• Journal of Korean Tunnelling and Underground Space Association
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• v.23 no.3
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• pp.151-165
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• 2021

Grouting, which is applied for the increase of ground strength and the decrease of permeability, is complex process because of several reasons, so the process needs to be elaborated. Injection process in consideration of ground condition and optimization of grouting sequence is essential. In this study, GIN (Grouting Intensity Number), multiple of injected grout volume and pressure, is revised to consider injection pressure reduction and joint opening during grouting process. A revised GIN process is evaluated through a field test. A revised GIN, considering ground condition, injection pressure, follows GIN envelope and produces rational grouting process. The result of a revised GIN reduces permeability of the ground in the order of 10^-1~10^-2 cm/sec.

• Journal of the Korean Geotechnical Society
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• v.28 no.6
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• pp.19-29
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• 2012

Pack micropiles were recently developed to improve pile capacity of general micropiles. Pack micropiles were made by warping thread bar or steel pipe of general micropile by geotexlile pack and grouting inside the pack with pressure. According to the pressure, the boring hole could be enlarged. A series of pile uplift tests were performed on three micropiles. Two out of the three piles were the pack micropiles and the other was the general micropile, in which a thread bar was used in the boring hole. According to the pressure applied to the pack micropiles, the diameter of boring hole was enlarged from 152 mm to 220 mm. Unit skin friction mobilized on side surfaces of micropiles increased with displacement of pile head and reached on a constant value, which represents that the relative displacement between piles (or thread bar) and soils was reached on critical state. And the uplift resistance of pack micropile was higher than that of general micropile. Two reasons can be considered: One is that the frictional surface increases due to enlarging diameter of boring holes and the other is that the unit skin friction could increase due to compressing effect of surrounding soils by soil displacement as much as the enlarging volume of boring hole. The compression effect appeared at deeper layer rather than surface layer. The unit skin friction mobilized on micropiles with small diameter was higher than the ones on large bored piles.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.42 no.4
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• pp.501-508
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• 2022

Required essential technique is to determine the maximum recharge pressure in the well with condition of non-ground failure for the recovery of the groundwater. Based on the classical soil mechanics, the maximum recharge pressure was estimated with the numerical anlaysis and laboratory triaxial test. In the numerical analysis, the maximum recharge pressure is defined as the ground failure stress. The ground failure of the sand was defined as the piping and the one of the caly was to the undrained failure by the confined pressure increment. In the triaxial test, the recharge pressure in the ground was modified by the back pressure in the specimen. In case of sand, the volume strain was dramatically increased at the 93 % of the maximum back pressure, same meaning of the 0 effective stress state. In case of clay, the only radial volume strain was to reached 1.5 % without failure. Therefore, The maximum recharge pressure could be determined with the numerical analysis and triaxial test.

• Journal of Korean Tunnelling and Underground Space Association
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• v.19 no.2
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• pp.265-281
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• 2017

For shallow tunnel constructions, settlement of the ground surface is a main issue. Recent technical developments in shield TBM tunneling technique have enabled a decrease in such settlements based on tunneling with ground deformation controls. For this objective, the tail void grouting is a common practice. Generally surface settlements in a soil of low permeability occur during a tunnel construction but also during a long period after completion of the tunnel. The long-term settlements occur mainly due to consolidation around the tunnel. The consolidation process is caused and determined by the tail void grouting which leads to an excess pore water pressure in the vicinity of the tunnel. Because of this, the grouting pressure has a strong effect on the long-term settlements in the shield tunneling. In order to investigate this effect, a series of coupled hydro-mechanical 3D finite element simulations have been performed. The results show that an increase in grouting pressure reduces the short-term settlements, but in many cases, it doesn't lead to a reduction of the final settlements after the completion of consolidation. Thereby, the existence of a critical grouting pressure is identified, at which the minimal settlements are expected.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.265-265
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• 2014

