally also to humans and animals. For that reason, maximum permitted vibration and noise levels are set by sensitivities of structures and they are used for the management of blast vibration. It is known that the fish lived in water are more sensitive to vibration than land animals, and thus the adverse impact of the blasting on fish farms should be very concerned. This study investigated the vibration and noise levels at a large eel farm located some 840 meters of the blasting site through the large real-scale experiments of blastings, prior to conducting the actual blasting. As a result, it was found that the noise met the requirement to be within maximum permitted level, while the ground vibration exceeded the permitted vibration. Accordingly, the impact of the excess vibration was investigated by an existing empirical method and verified by a new three dimensional numerical analysis. In this study, such an inspection process was briefly described, and a method was suggested for the examination of possible adverse effects from blasting on vibration-sensitive structures like the eel farm. The study also introduced a design method that controls the blast effects - ground vibration and noise.

Development of Automatic Remote Exposure Controller for Gamma Radiography (감마선투과검사 장치의 자동 원격조작기 개발)

  • Joo, Gwang-Tae;Shin, Jin-Seong;Kim, Dong-Eun;Song, Jung-Ho;Choo, Seung-Hwan;Chang, Hong-Keun
    • Journal of the Korean Society for Nondestructive Testing
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    • v.22 no.5
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    • pp.490-499
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    • 2002
  • Recently, gamma radiographic equipments have been used about 1,000 sets manually and operated by about 2,500 persons in Korea. In order for a radiography to work effectively with avoiding any hazard of the high level radiation from the source, many field workers have expected developing a wireless automatic remote exposure controller. The KlTCO research team has developed an automatic remote exposure controller that can regulate the speed of $0.4{\sim}1.2m/s$ by BLDC motor of 24V 200W which has output of $54kgf{\cdot}cm$, suitable torque and safety factor for the work. And the developed automatic remote exposure controller can control rpm of motor, pigtail position by photo-sensor and exposure time by timer to RF sensor. Thus, the developed equipment is expected that the unit can be used in many practical applications with benefits in economical advantage to combine the use of both automatic and manual type because attachment is possible existent manual remote exposure controller, AC and DC combined use.

Performance Evaluation of the MAC Protocols for WDM Metro Ring with Wavelength-Shared Nodes Connecting Broadband Access Networks (대역 액세스 망을 연결하는 파장 공유 노드 기반 WDM 메트로 링의 MAC 프로토콜 성능 평가)

  • So Won-Ho
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.43 no.1 s.343
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    • pp.111-120
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    • 2006
  • In this paper, a node architecture of WDM metro network for connecting broadband access networks to converge wire/wireless networks. In consideration of the proposed node architecture and network requirements we proposed and evaluated medium access control protocols. We review WDM related technologies of sub-carrier multiplexing and optical components in order to resolve the bottleneck between optical backbone networks md access networks, and a access node architecture sharing common wavelength is introduced. Source-stripping (SS) MAC protocol Is evaluated under the proposed functional node architecture. DS+IS (Destination-Stripping and Source-Stripping) and DS+IS (Destination-Stripping and Intermediate-Stripping) MAC protocols are described to increase the slot-reuse factor which is low on SS MAC protocol. The key function of new MAC protocols regards the optical switch module of proposed node architecture and helps intermediate or source access nodes for dropping slots to destinations of different wavelength group. Thus, slot-reuse factor increases as the MAC protocols reduce the unnecessary ring-rotation of transferred slots. We use a numerical analysis to expect bandwidth efficiency and maximum throughput by slot-reuse factor Throughput network simulation, the verification of throughput, queuing delay, and transmission fairness are compared among MAC protocols.

A Study On Low-cost LPR(License Plate Recognition) System Based On Smart Cam System using Android (안드로이드 기반 스마트 캠 방식의 저가형 자동차 번호판 인식 시스템 구현에 관한 연구)

  • Lee, Hee-Yeol;Lee, Seung-Ho
    • Journal of IKEEE
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    • v.18 no.4
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    • pp.471-477
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    • 2014
  • In this paper, we propose a low-cost license plate recognition system based on smart cam system using Android. The proposed system consists of a portable device and server. Potable device Hardware consists of ARM Cortex-A9 (S5PV210) processor control unit, a power supply device, wired and wireless communication, input/output unit. We develope Linux kernel and dedicated device driver for WiFi module and camera. The license plate recognition algorithm is consisted of setting candidate plates areas with canny edge detector, extracting license plate number with Labeling, recognizing with template matching, etc. The number that is recognized by the device is transmitted to the remote server via the user mobile phone, and the server re-transfer the vehicle information in the database to the portable device. To verify the utility of the proposed system, user photographs the license plate of any vehicle in the natural environment. Confirming the recognition result, the recognition rate was 95%. The proposed system was suitable for low cost portable license plate recognition device, it enabled the stability of the system when used long time by using the Android operating system.

