• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
• /
• pp.133-133
• /
• 2000

알루미늄 산화막은 알루미늄 전해 커패시터의 유전재료로 많이 사용되고 잇다. 기존의 생산 공정은 양극 산화법에 의한 산화막 형성으로 대부분이 이러한 습식 공정으로 생산되고 있다. 이 양극 산화법 방식은 장점도 있으나 폐기물이 많이 발생되는 단점이 있다. 본 연구에서는 폐기물의 발생을 획기적으로 줄일 수 있고 산화막 형성 효율을 높일 수 잇는 방식으로 activated reactive evaporation(ARE)을 도입하였다. 이 방식은 electron-beam에 의해 알루미늄을 증착시킬 때 plasma를 챔버 내에 발생시켜 활성 반응으로 알루미늄 원자가 산소와 반응하여 기판위에 Al2O3가 증착되는 것이다. 이 방식은 기계적 작동이 단순하고 증착이 되는 여러 변수들의 독립적 조절이 가능하므로 증착을 제어하기 쉽기 때문에 바로 산업 현장에서 적용될 수 있을 것으로 전망되어 본 연구에 도입하게 되었다. 기판은 유전용량을 증가시키기 위하여 알루미늄 원박을 에칭하였다. 이것은 기판으로 쓰일 알루미늄의 표면의 표면적을 증가시키기 위한 것으로, 알루미늄 전극의 표면적을 확대시키면 유전용량이 증가된다. 99.4%의 50$\mu\textrm{m}$와 60$\mu\textrm{m}$ 두께의 알루미늄 원박을 Ar 이온빔에 의해 1keV의 에너지로 20mA로 에칭을 하였다. 에칭 조건별로 에칭상태를 조사하였다. 에칭 후 표면 상태는 AFM으로 관찰하였다. 화성 실험은 진공 챔버 내의 진공을 약 10-7 torr까지 내린 후, 5$\times$10-5 torr까지 O2와 Ar을 주입시킨 다음 filament에서 열전자를 방출시키고 1.2 kV의 electrode에 의해 가속시켜 이들 기체들의 플라즈마를 발생시켰다. e-beam에서 증발된 알루미늄과 활성 반응을 이루어 기판에 Al2O3가 형성되었다. 여러 증착 변수들(O2와 Ar의 분압, 가속 전압, bias 전압 등)과 산화막의 상태 등을 XPS(X-ray photoelectron spectroscopy), AFM(Atomic Force Microscopy), XRD(X-Ray Diffraction), EXD로 조사하였다.

• 한국세라믹학회지
• /
• 제49권3호
• /
• pp.247-252
• /
• 2012

Crystal structure and chemical compositions of Plasma electrolytic oxidized layer of A-1100, A-2024, A-5052, A-6061, A-6063, A-7075, ACD-7B and ACD-12 were investigated. The electrolyte for plasma electrolytic oxidation was mixture of distilled water, $Na_2P_2O_7$, Cu, Cr metal salts and KOH. ${\eta}$-Alumina, as well as ${\alpha}$-alumina, was main crystal phase. Another crystals such as $(Al_{0.948}Cr_{0.052})_2O_3$ and $(Al_{0.9}Cr_{0.1})_2O_3$ were also formed in the oxide layer. It was thought that the effect of electrolyte compositions on the physical properties and crystal system of PEO layers was greater than the effect of Al alloy composition variation.

• 한국세라믹학회지
• /
• 제49권3호
• /
• pp.241-246
• /
• 2012

Physical properties of plasma electrolytic oxidized layers of 8 different kinds of Al alloys, A-1100, A-2024, A-5052, A-6061, A-6063, A-7075, ACD-7B and ACD-12 were investigated. The electrolyte for plasma electrolytic oxidation was mixture of distilled water, $Na_2P_2O_7$, KOH and some metal salts. Growth rate of oxide layer was slower in $Na_2P_2O_7$ electrolyte system than in $Na_2SiO_3$ system, and Ra50 surface roughness of oxidized layer was below $1.2{\mu}m$. Surface hardness in $Na_2P_2O_7$ electrolyte system is higher than in $Na_2SiO_3$ system, and roughness was lower in $Na_2P_2O_7$ electrolyte system than in $Na_2SiO_3$ system.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2016년도 추계학술대회 논문집
• /
• pp.123.2-123.2
• /
• 2016

Mg alloys have been developed for automobile and mobile equipments because of their low density of $1.7g/cm^3$. One of the main problems of Mg alloys is their poor corrosion resistance which has limited their wide applications. Plasma electrolytic oxidation (PEO) method is one of the promising surface treatment methods for Mg alloys. In this presentation, experimental data about the effects of solution composition and form of current are presented and discussed in view of dielectric breakdown and reformation of PEO films The role of various anions of phosphate, silicate, fluoride, carbonate and hydroxide ions is discussed in view of film breakdown and reformation of PEO films.

