• Title/Summary/Keyword: 필름계측

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In-situ Deposition Rate Measurement System to Improve the Accuracy of the Film Formation Process (성막 공정 정밀도 향상을 위한 실시간 성막 속도 측정 시스템)

  • Somi Park;Seung-Yo Baek;Hyun-Bin Kim;Jonghee Lee;Jae-Hyun Lee
    • Applied Chemistry for Engineering
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    • v.34 no.4
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    • pp.383-387
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    • 2023
  • The quartz crystal microbalance (QCM), commonly used in high vacuum deposition, becomes difficult to use when a thick film is deposited on the quartz, affecting the crystal's inherent vibration. In this study, a non-destructive optical measurement method was developed to measure the film's deposition rate during the in-situ film deposition process. By measuring the scattered laser intensity caused by the dimer in the parylene gas passing through the gas flow path, it was successfully confirmed that the ratio of the dimer in the parylene gas increases as the pyrolysis temperature decreases. Additionally, it was noted that the film's thickness and haze increase as the pyrolysis temperature decreases by confirming the characteristics of the visible parylene films. Through the research results, we aim to utilize the stable in-situ film deposition rate measurement system to control the precise film deposition rate of parylene films.

The Development of PET Film Cutting System (PET 필름 커팅시스템 개발)

  • Kim, Gwan-Hyung;Kwon, Oh-Hyun;Oh, Am-Suk;Kim, Song-Hyong
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2013.10a
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    • pp.924-925
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    • 2013
  • 최근 미세가공 및 자동측정 분야가 고성능화 되어 자동화가 많이 실현되고 있다. 이러한 자동화는 고정밀도와 동시에 제품 생산에 대한 저비용, 단기납기, 고품질의 제품 창출로 이어진다. 현재 핸드폰 시장이 급성장함에 따라 핸드폰의 생산 주기가 현저하게 짧아지고 핸드폰 조립공정에 있어서 다양한 크기에 대한 핸드폰 평판표시장치인 LCD(Liquid Crystal Display)가 존재하고 있다. 핸드폰 조립공정에 있어서 이러한 다양한 LCD 표시장치(LCD, PDP, FED등)를 보호하기 위하여 보호매체인 PE/PET 필름을 부착하여 납품하도록 하고 있으며, 핸드폰 조립공정에서 발생할 수 있는 흠집 등 기타 불량을 줄이도록 노력하고 있다. 그러나 이러한 보호필름은 현재 핸드폰 조립공정 후판부에서 평판표시장치의 유리기판의 크기에 맞게 보호필름을 절단하도록 공정이 구성되어 있다. 본 논문에서는 이러한 핸드폰 조립공정을 개선하고 자동화하기 위하여 경박단소용 평판표시장치의 얇은 유리기판에 접착된 PE/PET 필름을 핸드폰의 다양한 패턴에 맞추어 하단의 유리기판에는 결함이 없도록 하여 보호필름만을 커팅 할 수 있는 커팅시스템을 제안하고 정밀계측에 대한 실험 데이터를 제시하고자 한다.

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Principles and Prospect of Speckle Pattern Interferometry (스페클 간섭계의 원리와 전망)

  • 강영준
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.5
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    • pp.7-13
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    • 2004
  • 간섭성 광원인 레이저를 이용한 계측 및 검사기법 중 대표적인 것이 홀로그래피를 이용한 간섭법(Holographic Interferometry, HI)이다. HI는 레이저 파장을 단위로 하기 때문에 물체변형에 대해 측정감도가 좋고 비파괴 비접촉의 계측이 가능하다. 또한 삼차원 정보 추출이 가능해서 주어진 간섭무늬로부터 전 영역의 변형을 구할 수 있다는 커다란 장점을 가지고 있다. 그러나 일반적으로 홀로그래피용 필름은 기록 및 현상방법이 성가시고 그 속도 또한 느릴 뿐만 아니라 간섭무늬 패턴도 매우 복잡해서 산업현장 등 실제의 응용에는 현실적인 어려움이 있다.(중략)

