• Title/Summary/Keyword: 표면파 속도법

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Inversion of SAW Dispersion Data to Determine the Elastic Constants of a Thin film (표면파속도와 역산법에 의한 박막탄성계수 산출)

  • 김진오
    • Journal of the KSME
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    • v.34 no.7
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    • pp.510-516
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    • 1994
  • 탄성파의 속도는 파동 전파 매질의 밀도와 탄선계수에 달려 있으므로, 박막이 입혀진 기판에서 전파하는 표면파에 대해서 기판과 박막의 밀도와 탄성계수 및 박막의 두께 등을 알면 전파 속 도를 계산할 수 있다. 박막의 탄성계수를 모르는 경우에는 표면파 속도를 측정하여 역으로 탄 성계수를 산출할 수 있다. 이러한 역산과정에는 일반적인 비선형 방정식의 curve-fitting에 이용될 수 있는 simplex법이 효율적으로 활용된다. 이 글에서는 표면파 속도를 측정하고 그 데이터로 부터 역산하여 박막의 탄성계수를 구하는 원리와 과정을 설명한다.

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Thickness Measurement of Ni Thin Film Using Dispersion Characteristics of a Surface Acoustic Wave (표면파의 분산 특성을 이용한 Ni 박막의 두께 측정)

  • Park, Tae-Sung;Kwak, Dong-Ryul;Park, Ik-Keun;Kim, Miso;Lee, Seung-Seok
    • Journal of the Korean Society for Nondestructive Testing
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    • v.34 no.2
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    • pp.171-175
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    • 2014
  • In this study, we suggest a method to measure the thickness of thin films nondestructively using the dispersion characteristics of a surface acoustic wave propagating along the thin film surface. To measure the thickness of thin films, we deposited thin films with different thicknesses on a Si (100) wafer substrate by controlling the deposit time using the E-beam evaporation method. The thickness of the thin films was measured using a scanning electron microscope. Subsequently, the surface wave velocity of the thin films with different thicknesses was measured using the V(z) curve method of scanning acoustic microscopy. The correlation between the measured thickness and surface acoustic wave velocity was verified. The wave velocity of the film decreased as the film thickness increased. Therefore, thin film thickness can be determined by measuring the dispersion characteristics of the surface acoustic wave velocity.

Surface Wave Method: Focused on Active Method (표면파 탐사: 능동 탐사법을 중심으로)

  • Kim, Bitnarae;Cho, Ahyun;Cho, Sung Oh;Nam, Myung Jin;Pyun, Sukjoon;Hayashi, Koich
    • Geophysics and Geophysical Exploration
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    • v.22 no.4
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    • pp.210-224
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    • 2019
  • Surface wave (SW) surveys, which have been applied to numerous application fields ranging from micro-scale ultrasonic analysis to geological scale analysis, are widely used to monitor near-surface stability. The survey method is basically made through analysis on dispersion of SW propagating along the earth surface, in order to delineate shear velocity structure of subsurface. SW survey data are inverted with assuming one-dimensional (1D) layered-earth in order to recover shear wave velocities of each layer, after being analyzed to make the dispersion curve that shows phase velocity of SW with respect to frequency. This study reviews surface wave surveys with explaining the basic theory including the characteristics of dispersion and the procedure of general data processing. Even though surface wave surveys can be categorized into active and passive methods, this paper focuses only on active surface wave methods which includes continuous SW (CSW), spectral analysis of SW (SASW) and multichannel analysis of SW (MASW). Passive method will be reviewed in the subsequent paper.

Comparison of Shear-wave Velocity Sections from Inverting SH-wave Traveltimes of First Arrivals and Surface Wave Dispersion Curves (SH파 초동주시 역산과 표면파 분산곡선 역산으로부터 구한 횡파속도 단면 비교)

  • Lee, Chang-Min;Kim, Ki-Young
    • Journal of the Korean Geophysical Society
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    • v.8 no.2
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    • pp.67-74
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    • 2005
  • Two-dimensional S-wave velocity sections from SH-wave refraction tomography and surface wave dispersions were obtained by inverting traveltimes of first arrivals and surface wave dispersions, respectively. For the purpose of comparison, a P-wave velocity tomogram was also obtained from a P-wave refraction profiling. P and Rayleigh waves generated by vertical blows on a plate with a sledgehammer were received by 100- and 4.5-Hz geophones, respectively. SH-waves generated by horizontal blows on both sides of a 50 kg timber were received by 8 Hz horizontal geophones. The shear-wave signals were enhanced subtracting data of left-side blows from ones of the right-side blows. Shear-wave velocities from tomography inversion of first-arrival times were compared with ones from inverting dispersion curves of Rayleigh waves. Although the two velocity sections look similar to each other in general, the one from the surface waves tends to have lower velocities. First arrival picking of SH waves is troublesome since P and PS-converted waves arrive earlier than SH waves. Application of the surface wave method, on the other hand, is limited where lateral variation of subsurface tructures is not mild.

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Characterization of Residual Stress in Shot Peened Al 7075 Alloy Using Surface Acoustic Wave (표면파를 이용한 쇼트피닝된 Al 7075 합금의 잔류응력 평가)

  • Kim, Chung-Seok;Kim, Yong-Kwon;Park, Ik-Keun;Kwun, Sook-In
    • Journal of the Korean Society for Nondestructive Testing
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    • v.26 no.5
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    • pp.291-296
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    • 2006
  • The residual stress in shot-peened Al 7075 alloy was evaluated using surface acoustic wave (SAW). Shot peening was conducted to produce a variation in the residual stress with the depth below the surface under a shot velocity of 30 m/s. The SAW velocity was measured from the V(z) curve using a scanning acoustic microscopy (SAM). The Vickers hardness profile from the surface showed a significant work hardening near the surface layer with a thickness of about 0.25 mm. As the residual stress became more compressive, the SAW velocity increased, whereas as the residual stress became more tensile, the SAW velocity decreased. The variation in the SAW velocity through the shot peened surface layer was in good agreement with the distribution of the residual stress measured by X-ray diffraction technique.

