• Proceedings of the KIEE Conference
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• 1987.11a
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• pp.304-306
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• 1987

The dielectric loss ($tan{\delta}$) and the Capacitance (C) of the PPMKA(plasma-polymerized methyl metacrylate) films were measured in the frequency range of 1KHz - 5MHz at $25^{\circ}C$. The effects of the oxidation and the heating and the plasma treatment for $tan{\delta}$ and C of PMMA were investigated. Dielectric loss of PPMMA films was inceased with the oxidized products like CO and OH. As condidates for their origin the existence of low molecula moieties and free radicals in the PPMMA, and the crosslinking made by the heating and plasma treatment have been considered.

• Proceedings of the Membrane Society of Korea Conference
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• 2004.05b
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• pp.53-56
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• 2004

Morphology of membrane affects its performance [1]. For a constant amount of fixed charges, the distribution of these charges is also significant to its performance (2). In some ionomer membranes such as Nafion, the membrane fixed charge is not randomly distributed, but occurs in clusters. Thus, the membrane solution is phase-separated, with the ion clusters, acting as inverted micelles in a polymer solvent.(omitted)

• Korean Journal of Materials Research
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• v.15 no.8
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• pp.521-527
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• 2005

Surface modification of polypropylene hollow fiber membranes was peformed in order to develop blood-compatible biomaterials for use in the blood contacting and oxygenation membranes of a lung-assist device(LAD). Blood compatibility was determined by using anticoagulation blood and evaluating formation of blood clots on their surfaces as well as activation of plasma coagulation cascade, platelet adhesion, and aggregation. It was verified that the number of platelets on the silicone coated fibers was significantly lower than those on polypropylene. It was also found that the polypropylene hollow fiber membranes using plasma treatment exhibited suppression of complement activation in blood compatibility test.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1400-1402
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• 1994

Plasma polymerized thin films was prepared using an interelectrod inductively coupled gas-flow-type reactor. Styrene was chosen as the monomer to be used. This thin films were also delineated by the electron-beam apparatus with an acceleration voltage 30kV, and the pattern in the resist was developed with RIE 80 with argon gas mixture ratio, pressure and RF power. The molecular structure of thin films was investigated by GPC and FT-IR and then was discussed in relation to its quality as a resist. In the case of plasma polymerization, thickness of resist could be controlled by discharge duration and power. Also etch rate is increased as to growing pressure with RIE 80.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.45 no.3
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• pp.438-443
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• 1996

The effect of plasma polymerization conditions on the structure of the plasma polymerized styrene were investigated by using Fourier Transform Infrared Ray(FT-IR), Differential Scanning Calorimetry (DSC), Gel Permeation Chromatography(GPC). Plasma polymerized thin film was prepared using an interelectrode inductively coupled gas-flow-type reactor. We show that polymerization parameters of thin film affect sensitivity and etching resistance of plasma polymerized styrene is 1.41~3.93, and deposition rate of that are 32~383[.angs./min] with discharge power. Swelling and etching resistance becomes more improved with increasing discharge power during plasma polymerization. (author). 11 refs., 10 figs., 1 tab.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1992.05a
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• pp.26-29
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• 1992

In this study, We made use of interelectrode capacitively coupled type plasma polymerization apparatus in order to make th organic optical thin films. We adopted in Benzen. Styrene, which have optical function in the organic world. It is manufactured polymerization thin films and examined optics properties by it respectively. We have known that the refractive index decreased as discharging power increased. At the middle wave length as 550[nm], the refractive index of Styrene is smaller than one of Benzen. Then, it is known that measured results are valid because the extinction coefficient(K) is about 10$\^$-4/ for variation of refractive index.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1994.05a
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• pp.138-140
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• 1994

Plasma polymerized thin film was prepared using an interelectrod inductively coupled gas-flow-type reactor. Styrene was chosen as the monomer to be used. This thin films were also delineated by the electron-beam apparatus with an acceleration voltage 30kV, and the pattern in the resist was developed with RIE 80 with argon gas mixture ratio, pressure and RF power. The effect of charge of discharge power on growth rate and etching rate of the thin films were studied. The molecular structure of thin films were investigated by FIR and then was discussed in relation to its quality as a resist. In the case of Plasma polymerization, thickness of resist could be controlled by discharge duration and power. Also etch rate is increased as to growing argon gas and RF power with RIE 80.

• Proceedings of the KIEE Conference
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• 1993.07b
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• pp.1183-1185
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• 1993

The plasma polymerized thin film of MMA+Sty was prepared using a capacitively coupled gas-flow-type reactor. This thin films were also delincated by the electron-beam apparatus with an acceleration voltage 30KV, and the pattern in the resist was developed with the gas-flow-type reactor using an argon as an etchant. The effect of discharge power on groth rate and etching rate of the thin film were studied. The molacular structure of the resist was investigated by ESCA and FT-IR.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.399-399
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• 2010

Polyethylene glycol(PEG)은 강력한 단백질 및 세포흡착 억제력을 가지고 있어 다양한 생물학적 연구에 사용되고 있으나, 기판과의 결합력이 무척 약해 기판 위에 박막을 형성하기가 매우 어렵다는 문제점이 있다. 이번 연구에서는 capacitively-coupled plasma chemical vapor deposition(CCP-CVD)를 이용하여 PEG를 유리 기판 위에 플라즈마 중합하여 plasma-polymerized PEG(PP-PEG) 기판을 만들었다. PP-PEG 박막은 FT-IR, XPS, ToF-SIMS 분석을 통하여 PEG와 매우 유사한 화학적 조성을 가지고 있음을 확인할 수 있었다. 또한 PP-PEG 기판은 photolithography 방법을 이용하여 표면에 photoresist를 패턴한 뒤 아민작용기를 가지는 plasma-polymerized ethylenediamine (PPEDA)를 증착하여 표면이 amine/PEG로 패턴화된 박막 기판을 만들었다. 패턴된 기판에 단백질 및 세포를 고정화하였을 때, 아민 작용기가 노출된 부분에만 고정화가 나타나고 PP-PEG 영역에는 단백질 및 세포의 흡착이 효율적으로 억제되는 것을 형광측정 및 ToF-SIMS chemical imaging 방법을 이용하여 확인하였다. 이러한 바이오칩 제작기술은 단백질 및 세포 칩을 포함한 여러 분야에서 폭넓게 응용될 수 있을 것으로 기대된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.195.2-195.2
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• 2013

플라즈마 중합 증착기술을 이용하여 ppMMA (plasma polymerized methyl methacrylate) 및 ppS (plasma polymerized styrene) 박막을 제작하고, ppMMA를 게이트 절연층, polymer electret인 ppS를 메모리층으로 한 전계효과트랜지스터 기반 유기 메모리 소자를 제작하였다. 메모리층인 ppS의 두께를 각각 30, 60, 90 nm로 달리한 유기 메모리 소자가 C-V 및 I-V 특성에서 나타내는 히스테리시스 현상을 분석하여 메모리 특성을 평가했으며, 메모리층의 두께 변화에 따른 유기 메모리 소자의 성능을 비교분석하였다.