Development of multi-depth and artificial intelligence smart measuring device for analyzing surface water-groundwater correlation characteristics (지표수-지하수 연계 특성 분석용 다심도 및 인공지능 스마트 계측장치 개발)

  • Lim, Woo-Seok;Hwang, Chan-Ik;Choi, Myoung-Rak;Kim, Gyoo-Bum
    • Proceedings of the Korea Water Resources Association Conference
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    • 2020.06a
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    • pp.380-380
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    • 2020
  • 가뭄 피해 극복을 위한 인공 함양지 통합관리시스템의 일부로써 지표수-지하수 연계 특성 분석용 의사결정을 전달하는 인공지능 스마트 계측기의 필요성이 꾸준히 제기되어 왔으나 실용성과 효율성을 동시에 갖춘 계측기는 시장에 출시되지 않았다. 기존의 계측기는 단순 측정이 목적이었으며 분석을 위해서는 일정 기간 직접 계측하여 분석하거나, 계측데이터를 원격 망을 통하여 서버로 전송하고 관리자가 데이터를 해석하는 방식을 취하였다. 또한, 수질 계측과 수질의 미소 변동성을 동시에 계측하여 수질 변화상태를 판단 할 수 있는 수질 계측기는 상품화되지 않아 다목적 수질 분석에 한계점을 갖고 있다. 이러한 한계점이 기존의 지하수 수질 계측기로는 불가능한 수중 라돈을 채수 없이 계측 가능하도록 하고, 순간 수질 변화 및 수질 변화 요인분석이 가능한 계측을 위하여 라돈, 전도도, 수위, 수온 및 필름형 pH 센서를 개발하여 적용한 다항목 계측기로 통합하는 연구가 필요한 이유이다. 개발한 계측기는 빅데이터 기반의 지능형 수질 변동성 분석 알고리즘을 내장하고 수직 깊이 방향의 다중심도 계측이 가능하도록 핵심적인 통신 연결성을 확보하였고 다양한 수질에서 견딜 수 있으며 특히 인공함양에서 발생하는 철, 망간에 부식되지 않는 재질을 이용하여 설계한 '지표수-지하수 연계 특성 분석용 다심도 및 인공지능 스마트 계측장치'이다. 본 장치는 기존 지하수 수질 계측기에서는 불가능하였던 순간 수위변화 및 수위변화 요인분석이 가능한 계측을 위하여 초당 측정 샘플링 주파수(10Hz)를 높인 계측회로를 개발하여 적용하였다.

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Tape-Type Liquid Leakage Film Sensor (액체누설 감지용 테이프형 필름센서)

  • Yu, D.K.;Kim, K.S.;Yub, H.K.;Han, G.H.;Jin, D.J.;Kim, J.H.;Han, S.H.;Cho, G.S.
    • Journal of the Korean Vacuum Society
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    • v.20 no.2
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    • pp.146-154
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    • 2011
  • The adhesive-tape of a liquid leak film sensor including the alarm system is developed. The sensing film is composed of three layers such as base film layer, conductive line layer, and protection film layer. The thickness of film is 300~500 um, the width is 3.55 cm, and the unit length is 200 m. On the conductive line layer, three conducting lines and one resistive line are formulated by the electronic printing method with a conducting ink of silver-nano size. When a liquid leaks for the electricity to be conducted between the conductive line and the resistive line, the position of leakage is monitored by measuring the voltage varied according to the change of resistance between two lines. The error range of sensing position of 200 m film sensor is ${\pm}1m$.