Development of Automated Inversion Method for HWAW Method Using Genetic Algorithm (유전자 알고리즘을 이용한 HWAW 방법을 위한 자동화 역산 방법의 개발)

  • Park, Hyung-Choon;Hwang, Hea-Jin
    • Journal of the Korean Geotechnical Society
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    • v.28 no.8
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    • pp.55-63
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    • 2012
  • The evaluation of shear modulus (or shear wave velocity) profile of the site is very important in various fields of geotechnical engineering and various surface wave methods have applied to determine the shear wave velocity profiles and showed good performance. Surface wave methods evaluate the dispersion curve in the field and determine the shear wave velocity profile through the inversion process. In this paper, the automated inversion process using the genetic algorithm is developed for HWAW method which is one of surface wave methods recently developed. The proposed method uses the error function based on the wavelength domain dispersion curve and can determine the reliable shear wave velocity profile not only in shallow depth but also in deep depth. To estimate the validity of the proposed method, numerical simulations and field test were performed and the proposed method was applied to determine the shear wave velocity profiles. Through the numerical simulations and field applications, the promising potential of the proposed method was verified.

Comparison of shear-wave sections from inverting refracted shear waves and surface wave dispersions (횡파단면 작성을 위한 굴절된 횡파와 표면파 자료 역산 결과 비교)

  • Lee, Chang, Min;Kim, Ki-Young
    • 한국지구물리탐사학회:학술대회논문집
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    • 2005.05a
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    • pp.287-291
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    • 2005
  • Two-dimensional velocity tomograms of P- and S-waves were obtained by inverting traveltimes of first arrivals. The two sections of shear-wave velocity show similar features as a whole, with smaller values on the section from surface wave dispersions. Difficulties in picking SH-wave phases due to noise and later arrivals than P waves and PS converted waves are experienced. In addition, a flat layer model based on the surface wave inversion prohibits applications of the method where sgear wave velocities vary strongly in the lateral direction.

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A Method for Noninvasive Diagnosis of Bone using Ultrasonic Doppler Method (초음파 Doppler법에 의한 생체 경조직의 비침투적인 진단을 위한 기초실험)

  • 박무훈
    • The Journal of the Acoustical Society of Korea
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    • v.17 no.7
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    • pp.3-11
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    • 1998
  • 본 논문에서는 분포정수선로의 간단한 모델을 이용해서, 외부에서 진동을 가했을 때 에 뼈 표면에서 발생하는 굴곡파의 전파속도와 종파의 전파속도를 구할 수 있는 새로운 측 정원리를 제안했다. 이 측정원리를 이용해서, 봉(brass, polymethylmethacrylate)표면에 발생 하는 정재파에 대한 속도의 공간분포를 laser Doppler법으로 측정해서, 각각의 주파수에 대 한 전파속도를 구했다. 이 새로운 측정방법은 in vivo에서 초음파 Doppler법을 이용해서 뼈 의 이상(골다공증, osteoporosis)진단의 가능성을 제시했다.

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Inversion of spectral analysis of surface waves with analytic Jacobian (해석적 자코비안을 이용한 표면파 기법의 역산)

  • Ha, Hee-Sang
    • Journal of the Korean Geophysical Society
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    • v.5 no.3
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    • pp.233-245
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    • 2002
  • The spectral-analysis-of-surface-waves (SASW) method is a nondestructive testing method based upon generation and detection of elastic stress waves. SASW is widely used as one of the techniques to determine stiffness profile in engineering geophysics. The essential steps involved are construction of an experimental dispersion curve from data collected in situ, and inversion of the dispersion curve to determine the stiffness profile. The main object of this study is to derive an analytical Jacobian for the inversion. If we set the subsurface to N homogeneous layer, it could save 2N times Jacobian calculation compared to numerical jacobian calculation during inversion. To reconstruct a stiffness profile, constrained damped least square method was applied for the inversion. The algorithm was tested for the numerical data and for the real asphalt and tunnel data, which were able to verify the stiffness profile. The stiffness profile reconstructed by the algorithm showed the possibility to appraise the soundness of tunnel with applications SASW.

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Joint inversion of receiver function and surface-wave phase velocity for estimation of shear-wave velocity of sedimentary layers (퇴적층들의 전단파 속도 평가를 위한 수신함수와 표면파 위상 속도의 통합 역산)

  • Kurose, Takeshi;Yamanaka, Hiroaki
    • Geophysics and Geophysical Exploration
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    • v.9 no.1
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    • pp.93-101
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    • 2006
  • In this study, we propose a joint inversion method, using genetic algorithms, to determine the shear-wave velocity structure of deep sedimentary layers from receiver functions and surface-wave phase velocity. Numerical experiments with synthetic data indicate that the proposed method can avoid the trade-off between shear-wave velocity and thickness that arises when inverting the receiver function only, and the uncertainty in deep structure from surface-wave phase velocity inversion alone. We apply the method to receiver functions obtained from earthquake records with epicentral distances of about 100 km, and Rayleigh-wave phase velocities obtained from a microtremor array survey in the Kanto Plain, Japan. The estimated subsurface structure is in good agreement with the previous results of seismic refraction surveys and deep borehole data.