일반적으로 태양전지 및 반도체 공정에서 불순물 주입 과정인 도핑(Doping)공정은 크게 몇 가지 방법으로 구분해 볼 수 있다. 소성로(Furnace)를 이용하여 열을 통해 불순물을 웨이퍼 내부로 확산시키는 열확산 방법과 진공 챔버 내부에서 전자기장을 걸어 이온을 극도로 가속시켜 진행하는 이온 주입(Ion implantation)이나 이온 샤워(Ion shower)를 이용한 도핑 방법이 있다. 또한 최근 자외영역 파장의 레이저광을 조사하여 광화학 반응에 의해 도펀트 물질를 분해하는 동시에 조사 부분을 용해하여 불순물을 도포하는 기법인 레이져 도핑(Laser doping) 방법이 개발중이다. 그러나 레이져나 이온 도핑 공정기술은 고가의 복잡한 장비가 필요하여 매출 수익성 및 대량생산에 비효율적이며 이온 주입에 의한 박막의 손상을 치료하기 위한 후속 어닐링(Post-annealing) 과정이 요구되는 단점을 가지고 있고 열확산 도핑 방법은 정량적인 불순물 주입 제어가 어렵고 시간 대비 생산량의 한계가 있다. 반면 대기압 플라즈마로 도핑을 할 경우 기존에 진공개념을 벗어나 공정상에서 보다 저가의 생산을 가능케 할 뿐아니라 멀티 플라즈마 소스 개발로 이어진다면 시간적인 측면에서도 단연 단축시킬 수가 있어 보다 대량 생산 공정에 효과적이다. 따라서 본 연구에서는 새로운 도핑 방법인 대기압 플라즈마를 이용한 도핑 공정기술의 가능성을 제안하고자 도핑 공정 시 웨이퍼 내 전류 패스(Current path)에 대한 메카니즘을 연구하였다. 대기압 플라즈마 방전 시 전류가 웨이퍼 내부에 흐를 때 발생되는 열을 이용하여 도핑이 되는 형식이란 점을 가정하고 이 점에 대한 원리를 증명하고자 실험을 진행하였다. 실험 방식은 그라운드(Ground) 내 웨이퍼의 위치와 웨이퍼 내 방전 위치에 따라 적외선 화상(IR image: Infrared image) 화상을 서로 비교하였다. 적외선 화상은 실험 조건에 따라 화상 내 고온의 표식이 상이하게 변하는 경향성을 나타내었다. 이 고온의 표식이 전류 패스라는 점을 증명하고자 시뮬레이션을 통해 자기장의 전산모사를 한 결과 전류 패스의 수직 방향으로 자기장이 형성이 됨을 확인하였으며 이는 즉 웨이퍼 내부 전류 패스에 따라 도핑이 된다는 사실을 명백히 말해주는 것이며 전류 패스 제어의 가능성과 이에 따라 SE(Selective Emitter) 공정 분야 응용 가능성을 보여준다.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.250.2-250.2
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• 2015

결정질 태양전지의 변환효율은 이미 이론적 한계에 가까워져, 최근 산업에서는 이 대신 제조공정 단가를 낮추려는 연구가 진행되고 있다. 본 연구에서는 태양전지 도핑공정에 대기압 DBD 플라즈마를 응용하여 저렴하게 태양전지를 제작할 수 있는 방법을 모색한다. 대기압 DBD 플라즈마를 발생시키기 위해 DC-AC 인버터 구조의 전원을 사용하여 수십 kHz의 주파수, 수 kV의 전압을 인가하여 $5cm{\times}1cm$ 직사각형 모양의 아노다이징된 알루미늄 전극을 사용하였다. 전극과 Ground 사이에 Argon 가스를 주입하여 플라즈마를 발생시켰으며, 출력전류는 수십 mA의 전류가 측정되었다. $3cm{\times}3cm$의 P-type wafer에 스핀코팅 방식으로 H3PO4를 도포한 후, Wafer 표면에 플라즈마를 조사하여 대기압 DBD 플라즈마를 이용한 태양전지 도핑 가능성을 확인하였다. 플라즈마 출력 전류와 플라즈마 조사시간을 변수로 도핑된 Wafer의 특성을 확인하였다. 도핑 프로파일은 SIMS (Secondary Ion Mass Spectrometry)를 통해 측정하였으며, 전기적인 특성은 4 point probe로 면저항을 측정하였다. 대기압 DBD 플라즈마를 이용해 도핑된 wafer에 전극을 형성하여, 같은 도펀트를 사용하여 Furnace로 열 확산법을 이용해 도핑 공정을 진행한 wafer와 변환효율(Conversion efficiency)을 측정하여, 대기압 플라즈마를 이용한 도핑 가능성을 확인하였다.

• Journal of Korean Tunnelling and Underground Space Association
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• v.20 no.2
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• pp.433-452
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• 2018

The shield tunneling method can minimize surface settlements by preventing the deformation of tunnel face and tunnel intrados due to tunnel excavation. For this purpose, it is very important to control the operating conditions of shield TBM. The face pressure and backfill pressure for tail void grouting should be the most important and immediate measure not only to restrain surface settlement, but also to influence the effective stress and pore water pressure around the circumstance of tunnel during excavation. The reaction of the ground to the application of face pressure and backfill pressure relies on the stiffness and permeability of ground. Especially, the reaction of saturated clayey ground formations, which shows the time-dependent deformation, is different from the permeable ground. Hence, in this paper it was investigated how the TBM operating conditions, ground stiffness, and permeability impact on the surface settlement of saturated clayey ground. For this purpose, a series of parametric studies were carried out by means of the stress-pore water pressure coupled FE analysis. The results show that the settlement of soft clayey ground is divided into the immediate settlement and consolidation settlement. Especially, the consolidation settlement depends on the ground stiffness and permeability. In addition, the existence of critical face pressure and backfill pressure was identified. The face pressure and backfill pressure above the critical value may cause an unexpected increase in the ground settlement.

