• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.616-616
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• 2013

그래핀(Graphene)은 열전도도가 높고 전자 이동도(200,000 cm2V-1s-1)가 우수한 전기적 특성을 가지고 있어 전계 효과 트랜지스터(Field effect transistor; FET), 유기 전자 소자(Organic electronic device)와 광전자 소자(Optoelectronic device) 같은 반도체 소자에 응용 가능하다. 최근에는 아크 방출(Arc discharge method), 화학적 기상 증착법(Chemical vapor deposition; CVD), 이온-조사법(Ionirradiation)등을 이용한 이종원자(Hetero atom)도핑과 화학적 처리를 이용한 기능화(Functionalization)등의 방법으로 그래핀의 전도도를 향상시킬 수 있었다. 그러나 이러한 방법들은 기판의 표면을 거칠게 하며, 그래핀에 많은 결함들이 발생한다는 단점이 있다. 이러한 단점을 극복하기 위해 자가조립 단층막법(Self-assembled monolayers; SAMs)을 이용하여 기판을 기능화한 후 그 위에 그래핀을 전사하면, 자가조립 단층막의 기능기에 따라 그래핀의 일함수를 조절 가능하고 운반자 농도나 도핑 유형을 변화시켜 소자의 전기적 특성을 최적화 할 수 있다 [1-3]. 본 연구에서는 PET(polyethylene terephthalate) 기판에 SAMs를 이용하여 유연하고 투명한 그래핀 전극을 제작하였다. 산소 플라즈마와 3-Aminopropyltriethoxysilane (APTES)를 이용하여 PET 기판 표면 위에 하이드록실 기(Hydroxyl group; -OH)와 아민 기(Amine group; -NH2)를 순차적으로 기능화 하였고, 그 위에 화학적 기상 증착법을 이용하여 합성한 대면적의 균일한 그래핀을 전사하였다. PET 기판 위에 NH2 그룹이 존재하는 것을 접촉각 측정(Contact angle measurement)과 X-선 광전자 분광법(Xray photoelectron spectroscopy: XPS)을 통해 확인하였으며, NH2그룹에 의해 그래핀에 도핑 효과가 나타난 것을 라만 분광법(Raman spectroscopy)과 전류-전압 특성곡선(I-V characteristic curve)을 이용하여 확인하였다. 본 연구 결과는 유연하고 투명한 기판 위에 안정적이면서 패턴이 가능하기 때문에 그래핀을 기반으로 하는 반도체 소자에 적용 가능할 것이라 예상된다.

• Analytical Science and Technology
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• v.5 no.1
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• pp.127-134
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• 1992

Effects of boron addition on microstructure and phases of plasma are melted tungsten have been investigated by optical microscopy, scanning electron microscopy, Auger electron spectroscopy, X-ray diffractometer, measurements of grain size and hardness. The change in the microstructure upon boron addition was studied by optical microscopy. It was observed that the grain refinement was induced upon content within the limit of solubility. When the boron content was above the solubility limit, two phases of primary tungsten and eutectic structure were observed and confirmed by AES and XRD analysis. It was also shown that recrystallization temperature was increased and recrystallized grain size was reduced as boron content increased.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1732-1734
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• 2001

The purpose of this experiment was to develope Triggered Vacuum Switch(TVS) and to improve understanding of the high current vacuum arc phenomena in the TVS. The TVS has an array of rods of alternate polarity in which a fixed gap spacing is maintained between the rods. The cross section of each rod has trapezoidal shape. Breakdown of the TVS produced high current vacuum arc plasma. A spectroscopic measurement was performed over 20 kA peak current in the center of electrodes, in the vicinity of cathode, and outside electrodes. The electrode material tested was Fe. Measured Fe spectrum range was from 200 nm to 900 nm. Measurement result showed that over 90 percent of the charge states were FeII and the others were FeI and FeIII. The electron temperature was determined from the relative line intensity ratio methode of FeII system by assuming the local thermal equilibrium(LTE). The electron temperature at the center of electrodes was measured as 1.5 eV at 26 kA peak current. The electron temperature varied with its peak current. Intensity of spectrums is the highest in the vicinity of the cathode. Further we will also present study result of the diode phenomena in the TVS.