Measurement of Radiation Using Tissue Equivalent Phantom in ICR Treatment (자궁강내 근접방사선조사시 인체조직등가 팬톰을 이용한 방사선량 측정)

  • Jang, Hong-Seok;Suh, Tae-Suk;Yoon, Sei-Chul;Ryu, Mi-Ryeong;Bahk, Yong-Whee;Shinn, Kyung-Sub
    • Journal of Radiation Protection and Research
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    • v.20 no.1
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    • pp.45-52
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    • 1995
  • This study is to compare A point doses in human pelvic phantom by film dosimetry, computer planning and manual calculation by using of along-away table. We developed tissue equivalent human pelvic phantom composed of four pieces of cylindrical acryl tubes with water, to simulate intracavitary radiation (ICR) in patients with cervix cancer. When the phantom assembled from 4 pieces, it has a small space for inserting Fletcher-Suit-Delclos applicator like a human vagina. Fletcher-Suit-Delclos applicator inserted into the space was packed tightly with furacin gauzes, and three $^{137}Cs$ sources with radioactivity of $15.7mg\;Ra-eq$ were inserted into the tandem. For the film dosimetry, two pieces of X-OMAT V film (Kodak Co.) of which planes include point A, were arranged orthogonally in the slits between phantoms. A point dose and iso-dose curves were measured by means of optical densitometer. A point doses by film dosimetry, RTP system and manual calculation by using of along-away table were compared, and iso-dose curves by film dosimetry and computer planning were also compared. The dose of A point was 51.2cGy/hr by film dosimetry, 46.7cGy/hr by RTP system and 47.9 cGy/hr by along-away table. A point dose by computer planning was similar to the dose by calculation using of along-away table with acceptable accuracy $({\pm}3%)$, however, the dose by film dosimetry was different from two others with about 10% error. Since most clinical beams contains a scatter component of low energy photons, the correlation between optical density and dose becomes tenuous. In addition, film suffers from several potential errors such as changes in processing conditions, interfilm emulsion differences, and artifacts caused by air pockets adjacent to the film. For these reasons, absolute dosimetry with film is impractical, however, it is very useful for checking qualitative patterns of a radiation distribution. In future, solid state dosimeter such as TLD must be used for the dosimetry of ionizing radiation. When considerable care is used, precision of approximately 3% may be obtained using TLD.

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THREE DIMENSIONAL ANALYSIS OF MAXILLOFACIAL STRUCTURE BY FRONTAL AND LATERAL CEPHALOGRAM (두부 방사선 규격사진을 이용한 악안면 구조의 3차원적 분석법)

  • Kwon, Kui-Young;Lee, Sang-Han;Kwon, Tae-Geon
    • Maxillofacial Plastic and Reconstructive Surgery
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    • v.21 no.2
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    • pp.174-188
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    • 1999
  • The purpose of this study is to evaluate the precision and accuracy of a three dimensional cephalogram constructed by using the frontal and lateral cephalogram of twelve human dry skulls. After achieving the three dimensional image reconstruction program, we tried to apply this program to two dentofacial deformity patients. 1. Conventional nasion relator in cephalostat was used to reproduce the same head position for the same dry skull. The mean difference of the three dimensional cephalogram for the same dry skull was $0.34{\pm}0.33mm$. Closeness of repeated measures to each skull reveals the precision of this method for the three dimensional cephalogram. 2. Concerning the accuracy, the mean difference between the three dimensional reconstruction data and actual lineal measurements was $1.47{\pm}1.45mm$ and the mean magnification ratio was $100.24{\pm}4.68%$. This Diffrerence is attributed mainly to the ill defined cephalometric landmarks, not to the positional change of the dry skull. 3. Cephalometric measurement of lateral and frontal radiographs had no consecutive magnification ratio because of the different focus-object distance. The mean difference between the frontal and lateral cephalogram to the actual lineal measurements was $4.72{\pm}2.01mm$ and $-5.22{\pm}3.36mm$. Vertical measurements were slightly more accurate than horizontal measurements. 4. Applying to the actual patient analysis, it is recommendable to use this program for analyzing the asymmetry or spatial change after operation. The orthodontic bracket would be a favorable cephalometric landmark for constructing the three dimensional images.