• 한국재료학회지
• /
• 제18권5호
• /
• pp.241-246
• /
• 2008

Pure Mg and Mg-6wt.%Al alloy were coated by the plasma electrolytic oxidation with various coating times and the microstructural and mechanical characteristics of the coatings were investigated. The coatings on pure Mg and Mg-6wt.%Al alloy consisted of MgO and $Mg_2SiO_4$. The surface roughness and thickness of the coatings became larger as the coating time increased. The coatings on the Mg-6wt.%Al alloy were more uniform and thicker than those on pure Mg. The microhardness and friction coefficient of the coatings increased progressively as the coating time increased. In addition, the coatings on the Mg-6wt.%Al alloy compared to pure Mg showed improved microhardness and a better friction coefficient.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2016년도 추계학술대회 논문집
• /
• pp.115.2-115.2
• /
• 2016

Al alloys are being used widely for automobile, aerospace and mechanical components because of their high strength ratio to weight. However, still they suffer from abrasion or corrosion owing to insufficient resistances to friction or mechanical impact and chemical attack. Plasma electrolytic oxidation (PEO) method is one of the promising surface treatment methods for Al alloys which can render better hardness than aluminum anodic oxide (AAO) films prepared by conventional anodizing method in acidic solutions. In this presentation, some basic nature of PEO film formation and growth process on Al alloys will be presented based on the experimental results obtained and discussed in view of dielectric breakdown and reformation and the role of various anions in film breakdown and reformation of PEO films.

• 한국표면공학회지
• /
• 제55권5호
• /
• pp.292-298
• /
• 2022

In this study, PEO (plasma electrolytic oxidation) film formation behavior of AZ31 Mg alloy under application of 300 Hz pulse current was studied by the analyses of V-t curve, arc generation behavior, PEO film thickness and morphology of PEO films with treatment time in 0.05 M NaOH + 0.05 M Na₂SiO₃ + 0.1 M NaF solution. PEO films was observed to grow after 10 s of application of pulse current together with generation of micro-arcs. PEO film grew linearly with treatment time at a growth rate of about 5.58 ㎛/min at 200 mA/cm² of pulse current but increasing rate of film formation voltage became lowered largely with increasing treatment time after passing about 250 V, suggesting that resistivity of PEO films during micro-arc generation decreases with increasing film formation voltage at more than 250 V.

• 열처리공학회지
• /
• 제25권5호
• /
• pp.227-232
• /
• 2012

Magnesium alloy have good physical properties such as good castability, good vibration absorption, high strength/weight ratios. Despite the desirable properties, the poor resistance of Mg alloy impedes their use in many various applications. Therefore, magnesium alloy require surface treatment to improve hardness, corrosion and wear resistance. Plasma Electrolytic Oxidation (PEO) is one the surface treatment methods to form oxide layer on Mg alloy in alkali electrolyte. In comparison with Anodizing, there is environmental process having higher hardness and faster deposition rate. In this study, the characteristics of oxide film were examined after coating the AZ31 Mg alloy through the PEO process. We changed concentration of sodium aluminate into $K_2ZrF_6$, KF base electrolyte. The morphologies of the coating layer were characterized by using scanning electron microscopy (SEM). Corrosion resistance also investigated by potentiodynamic polarization analysis. As a result, propertiy of oxide layer were changed by concentration of sodium aluminate. Increasing with concentration of sodium aluminate in electrolyte, the oxidation layer was denser and the pore size was smaller on the surface.

• 한국세라믹학회지
• /
• 제49권6호
• /
• pp.498-504
• /
• 2012

Oxide layers were prepared by an environmentally friendly plasma electrolytic oxidation (PEO) process on an Al-1050 substrate. The electrolyte for PEO was an alkali-based solution with $Na_2SiO_3$ (8 g/L) and NaOH (3 g/L). The influence of the electrical parameters on the phase composition, microstructure and properties of the oxide layers formed by PEO were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The voltage-time responses were recorded during various PEO processes. The oxides are composed of two layers and are mainly made of ${\alpha}$-alumina, ${\gamma}$-alumina and mullite phases. The proportion of each phase depends on various electrical parameters. It was found that the surface of the oxides produced at a higher current density and Ia/Ic ratio shows a more homogeneous morphology than those produced with the electrical parameters of a lower current density and lower Ia/Ic ratio. Also, the oxide layers formed at a higher current density and higher Ia/Ic ratio show high micro-hardness levels.

• 한국표면공학회지
• /
• 제51권6호
• /
• pp.381-386
• /
• 2018

In this study, plasma electrolytic oxidation (PEO) method was used to from anodic oxide films on Al alloy and their resistance and morphological characteristics were investigated as a function of film formation voltage and treatment time. Cross-sectional morphology and composition of the PEO films were analyzed by SEM (Scanning Electron Microscopy) and EDS (Energy Dispersive Spectroscopy). The PEO films showed increased surface roughness and thickness with of film formation voltage and treatment time. The wear resistance was found to be the best for the PEO film formed for 5 min at 500V which is attributed to be denser structure relatively and lower surface roughness.