• Particle and aerosol research
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• v.13 no.4
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• pp.151-158
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• 2017

Electrostatic precipitator is widely used to remove particulate matters in indoor air and industrial flue gas due to low pressure drop and high collection efficiency. However, it has a low collection efficiency for the submicrometer sized particles. Electrospraying is a potential method to increase the particle charging efficiency, which results in increased collection efficiency. Although particle charging efficiency is highly dependent upon droplet size, the effective measuring method of the droplets is still uncertain. Tap water was electrosprayed in this study, and the images of electrosprayed droplets were taken with a high speed camera coupled with several visualization methods in order to measure the droplets size. The droplet size distribution was determined by an image processing with an image-J program. As a result, a droplet measured by a laser visualization, had a half size of that by a Xenon light visualization. In addition, the experimentally measured droplet sizes were a good agreement with the predicted values suggested by $Fern{\acute{a}}ndez$ de la Mora and Loscertales(1994).

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2005.11a
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• pp.488-490
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• 2005

• Journal of ILASS-Korea
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• v.11 no.2
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• pp.98-104
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• 2006

A charged droplet scrubber was introduced to remove visible smokes generated in many industrial facilities. Lab-scale and field tests were conducted in this study. The system consists of a corona discharger to effectively charge the fine particles, fellowed by an electrostatic chamber to promote coagulation between charged fine particles and oppositely charged droplets and a demister to remove resultant particles. Overall collection efficiency, 98.4% was obtained from a lab-scale test, when a high voltage was applied to an ionizer and a charged droplet scrubber. Field tests also show the high collection efficiencies, 93.5% with one stage and 99.4% with two stage system. This system can be used to increase the collection efficiency of the conventional air pollution control devices to satisfy the national emission standard.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.893-898
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• 2003

An experiment was conducted to characterize water droplet charging performance of an electrostatic spraying nozzle for an electrostatic wet scrubber. Charge-to-mass ratios, the nozzle currents divided by the mass flow rate of water were obtained with respect to the applied voltage to the ring-electrode for 2 different flow conditions. It was shown that the charge-to-mass ratio increased in proportion to the applied voltage and tended to saturate at a certain higher voltage.

• Air Cleaning Technology
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• v.17 no.4 s.67
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• pp.39-57
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• 2004

첨단산업으로 불리는 반도체, LCD, PDP, 유기EL(OLED) 등의 생산 공정은 고도의 청정상태를 요구하며, 때문에 이들의 생산공정 중 대부분이 클린룸 내에서 이루어진다. 클린룸 내에서의 주요공정은 크게 박막형성(Layering), 노광(Photo Lithography), 식각(Etching) 등 3가지 공정으로 나눌 수 있으며, 반도체 제조공정의 경우 특별히 도핑(Doping) 공정이 추가된다. 오염물질을 함유하는 클린룸 배기는 일반적으로 산, 알칼리, Toxic(PFCs, Flammable), VOC 등으로 분류하며, 각각의 배기는 각 배기특성에 맞는 오염제어 장치를 통해, 정화된 후, 대기로 방출된다. 산, 알칼리 배기는 일반적으로 최종 단계에서 중앙집중식 습식스크러버에 의해 흡수, 중화 처리되며, VOC의 경우 농축기(Concentrator) & 축열식 열 산화장치(RTO) 설비에 의해 연소 처리된다. 하지만 CVD공정으로부터의 배기가 주를 이루는 Toxic배기의 경우, 다량의 PFCs(과불소화합물) 가스를 함유하고 있는 이유로, 대부분 클린룸 내부에 P.O.U(Point of use) 처리장치가 설치되며, P.O.U에 의해 1차 처리된 후 최종적으로 중앙집중식 습식스크러버를 거쳐 대기로 방출된다. 알칼리배기의 주성분으로는 암모니아($NH_3$), HMDS (Hexa Methyl DiSilazane), TMAH (Tetra Methyl Ammonium Hydroxide), LGL, CD 등이며 흡수액에 황산(Sulfuric Acid)용액을 공급, 중화처리하고 있다. 탄소성분을 먹이로 하는 미생물의 번식에 의한 막힘 문제를 제외하고는 큰 문제가 없다. 하지만 Toxic배기 및 산배기의 경우 처리효율이, 가스흡수 이론에 의한 계산결과와 비교할 때, 매우 저조하게 나타나는 효율부족 현상을 겪고 있으며, 이는 잔여 PFCs 가스성분 및 반응에어로졸, 응축에어로졸 등의 영향으로 추정하고 있다. 최근 Toxic 배기의 경우, P.O.U 설비를 Burn & Wet type으로 변경하여, 배기 중 PFCs 및 반응에 에어로졸($SiO_2$)의 농도를 원천적으로 감소시키는 노력이 진행 중이다. 산배기의 경우, 산결로 현상에 의한, 응축에어로졸이 문제가 되고 있으나 내식열교환기(Anti-Corrosive Heat Exchanger), 하전액적스크러버 시스템(Charged Droplets Scrubber System), Wet ESP(Wet Electrostatic Procipitator) 등의 도입을 통해 문제해결을 위한 노력을 경주하고 있다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.1
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• pp.79-87
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• 2024

This paper is a study on the optimal microdroplet generation conditions in indirect charging electrostatic spraying. Unlike the direct charging method, which applies power to the nozzle, the indirect charging method applies power to the discharge electrode between the nozzle and the collection electrode. Therefore, an electrically simplified system can be obtained by minimizing the insulation part a stable spray pattern can be obtained with a wide spray angle, and a stable spray pattern can be obtained with a wide spray angle. To conduct the study, an indirect charging type electrostatic spray visualization system was constructed and the static characteristics of the microdroplets were analyzed through image processing of the spray shape of the microdroplets. The total number of microdroplets and the number of microdroplets per power consumption are confirmed according to the changes in the distance between the discharge electrode and the collection electrode, the flow rate, and the applied voltage, which affect the generation of microdroplets, and using this, the optimal generation conditions are derived and the corresponding microdroplet size distribution was analyzed. As a result of the experiment, it was confirmed that the optimal generation condition was at a flow rate of 15 to 20 mL/min and a voltage of -22.5 to -25 kV in terms of the number of microdroplets, and at a flow rate of 15 to 20 mL/min and a voltage of -20 kV in terms of energy consumption efficiency.