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Low Velocity Impact Monitoring for a Composite Sandwich Beam Using Piezo Thin Film Sensors (압전필름센서를 이용한 복합재 샌드위치 보의 저속충격 모니터링)

  • Park, Chan Ik;Lee, Gwan Ho;Kim, In Geol;Lee, Yeong Sin
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.31 no.2
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    • pp.51-56
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    • 2003
  • The piezoelectric thin film(PVDF: polyvinylidene fluoride) sensors having good dynamic sensing charachteristics can be used to monitor low vwlocit impact on composite structures. The impact response function for composite sandwich beam was derved. The impact tests at low energy without inducing damage were performed on the instrumented drop weight impact tester. The measured signals of PVDF sensors attached on the surface of the beam agreed well with the simulated signals. And the inverse technique was applied to reconstruct the impact forces from the PVDF sensor signals. Most of reconstructed impact forces showed good agreement with the measured forces. The comparison results showed that the piezoelectric thin film sensor can be used to monitor the low velocity impact on composite sandwich structures.

Analysis of the Dose Distribution of Moving Organ using a Moving Phantom System (구동팬텀 시스템에 의한 움직이는 장기의 선량분포 분석)

  • Kim, Yon-Lae;Park, Byung-Moon;Bae, Yong-Ki;Kang, Min-Young;Lee, Gui-Won;Bang, Dong-Wan
    • The Journal of Korean Society for Radiation Therapy
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    • v.18 no.2
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    • pp.81-87
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    • 2006
  • Purpose: Few researches have been peformed on the dose distribution of the moving organ for radiotherapy so far. In order to simulate the organ motion caused by respiratory function, multipurpose phantom and moving device was used and dosimetric measurements for dose distribution of the moving organs were conducted in this study. The purpose of our study was to evaluate how dose distributions are changed due to respiratory motion. Materials and Methods: A multipurpose phantom and a moving device were developed for the measurement of the dose distribution of the moving organ due to respiratory function. Acryl chosen design of the phantom was considered the most obvious choice for phantom material. For construction of the phantom, we used acryl and cork with density of $1.14g/cm^3,\;0.32g/cm^3$ respectively. Acryl and cork slab in the phantom were used to simulate the normal organ and lung respectively. The moving phantom system was composed of moving device, moving control system, and acryl and cork phantom. Gafchromic film and EDR2 film were used to measure dose ditrbutions. The moving device system may be driven by two directional step motors and able to perform 2 dimensional movements (x, z axis), but only 1 dimensional movement(z axis) was used for this study. Results: Larger penumbra was shown in the cork phantom than in the acryl phantom. The dose profile and isodose curve of Gafchromic EBT film were not uniform since the film has small optical density responding to the dose. As the organ motion was increased, the blurrings in penumbra, flatness, and symmetry were increased. Most of measurements of dose distrbutions, Gafchromic EBT film has poor flatness and symmetry than EDR2 film, but both penumbra distributions were more or less comparable. Conclusion: The Gafchromic EBT film is more useful as it does not need development and more radiation dose could be exposed than EDR2 film without losing film characteristics. But as response of the optical density of Gafchromic EBT film to dose is low, beam profiles have more fluctuation at Gafchromic EBT. If the multipurpose phantom and moving device are used for treatment Q.A, and its corrections are made, treatment quality should be improved for the moving organs.

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3-Dimensional Dental Surgery System based on PC using anatomical landmarks (해부학적 계측점을 이용한 PC-기반3차원 치과수술 시스템)

  • 이경상;유선국;김형돈;배현수;김남현
    • Journal of Biomedical Engineering Research
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    • v.20 no.2
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    • pp.139-148
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    • 1999
  • In this paper, we designed the dental surgery system based on PC. This system predict post operated 3-dimensional image, So the patient has no need to take CT after surgery and expose his body to radiological damage. We predict the post operated skull from the patient's CT with pre and post cephalometry X-ray. Our novel procedures, to register X-ray and CT, are based on anatomical landmarks, singular value decomposition. And we display the predicted image 3-dimensionally by surface rendering. We verified this system by dry skull experiment and clinical experiment. When significance level is 0.05, there is on significance.

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