• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.107-107
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• 2000

최근 반도체 소자의 고집적화 및 대용량화의 경향에 다라 MOSFET 소자 제작에 이동되는 게이트 산화막의 두께가 수 nm 정도까지 점점 얇아지는 추세이고 Giga-DRAM급 차세대 UNSI소자를 제작하기 위해 5nm이하의 게이트 절연막이 요구된다. 이런 절연막의 두께감소는 게이트 정전용량을 증가시켜 트랜지스터의 속도를 빠르게 하며, 동시에 저전압동작을 가능하게 하기 때문에 게이트 산화막의 두께는 MOS공정세대가 진행되어감에 따라 계속 감소할 것이다. 따라서 절연막 두께는 소자의 동작 특성을 결정하는 중요한 요소이므로 이에 대한 정확한 평가 방법의 확보는 공정 control 측면에서 필수적이다. 그러나, 절연막의 두께가 작아지면서 게이트 산화막과 crystalline siliconrksm이 계면효과가 박막의 두께에 심각한 영향을 주기 때문에 정확한 두께 계측이 어렵고 계측방법에 따라서 두께 계측의 차이가 난다. 따라서 차세대 반도체 소자의 개발 및 양산 체계를 확립하기 위해서는 산화막의 두께가 10nm보다 작은 1nm-5nm 수준의 박막 시료에 대한 두께 계측 방법이 확립이 되어야 한다. 따라서, 본 연구에서는 습식 산화 공정으로 제작된 3nm-7nm 의 게이트 절연막을 현재까지 알려진 다양한 두께 평가방법을 비교 연구하였다. 절연막을 MEIS (Medim Energy Ion Scattering), 0.015nm의 고감도를 가지는 SE (Spectroscopic Ellipsometry), XPS, 고분해능 전자현미경 (TEM)을 이용하여 측정 비교하였다. 또한 polysilicon gate를 가지는 MOS capacitor를 제작하여 소자의 Capacitance-Voltage 및 Current-Voltage를 측정하여 절연막 두께를 계산하여 가장 좋은 두께 계측 방법을 찾고자 한다.다. 마이크로스트립 링 공진기는 링의 원주길이가 전자기파 파장길이의 정수배가 되면 공진이 일어나는 구조이다. Fused quartz를 기판으로 하여 증착압력을 변수로 하여 TiO2 박막을 증착하였다. 그리고 그 위에 은 (silver)을 사용하여 링 패턴을 형성하였다. 이와 같이 공진기를 제작하여 network analyzer (HP 8510C)로 마이크로파 대역에서의 공진특서을 측정하였다. 공진특성으로부터 전체 품질계수와 유효유전율, 그리고 TiO2 박막의 품질계수를 얻어내었다. 측정결과 rutile에서 anatase로 박막의 상이 변할수록 유전율은 감소하고 유전손실은 증가하는 결과를 나타내었다.의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.139-139
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• 2010