• Journal of Hydrogen and New Energy
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• v.9 no.2
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• pp.65-75
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• 1998

Five different processes were selected and tested to find an useful method of manufacturing Fe-Ti type electrode. Initially, FeTi alloy was prepared by melting in plasma arc furnace and then powdered for shaping. Electroless Ni plating on these powder particles before shaping improved the discharge characteristics. The effects of heat-treatments on the electrode characteristics were also investigated. The discharge capacities of electrods were increased with the increasing heat-treatment temperatures. When heat treated at $1000^{\circ}C$ after shaping, the best results were acquired in the discharge capacity and cycle life. Both electroless Ni plating and heat-treatment were appeared to be crucial for the performance improvement of FeTi type electrode. Fe-Ti -Mn electrodes were prepared according to the process suggested in this study and tested to verify the promising effects of that.

• Analytical Science and Technology
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• v.5 no.3
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• pp.319-325
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• 1992

Plasma are melting method was used in making Mo-1.17 Ti-0.18 Zr-0.06 C ingot having over 99% of the theoretical density. Oxygen content herewith, decreased from the origin of 830ppm to 40ppm. After cold rolling of Mo alloy by 50%, the recrystallization behaviors were studied in the temperature range from $800^{\circ}C$ to $2100^{\circ}C$ for 1 hr isochronical holding time and also at $1400^{\circ}C$, $1500^{\circ}C$, $1600^{\circ}C$ for varying isothermal holding time 0 to 108000sec. The complete recrystallization temperature of Mo was $1400^{\circ}C$ but that of Mo alloy was $1700^{\circ}C$. 50%-1 hr recrystallization temperature of Mo alloy sheet was about $1500^{\circ}C$ and when compared to Mo there was an increase of over $300^{\circ}C$. The activation energy of recrystallization of Mo alloy sheet was 508kJ/mol.

• Tribology and Lubricants
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• v.32 no.4
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• pp.125-131
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• 2016

In recent years, thick ta-C coating has attracted considerable interest owing to its existing and potential commercial importance in applications such as automobile accessories, drills, and gears. The thickness of the ta-C coating is an important parameter in these applications. However, the biggest problems are achieving efficient coating and uniformity over a large area with high-speed deposition. Feasibility is confirmed for the ta-C coating thickness of up to 9.0 µm (coating speed: 3.0 µm/h, fixed substrate) using a single FCVA cathode. The thickness was determined using multiple coating cycles that were controlled using substrate temperature and residual stresses. In the present research, we have designed a coating system using FCVA plasma and produced enhanced thick ta-C coating. The system uses a specialized magnetic field configuration with stabilized DC arc plasma discharge during deposition. To achieve quality that is acceptable for use in automobile accessories, the magnetic field, T-type filters, and 10 pieces of a multi-cathode are used to demonstrate the deposition of the thick ta-C coating. The results of coating performance indicate that uniformity is ±7.6 , deposited area is 400 mm, and the thickness of the ta-C coating is up to 5.0 µm (coating speed: 0.3 µm/h, revolution and rotation). The hardness of the coating ranges from 30 to 59 GPa, and the adhesion strength level (HF1) ranges from 20 to 60 N, depending on the ta-C coating.

• Journal of Welding and Joining
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• v.26 no.2
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• pp.92-97
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• 2008

In welding of thin plate, some defects such as melt through and unmelted zone occur easily at welding start, however there is a limited study on those problems. Therefore the effects of start block and arc length on melt through and unmelted zone at start were investigated in this study. When start block height was lower than base metal, there was melt through at start. And when the height was even with base metal, no unmelted zone existed. Unmelted zone was increased as start block height increased from 0mm to 0.5mm. However unmelted zone was not much changed as the height increasing from 0.5mm to 1.0mm. When gap existed between start block and base metal, melt through occurred. However, unmelted zone was increased as the contact force of start block on base metal was increased from 0kgf to 7.5kgf. And when arc length was decreased from 3.8mm to 3.0mm, unmelted zone was decreased. It was concluded that the optimum condition to prevent melt through and to minimize unmelted zone would be with start block height 0.25mm, contact force 3.0kgf, and arc length 3.4mm. This optimum condition was applied to the mass production line and resulted in satisfied outcome.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.10
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• pp.5919-5924
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• 2014