A Study On Low Radiation Measurement of Radiation Measuring Devices and Improvement of Reaction Speed according to the Rapid Change of Radiation Dose (방사선 측정장치의 저준위 방사선 측정과 방사선량의 급격한 변화에 따른 장치의 반응 속도개선에 관한 연구)

  • Lee, Joo-Hyun;Lee, Seung-Ho
    • Journal of IKEEE
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    • v.18 no.4
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    • pp.544-551
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    • 2014
  • This paper suggests an algorithm to measure low-level radiation by radiation measuring devices, and the other algorithm to improve reaction speed of the device to better respond to dramatic changes in radiation amount. The former algorithm to improve the accuracy of measuring low-level radiation takes advantage of a dual window radiation measurement method which is based on accumulated average of pulses gathered by a radiation measuring sensor. The latter algorithm is to enhance reaction speed of a measuring device to more sensitively react to dramatic changes in radiation amount by adopting a dual window radiation measurement method which analyzes data patterns newly put into for six seconds. To verify the suggested algorithms, a hardware-which consists of sensor and high-voltage generator, controller, charger and power supply circuit, wireless communication part, and display part-was used. Tests conducted on the dual window radiation measurement method as used in the suggested algorithm have proved that accuracy improves to measure low-level radiation of 5uSv/h, and linearity also gets better. Other tests were conducted to see whether the suggested algorithm enhances the reaction speed of a radiation measuring device so that the device responds better to dramatically changing radiation amount. The experimental results have shown meaningful changes in numbers after six seconds. Therefore, the conclusions are made that the algorithm enhances the reaction speed of the device.

A Case Study on Elephant Foot Method for Railway Tunneling in Large Fault Zone (대규모 단층대구간에서의 철도터널 우각부 보강공법 적용성 연구)

  • Lee, Gilyong;Oh, Jeongho;Cho, Kyehwan;Lee, Doosoo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.36 no.6
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    • pp.1161-1167
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    • 2016
  • In this study, an attempt was made to conduct a case study on the development of ground expansive displacement due to lack of bearing capacity of original ground in spite of applying reinforcement treatments that intended to enhance the stability of big size high-speed rail tunnel in large fault zone. For the purpose of this, in-situ measurements made in the middle of excavation stage were analyzed in order to characterize ground responses and numerical analysis was performed to evaluate the effectiveness of reinforcement technique such as elephant foot method applied for this site via comparing with field monitoring measurements. In addition, further numerical studies were carried out to investigate the influence of leg pile installation angle and length, which is one of types of elephant foot method. The results revealed that the optimum condition for the leg pile installation is to maintain 45 degree of installation angle along with 6 meter of embedment depth.

Analysis of Filtration Characteristics of Submerged Microfiltration Membranes for Rainwater Filtration (빗물여과를 위한 침지식 정밀여과막의 여과특성 해석)

  • Cho, Hyeongrak;Jung, Jungwoo;Sohn, Jinsik;Lee, Sangho;Chae, Soo Kwon
    • Membrane Journal
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    • v.24 no.1
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    • pp.31-38
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    • 2014
  • Rainwater harvesting is a process by which rainwater collected from rooftop or other catchment is purified so that the water can be directly or indirectly used by human beings for beneficial uses. As rainwater is increasingly considered for high quality purposes, membranes have gained an important place in rainwater treatment. It has advantages such as the production of high quality water, small footprint, and affordable energy consumption. Nevertheless, membrane fouling is regarded as a serious problem similar to the cases of water treatment and wastewater reclamation. In this study, we applied microfiltration (MF) membranes for rainwater treatment. In addition, a low pressure ultraviolet (UV) process was also use as a pretreatment to control notonly. To quantify the effect of UV on organic matters, both total organic carbon (TOC) and UV absorbance (UVA) were measured. Moreover, the effect of UV pretreatment on membrane fouling was investigated. Experimental results indicated that the pretreatment of membranes using LPUV was effective to control fouling of MF membranes only when the rainwater was contaminated by algae. This was attributed the reduction and modification of organics after UV treatments. It is likely that the UV/MF process is a promising option for water treatment in decentralized water treatment such as micro water grid systems.

Performance Evaluation of Concrete using Performance Improving-type Polycarboxylic acid-based Admixture (성능개선형 폴리카르본산계 혼화제를 사용한 콘크리트의 성능평가에 관한 실험적 연구)

  • Seo, Tae-Seok;Choi, Hoon-Jae;Gong, Min-Ho
    • Journal of the Korea Institute of Building Construction
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    • v.17 no.5
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    • pp.445-451
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    • 2017
  • Because of the supply-demand problem of aggregate, recently, the construction sites using 100% crushed sand are increasing and the use of low quality aggregate such as farmland sand is increasing too. When the low quality aggregate is used, the various quality defect of concrete such as the strength reduction, the increase of shrinkage and bleeding can be occurred. Therefore, in this study, the performance improvement PC admixture was developed to minimize the quality defect of plain concrete of basement parking area, when the low quality aggregate was used at the plain concrete of basement parking area. The slump loss to elapsed time test, the compressive strength test, the bleeding test and the drying shrinkage test were carried out.