• Tunnel and Underground Space
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• v.20 no.2
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• pp.82-91
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• 2010

Grouting technology is one of the ground improvement methods used in water controlling and reinforcement of rock mass in underground structure construction. It is necessarily required to find out the characteristics of grout flow through discontinuities in a rock mass for an adequate grout design and performance assessment. Laminar flow is not always applicable in simulating a grout flow in a rock mass, since the rock joints usually have apertures at a micro-scale and the flow through these joints is affected by the joint roughness and the velocity profile of the flow changes partially near the roughness. Thus, the influence of joint roughness and aperture on the grout flow in rough rock joint was numerically investigated in this study. The commercial computational fluid dynamics code, FLUENT, was applied for this purpose. The computed results by embedded Herschel-Bulkley model and VOF (volume of fluid) model, which are applicable to simulate grout flow in a narrow rock joint that is filled with air and water, were well compared with that of analytical results and previously published laboratory test for the verification. The injection pressure required to keep constant injection rate of grout was calculated in a variety of Joint Roughness Coefficient (JRC) and aperture conditions, and the effect of joint roughness and aperture on grout flow were quantified.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.40 no.1
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• pp.97-103
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• 2020

The newly improved multistep steel pipe grouting method was applied to an existing steel pipe-reinforced grouting method. It was applied in order to prevent a damage caused by ground failure from excessive grouting pressure in a tunnel construction. The tunnel goes under a highway and a ramp connected to a rest area on OO highway with 11.3~12.1 m depth cover and is a part of roadbed facility construction section ordered by OO public corporation. The improved grouting method provides pre-construction work condition assessment technique through new water injection limit test and grouting effect assessment technique by grouting type assessment. It also includes assessments on interval of joints, appropriate grouting pressure, and optimal operation time to be applied to current operations. Application of the grouting method allowed the smooth road management in shallow-depth grouting construction area located upper part of tunnel excavation. Moreover, the possibility of the application of the method not only to shallow-depth grouting construction but also to various steel pipe-reinforced grouting constructions was confirmed.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.447-447
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• 2010

일찍이 $SiO_2$ (Silicon dioxide) 박막은 다양한 분야에서 유전층, 부식 방지층, passivation층 등의 역할을 해왔다. 그리고 이러한 박막 공정은 대부분 진공의 환경에서 그 공정이 이루어지고 있다. 하지만 이러한 진공 system은 chamber, loadlock 그리고 펌프 등의 다양한 진공장비로 인한 생산 비용 증가, 공정의 복잡성뿐만 아니라 공정의 대면적화에 어려움을 지니고 있다. 그리고 최근 flexible display의 제조 공정에서 polymer 혹은 plastic 기판을 제조 공정에 적용시키기 위해 저온 공정이 필수적으로 요구 되고 있다. 이러한 기술적 한계를 뛰어 넘기 위해 최근 많은 연구가들은 atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD)에 대해 지속적으로 다양한 연구를 하고 있다. 본 연구에서는 remote-type의 modified pin-to-plate dielectric barrier discharge (DBD) 시스템을 이용한 $SiO_2$ 무기 박막 증착에 관해 연구하였다. $O_2$/He/Ar의 gas와 5 kV AC power (30 kHz)의 전원장치를 통해 고밀도 대기압 플라즈마를 발생시켰고, silicon precursor로는 hexamethyldisilazane (HMSD)를 사용하였다. 먼저 HMDS와 $O_2$ gas의 flow rate 변화에 따른 증착률을 조사하였고 그 다음으로 박막의 조성 및 표면 특성을 조사하였다. HMDS의 유량이 100 ~ 300 sccm으로 증가함에 따라 증착속도는 증가했다. 하지만 FT-IR을 통해 HMDS의 유량이 증가하면 반응에 참여할 산소 분자의 부족으로 인해 $-(CH_3)_X$의 peak intensity가 증가하고, -OH의 peak intensity가 점차 감소함을 관찰 할 수 있었다. 또한 증착된 박막의 표면에 particle과 불균일한 surface morphology 등을 SEM image를 통해 관찰 하였다. 산소 유량이 탄소와 관련된 많은 불순물들의 제거에 도움이 됨에도 불구하고 14 slm 이상의 산소가 반응기 내로 주입되게 되면 대기압 플라즈마의 discharge가 불안정하게 되어 공정효율을 저하시키는 요소가 되었다. 결과적으로 HMDS (150 sccm)/$O_2$ (14 slm)/He (5 slm)/Ar (3 slm)의 조건에서 약 42.7 nm/min 증착률을 가지며, 불순물이 적고 surface morphology가 깨끗한 $SiO_2$ 박막을 증착할 수 있었다.