금속 실리사이드 나노입자는 열적 및 화학적 안정성이 뛰어나고, 절연막내에 일함수 차이에 따라 깊은 양자 우물구조가 형성되어 비휘발성 메모리 소자를 제작할 수 있다. 그러나 단일 $SiO_2$ 절연막을 사용하였을 경우 저장된 전하의 정보 저장능력 및 쓰기/지우기 시간을 향상시키는 데 물리적 두께에 따른 제한이 따른다. 본 연구에서는 터널장벽 엔지니어링을 통하여 물리적인 두께는 단일 $SiO_2$ 보다는 두꺼우나 쓰기/지우기 동작을 위하여 인가되는 전기장에 의하여 상대적으로 전자가 느끼는 상대적인 터널 절연막 두께를 감소시키는 방법으로 동작속도를 향상 시킨 $SiO_2/Si_3N_4/SiO_2$ 및 $Si_3N_4/SiO_2/Si_3N_4$ 터널 절연막을 사용한 금속 실리사이드 나노입자 비휘발성 메모리를 제조하였다. 제조방법은 우선 p-type 실리콘 웨이퍼 위에 100 nm 두께로 증착된 Poly-Si 층을 형성 한 이후 소스와 드레인 영역을 리소그래피 방법으로 형성시켜 트랜지스터의 채널을 형성한 이후 그 상부에 $SiO_2/Si_3N_4/SiO_2$ (2 nm/ 2 nm/ 3 nm) 및 $Si_3N_4/SiO_2/Si_3N_4$ (2 nm/ 3 nm/ 3 nm)를 화학적 증기 증착(chemical vapor deposition)방법으로 형성 시킨 이후, direct current magnetron sputtering 방법을 이용하여 2~5 nm 두께의 $WSi_2$ 및 $TiSi_2$ 박막을 증착하였으며, 나노입자 형성을 위하여 rapid thermal annealing(RTA) system을 이용하여 $800{\sim}1000^{\circ}C$에서 질소($N_2$) 분위기로 1~5분 동안 열처리를 하였다. 이후 radio frequency magnetron sputtering을 이용하여 $SiO_2$ control oxide layer를 30 nm로 증착한 후, RTA system을 이용하여 $900^{\circ}C$에서 30초 동안 $N_2$ 분위기에서 후 열처리를 하였다. 마지막으로 thermal evaporator system을 이용하여 Al 전극을 200 nm 증착한 이후 리소그래피와 식각 공정을 통하여 채널 폭/길이 $2{\sim}5{\mu}m$인 비휘발성 메모리 소자를 제작하였다. 제작된 비휘발성 메모리 소자는 HP 4156A semiconductor parameter analyzer와 Agilent 81101A pulse generator를 이용하여 전기적 특성을 확인 하였으며, 측정 온도를 $25^{\circ}C$, $85^{\circ}C$, $125^{\circ}C$로 변화시켜가며 제작된 비휘발성 메모리 소자의 열적 안정성에 관하여 연구하였다.

• Korean Journal of Food Science and Technology
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• v.46 no.3
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• pp.315-322
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• 2014

Immobilized lipases were prepared by physical adsorption using lipase AK, AY, AH, PS and R on Amberlite$^{(R)}$XAD$^{(R)}$7 HP resin. With the immobilized lipases (10%), structured lipid was synthesized by enzymatic interesterification of canola oil, palmitic ethyl ester, and stearic ethyl ester in order to study the reaction characteristics. Among the lipase, the highest protein content was obtained from lipase AH (11.41%) before immobilization, while the highest levels of bound protein was observed from immobilized lipase AK (63.91%). Immobilized lipase AK had the highest interesterification activity (38.3% of total saturated fatty acid). Lipase AK was also used for a continuous reaction in which the slow flow of reactant resulted in increased reaction rate. Reusability of immobilized AK, AH and PS increased at the second reaction (120-196.5%). However, the activity of immobilized AK, which had the highest bound protein content (63.91%) decreased after the third reaction, while the activity of immobilized AH and PS was maintained until the sixth reaction.

• Korean Journal of Food Science and Technology
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• v.32 no.6
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• pp.1244-1250
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• 2000

A method for simultaneous quantitative determination of plasticizers such as diethyl phthalate(DEP), di-n-propyl phthalate(DprP), di-n-butyl phthalate(DBP), di-n-pentyl phthalate(DPP), butylbenzyl phthalate(BBP), di-(2-ethylhexyl) phthalate(DEHP), dicyclohexyl phthalate(DCHP) and di-(2-ethylhexyl) adipate(DEHA), which are suspected as endocrine disruptors, in food was studied. A analysis method was optimized for the quantification of plasticizers in Jjambbong, which is a kind of fatty noodle, by using GC/FID. The detection limits of DEP, DprP, DBP, DPP, BBP, DEHP, DCHP and DEHA were 3.5, 5.3, 2.2, 2.2, 7.2, 1.7, 1.9 and 3.0 mg/kg, respectively. Much higher recovery was obtained by extraction with acetone/n-hexane(1:1) rather than hexane solvent system. The recovery of DEP, DprP, DBP, DPP, BBP, DEHP, DCHP and DEHA were 72.7, 85.9, 91.4, 97.1, 100.8, 103.2, 104.3 and 95.8% after 4 time extractions, respectively. The migration of plasticizers from PVC wraps into PVC wrap covered Jjambbong was conducted after shaking(120 rpm) for 30min at room temperature with chosen solvent system. It was found that the migration level of DEHA were 577, 706, 770 mg/kg into Jjambbong, respectively, while the other plasticizers were not observed.

