• Proceedings of the KIEE Conference
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• 1991.07a
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• pp.183-186
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• 1991

In order to prepare the functional organic optic meterials, the capacitive coupled gas flow type plasma polymerization apparatus was designed and manufactured. Styrene and para-Xylene monomer were adopt as organic materisl. Optical constant, refrative index, extinction coefficient of organic thin films by the gas flow type plasma polymerization appratus were determined by envelope method using spectrophotometry. The refractive index of plasma polymerized thin films was decreased in accordance to increase of wave length and discharge time. The extinction coefficient was very small compared with refractive index. From the experimental result of optical constant and film thickness, it was considered that the films which had required optical properties and thickness can be prepared by control of polymerization condition.

• Proceedings of the KIEE Conference
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• 1992.07b
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• pp.875-878
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• 1992

In this study, We made use of inter-electrode capacitively coupled type plasma polymerization apparatus in order to make the organic optical thin films. We adopted in Benzen. Vinyl-Pyridine and Styrene, which have optical function in the organic world and manufactured double later. It is examined optics properties by it respectively. At the middle wave length as 550[nm], the transmittance is double layer smaller than one of single layer. The refractive index with wave length is various from 1.55 to 1.65. Then, it is known that measured results are valid because the extinction coefficient(K) is about $10^{-4}$ for variation of refractive index.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1353_1354
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• 2009

The OTFT devices had inverted staggered structures of Au/pentacene/ppMMA/ITO on PET substrate. The overall device performances of the flexible devices such as the operating voltage, the field effect mobility, the on/off ratio and the off current are somewhat worse than those of devices fabricated on glass substrates. Pentacene/ppMMA OTFT benchmarks (mobility, sub-threshold slope, on/off ratio) were comparable to that of solution cast PMMA, but below average when compared to other polymer gate dielectrics. However, threshold and drive voltages were among the lowest reported for a polymer gate dielectric, and surpassed only by ultra-thin SAM gate dielectrics.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.25 no.12
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• pp.48-53
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• 2011

Polymer thin films were prepared by capacitively coupled plasma polymerization process for application of gate insulator. The polymer thin films revealed to form polymer layers with original properties of the monomer. Among the plasma polymer thin films, the styrene polymer having large number of phenyl sites revealed higher dielectric constant of k=3.7 than that of conventional polymer. The plasma polymerized styrene thin film revealed no hysteresis characteristics and low leakage current density of $1{\times}10^{-8}[Acm^{-2}]$ at field strength of $1[MVcm^{-1}]$, which measured by I-V and C-V measurements using MIM and MIS devices.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.1
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• pp.43-47
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• 2001

Plasma polymerized hexamethyldisiloxane thin film was fabricated by employing an inter-electrode capacitively coupled type apparatus under the following conditions : carrier gas flow rate of 11 sccm, reaction pressure of 0.1 torr, discharge frequency of 13.56 MHz and discharge power of 30∼90 W. Polymerization rate of thin film fabricated at the discharge power of 90W is 32.5nm/min. Relative dielectric constant and dielectric loss tangent of thin film shows 3.2∼3.8 and 2.6x10$\^$-3/∼4.51x10$\^$-3/ respectively in the frequency range of 1 kHz∼1 MHz. As the annealing temperature is increased, the relative dielectric constant gradually decreases while the dielectric loss tangent increases. The current density increase gradually with increasing annealing temperature and electric field. The electric conduction of the heaxamethyldisiloxane thin film shows Schottky effect.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1993.05a
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• pp.28-32
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• 1993

A deposition rate of styrene thin films is linearly increased, but one of benzene thin films is nonlinearly increased with increasing discharge power under maintaining a polymerization time, pressure and monomer flow rate. And, the reduction of transmittance at shortwave is larger than that of transmittance at longwave. The refractive index with wavelength is various from 1.55 to 1.65. The refractive index of their thin films is decreased with increasing discharge power. Also, it is known that measured results are valid because the calculation of the extinction coefficient is about $10^3$ within variation of refractive index.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1636-1638
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• 1996

MMA-Styrene-Tetramethyltin(MST) thin films were fabricated by plasma polymerization method, and their electrical properties were confirmed by IR and GPC. The electrical conductivity increased with increasing temperature, and the adsorption current hardly appeared. The high-field electrical conduction mechanism is the electronic one such as schottky, and the activation energy is about 1.1 eV.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1419-1421
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• 2002

Plasma polymerization of thiophene was carried out in a vacuum reactor with capacitively coupled electrode. This paper describes the dependence of molecular structure and electrical properties on the polymerization conditions such as plasma energy, mass flow rate and pressure. The plasma polymerized thiophene films were chracterized by FT-IR spectroscopy and SEM. The IR analysis revealed the thiophene rings are broken by the discharge energy.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.146-149
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• 1996

Polymerization rate, transmittance, refractive index, and extinction coefficient of plasma polymerized tetramethydisiloxane (TMD) have been investigated. The rate of polymerization of TMD films increased nonlinearly with the discharge lower. The refractive indices of thin films varied from 1.40 to 1.43 and they also increased with increasing discharge power. Also, the extinction coefficient was about 0.2 and is independent of photon energy.

• Textile Coloration and Finishing
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• v.7 no.2
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• pp.55-62
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• 1995

Plasma polymerization of Perfiuoropropene(PFP) and n-Hexane was carried out in a tubular type reactor by means of 13.56MHz radio frequency generator at the fixed RF discharge power of 25W and at the pressures of 100mTorr, 140mTorr and 200mTorr. The thin films were deposited on PAN fabrics in order to improve the dimemsional stability of woven states in hot water laundry. IR spectroscopy was used for the analysis of the structures of the thin films deposited and SEM for examination of surfaces of the fabrics. the PAN fabrics, which were coated by thin films at several experimental conditions, were immersed in boiling water for 2 hours and then the dimension stability of woven states were evaluated. In spite of very thin films, the results of surface modification were satisfactory. In general the performace of thin films by PFP was superior to that of n-Hexane.