• Journal of the Microelectronics and Packaging Society
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• v.31 no.2
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• pp.36-44
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• 2024

Copper electrodeposition technology is essential for producing copper films and interconnects in the microelectronics industries including semiconductor packaging, semiconductors and secondary battery, and there are extensive efforts to control the microstructure of these films and interconnects. In this study, we investigated the influence of crystallographic orientation on the local plastic deformation of copper films for secondary batteries deformed by uniaxial tensile load. Crystallographic orientation maps of two electrodeposited copper films with different textures were measured using an electron backscatter diffraction (EBSD) system and then used as initial conditions for crystal plasticity finite element analysis to predict the local plastic deformation behavior within the films during uniaxial tension deformation. Through these processes, the changes of the local plastic deformation behavior and texture of the films were traced according to the tensile strain, and the crystal orientations leading to the inhomogeneous plastic deformation were identified.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.29 no.3
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• pp.167-170
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• 2018

The method of moments(MoM) is one of the most popular integral-equation-based full-wave simulation methods, and the multi-level fast multipole method(MLFMM) algorithm can be used for its efficient calculation. When calculating the surface current on the large scatterer in the MoM or MLFMM, iterative methods for the final matrix inversion are used. Among them, BiCGstab(l) has been widely adopted due to its good convergence rate. The number of iterations can be reduced when l becomes larger, but the number of operations per iteration is increased. Herein, we analyze the computational complexity of BiCGstab(l) in the MLFMM method and propose an optimum choice of l.

• The Journal of the Korea Contents Association
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• v.15 no.11
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• pp.298-306
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• 2015

This study is the material of the additional filter(Cu, Ni, CaWO4, Gd+Ba) being used when the diagnosis X-ray was varied to evaluate the spatial dose distribution accordingly. And it suggest to find a suitable material. Experiments using MCNPX program based on the Monte Carlo simulation method was carried out by selecting the chest and abdomen taken. As a result, each material per dose, the average scatter dose is approximately 62%, 100 cm radius of the point of the simulated body surface exposure dose and 50 cm radius centered on the point average about 47%. It is determined that an Al material is currently available in accordance with the result to be replaced by Cu, Ni material is sufficient. With just the thickness due to the difference in the atomic number and density adjusted to be about one-tenth of the Al it will be suitable.

• Journal of the Korean Magnetics Society
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• v.7 no.6
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• pp.308-313
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• 1997

The magnetoresistance (MR) and the saturation field behavior of the CoFe-Ag nano granular films as a function of the ferromagnetic underlayer and overlayer materials were investigated. The maximum MR ratio of 25.7 % and the saturation field of 2.1 kOe in the as-deposited 3000 $\AA$ $(Co_{92}Fe_8)_{31}Ag_{69}$ single alloy films at room temperature were obtained. The MR ratio and the saturation field of the 100 $\AA$ alloy film were 1.2 % and 5.2 kOe, respectively. Those of the sandwiched alloy films of 200 $\AA$ thick with the Fe under and overlayer of 100 $\AA$ were 11 % and 1.8 kOe respectively. The reduction of saturation field in the sandwiched alloy films is due to the exchange coupling between the ferromagnetic layers and the alloy layer. Among the Fe and FeNi, the more effective materials to reduce the saturation field of the sandwiched alloy films was Fe.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.6
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• pp.290-296
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• 2003

The heteroepitaxial growth of crystalline 3C-SiC on 6H-SiC substrates using high purity silane ($SiH_4$) and prophane ($C_3H^8$) was carried out by thermal chemical vapor deposition, and growth characteristics were investigated in this study. In case that the flow ratio of C/Si and flow rate of $H_2$ were 4.0 and 5.0 slm, respectively, the growth rate of epilayers was about 1.8 $\mu$m/h at growth temperature of $1200^{\circ}C$. The Nomarski surface morphology, X-ray diffraction, Raman spectroscopy, and photoluninescence of grown epilayers were measured to investigate the crystallinity. In this study, the high quality of crystalline 3C-SiC heteropitaxial layers was observed at growth temperature of above $1150^{\circ}C$.

• Progress in Medical Physics
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• v.25 no.1
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• pp.23-30
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• 2014

The purpose of this study is to evaluate the developed dose verification program for in vivo dosimetry based on transit dose in radiotherapy. Five intensity modulated radiotherapy (IMRT) plans of lung cancer patients were used in the irradiation of a homogeneous solid water phantom and anthropomorphic phantom. Transit dose distribution was measured using electronic portal imaging device (EPID) and used for the calculation of in vivo dose in patient. The average passing rate compared with treatment planning system based on a gamma index with a 3% dose and a 3 mm distance-to-dose agreement tolerance limit was 95% for the in vivo dose with the homogeneous phantom, but was reduced to 81.8% for the in vivo dose with the anthropomorphic phantom. This feasibility study suggested that transit dose-based in vivo dosimetry can provide information about the actual dose delivery to patients in the treatment room.

• Korean Journal of Ichthyology
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• v.29 no.1
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• pp.80-86
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• 2017

We examined monthly variations in community structure of larval fish assemblage in the coastal waters of south-central Korea in spring and summer, 2016. A total of 31 taxa of larvae were collected during the study period. Engraulis japonicus larvae were predominated in spring than summer. The larvae of Cynoglossus abbreviates, a spring spawners, were exclusively collected in spring, while those of Nibea albiflora, a summer spawners, were exclusively caught in summer. Due to those seasonal differences in abundance of the dominant species, larval fish community was divided into two main seasonal groups (i.e. April~May and June~August). In addition, summer group was divided into two significant subgroups (June~July and August). During August, the larvae of E. japonicus and N. albiflora sharply decreased in abundance due to abnormally high sea water temperature that was raised up to $28^{\circ}C$, with the temperature being out of range of their optimum spawning temperature.

• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.300-305
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• 1998

Crystallinity and structual properties of the epitaxially grown Pt films on $Al_2O_3$(0001) substrate by rf magnetron sputtering at a substrate temperature of $600^{\circ}C$ were studied by using backscattering spectrometry (BS)/channeling and transmission electron microscopy (TEM) measurements. $MeV^4$He ion BS/channeling results showed that the channeling minimum yield of Pt film with a thickness of 3500$\AA$ was 4%. This indicates an excellent crystallinity of Pt film. When the thickness of Pt film was less than 200 $\AA$, the channeling minimum yield of Pt film increased sharply with the decrease in film thickness. The Pt layer on $Al_2O_3$(0001) substrate grew epitaxially to the direction of (111) with six-fold symmetry. Cross-sectional TEM images also showed that Pt film on $Al_2O_3$(0001) substrate consist of twinned domains to release the strain induced by the lattice mismatch and the surface roughness of the film increased at the twin boundaries where the strain was contcentrated.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.22 no.8
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• pp.790-796
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• 2011

The system which is exposed in the impact range of High-altitude Electromagnetic Pulse(HEMP) may get serious damage because HEMP has a very large electric field value, a very fast rise-time, and so on. Electromagnetic analysis should be performed for signals coupled to the opening or cables of the system prior to derive the system design specifications in order to protect the system against HEMP adequately. In this paper, we analyzed the HEMP coupled signals for the coaxial cable which is generally used to transmit and receive video or RF signals and compared the coupled signal of the one wire with that of the inner conductor of a coaxial cable to confirm the decreased effect of HEMP by the shield. The coaxial cable is analyzed by the external and internal region of the shield separately. For the external region of the coaxial cable, general scattered equation was applied to calculate currents on the surface of the shield and for internal region of the coaxial cable, chain matrix algorithm is used. To verify this paper the analyzed results were compared the results of the existing paper and the two results have good agreements.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.134.1-134.1
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• 2014

콜로이달 리소그래피는 나노미터 크기의 나노구를 자가조립에 의해 정렬시킴으로써, 파장이하 크기의 주기 구조를 저비용으로 쉽게 구현할 수 있는 패터닝 기법이다. 콜로이달 리소그래피나 소프트 리소그래피와 같이 대면적 패터닝이 가능한 공정을 태양전지를 위한 반사방지 및 광 포획 증대 구조에 적용함으로써, 기존 성능을 크게 향상시켰다. 본 연구에서는, 유한차분 시간영역 수치해석법을 이용하여 반사 방지 및 광 포획 증대 구조에 대한 이론적 검증 및 설계를 진행하였고, 콜로이달 리소그래피 및 반도체 공정을 통해 샘플을 제작하였으며, 제작된 샘플의 성능을 적분구를 겸비한 자외선 가시광 근적외선 영역 분광기를 통해 평가하였다. 반사방지 나노섬을 겸비한 나노 원뿔대 언덕형 굴절률 소자를 구현함으로써, 300나노미터 이하의 구조체를 사용하지 않고도 근자외선 영역을 포함하는 태양광 에너지의 손실을 최소화할 수 있는 광대역 방사방지 구조체를 제시하였다. 나노 원뿔대가 격자상수 이상의 파장에 대한 언덕형 굴절률을 제공하고, 4분의 1파장 나노섬 반사방지막이 격자 상수 이하의 근자외선 태양광을 추가적으로 흡수하여, 근자외선 영역에서의 평균 반사율을 3.8% 수준으로 달성 할 수 있었다. 또한, 낮은 양호계수를 갖는 속삭임 회랑 공진기 어레이를 이용하여, 박막 태양전지에 적합한 유전체 기반 광포획 증대 나노구조를 제시하였다. 나노반구, 나노고깔, 나노구, 함몰형 나노구 어레이 형태를 가지며, 500nm의 주기를 갖는 유전체 표면 텍스쳐드 구조를 초박형 비정질 실리콘 필름(100nm) 위에 제작하여 광대역 광 포획 증대 효과를 실험적으로 평가하였다. 구조들 중 함몰형 나노구 어레이가 결합된 비정질 실리콘 박막이 가장 높은 성능을 보였으며, 구조가 없는 경우 대비 약 67.6%의 가중 흡수율 증가를 나타내었다. 특히, 함몰형 나노구 어레이 구조 중 폴리메틸메타아크릴레이트로 제작된 평판형 함몰층은 나노구 비정질 박막 실리콘 사이의 접착력 및 기계적 강성을 향상시켰을 뿐 아니라, 함몰층 내부로 회절되고 산란된 빛들이 도파모드 효과에 의해 부가적인 광 포획 증대를 가져옴으로써, 가장 높은 광 포획 효과를 얻을 수 있었다. 유전체 기반 나노 구조들은 간단하고 저비용이며, 대면적으로 쉽게 제작할 수 있는 자가 조립 기반 콜로이달 리소그래피 및 소프트 리소그래피 기술을 이용하여 제작되었다.