• Journal of the Korean Society of Food Science and Nutrition
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• v.36 no.1
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• pp.51-57
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• 2007

Levan, the fructose polymer is an indigestible carbohydrate regularly consumed by humans. Its physiological functions, in terms of hypocholesterolemic effect and calcium metabolism, have not been well documented. The objective of this study was to investigate the effects of levan on blood lipids and the calcium absorption ratio in rats fed a 0.1% low calcium diet. Thirty rats were divided into three groups and fed a 0.1% low calcium diet (control) or low calcium diets containing either 2.5% levan or 5% levan for eight weeks. The blood lipid and biomarkers relevant to Ca metabolism (urinary Ca and hydroxyproline), the femoral weight and the Ca contents were determined. The body weight gains were lower in the 5% levan group than the control group. Plasma concentrations of triacylglycerol and LDL-cholesterol decreased in the 5% levan group, compared to the control group, but the atherogenic indice were not affected. Blood alkaline phosphatase activity, Ca and urinary hydroxyproline excretion levels were not different in the three groups. The net calcium absorption in rats fed a 5% levan diet was greater than rats fed the control diet, while the femoral weights and Ca contents were not significantly different in the three groups. We concluded that a 5% levan diet could both enhance the calcium absorption and improve the lipid profiles in rats fed a low calcium diet.

• Health Policy and Management
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• v.29 no.2
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• pp.206-219
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• 2019

This paper aims to demonstrate current health expenditure (CHE) and National Health Accounts of the years 2018 constructed according to the SHA2011, which is a manual for System of Health Accounts (SHA) that was published jointly by the Organization for Economic Cooperation and Development (OECD), Eurostat, and World Health Organization in 2011. Comparison is made with international trends by collecting and analyzing health accounts of OECD member countries. Particularly, scale and trends of the total CHE financing as well as public-private mix are parsed in depth. In the case of private financing, estimation of total expenditures for (revenues by) provider groups (HP) is made from both survey on the benefit coverage rate of National Health Insurance (by National Health Insurance Service) and Economic Census and Service Industry Census (by National Statistical Office); and other pieces of information from Korean Health Panel Study, etc. are supplementarily used to allocate those totals into functional classifications. CHE was 144.4 trillion won in 2018, which accounts for 8.1% of Korea's gross domestic product (GDP). It was a big increase of 12.8 trillion won, or 9.7%, from the previous year. GDP share of Korean CHE has already been close to the average of OECD member countries. Government and compulsory schemes' share (or public share), 59.8% of the CHE in 2018, is much lower than the OECD average of 73.6%. 'Transfers from government domestic revenue' share of total revenue of health financing was 16.9% in Korea, lower than the other social insurance countries. When it comes to 'compulsory contributory health financing schemes,' 'transfers from government domestic revenue' share of 13.5% was again much lower compared to Japan (43.0%) and Belgium (30.1%) with social insurance scheme.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.25 no.1
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• pp.31-38
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• 1980

This experiment was carried out to study the heterosis and the GCA and SCA effects for days to heading of F 1 populations produced from eight wheat cultivar diallel. Greater heterosis for early heading was exhibited under the high temperature condition than under the low temperature conditions, and same results were also observed under short day condition rather than long day conditions. There are highly significant mean for GCA and SCA at all environmental conditions. Yecora F70 was showed the greatest effect, and Bezostaya and Blueboy were exhibited less effects of CCA for early heading. Significant GCA effect was expressed at high temperature and short day condition, indicating that this condition provides a better opportunity to select the materials for earliness. Selections of combination with greater effect of SCA for early heading such as Suweon 169 \times Yecora F70 were discussed for practical utilization.