Accumulated dross adhered to the cutting support degrades the cutting accuracy and aggravates the working environment by reducing the efficiency of the dust collector. Furthermore, the cutting machine and product can be damaged by the scattering of molten metal. In this study, an attempt was made to increase the productivity of steel cutting process and improve the working environment by dross control. The dross adhesion characteristics were invested by a cutting experiment and the design concept for a dross removal machine was devised. Finally, a cutting support cleaning system and its operating algorithm were developed. The applicability of the developed system was examined and verified by a long-term field test after installation of the plasma arc cutting system of a shipyard.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.117-117
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• 2010

나노입자 제조 기술이 점차 발전하면서 금속산화물, 반도체용 및 태양전지용, 신소재 등 다양한 응용분야에 사용하고 있다. 따라서 이와 같은 나노입자 제조방법으로는 펄스 레이저 용사법(pulsed laser ablation), 플라즈마 아크 합성법(plasma arc synthesis), 열분해법(pyrolysis), plasma-enhanced chemical vapor deposition (PECVD)법 등과 같은 기상공정이 많이 사용되고 있다. 기상공정은 기존의 공정에 비해 고순도 입자의 대량 생산, 다성분 입자의 화학적 균질성 유지, 비교적 간단하고 깨끗한 공정 등의 장점을 가지고 있다. 기상공정에서 일반적인 입자 형성 메커니즘은 기체 상태의 화학 물질이 물리적 공정 혹은 화학 반응에 의해 과포화상태에 도달하게 되며, 이 때 동질 핵생성(homogeneous nucleation)이 일어나고 생성된 핵(nuclei)에 기체가 응축되고 충돌, 응집하면서 입자는 성장하게 된다. 열분해법은 실리콘 나노입자를 생산하는 기상공정 중 하나이다. 일반적으로 열분해 공정은 지속적으로 열이 가해지는 반응기 내에 반응기체인 $SiH_4$을 주입하고, 운반기체는 He, $H_2$, Ar, $N_2$ 등을 사용하였을 때, 높은 열로 인해 $SiH_4$가 분해되며, 이 때 가스-입자 전환 현상(gas to particle conversion)이 일어나 실리콘 입자가 형성된다. 그러나 입자 형성과정은 $SiH_4$ 농도, 유량, 작동 압력, 온도 등 매우 다양한 요소에 영향을 받는다. 고, 복잡한 화학반응 메커니즘에 의해 명확히 규명되지는 못하고 있다. 이에 본 연구에서는 복잡한 화학반응을 해석하는 상용코드 CHEMKIN 4.1.1을 이용하여 열분해 반응기 내에서의 실리콘 입자 형성, 성장, 응집, 전송 모델을 만들고 이를 수치해석하였다. 표면 반응, 응집, 전송에 의한 입자 성장 메커니즘을 포함하고 있는 aerosol dynamics model을 method of moment법으로 해를 구하였으며, 이를 실험 결과와 비교하여 모델링을 검증하였다. 또한 반응기의 온도, 압력, 가스 농도, 유량 등의 요소를 고려하여 실리콘 나노입자를 형성하는 최적의 조건을 연구하였다.

• Journal of Ocean Engineering and Technology
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• v.30 no.5
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• pp.356-360
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• 2016

Recently, the lifetime extension of nuclear power plants has been considered. Thus, it is necessary to consider facility safety management and economic management. However, when the bolts in nuclear power plants are replaced and the turbines of nuclear power plant are disassembled, numerous problems are found in relation to stuck bolts in clamping parts. In order to solve these problems, a hybrid vacuum chamber was first designed and manufactured. It can perform arc ion plating and sputtering, which were used to deposit Ti/TiN on an A913 B7 bolt. X-ray diffraction (XRD) and scanning electron microscopy (SEM) analyses were conducted to determine the composition and characteristics of the bolt, and tests were conducted to determine how long the bolt could endure under various conditions in a nuclear power plant. The SEM and XRD results clearly showed a continual and even coating layer. When this TiN-coated bolt is used in a nuclear power plant, the lifetime can be extended compared to a conventional bolt, but it is necessary to determine what additional properties are required.