• Journal of Food Hygiene and Safety
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• v.38 no.4
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• pp.193-201
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• 2023

Antimicrobials in human medicine are classified by The World Health Organization (WHO) into three groups: critically important antimicrobials (CIA), highly important antimicrobials (HIA), and important antimicrobials (IA). CIA are antibiotic classes that satisfy two main criteria: that they are the sole or the only available limited therapeutic option to effectively treat severe bacterial infections in humans (Criterion 1), and infections where bacteria are transmitted to humans from non-human sources or have the potential to acquire resistance genes from non-human sources (Criterion 2). WHO emphasizes the need for cautious and responsible use of the CIA to mitigate risk and safeguard human health. Specific antimicrobials within the CIA with a high priority for management are reclassified as "highest priority critically important antimicrobials (HP-CIA)" and include the 3^rd generation of cephalosporins and the next generation of macrolides, quinolones, glycopeptides, and polymyxins. The CIA list is the scientific basis for risk assessment and risk management policies that warrant using antimicrobials to reduce antimicrobial resistance in several countries. In addition, the CIA list ensures food safety in the food industry, including for the popular food chain companies McDonald's and KFC. The continuous update of the CIA list reflects the advancement in research and emerging future challenges. Thus, active and deliberate evaluation of antimicrobial resistance and the construction of a list that reflects the specific circumstances of a country are essential to safeguarding food security.

• Journal of dental hygiene science
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• v.12 no.2
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• pp.123-129
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• 2012

The aim of study was to compare the color parameters and mean color difference of porcelain specimens by different veneering technique in order to examine the effect of veneering technique on esthetics of yttria-stabilized tetragonal zirconia polycrystalline(Y-TZP) all ceramic restoration. Three groups of square-shaped core ceramic specimens(14mm in diameter and 0.3, 0.5, 0.7 mm) and two groups of veneering ceramic specimen were prepared for analysis. Color parameter($L^*,a^*,b^*$) and color difference of zirconia core squares and core-veneer specimens were measured with ShadeEye $NCC^{(R)}$ spectrophotometer, respectively. Mean color difference(${\Delta}E^*$)were calculated using color difference formula. Two-way analysis of variance(ANOVA) combined with a Tukey multiple-range test were used to analysis the data(${\alpha}=0.05$). ${\Delta}E^*$ values were not significantly affected by core thickness and veneering porcelain(p=0.083). The color differences(${\Delta}E^*$) of core-veneer specimens with 0.5, 0.7 mm-A1,A2,A3.5 shade were mostly below 3.7 which was within the clinically acceptable range, while color differences between 0.3 mm-A1,A2 showed more than 3.7. All-ceramic system has color characteristics that clinicians have to consider when selecting materials. Also, manufacturers of different porcelain systems must make every effort to achieve color reproducibility.

• Journal of Sensor Science and Technology
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• v.14 no.1
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• pp.33-41
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• 2005

For more convenient electrode-electrolyte interface impedance analysis in biosensor, a stand-alone impedance measurement system is required. In our study, we developed a PC-based portable system to analyze impedance of the electrochemical cell using microprocessor. The devised system consists of signal generator, programmable amplifiers, A/D converter, low pass filter, potentiostat, I/V converter, microprocessor, and PC interface. As a microprocessor, PIC16F877 which has the processing speed of 5 MIPS was used. For data acquisition, the sampling rate at 40 k samples/sec, resolution of 12 bit is used. RS-232 with 115.2 kbps speed is used for the PC communication. The square wave was used as stimuli signal for impedance analysis and voltage-controlled current measurement method of three-electrode-method were adopted. Acquired voltage and current data are calculated to multifrequency impedance signal after Fourier transform. To evaluate the implemented system, we set up the dummy cell as equivalent circuit of which was composed of resistor, parallel circuit of capacitor and resistor connected in parallel and measured the impedance of the dummy cell; the result showed that there exist accuracy within 5 % errors and reproduction within 1 % errors compared to output of Hioki LCR tester and HP impedance analyzer as a standard product. These results imply that it is possible to analyze electrode-electrolyte interface impedance quantitatively in biosensor and to implement the more portable high speed impedance analysis system compared to existing systems.